JPH0426413B2 - - Google Patents
Info
- Publication number
- JPH0426413B2 JPH0426413B2 JP6315884A JP6315884A JPH0426413B2 JP H0426413 B2 JPH0426413 B2 JP H0426413B2 JP 6315884 A JP6315884 A JP 6315884A JP 6315884 A JP6315884 A JP 6315884A JP H0426413 B2 JPH0426413 B2 JP H0426413B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- receiving element
- pressure
- layer
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 21
- 239000000835 fiber Substances 0.000 claims description 19
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000013307 optical fiber Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6315884A JPS60209128A (ja) | 1984-04-02 | 1984-04-02 | 感圧センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6315884A JPS60209128A (ja) | 1984-04-02 | 1984-04-02 | 感圧センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60209128A JPS60209128A (ja) | 1985-10-21 |
JPH0426413B2 true JPH0426413B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-05-07 |
Family
ID=13221144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6315884A Granted JPS60209128A (ja) | 1984-04-02 | 1984-04-02 | 感圧センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60209128A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114599938A (zh) * | 2019-10-30 | 2022-06-07 | 索尼集团公司 | 光学传感器和光学传感器模块 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5413773B2 (ja) * | 2009-06-24 | 2014-02-12 | 国立大学法人 東京大学 | 柔軟触覚センサ |
CN104374515B (zh) * | 2014-11-21 | 2016-05-25 | 贵州大学 | 一种反射型光纤压力传感器探头中光纤束的布置结构 |
JP6983713B2 (ja) * | 2018-04-04 | 2021-12-17 | キヤノン株式会社 | 光学式センサ、およびその光学式センサを備えた装置 |
JP6864401B1 (ja) * | 2020-08-17 | 2021-04-28 | 株式会社SensAI | 触覚センサ |
JPWO2023100483A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 2021-11-30 | 2023-06-08 |
-
1984
- 1984-04-02 JP JP6315884A patent/JPS60209128A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114599938A (zh) * | 2019-10-30 | 2022-06-07 | 索尼集团公司 | 光学传感器和光学传感器模块 |
Also Published As
Publication number | Publication date |
---|---|
JPS60209128A (ja) | 1985-10-21 |