JP2931529B2 - Composite type thin film magnetic head - Google Patents
Composite type thin film magnetic headInfo
- Publication number
- JP2931529B2 JP2931529B2 JP26565094A JP26565094A JP2931529B2 JP 2931529 B2 JP2931529 B2 JP 2931529B2 JP 26565094 A JP26565094 A JP 26565094A JP 26565094 A JP26565094 A JP 26565094A JP 2931529 B2 JP2931529 B2 JP 2931529B2
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- Japan
- Prior art keywords
- layer
- core layer
- head
- magnetic
- thin film
- Prior art date
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＨＤＤ（ハード・ディ
スク・ドライブ）等の磁気記録装置に使用される磁気ヘ
ッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used for a magnetic recording device such as an HDD (hard disk drive).
【０００２】[0002]
【従来の技術】ＨＤＤ等の磁気記録装置に使用される磁
気ヘッドとして、磁気抵抗効果素子層及びシールド層を
備える再生用の磁気抵抗効果型ヘッドと磁気コア層及び
コイル層を備える記録用の誘導型ヘッドとを基板上に積
み重ねて形成した複合型の薄膜磁気ヘッドが、特公昭５
８−３６４０６号に開示されている。かかる複合型薄膜
磁気ヘッドにおいて、磁気抵抗効果型ヘッドの上部シー
ルド層と誘導型ヘッドの下部コア層は、厚さ数μｍの非
磁性層を介して互いに磁気的に分離されている。2. Description of the Related Art As a magnetic head used in a magnetic recording apparatus such as an HDD, a reproducing magnetoresistive head having a magnetoresistive element layer and a shield layer and a recording induction head having a magnetic core layer and a coil layer are provided. Combined type thin film magnetic head formed by stacking a die head on a substrate
No. 8-36406. In such a composite thin-film magnetic head, the upper shield layer of the magnetoresistive head and the lower core layer of the inductive head are magnetically separated from each other via a non-magnetic layer having a thickness of several μm.
【０００３】ところが、磁気記録の高密度化を図るため
に記録トラック幅を小さくすると、該トラック幅を規制
する記録用誘導型ヘッドの磁気コア層の記録媒体対向面
近傍部において、図８に符号８９で示すような三角形状
の還流磁区の占める面積が相対的に大きくなり、記録能
力が低下するという問題が起こる。図９は該磁気コア層
の磁区構造を示す平面図であり、図中の矢印は磁壁８８
によって区分された各磁区内の磁化方向を示しており、
図の上端辺８７が記録媒体対向面に相当する。However, when the recording track width is reduced in order to increase the density of the magnetic recording, when the width of the magnetic core layer of the recording induction type head for controlling the track width is reduced in the vicinity of the recording medium facing surface as shown in FIG. The area occupied by the triangular return magnetic domain as indicated by 89 becomes relatively large, which causes a problem that the recording capability is reduced. FIG. 9 is a plan view showing the magnetic domain structure of the magnetic core layer.
Indicates the magnetization direction in each magnetic domain divided by
The upper side 87 in the figure corresponds to the recording medium facing surface.
【０００４】[0004]
【発明が解決しようとする課題】本発明は、磁気抵抗効
果素子層及びシールド層を備える磁気抵抗効果型ヘッド
と磁気コア層及びコイル層を備える誘導型ヘッドとを基
板上に積み重ねて形成した複合型の薄膜磁気ヘッドにお
いて、誘導型ヘッドの下部コア層の記録媒体対向面近傍
部における還流磁区の発生を抑制するものである。SUMMARY OF THE INVENTION The present invention relates to a composite in which a magnetoresistive head having a magnetoresistive element layer and a shield layer and an inductive head having a magnetic core layer and a coil layer are stacked on a substrate. In the thin-film magnetic head of the induction type, the generation of return magnetic domains in the vicinity of the recording medium facing surface of the lower core layer of the induction type head is suppressed.
【０００５】[0005]
【課題を解決するための手段】本発明の第１の局面に係
る複合型薄膜磁気ヘッドは、磁気抵抗効果素子層及びシ
ールド層を備える磁気抵抗効果型ヘッドと磁気コア層及
びコイル層を備える誘導型ヘッドとを基板上に積み重ね
て形成した複合型薄膜磁気ヘッドにおいて、前記誘導型
ヘッドの下部コア層は、少なくとも記録媒体対向面近傍
部において該誘導型ヘッドの上部コア層と略同一の平面
形状を有し、前記磁気抵抗効果型ヘッドの上部シールド
層は、前記誘導型ヘッドの上部コア層よりも拡がった平
面形状を有し、前記下部コア層の記録媒体対向面近傍部
と前記上部シールド層との間には、非磁性薄膜が介在し
ており、前記下部コア層の記録媒体対向面近傍部以外の
部分は、前記上部シールド層に直接接触していることを
特徴とするものである。According to a first aspect of the present invention, there is provided a composite thin-film magnetic head comprising: a magnetoresistive head having a magnetoresistive element layer and a shield layer; and an induction head having a magnetic core layer and a coil layer. And a lower core layer of the inductive head has a planar shape substantially the same as that of the upper core layer of the inductive head at least in the vicinity of the recording medium facing surface. Wherein the upper shield layer of the magnetoresistive head has a planar shape that is wider than the upper core layer of the inductive head, and a portion of the lower core layer near the recording medium facing surface and the upper shield layer. A non-magnetic thin film is interposed therebetween, and a portion of the lower core layer other than a portion near the recording medium facing surface is in direct contact with the upper shield layer. That.
