JPH04205907A - Thin film type magnetic head and production thereof - Google Patents
Thin film type magnetic head and production thereofInfo
- Publication number
- JPH04205907A JPH04205907A JP33408890A JP33408890A JPH04205907A JP H04205907 A JPH04205907 A JP H04205907A JP 33408890 A JP33408890 A JP 33408890A JP 33408890 A JP33408890 A JP 33408890A JP H04205907 A JPH04205907 A JP H04205907A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- pole layer
- layer
- upper magnetic
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 37
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000010408 film Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 15
- 238000010030 laminating Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 13
- 238000009877 rendering Methods 0.000 abstract 1
- 238000004904 shortening Methods 0.000 abstract 1
- 239000004020 conductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
この発明は、コンピュータ用の固定磁気ディスク装置等
に適用される薄膜磁気ヘッドおよびその製造方法に関す
るThe present invention relates to a thin film magnetic head applied to a fixed magnetic disk device for a computer, and a method for manufacturing the same.
第９図ないし第１１図に、従来の薄膜磁気ヘッドの一構
造例を示す。この例の薄膜磁気ヘッドは、底面１ａ（第
９図においては上面として一示されている面）を磁気デ
ィスク等の磁気記録媒体に向けて配されるスライダｌの
前面部に、フォトリソグラフィ技術による薄膜磁気ヘッ
ド素子２を設けてなるものである。
前記薄膜磁気ヘッド素子２は、前記スライダ夏の前面ｉ
ｂを基板としてその表面に第１θ図に示すように、非磁
性体の絶縁層３、下部磁極層（下部コア）４、ギャップ
層５、絶縁層６で被包されたコイル導体７、上部磁極層
８を順次積層してなるものである。前記薄膜磁気ヘッド
素子２は、各磁極層４．８の先端部をギャップ層５を介
して重ね合わせることでそれら磁極層４．８の先端部を
対の磁極（ボール）９．１０となしてそれらの相互間に
ギャップｌ！を形成するとともに、各磁極９゜ｌＯの先
端面をスライダＩの底面ｌＯ側に露出させた構成とされ
てい゛る。9 to 11 show an example of the structure of a conventional thin film magnetic head. The thin-film magnetic head of this example uses photolithography technology to form a magnetic head on the front surface of a slider l, which is placed with its bottom surface 1a (the surface shown as the top surface in FIG. 9) facing a magnetic recording medium such as a magnetic disk. A thin film magnetic head element 2 is provided. The thin film magnetic head element 2 is located on the front surface i of the slider.
b is used as a substrate, and as shown in Fig. 1θ, a non-magnetic insulating layer 3, a lower magnetic pole layer (lower core) 4, a gap layer 5, a coil conductor 7 covered with an insulating layer 6, and an upper magnetic pole are formed on the surface of the substrate. It is formed by laminating layers 8 in sequence. In the thin film magnetic head element 2, the tips of the respective magnetic pole layers 4.8 are overlapped with each other via the gap layer 5, so that the tips of the magnetic pole layers 4.8 form a pair of magnetic poles (balls) 9.10. A gap l between them! In addition, the tip surface of each magnetic pole 9°lO is exposed on the bottom face lO side of the slider I.
【発明が解決しようとする課Ｉｌｌ
ところで、前記構造の薄膜磁気ヘッドは、フェライトヘ
ッド等に比較して磁極９．ＩＯのサイズが極めて小さく
、それらのポール長ｐ 、、Ｐ 、（第１１図参照）が
記録波長と同程度となるものであり、また、コア端１２
．１３．即ち、各磁極９．１０のギャップ１１と反対側
の縁がギャップ１１と平行になっている。このため、そ
れらコア端１２．１３が疑似ギャップとなってしまって
第１２図に示すように再生波形の両側にデイツプが発生
するという、いわゆる、コア端部効果（コンタ−効果）
が顕著に生乙、その結果、出力特性か第１３図に示すよ
うに波打ってしまうという問題を生しるおそれかあった
。
本発明は前記課題を解決するためになされたしので、コ
ンタ−効果を抑制し得る薄膜磁気ヘットおよびその製造
方法を提供することを目的としている。
【課題を解決するための手段】
請求項Ｉに記載した発明は前記課題を解決するために、
基板上にギャップ層を介して積層した下部磁極層と上部
磁極層のそれぞれの先端面を前記基板の側面側に露出さ
せることにより、下部磁極層の先端部と上部磁極層の先
端部をそれらの間にギャップを有する対の磁極となした
薄膜磁気ヘッドにおいて、訂記上部磁極層の少なくとも
先端面の断面形状が、ギャップ側と反対側に膨出する弓
型に形成されてなるものである。
請求項２に記載した発明は前記課題を解決するために、
基板の表面に下部磁極層とギャップ層と上部磁極層を順
次積層し、下部磁極層と上部磁極層のそれぞれの先端面
を前記基板の側面側に露出させて製造される薄膜磁気ヘ
ッドの製造方法において、前記ギャップ層上に上部磁極
層を形成する際に、上部磁極層形成予定部分を除く部分
をレジスト膜で覆い、このレジスト膜で覆われていない
部分に成膜して断面弓型の上部磁極層を形成するととも
に、上部磁極層形成後にレジスト膜を除去するものであ
る。Problems to be Solved by the Invention By the way, the thin film magnetic head having the above structure has a magnetic pole of 9. The size of the IO is extremely small, and their pole lengths p , , P , (see Fig. 11) are approximately the same as the recording wavelength, and the core end 12
．． 13. That is, the edge of each magnetic pole 9.10 opposite to the gap 11 is parallel to the gap 11. For this reason, these core ends 12 and 13 become pseudo gaps, and dips occur on both sides of the reproduced waveform as shown in FIG. 12, which is the so-called core end effect (contour effect).
As a result, the output characteristics may become wavy as shown in FIG. 13. The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a thin film magnetic head capable of suppressing the contour effect and a method for manufacturing the same. [Means for solving the problem] In order to solve the problem, the invention described in claim I has the following features:
By exposing the tip surfaces of the bottom and top pole layers laminated on the substrate with a gap layer interposed therebetween on the side surface of the substrate, the tips of the bottom and top pole layers are separated from each other. In a thin film magnetic head having a pair of magnetic poles with a gap between them, at least the tip end surface of the upper magnetic pole layer has a cross-sectional shape that is arched and bulges toward the side opposite to the gap side. In order to solve the above problem, the invention described in claim 2 has the following features:
A method for manufacturing a thin film magnetic head, which is manufactured by sequentially laminating a lower magnetic pole layer, a gap layer, and an upper magnetic pole layer on the surface of a substrate, and exposing the tip surfaces of each of the lower magnetic pole layer and the upper magnetic pole layer to the side surface of the substrate. When forming the upper magnetic pole layer on the gap layer, the portion other than the portion where the upper magnetic pole layer is to be formed is covered with a resist film, and a film is formed on the portion not covered with the resist film to form an upper portion having an arch-shaped cross section. In addition to forming the magnetic pole layer, the resist film is removed after forming the upper magnetic pole layer.
請求項１の薄膜磁気ヘッドは、磁極の最先端部が基板の
側面側に露出しており、かつ、上部磁極層が断面弓型と
なって上部磁極層の少なくとも先端面のボール長が、端
部側で短くなっているので、端部側でロスが生じる。従
って端部側がギャップと平行になっている場合のように
疑似ギャップが形成されることが防止されてコンタ−効
果が抑制されて出力波形にデイツプが生じない。
また、請求項２に記載した製造方法によれば、コンタ−
効果を抑制できる断面弓型の上部磁極層をレジスト層の
形成工程と上部磁極膜の成膜工程とレノスト膜の除去工
程といった簡単な工程によって容易に形成することかで
きる。In the thin film magnetic head according to claim 1, the leading edge of the magnetic pole is exposed on the side surface of the substrate, and the upper magnetic pole layer has a bow-shaped cross section, so that the ball length of at least the tip surface of the upper magnetic pole layer is equal to the edge. Since it is shorter at the end, loss occurs at the end. Therefore, formation of a pseudo gap as would be the case when the end side is parallel to the gap is prevented, the contour effect is suppressed, and no dip occurs in the output waveform. Moreover, according to the manufacturing method described in claim 2, the contour
The upper magnetic pole layer having a bow-shaped cross section that can suppress the effect can be easily formed by a simple process of forming a resist layer, forming an upper magnetic pole film, and removing a Renost film.
第１図と第２図は本発明の一実施例の薄膜磁気ヘッドを
示すためのもので、第１図においてＩＯは上部磁極層、
９は下部磁極層、ＩＩはギャップを示し、この実施例で
は第１図に示す上部磁極層ＩＯにおいて、符号Ｐで示す
ボール長が上部磁極層９の左右両端部側に向かうにつれ
て短くなるように断面弓型に形成されている。
次に本実施例の薄膜磁気ヘラＦ’ Ａの詳細構造につい
て、第２図ないし第４図を基に薄膜磁気ヘッドＡの製造
手順とともに以下に説明する。
本実施例の薄膜磁気ヘッドＡは、第９図に示す従来の薄
膜磁気ヘッドと同様にスライダＩの訪面部に薄膜磁気ヘ
ッド素子２を設けてなるものである。この薄膜磁気ヘッ
ドＡを製造するには、まず、第３図に示すようにスライ
ダＩの前面１ｂを基板としてその上面に絶縁層３を形成
するとともに、その表面上の所定位置にリフト部２０を
形成し、次いで、それら絶縁層３およびリフト部２０の
表面上に第４図に示すように下部磁極層４を積層し、更
に、その表面上にギャップ層５を形成する。
次に第２図に示すようにコイル導体７を絶縁層６て被包
する状態で形成し、その表面上に更に上部磁極層８を積
層して両磁極層４．８の基部どうしを重ね合わせるとと
もに先端部どうしをギャップ層５を介して重ね合わせる
。これにより、両磁極層４．８の先端面か対の磁極９．
ＩＯとなってそれらの間にギャップ１１が形成され、そ
れら磁極９、ＩＯの先端面が第１図に示すようにスライ
ダｌの底面ｌａ側（基板の側面側）に露出する。
以上の手順は、従来の薄膜磁気ヘッドの製造手順と変わ
るところはなく、従って、以上の手順により製造された
ものは基本的に従来の薄膜磁気ヘッドと変わるところは
ないが、本実施例においては上部磁極層８をギャップｌ
ｌ側と反対側に膨出する断面弓型に形成するところが、
従来構造と異なっている。従って府記上部磁極層８の少
なくとも先端面のポール長Ｐか、先端面の中央部側より
ら先端面の端部側において徐々に短くなるように形成さ
れている。
上部磁極ｌｉ８を断面弓型に形成するには、第５図ない
し第７図に示す手順で製造すれば良い。
まず、上部磁極層８を形成しようとする部分を除いた部
分に第５図に示すようにレジスト層１５゜１６を形成し
、これらのレノスト層１５．１６の間に上部磁極層８を
成膜するリフトオフ法を実施する。このようにレジスト
層１５．１６の間に上部磁極層８を成膜すると、上部磁
極膜８は断面弓型に成長する。
前記のように成膜する場合、レノスト層１５゜１６の端
部を垂直らしくはオーバーハング状態にすると、レジス
ト層１５．１６の端部でのスパッタ粒子などのンヤドウ
ウィングの効果で端部か薄く、中心部が盛り上かった状
態の膜が形成される。
これがリフトオフ法であり、このリフトオフ法によって
形成された膜が上部磁極層８となる。なお、リフトオフ
法に適したレノスト層１５．１６の端部形状を得るため
に、イメージリバース法と弥される公知の反転原像法を
用いることが好ましい。
以上説明したように形成された薄膜磁気ヘッドＡによっ
て得られる再生波形は、第８図に示すようなものとなる
。第８図に示す再生波形において、上部磁極層８側に対
応する波形部分には、第１２図に示すように従来得られ
てい１ニデイツプが無くなり、多少波打ってはいるが、
デイツプの無い波形が得られる。従って本発明の薄膜磁
気ヘッドから得られる出力特性には波打ち現象を生じな
い。1 and 2 are for showing a thin film magnetic head according to an embodiment of the present invention. In FIG. 1, IO is an upper magnetic pole layer;
Reference numeral 9 indicates a lower magnetic pole layer, and II indicates a gap. In this embodiment, in the upper magnetic pole layer IO shown in FIG. It is formed into a bow-shaped cross section. Next, the detailed structure of the thin film magnetic spatula F'A of this embodiment will be explained below along with the manufacturing procedure of the thin film magnetic head A based on FIGS. 2 to 4. The thin film magnetic head A of this embodiment has a thin film magnetic head element 2 provided on the contact surface of the slider I, similar to the conventional thin film magnetic head shown in FIG. To manufacture this thin-film magnetic head A, first, as shown in FIG. 3, the front surface 1b of the slider I is used as a substrate, and an insulating layer 3 is formed on the upper surface thereof, and a lift portion 20 is formed at a predetermined position on the surface. Then, as shown in FIG. 4, a lower magnetic pole layer 4 is laminated on the surfaces of the insulating layer 3 and the lift portion 20, and a gap layer 5 is further formed on the surfaces thereof. Next, as shown in FIG. 2, the coil conductor 7 is formed so as to be covered with the insulating layer 6, and the upper magnetic pole layer 8 is further laminated on the surface thereof, and the bases of the two magnetic pole layers 4.8 are overlapped with each other. At the same time, the tips are overlapped with each other with the gap layer 5 interposed therebetween. As a result, the tip surfaces of both magnetic pole layers 4.8 and the pair of magnetic poles 9.
