JPH0421307B2 - - Google Patents

Info

Publication number
JPH0421307B2
JPH0421307B2 JP1022135A JP2213589A JPH0421307B2 JP H0421307 B2 JPH0421307 B2 JP H0421307B2 JP 1022135 A JP1022135 A JP 1022135A JP 2213589 A JP2213589 A JP 2213589A JP H0421307 B2 JPH0421307 B2 JP H0421307B2
Authority
JP
Japan
Prior art keywords
grid
spherical
energy
center
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1022135A
Other languages
English (en)
Japanese (ja)
Other versions
JPH02201857A (ja
Inventor
Hiroshi Daimon
Shozo Ino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1022135A priority Critical patent/JPH02201857A/ja
Priority to US07/549,414 priority patent/US5107111A/en
Publication of JPH02201857A publication Critical patent/JPH02201857A/ja
Publication of JPH0421307B2 publication Critical patent/JPH0421307B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24435—Microchannel plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24571—Measurements of non-electric or non-magnetic variables
    • H01J2237/24585—Other variables, e.g. energy, mass, velocity, time, temperature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP1022135A 1989-01-30 1989-01-30 球面型荷電粒子アナライザ Granted JPH02201857A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1022135A JPH02201857A (ja) 1989-01-30 1989-01-30 球面型荷電粒子アナライザ
US07/549,414 US5107111A (en) 1989-01-30 1990-07-06 Spherical electrode type charged particle analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1022135A JPH02201857A (ja) 1989-01-30 1989-01-30 球面型荷電粒子アナライザ

Publications (2)

Publication Number Publication Date
JPH02201857A JPH02201857A (ja) 1990-08-10
JPH0421307B2 true JPH0421307B2 (en, 2012) 1992-04-09

Family

ID=12074449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1022135A Granted JPH02201857A (ja) 1989-01-30 1989-01-30 球面型荷電粒子アナライザ

Country Status (2)

Country Link
US (1) US5107111A (en, 2012)
JP (1) JPH02201857A (en, 2012)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5541409A (en) * 1994-07-08 1996-07-30 The United States Of America As Represented By The Secretary Of The Air Force High resolution retarding potential analyzer
US5962850A (en) * 1998-03-04 1999-10-05 Southwest Research Institute Large aperture particle detector with integrated antenna
US6690007B2 (en) 2000-08-07 2004-02-10 Shimadzu Corporation Three-dimensional atom microscope, three-dimensional observation method of atomic arrangement, and stereoscopic measuring method of atomic arrangement
US6797951B1 (en) 2002-11-12 2004-09-28 The United States Of America As Represented By The Secretary Of The Air Force Laminated electrostatic analyzer
PL368785A1 (pl) * 2004-06-28 2006-01-09 Krzysztof Grzelakowski Obrazujący filtr energii dla elektronów i innych elektrycznie naładowanych cząstek oraz sposób filtrowania energii elektronów i innych elektrycznie naładowanych cząstek w urządzeniach elektrooptycznych za pomocą obrazującego filtru energii
EP3203494B1 (en) * 2014-09-24 2019-12-18 National Institute for Materials Science Energy-discrimination electron detector and scanning electron microscope in which same is used

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB221082A (en) * 1923-09-07 1924-09-04 Goldschmidt Ag Th Process for the production of valuable aluminium alloys
US3679896A (en) * 1969-12-23 1972-07-25 Ibm Electrostatic prism
US4179604A (en) * 1978-09-29 1979-12-18 The United States Of America As Represented By The Secretary Of The Navy Electron collector for forming low-loss electron images
JPS5878361A (ja) * 1981-10-31 1983-05-11 Shimadzu Corp 荷電粒子エネルギ−分析装置
JPS63126148A (ja) * 1986-11-14 1988-05-30 Hiroshi Daimon 荷電粒子アナライザ−

Also Published As

Publication number Publication date
JPH02201857A (ja) 1990-08-10
US5107111A (en) 1992-04-21

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees