JPH08129715A - Production of combined thin-film magnetic head - Google Patents

Abstract

PURPOSE: To substantially prevent the spreading of the magnetic fluxes leaking from opposite parts alongside the track width direction and to eliminate blurring in recording by forming parts facing each other in the same plane shape as the plane shape of the track width regulating part of an upper core layer in a part of a lower core layer. CONSTITUTION: A lower shielding layer 2, a gap spacer layer 3, a magneto- resistance effect element layer 4, a conductive layer 5 and a gap spacer layer 6 are successively formed on a substrate 1 and thereafter, a first thin film 71 to be made into an upper shielding layer and a second thin film 72 to be made into the lower core layer of an induction type head are formed. These films 71, 72 are etched as the upper shielding layer to a plane shape. Next, a lower insulating layer, coil layer 8, upper insulating layer, gap spacer layer and upper core layer 9 of the induction type head are formed on the film 72. Next, a resist layer is formed on the layer 9 and the upper insulating layer exclusive of the parts on the track regulating part of the layer 9. The film 72 is etched and shaped with the track width regulating part of the layer 9 and the resist layer as a mask. Finally, the resist layer is removed and the combined thin-film magnetic head is obtd.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic recording device such as an HDD (hard disk drive).

[0002]

2. Description of the Related Art As a magnetic head used in a magnetic recording device such as an HDD, a reproducing magnetoresistive head having a magnetoresistive element layer and a shield layer and a recording induction having a magnetic core layer and a coil layer. A composite type thin film magnetic head formed by stacking a mold head on a substrate is disclosed in
No. 8-36406.

In such a composite thin film thin film head, the upper shield layer of the magnetoresistive head and the lower magnetic core layer of the inductive head may be separated from each other by an insulating layer, but the manufacturing process is simplified. In order to achieve this, as shown in FIG. 8, both may be constituted by an integrated body 7 of magnetic thin films.

FIG. 8 is a perspective view of the composite type thin film magnetic head, in which 1 is a substrate, 2 is a lower shield layer of the magnetoresistive head, and 3 is between the lower shield layer and the magnetoresistive element layer. Gap spacer layers, 4 are magnetoresistive element layers,
Reference numeral 5 is a conductor layer for conducting electricity to the magnetoresistive effect element layer, 6 is a gap spacer layer between the magnetoresistive effect element layer and the upper shield layer, 7 is an upper shield layer / lower core layer of the inductive head, and 8 is A coil layer, 9 indicates an upper core layer.
A gap spacer layer is interposed between the upper shield layer / lower core layer 7 and the upper core layer 9, and is provided between the upper shield layer / lower core layer 7 and the coil layer 8 and between the coil layer 8 and the upper layer. An insulating layer is interposed between the core layer 9 and
Illustration is omitted.

The width of a recording track formed on a recording medium such as a magnetic disk by the composite type thin film magnetic head as shown in FIG. 8 is restricted by the track width of the upper core layer 9 of the induction type head. In the composite type thin film magnetic head, since the upper shield layer / lower core layer 7 extends to the side of the track width of the upper core layer 9 as well, when the recording current becomes large, the leakage magnetic flux from the gap portion is generated in the track width direction. It may spread laterally, and the effective recording track width may become wider than the track width of the upper core layer.

Such an expansion phenomenon of the effective recording track width is called "recording bleeding", and is 50 in HDD devices or the like.
In order to realize a high track density that reaches even 00TPI, that is, to perform recording with a track width of about 5 μm or less, there is a large problem of “recording bleeding” that causes crosstalk with adjacent tracks. It becomes an obstacle.

[0007]

SUMMARY OF THE INVENTION According to the present invention, a magnetoresistive head having a magnetoresistive element layer and a shield layer and an inductive head having a magnetic core layer and a coil layer are stacked and formed on a substrate. A composite thin film magnetic head in which the upper shield layer of the magnetoresistive head and the lower core layer of the inductive head are composed of a magnetic thin film or a magnetic thin film laminated via a relatively thin non-magnetic thin film. In the manufacturing method (1), the manufacturing method which can solve the above-mentioned problem of "recording bleeding" is clarified.

[0008]

A method of manufacturing a composite thin film magnetic head according to the present invention comprises a magnetoresistive head having a magnetoresistive element layer and a shield layer, and an inductive head having a magnetic core layer and a coil layer. In a method of manufacturing a composite type thin film magnetic head formed by stacking on a substrate,
A step of forming a second thin film which will be a lower core layer of the inductive head after forming a first thin film which will be an upper shield layer of the magnetoresistive head and before etching and shaping the first thin film. And a step of etching and shaping the first and second thin films into a planar shape as the upper shield layer, and a lower insulating layer of an inductive head having a predetermined planar shape at a predetermined portion on the second thin film. A step of sequentially forming a coil layer, an upper insulating layer, a gap spacer layer and an upper core layer,
Forming a resist layer on the upper core layer and on the upper insulating layer except on the track width regulating portion of the upper core layer, and masking the track width regulating portion of the upper core layer and the resist layer And a step of etching and shaping the second thin film, and a step of removing the resist layer.

[0009]

According to the above-described manufacturing method of the present invention, a portion of the lower core layer that is opposed to the upper core layer in the same plane shape as the track width regulating portion is formed, and the facing portion, that is, the induction type head is formed. It becomes difficult for the magnetic flux leaking from the gap portion to spread laterally in the track width direction, and the problem of "recording bleeding" is solved.

Further, according to the above-described manufacturing method of the present invention, the track width regulating portion of the upper core layer is thinner than the portion covered with the resist layer, so that the magnetic flux passing through the upper core layer is absorbed by the track width regulating portion. The recording efficiency is improved by narrowing down in the thickness direction.

[0011]

Embodiments of the present invention will be described below with reference to the drawings.

In the embodiment of the present invention, first, as shown in FIG. 2, the lower shield layer 2 of the magnetoresistive head and the gap spacer layer between the lower shield layer and the magnetoresistive element layer are formed on the substrate 1. 3, magnetoresistive effect element layer 4, conductor layer 5 for energizing the magnetoresistive effect element, gap spacer layer 6 between the magnetoresistive effect element layer and the upper shield layer
And then sequentially forming the first thin film 7 serving as an upper shield layer.
1 and a second thin film 72 to be the lower core layer of the inductive head
Is formed, and the first and second thin films 71 and 72 are etched and shaped into a planar shape as an upper shield layer.

The material of the first thin film 71 is NiF.
An e-alloy or the like is used, and the thickness is 0.5 to 3 μm. As the material of the second thin film 72, a CoZrSn-based amorphous alloy or the like is used, and the thickness thereof is 0.5 to 5 μm.

Next, as shown in FIG. 3, a lower insulating layer (not shown), a coil layer 8 and an upper insulating layer of the induction type head having a predetermined plane shape at a predetermined portion on the second thin film 72. (Not shown), a gap spacer layer (not shown), and an upper core layer 9 are sequentially formed.

The material of the upper core layer 9 is CoZr.
A Sn-based amorphous alloy or the like is used, and the thickness is 1 to 5 μm.

Next, as shown in FIG. 4, a resist layer 92 is formed on the upper core layer and the upper insulating layer except on the track width restricting portion 91 of the upper core layer 9.

Next, as shown in FIG. 5, the second thin film is etched and shaped by using the track width regulating portion 91 of the upper core layer and the resist layer 92 as a mask. At this time, the etching depth does not necessarily have to match the thickness of the second thin film, and the bottom layer portion of the second thin film may remain or may reach the upper layer portion of the first thin film. .

Finally, by removing the resist layer, a composite type thin film magnetic head as shown in FIG. 1 is obtained.

Here, the first thin film 71 and the second thin film 72 may be made of different materials as in the above embodiment, or may be made of the same material.

Further, the first thin film 71 and the second thin film 7
A non-magnetic thin film may be provided on the entire surface between the two, and FIG.
Alternatively, as shown in FIG. 7, a non-magnetic thin film 73 may be locally interposed between the first thin film 71 and the second thin film 72. The non-magnetic thin film 73 is magnetostatic between the lower core layer 72 of the inductive head composed of the second thin film and the upper shield layer 71 of the magnetoresistive head composed of the first thin film. It is provided to control the magnetic domain structure in the lower core layer 72 by changing the different coupling state.

[0021]

By using the composite type thin film magnetic head manufactured according to the present invention, it is possible to suppress the effective expansion of the recording track width and improve the recording efficiency, and to realize a high track density magnetic recording system. Will be possible.

[Brief description of drawings]

FIG. 1 is a perspective view of a composite type thin film magnetic head according to an embodiment of the present invention.

FIG. 2 is a perspective view (No. 1) showing a manufacturing process of a composite type thin film magnetic head according to an embodiment of the present invention.

FIG. 3 is a perspective view showing a manufacturing process of a composite type thin film magnetic head according to an embodiment of the present invention.

FIG. 4 is a perspective view showing a manufacturing process of a composite type thin film magnetic head according to an embodiment of the present invention.

FIG. 5 is a perspective view showing a manufacturing process of a composite type thin film magnetic head according to an embodiment of the present invention.

FIG. 6 is a perspective view of a composite type thin film magnetic head according to an embodiment of the present invention.

FIG. 7 is a perspective view of a composite type thin film magnetic head according to an embodiment of the present invention.

FIG. 8 is a perspective view of a composite type thin film magnetic head according to a conventional example.

[Explanation of symbols]

1 Substrate 2 Lower Shield Layer 3 Gap Spacer Layer Between Lower Shield Layer and Magnetoresistive Element Layer 4 Magnetoresistive Element Layer 5 Conductor Layer for Energizing Magnetoresistive Element Layer 6 Magnetoresistive Element Layer and Top Gap between shield layer 71 Upper shield layer (first thin film) 72 Lower core layer (second thin film) 8 Coil layer 9 Upper core layer

Claims (3)

[Claims] 1. A method of manufacturing a composite thin-film magnetic head, wherein a magnetoresistive head having a magnetoresistive element layer and a shield layer and an inductive head having a magnetic core layer and a coil layer are stacked and formed on a substrate. After forming a first thin film which will be an upper shield layer of the magnetoresistive head, and forming a second thin film which will be a lower core layer of the inductive head before etching and shaping the first thin film. A step of etching and shaping the first and second thin films into a planar shape as the upper shield layer, and a lower part of the induction type head having a predetermined planar shape at a predetermined portion on the second thin film. A step of sequentially forming an insulating layer, a coil layer, an upper insulating layer, a gap spacer layer, and an upper core layer; and, except for a track width restricting portion of the upper core layer, on the upper core layer and the upper insulating layer. A step of forming a resist layer thereon; a step of etching and shaping the second thin film using the track width restricting portion of the upper core layer and the resist layer as a mask; and a step of removing the resist layer. And a method of manufacturing a composite thin film magnetic head. 2. The method of manufacturing a composite thin-film magnetic head according to claim 1, further comprising the step of forming the second thin film on the first thin film without an intermediate layer. 3. The method according to claim 1, further comprising a step of forming a nonmagnetic layer having a predetermined planar shape on a predetermined portion of the first thin film, and then forming the second thin film. 1
A method of manufacturing the composite thin-film magnetic head described.