A gap 11 is formed between them, and the tip surfaces of the magnetic poles 9 and IO are exposed on the bottom la side of the slider l (side surface side of the substrate) as shown in FIG. The above procedure is the same as the manufacturing procedure of a conventional thin film magnetic head, and therefore, the product manufactured by the above procedure is basically the same as a conventional thin film magnetic head, but in this example, The upper magnetic pole layer 8 is separated by a gap l.
The part that is formed into an arch-shaped cross section that bulges out on the side opposite to the l side is
It is different from the conventional structure. Therefore, the pole length P of at least the tip end surface of the upper magnetic pole layer 8 is formed to become gradually shorter from the center side of the tip end surface to the end side of the tip end surface. In order to form the upper magnetic pole li8 to have an arcuate cross-section, it may be manufactured by the procedure shown in FIGS. 5 to 7. First, as shown in FIG. 5, resist layers 15 and 16 are formed except for the part where the upper magnetic pole layer 8 is to be formed, and the upper magnetic pole layer 8 is formed between these renost layers 15 and 16. Perform the lift-off method. When the upper magnetic pole layer 8 is formed between the resist layers 15 and 16 in this manner, the upper magnetic pole layer 8 grows to have an arch-shaped cross section. When forming a film as described above, if the ends of the resist layers 15 and 16 are made to overhang rather than vertically, the ends of the resist layers 15 and 16 will be distorted due to the winging effect of sputtered particles and the like. A thin film with a raised center is formed. This is the lift-off method, and the film formed by this lift-off method becomes the upper magnetic pole layer 8. Note that in order to obtain an end shape of the Renost layer 15, 16 suitable for the lift-off method, it is preferable to use a known inversion original image method called an image reverse method. The reproduced waveform obtained by the thin film magnetic head A formed as described above is as shown in FIG. In the reproduced waveform shown in FIG. 8, the waveform portion corresponding to the upper magnetic pole layer 8 side loses the conventionally obtained 1-day dip, as shown in FIG. 12, and is slightly wavy.
A waveform without dips can be obtained. Therefore, the output characteristics obtained from the thin film magnetic head of the present invention do not exhibit any waving phenomenon.
以上説明したように請求項１に記載した発明は、磁極の
最先端部が基板の側面側に露出しており、かつ、上部磁
極層が断面弓型となって上部磁極層の少なくとも先端面
のポール長が、端部側で短くなっているので、上部磁極
層に対応する再生波形の端部側でロスか生じる。従って
本発明に係る薄膜磁気ヘッドによれば、端部側がギャッ
プと平行になっている従来の薄膜磁気ヘッドのように疑
似ギャップを形成してしまうことがなくなり、コンタ−
効果を抑制できて出力波形にデイツプを生じさせない効
果かある。
まｆコ、請求項２に記載した製造方法によれば、コンタ
−効果を抑制できる断面弓型の上部磁極層をレジスト層
の形成工程と上部磁極膜の成膜工程とレジスト膜の除去
工程といった従来公知の簡単な工程によって容易に形成
することかできる効果がある。As explained above, the invention described in claim 1 is such that the leading edge of the magnetic pole is exposed on the side surface of the substrate, and the upper magnetic pole layer has an arched cross section, so that at least the leading edge of the upper magnetic pole layer is arched. Since the pole length is shorter on the end side, a loss occurs on the end side of the reproduced waveform corresponding to the upper magnetic pole layer. Therefore, according to the thin film magnetic head according to the present invention, unlike the conventional thin film magnetic head in which the end side is parallel to the gap, a pseudo gap is not formed, and the contour
This has the effect of suppressing the effect and preventing dips from occurring in the output waveform. According to the manufacturing method described in claim 2, the upper magnetic pole layer having a bow-shaped cross section capable of suppressing the contour effect is formed by forming a resist layer, forming an upper magnetic pole film, and removing a resist film. It has the advantage that it can be easily formed by conventionally known simple steps.
第１図は本発明の一実施例の薄膜磁気ヘッドの要部拡大
図、第２図は前記薄膜磁気ヘッドの詳細構造を示す断面
図、第３図ないし第７図は前記薄膜磁気ヘッドの製造方
法を説明するためのもので、第３図はスライダ上に絶縁
層を形成した状態を示す断面図、第４図は下部磁極層と
ギャップ層を形成した状態を示す断面図、第５図はレジ
スト膜の形成状態を示す断面図、第６図はレジスト膜間
に上部磁極層を形成した状態を示す断面図、第７図は形
成した上部磁極層を示す断面図、第８図は前記構造の薄
膜磁気ヘッドにより得られる出力波形を示す図、第９図
ないし第１３図は従来の薄膜磁気ヘッドの一例を示すも
ので、第９図は全体概略構成を示す斜視図、第１θ図は
薄膜磁気ヘッド素子の部分断面図、第１１図は磁極の先
端面を示す図、第１２図は出力波形を示す図、第１３図
は出力特性を示す図である。
■・・・スライダ、２・・・薄膜磁気ヘッド素子、３・
・・絶縁層、４・・下部磁極層、５・・・ギャップ層、
６・・・絶縁層、７・・導体コイル、８・・・上部磁極
層、１１・・・ギャップ、１２゜１３・・・コア端、Ｐ
・・ポール長、１５．１６・・・レジスト層。FIG. 1 is an enlarged view of essential parts of a thin film magnetic head according to an embodiment of the present invention, FIG. 2 is a sectional view showing the detailed structure of the thin film magnetic head, and FIGS. 3 to 7 are manufacturing of the thin film magnetic head. Figure 3 is a cross-sectional view showing the state in which an insulating layer is formed on the slider, Figure 4 is a cross-sectional view showing the state in which the bottom pole layer and the gap layer are formed, and Figure 5 is for explaining the method. 6 is a cross-sectional view showing the formation of the resist film, FIG. 6 is a cross-sectional view showing the upper magnetic pole layer formed between the resist films, FIG. 7 is a cross-sectional view showing the formed upper magnetic pole layer, and FIG. 8 is the structure described above. Figures 9 to 13 show an example of a conventional thin film magnetic head, Figure 9 is a perspective view showing the overall schematic configuration, and Figure 1θ is a thin film magnetic head. FIG. 11 is a partial cross-sectional view of the magnetic head element, FIG. 11 is a diagram showing the tip end surface of the magnetic pole, FIG. 12 is a diagram showing the output waveform, and FIG. 13 is a diagram showing the output characteristics. ■...Slider, 2...Thin film magnetic head element, 3...