【０００６】本発明の第２の局面に係る複合型薄膜磁気
ヘッドは、磁気抵抗効果素子層及びシールド層を備える
磁気抵抗効果型ヘッドと磁気コア層及びコイル層を備え
る誘導型ヘッドとを基板上に積み重ねて形成した複合型
薄膜磁気ヘッドにおいて、前記誘導型ヘッドの下部コア
層は、少なくとも記録媒体対向面近傍部において該誘導
型ヘッドの上部コア層と略同一の平面形状を有し、前記
磁気抵抗効果型ヘッドの上部シールド層は、前記誘導型
ヘッドの上部コア層よりも拡がった平面形状を有し、前
記下部コア層の記録媒体対向面近傍部以外の部分と前記
上部シールド層との間には、非磁性薄膜が介在してお
り、前記下部コア層の記録媒体対向面近傍部は、前記上
部シールド層に直接接触していることを特徴とするもの
である。A composite thin-film magnetic head according to a second aspect of the present invention comprises a substrate on which a magnetoresistive head having a magnetoresistive element layer and a shield layer and an inductive head having a magnetic core layer and a coil layer are provided. The lower core layer of the inductive head has a plane shape substantially the same as that of the upper core layer of the inductive head at least in the vicinity of the recording medium facing surface. The upper shield layer of the resistive head has a planar shape that is wider than the upper core layer of the inductive head, and the upper shield layer is formed between a portion of the lower core layer other than a portion near the recording medium facing surface and the upper shield layer. , A nonmagnetic thin film is interposed, and a portion of the lower core layer near the recording medium facing surface is in direct contact with the upper shield layer.
【０００７】上記本発明の第１及び第２の局面に係る複
合型薄膜磁気ヘッドにおいて、前記下部コア層は、記録
媒体対向面近傍部以外の部分においても前記上部コア層
と略同一の平面形状を有する構成であってもよい。In the composite type thin-film magnetic head according to the first and second aspects of the present invention, the lower core layer has substantially the same planar shape as the upper core layer in a portion other than a portion near the recording medium facing surface. May be provided.
【０００８】また、前記下部コア層と上部シールド層と
の間に介在する非磁性薄膜の厚さは、１０〜２００ｎｍ
であることが望ましい。[0008] The thickness of the nonmagnetic thin film interposed between the lower core layer and the upper shield layer is 10 to 200 nm.
It is desirable that
【０００９】[0009]
【作用】上記本発明の構成によれば、誘導型ヘッドの下
部コア層と磁気抵抗効果型ヘッドの上部シールド層とが
静磁的に結合して下部コア層の記録媒体対向面近傍部に
還流磁区が発生しにくくなり、該誘導型ヘッドの記録能
力を左右する下部コア層の記録媒体対向面近傍部の実効
的な透磁率が向上する。According to the structure of the present invention, the lower core layer of the inductive head and the upper shield layer of the magnetoresistive head are magnetostatically coupled to return to the lower core layer near the recording medium facing surface. Magnetic domains are less likely to be generated, and the effective magnetic permeability near the recording medium facing surface of the lower core layer which affects the recording performance of the inductive head is improved.
【００１０】また、上記本発明の構成においては、下部
コア層と上部シールド層との間に比較的薄い非磁性薄膜
を介在させるが、その介在部位を適宜選択することによ
り下部コア層の記録媒体対向面近傍部の単磁区化領域を
拡げることが可能となり、下部コア層の記録媒体対向面
近傍部の実効的な透磁率が向上する。In the structure of the present invention, a relatively thin non-magnetic thin film is interposed between the lower core layer and the upper shield layer. It becomes possible to expand the single magnetic domain formation region near the facing surface, and the effective magnetic permeability of the lower core layer near the recording medium facing surface is improved.
【００１１】[0011]
【実施例】以下、本発明の実施例及びその関連技術につ
いて、図面を参照しながら説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention and related techniques will be described below with reference to the drawings.
【００１２】本発明に関係する複合型薄膜磁気ヘッド
は、図１に示すような記録媒体対向面構造を有する。図
１において、１は基板、２は下部保護層、３は磁気抵抗
効果型ヘッドの下部シールド層、４は下部シールド層と
磁気抵抗効果素子層との間のギャップスペーサ層、５は
磁気抵抗効果素子層、６は磁気抵抗効果素子層に通電す
るための導体層、７は磁気抵抗効果素子層と上部シール
ド層との間のギャップスペーサ層、８は上部シールド層
兼誘導型ヘッドの下部コア層、９は下部コア層と上部コ
ア層との間のギャップスペーサ層、１０は上部コア層、
１１は上部保護層を示している。The composite type thin film magnetic head according to the present invention has a recording medium facing surface structure as shown in FIG. In FIG. 1, 1 is a substrate, 2 is a lower protective layer, 3 is a lower shield layer of a magnetoresistive head, 4 is a gap spacer layer between the lower shield layer and the magnetoresistive element layer, and 5 is a magnetoresistive effect. Element layer, 6 is a conductor layer for supplying current to the magnetoresistive element layer, 7 is a gap spacer layer between the magnetoresistive element layer and the upper shield layer, 8 is an upper shield layer and a lower core layer of the inductive head. , 9 are gap spacer layers between the lower core layer and the upper core layer, 10 is the upper core layer,
Numeral 11 indicates an upper protective layer.
【００１３】図１に示す複合型薄膜磁気ヘッドは、磁気
抵抗効果素子層５及びシールド層３、８を備える磁気抵
抗効果型ヘッドと磁気コア層８、１０及びコイル層（図
示せず）を備える誘導型ヘッドとを基板１の上に積層し
て形成し、前記磁気抵抗効果型ヘッドの上部シールド層
と前記誘導型ヘッドの下部コア層とを磁性薄膜の一体物
８にて構成した複合型磁気ヘッドであって、前記上部シ
ールド層兼下部コア層８が、上部コア層１０の平面形状
よりも拡がった平面形状を有する底部８１と、該底部上
に配され記録媒体対向面近傍において前記上部コア層の
トラック幅規制部と略同一の平面形状を有する凸部８２
とを備えた構成となっていることを特徴とするものであ
る。そして、前記上部シールド層兼下部コア層８におけ
る底部８１及び凸部８２は、機能面に注目すれば、底部
８１が磁気抵抗効果型ヘッドの上部シールド層に相当
し、凸部８２が誘導型ヘッドの下部コア層に相当する。The composite type thin film magnetic head shown in FIG. 1 includes a magnetoresistive head having a magnetoresistive element layer 5 and shield layers 3 and 8, magnetic core layers 8, 10 and a coil layer (not shown). An inductive head is formed by laminating on a substrate 1, and an upper shield layer of the magnetoresistive head and a lower core layer of the inductive head are composed of an integrated magnetic thin film 8. A head, wherein the upper shield layer and lower core layer 8 has a bottom 81 having a planar shape that is wider than the planar shape of the upper core layer 10, and the upper core disposed near the recording medium facing surface disposed on the bottom. Convex portion 82 having substantially the same planar shape as the track width regulating portion of the layer
And a configuration provided with: The bottom portion 81 and the convex portion 82 of the upper shield layer and lower core layer 8 are equivalent to the upper shield layer of the magnetoresistive head, and the convex portion 82 is the inductive type head, from the viewpoint of function. Of the lower core layer.
【００１４】前記上部シールド層兼下部コア層８におけ
る凸部８２及び底部８１は、以下に示すような方法によ
り形成させる。The projections 82 and the bottom 81 in the upper shield layer and lower core layer 8 are formed by the following method.
【００１５】すなわち、まず図２（ａ）に示すように、
前記下部保護層、下部シールド層、下部シールド層と磁
気抵抗効果素子層との間のギャップスペーサ層、磁気抵
抗効果素子層、リード導体層、磁気抵抗化素子層と上部
シールド層との間のギャップスペーサ層等が形成された
基体１００の上面全体に、厚さ１〜１０μｍの磁性薄膜
８０を形成する。That is, first, as shown in FIG.
The lower protective layer, the lower shield layer, a gap spacer layer between the lower shield layer and the magnetoresistive element layer, a magnetoresistive element layer, a lead conductor layer, and a gap between the magnetoresistive element layer and the upper shield layer. A magnetic thin film 80 having a thickness of 1 to 10 μm is formed on the entire upper surface of the base 100 on which the spacer layer and the like are formed.
【００１６】次に図２（ｂ）に示すように、後工程で形
成する上部コア層と略同一の平面形状を有するレジスト
パターンに従って、前記磁性薄膜８０を深さ３〜７μｍ
に至るまでエッチングすることにより、凸部８２を形成
する。Next, as shown in FIG. 2B, the magnetic thin film 80 is formed to have a depth of 3 to 7 μm in accordance with a resist pattern having substantially the same planar shape as an upper core layer formed in a later step.
