JPH04229671A - 高出力ビーム発生装置 - Google Patents
高出力ビーム発生装置Info
- Publication number
- JPH04229671A JPH04229671A JP3115762A JP11576291A JPH04229671A JP H04229671 A JPH04229671 A JP H04229671A JP 3115762 A JP3115762 A JP 3115762A JP 11576291 A JP11576291 A JP 11576291A JP H04229671 A JPH04229671 A JP H04229671A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- external
- tube
- electrode
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 13
- 230000005855 radiation Effects 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 20
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 16
- 229910052786 argon Inorganic materials 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000003792 electrolyte Substances 0.000 claims description 8
- 238000011049 filling Methods 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000007654 immersion Methods 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000007599 discharging Methods 0.000 abstract 1
- 239000010453 quartz Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 229910052743 krypton Inorganic materials 0.000 description 9
- 229910052724 xenon Inorganic materials 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 5
- 229910052801 chlorine Inorganic materials 0.000 description 5
- 230000001678 irradiating effect Effects 0.000 description 5
- 229910052754 neon Inorganic materials 0.000 description 5
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052756 noble gas Inorganic materials 0.000 description 4
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052740 iodine Inorganic materials 0.000 description 3
- 239000011630 iodine Substances 0.000 description 3
- 239000004922 lacquer Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000003973 paint Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- CJDPJFRMHVXWPT-UHFFFAOYSA-N barium sulfide Chemical compound [S-2].[Ba+2] CJDPJFRMHVXWPT-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Lasers (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1738/90A CH680099A5 (US06342305-20020129-C00040.png) | 1990-05-22 | 1990-05-22 | |
| CH01738/90-0 | 1990-05-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04229671A true JPH04229671A (ja) | 1992-08-19 |
Family
ID=4217429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3115762A Pending JPH04229671A (ja) | 1990-05-22 | 1991-05-21 | 高出力ビーム発生装置 |
Country Status (6)
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005056845A (ja) * | 2003-08-06 | 2005-03-03 | Patent Treuhand Ges Elektr Gluehlamp Mbh | 紫外線放射器 |
| WO2005104184A1 (ja) * | 2004-04-22 | 2005-11-03 | Futaba Technology Corporation | 紫外線照射装置 |
Families Citing this family (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4140497C2 (de) * | 1991-12-09 | 1996-05-02 | Heraeus Noblelight Gmbh | Hochleistungsstrahler |
| US5504391A (en) * | 1992-01-29 | 1996-04-02 | Fusion Systems Corporation | Excimer lamp with high pressure fill |
| US6211383B1 (en) | 1993-08-05 | 2001-04-03 | Kimberly-Clark Worldwide, Inc. | Nohr-McDonald elimination reaction |
| US5681380A (en) | 1995-06-05 | 1997-10-28 | Kimberly-Clark Worldwide, Inc. | Ink for ink jet printers |
| US6017471A (en) | 1993-08-05 | 2000-01-25 | Kimberly-Clark Worldwide, Inc. | Colorants and colorant modifiers |
| US5733693A (en) | 1993-08-05 | 1998-03-31 | Kimberly-Clark Worldwide, Inc. | Method for improving the readability of data processing forms |
| US5865471A (en) | 1993-08-05 | 1999-02-02 | Kimberly-Clark Worldwide, Inc. | Photo-erasable data processing forms |
| US6017661A (en) | 1994-11-09 | 2000-01-25 | Kimberly-Clark Corporation | Temporary marking using photoerasable colorants |
| US5645964A (en) | 1993-08-05 | 1997-07-08 | Kimberly-Clark Corporation | Digital information recording media and method of using same |
| US5685754A (en) | 1994-06-30 | 1997-11-11 | Kimberly-Clark Corporation | Method of generating a reactive species and polymer coating applications therefor |
| US6242057B1 (en) | 1994-06-30 | 2001-06-05 | Kimberly-Clark Worldwide, Inc. | Photoreactor composition and applications therefor |
| DE4430300C1 (de) * | 1994-08-26 | 1995-12-21 | Abb Research Ltd | Excimerstrahler und dessen Verwendung |
| JP2775699B2 (ja) * | 1994-09-20 | 1998-07-16 | ウシオ電機株式会社 | 誘電体バリア放電ランプ |
| JP3025414B2 (ja) * | 1994-09-20 | 2000-03-27 | ウシオ電機株式会社 | 誘電体バリア放電ランプ装置 |
| US5786132A (en) | 1995-06-05 | 1998-07-28 | Kimberly-Clark Corporation | Pre-dyes, mutable dye compositions, and methods of developing a color |
| WO1996039646A1 (en) | 1995-06-05 | 1996-12-12 | Kimberly-Clark Worldwide, Inc. | Novel pre-dyes |
| MX9710016A (es) | 1995-06-28 | 1998-07-31 | Kimberly Clark Co | Colorantes novedosos y modificadores de colorante. |
| US5782963A (en) | 1996-03-29 | 1998-07-21 | Kimberly-Clark Worldwide, Inc. | Colorant stabilizers |
| US6099628A (en) | 1996-03-29 | 2000-08-08 | Kimberly-Clark Worldwide, Inc. | Colorant stabilizers |
| US5855655A (en) | 1996-03-29 | 1999-01-05 | Kimberly-Clark Worldwide, Inc. | Colorant stabilizers |
| ES2175168T3 (es) | 1995-11-28 | 2002-11-16 | Kimberly Clark Co | Compuestos de colorantes estabilizados por la luz. |
| US5891229A (en) | 1996-03-29 | 1999-04-06 | Kimberly-Clark Worldwide, Inc. | Colorant stabilizers |
| JP3546610B2 (ja) * | 1996-09-20 | 2004-07-28 | ウシオ電機株式会社 | 誘電体バリア放電装置 |
| US6524379B2 (en) | 1997-08-15 | 2003-02-25 | Kimberly-Clark Worldwide, Inc. | Colorants, colorant stabilizers, ink compositions, and improved methods of making the same |
| US6015759A (en) * | 1997-12-08 | 2000-01-18 | Quester Technology, Inc. | Surface modification of semiconductors using electromagnetic radiation |
| US6049086A (en) * | 1998-02-12 | 2000-04-11 | Quester Technology, Inc. | Large area silent discharge excitation radiator |
| JP3521731B2 (ja) | 1998-02-13 | 2004-04-19 | ウシオ電機株式会社 | 誘電体バリア放電ランプ光源装置 |
| US5993278A (en) * | 1998-02-27 | 1999-11-30 | The Regents Of The University Of California | Passivation of quartz for halogen-containing light sources |
| JP2002517540A (ja) | 1998-06-03 | 2002-06-18 | キンバリー クラーク ワールドワイド インコーポレイテッド | インク及びインクジェット印刷用のネオナノプラスト及びマイクロエマルション技術 |
| EP1000090A1 (en) | 1998-06-03 | 2000-05-17 | Kimberly-Clark Worldwide, Inc. | Novel photoinitiators and applications therefor |
| CA2336641A1 (en) | 1998-07-20 | 2000-01-27 | Kimberly-Clark Worldwide, Inc. | Improved ink jet ink compositions |
| JP3346291B2 (ja) * | 1998-07-31 | 2002-11-18 | ウシオ電機株式会社 | 誘電体バリア放電ランプ、および照射装置 |
| DE69930948T2 (de) | 1998-09-28 | 2006-09-07 | Kimberly-Clark Worldwide, Inc., Neenah | Chelate mit chinoiden gruppen als photoinitiatoren |
| EP1059659A4 (en) * | 1998-12-28 | 2002-03-13 | Japan Storage Battery Co Ltd | QUIET DISCHARGE TUBE AND METHOD OF USE |
| EP1144512B1 (en) | 1999-01-19 | 2003-04-23 | Kimberly-Clark Worldwide, Inc. | Novel colorants, colorant stabilizers, ink compositions, and improved methods of making the same |
| US6331056B1 (en) | 1999-02-25 | 2001-12-18 | Kimberly-Clark Worldwide, Inc. | Printing apparatus and applications therefor |
| US6294698B1 (en) | 1999-04-16 | 2001-09-25 | Kimberly-Clark Worldwide, Inc. | Photoinitiators and applications therefor |
| US6368395B1 (en) | 1999-05-24 | 2002-04-09 | Kimberly-Clark Worldwide, Inc. | Subphthalocyanine colorants, ink compositions, and method of making the same |
| US6567023B1 (en) | 1999-09-17 | 2003-05-20 | Kabushiki Kaisha Toshiba | Analog to digital to analog converter for multi-valued current data using internal binary voltage |
| DE10145648B4 (de) * | 2001-09-15 | 2006-08-24 | Arccure Technologies Gmbh | Bestrahlungsvorrichtung mit veränderlichem Spektrum |
| US6971939B2 (en) * | 2003-05-29 | 2005-12-06 | Ushio America, Inc. | Non-oxidizing electrode arrangement for excimer lamps |
| DE102004030803A1 (de) * | 2004-06-25 | 2006-01-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hochreflektiv beschichteter mikromechanischer Spiegel, Verfahren zu dessen Herstellung sowie dessen Verwendung |
| DE102004048005A1 (de) * | 2004-10-01 | 2006-04-13 | Dr. Hönle AG | Gasentladungslampe, System und Verfahren zum Härten von durch UV-Licht härtbare Materialien sowie durch UV-Licht gehärtetes Material |
| US8022377B2 (en) * | 2008-04-22 | 2011-09-20 | Applied Materials, Inc. | Method and apparatus for excimer curing |
| DE102010043215A1 (de) | 2010-11-02 | 2012-05-03 | Osram Ag | Strahler mit Sockel für die Bestrahlung von Oberflächen |
| DE102012219064A1 (de) | 2012-10-19 | 2014-04-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | UV-Lichtquelle mit kombinierter Ionisation und Bildung von Excimern |
| US9722550B2 (en) | 2014-04-22 | 2017-08-01 | Hoon Ahn | Power amplifying radiator (PAR) |
| DE102014207690A1 (de) | 2014-04-24 | 2015-10-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur photochemischen Behandlung oder Reinigung eines flüssigen Mediums |
| DE102014207688A1 (de) | 2014-04-24 | 2015-10-29 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zur photochemischen Behandlung von verunreinigtem Wasser |
| US20170082302A1 (en) * | 2015-09-22 | 2017-03-23 | Ribe Jern Holding A/S | Radiator with heat insulation plate and radiator arrangement |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63314753A (ja) * | 1987-06-17 | 1988-12-22 | Matsushita Electric Works Ltd | 無電極放電灯 |
| JPH027353A (ja) * | 1988-01-15 | 1990-01-11 | Asea Brown Boveri Ag | 高出力放射器 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4038577A (en) * | 1969-04-28 | 1977-07-26 | Owens-Illinois, Inc. | Gas discharge display device having offset electrodes |
| CH670171A5 (US06342305-20020129-C00040.png) * | 1986-07-22 | 1989-05-12 | Bbc Brown Boveri & Cie | |
| CH677292A5 (US06342305-20020129-C00040.png) * | 1989-02-27 | 1991-04-30 | Asea Brown Boveri |
-
1990
- 1990-05-22 CH CH1738/90A patent/CH680099A5/de not_active IP Right Cessation
-
1991
- 1991-04-26 US US07/691,832 patent/US5214344A/en not_active Expired - Fee Related
- 1991-05-10 DE DE59106397T patent/DE59106397D1/de not_active Expired - Fee Related
- 1991-05-10 EP EP91107572A patent/EP0458140B1/de not_active Expired - Lifetime
- 1991-05-10 AT AT91107572T patent/ATE127617T1/de not_active IP Right Cessation
- 1991-05-21 JP JP3115762A patent/JPH04229671A/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63314753A (ja) * | 1987-06-17 | 1988-12-22 | Matsushita Electric Works Ltd | 無電極放電灯 |
| JPH027353A (ja) * | 1988-01-15 | 1990-01-11 | Asea Brown Boveri Ag | 高出力放射器 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005056845A (ja) * | 2003-08-06 | 2005-03-03 | Patent Treuhand Ges Elektr Gluehlamp Mbh | 紫外線放射器 |
| WO2005104184A1 (ja) * | 2004-04-22 | 2005-11-03 | Futaba Technology Corporation | 紫外線照射装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| ATE127617T1 (de) | 1995-09-15 |
| EP0458140B1 (de) | 1995-09-06 |
| DE59106397D1 (de) | 1995-10-12 |
| CH680099A5 (US06342305-20020129-C00040.png) | 1992-06-15 |
| US5214344A (en) | 1993-05-25 |
| EP0458140A1 (de) | 1991-11-27 |
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