...Insulating layer, 4.. Bottom pole layer, 5.. Gap layer,
6... Insulating layer, 7... Conductor coil, 8... Upper magnetic pole layer, 11... Gap, 12° 13... Core end, P
...Pole length, 15.16...Resist layer.
Claims (2)
極層と上部磁極層のそれぞれの先端面を前記基板の側面
側に露出させることにより、下部磁極層の先端部と上部
磁極層の先端部をそれらの間にギャップを有する対の磁
極となした薄膜磁気ヘッドにおいて、 前記上部磁極層の少なくとも先端面の断面形状を、ギャ
ップ側と反対側に膨出する弓型に形成してなることを特
徴とする薄膜磁気ヘッド。(1) By exposing the tip surfaces of the lower magnetic pole layer and the upper magnetic pole layer laminated on the surface of the substrate with a gap layer interposed therebetween on the side surface of the substrate, the tip of the lower magnetic pole layer and the tip of the upper magnetic pole layer can be formed. In a thin film magnetic head having a pair of magnetic poles having a gap between them, the cross-sectional shape of at least the tip end surface of the upper magnetic pole layer is formed into an arch shape bulging toward the side opposite to the gap side. A thin film magnetic head featuring:
層を順次積層し、下部磁極層と上部磁極層のそれぞれの
先端面を前記基板の側面側に露出させて製造される薄膜
磁気ヘッドの製造方法において、前記ギャップ層上に上
部磁極層を形成する際に、上部磁極層形成予定部分を除
く部分をレジスト膜で覆い、このレジスト膜で覆われて
いない部分に成膜して断面弓型の上部磁極層を形成する
とともに、上部磁極層形成後にレジスト膜を除去するこ
とを特徴とする薄膜磁気ヘッドの製造方法。(2) A thin-film magnetic head manufactured by sequentially laminating a lower magnetic pole layer, a gap layer, and an upper magnetic pole layer on the surface of a substrate, and exposing the tip surfaces of each of the lower magnetic pole layer and the upper magnetic pole layer to the side surface of the substrate. In the manufacturing method, when forming the upper magnetic pole layer on the gap layer, a resist film is applied to cover the area other than the area where the upper magnetic pole layer is to be formed, and a film is formed on the area not covered with the resist film to form a cross-sectional arch. A method for manufacturing a thin film magnetic head, comprising forming a molded upper magnetic pole layer and removing a resist film after forming the upper magnetic pole layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33408890A JPH04205907A (en) | 1990-11-30 | 1990-11-30 | Thin film type magnetic head and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33408890A JPH04205907A (en) | 1990-11-30 | 1990-11-30 | Thin film type magnetic head and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04205907A true JPH04205907A (en) | 1992-07-28 |
Family
ID=18273395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33408890A Pending JPH04205907A (en) | 1990-11-30 | 1990-11-30 | Thin film type magnetic head and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04205907A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6025977A (en) * | 1994-12-30 | 2000-02-15 | International Business Machines Corporation | Combined magnetoresistive (MR) read and inductive write head with sunken write coil |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6443806A (en) * | 1987-08-11 | 1989-02-16 | Hitachi Ltd | Thin film magnetic head |
| JPH0413210A (en) * | 1990-04-28 | 1992-01-17 | Tdk Corp | Thin-film magnetic head |
-
1990
- 1990-11-30 JP JP33408890A patent/JPH04205907A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6443806A (en) * | 1987-08-11 | 1989-02-16 | Hitachi Ltd | Thin film magnetic head |
| JPH0413210A (en) * | 1990-04-28 | 1992-01-17 | Tdk Corp | Thin-film magnetic head |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6025977A (en) * | 1994-12-30 | 2000-02-15 | International Business Machines Corporation | Combined magnetoresistive (MR) read and inductive write head with sunken write coil |
| US6156375A (en) * | 1994-12-30 | 2000-12-05 | International Business Machines Corporation | Method of making read/write magnetoresistive (MR) head with sunken components |
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