JPH0425706Y2 - - Google Patents
Info
- Publication number
- JPH0425706Y2 JPH0425706Y2 JP17021088U JP17021088U JPH0425706Y2 JP H0425706 Y2 JPH0425706 Y2 JP H0425706Y2 JP 17021088 U JP17021088 U JP 17021088U JP 17021088 U JP17021088 U JP 17021088U JP H0425706 Y2 JPH0425706 Y2 JP H0425706Y2
- Authority
- JP
- Japan
- Prior art keywords
- cup
- cleaning
- vacuum chuck
- developed
- cleaning liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 17
- 239000007788 liquid Substances 0.000 claims description 12
- 239000000126 substance Substances 0.000 description 6
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 4
- 239000002699 waste material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17021088U JPH0425706Y2 (US20030220297A1-20031127-C00074.png) | 1988-12-30 | 1988-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17021088U JPH0425706Y2 (US20030220297A1-20031127-C00074.png) | 1988-12-30 | 1988-12-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0290846U JPH0290846U (US20030220297A1-20031127-C00074.png) | 1990-07-18 |
| JPH0425706Y2 true JPH0425706Y2 (US20030220297A1-20031127-C00074.png) | 1992-06-19 |
Family
ID=31460958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17021088U Expired JPH0425706Y2 (US20030220297A1-20031127-C00074.png) | 1988-12-30 | 1988-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0425706Y2 (US20030220297A1-20031127-C00074.png) |
-
1988
- 1988-12-30 JP JP17021088U patent/JPH0425706Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0290846U (US20030220297A1-20031127-C00074.png) | 1990-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5879576A (en) | Method and apparatus for processing substrates | |
| JP3388628B2 (ja) | 回転式薬液処理装置 | |
| JPH0712035B2 (ja) | 噴流式液処理装置 | |
| JPH0568092B2 (US20030220297A1-20031127-C00074.png) | ||
| JP2000114233A (ja) | 半導体湿式エッチング装置 | |
| JPH0878368A (ja) | ワークの処理方法および装置 | |
| JP3341727B2 (ja) | ウエット装置 | |
| JP4255702B2 (ja) | 基板処理装置及び方法 | |
| JPH1057877A (ja) | 基板処理装置及び基板処理方法 | |
| JPH0425706Y2 (US20030220297A1-20031127-C00074.png) | ||
| JP4559702B2 (ja) | 流体送出リングおよびその製造方法ならびに提供方法 | |
| CN206619584U (zh) | 一种晶片处理器 | |
| JP2957383B2 (ja) | 回転式塗布装置 | |
| JPH0425705Y2 (US20030220297A1-20031127-C00074.png) | ||
| JPH0631253A (ja) | 円盤状物体の洗浄装置及び洗浄方法 | |
| JP2711955B2 (ja) | ウエーハ洗浄方法及び装置 | |
| KR0129712Y1 (ko) | 반도체 제조 장치의 회전 도포 장치 | |
| JPH04118067A (ja) | 塗布装置および塗布処理方法 | |
| JPH051343Y2 (US20030220297A1-20031127-C00074.png) | ||
| JP2849539B2 (ja) | 回転式塗布装置 | |
| JPS58184725A (ja) | 半導体基板のレジスト塗布装置 | |
| JPS59211226A (ja) | 半導体基板のレジスト塗布装置 | |
| JP2001334219A (ja) | スピン処理装置及びスピン処理方法 | |
| JPH0131160Y2 (US20030220297A1-20031127-C00074.png) | ||
| JPH10289857A (ja) | 現像方法及び現像装置 |