Is formed until the protrusions 82 are formed.
【００１７】そして図２（ｃ）に示すように、前記上部
コア層全体の平面形状よりも拡がった平面形状を有する
レジストパターンに従って、前記磁性薄膜８０の周辺部
が消えるまでエッチングすることにより、底部８１を整
形する。Then, as shown in FIG. 2 (c), the bottom portion of the magnetic thin film 80 is etched according to a resist pattern having a planar shape that is wider than that of the entire upper core layer until the peripheral portion of the magnetic thin film 80 disappears. Shape 81.
【００１８】前記凸部８２の平面形状は、図３に示すよ
うに、記録媒体対向面近傍のトラック幅規制部のみが上
部コア層と略同一の平面形状となっていてもよい。As shown in FIG. 3, only the track width regulating portion in the vicinity of the recording medium facing surface may have substantially the same planar shape as the upper core layer, as shown in FIG.
【００１９】ここで、前記図３に示したような上部シー
ルド層兼下部コア層、すなわち、凸部８２の記録媒体対
向面近傍部のみが上部コア層と略同一の平面形状を有す
る上部シールド層兼下部コア層の磁区構造を図４に示
す。図４の（ａ）は該上部シールド層兼下部コア層の底
部８１の磁区構造を示す平面図であり、（ｂ）は凸部８
２の磁区構造を示す平面図であり、（ｃ）は底部８１及
び凸部８２の磁区構造を示す断面図であり、図中の矢印
は磁壁８８によって区分された各磁区内の磁化方向を示
しており、図の上端辺８７が記録媒体対向面に相当す
る。なお、図３の（ｃ）には、ギャップスペーサ層９や
上部コア層１０、コイル層１２も併記している。Here, only the upper shield layer and the lower core layer as shown in FIG. 3, that is, the upper shield layer in which only the portion near the recording medium facing surface of the projection 82 has substantially the same planar shape as the upper core layer. FIG. 4 shows the magnetic domain structure of the lower core layer. FIG. 4A is a plan view showing the magnetic domain structure of the bottom 81 of the upper shield layer and lower core layer, and FIG.
FIG. 2C is a plan view showing the magnetic domain structure of FIG. 2, and FIG. 2C is a cross-sectional view showing the magnetic domain structure of the bottom portion 81 and the convex portion 82, and the arrows in the drawing show the magnetization directions in each magnetic domain divided by the magnetic wall 88. The upper side 87 in the figure corresponds to the recording medium facing surface. In FIG. 3C, the gap spacer layer 9, the upper core layer 10, and the coil layer 12 are also shown.
【００２０】図４を見ればわかるるように、凸部（すな
わち下部コア層相当部）８２の記録媒体対向面近傍部に
おいては、底部（すなわち上部シールド層相当部）８１
の磁区構造の影響を受けて、他の部分に見られるような
三角形状の還流磁区８９が消失している。As can be seen from FIG. 4, in the vicinity of the recording medium facing surface of the projection (ie, the portion corresponding to the lower core layer) 82, the bottom (ie, the portion corresponding to the upper shield layer) 81 is formed.
Under the influence of the magnetic domain structure described above, the triangular return magnetic domains 89 as seen in other portions have disappeared.
【００２１】上述のような還流磁区の消失は、図５〜図
７に示すように、上部シールド層兼下部コア層の底部８
１と凸部８２との間に比較的薄い非磁性薄膜８３を局部
的に介在させることによっても実現できる。図６〜図８
の（ａ）は該上部シールド層兼下部コア層の底部８１の
磁区構造を示す平面図であり、（ｂ）は凸部８２の磁区
構造を示す平面図であり、（ｃ）は底部８１及び凸部８
２の磁区構造を示す断面図であり、図中の矢印は磁壁８
８によって区分された各磁区内の磁化方向を示してお
り、図の上端辺８７が記録媒体対向面に相当する。な
お、図３の（ｃ）には、ギャップスペーサ層９や上部コ
ア層１０、コイル層１２も併記している。As shown in FIGS. 5 to 7, the disappearance of the return magnetic domain is caused by the bottom portion 8 of the upper shield layer and the lower core layer.
It can also be realized by locally interposing a relatively thin non-magnetic thin film 83 between the protrusion 1 and the projection 82. 6 to 8
3A is a plan view showing a magnetic domain structure of a bottom 81 of the upper shield layer and lower core layer, FIG. 3B is a plan view showing a magnetic domain structure of a convex portion 82, and FIG. Convex part 8
2 is a sectional view showing the magnetic domain structure of FIG.
The direction of magnetization in each magnetic domain divided by 8 is shown, and the upper end side 87 in the figure corresponds to the recording medium facing surface. In FIG. 3C, the gap spacer layer 9, the upper core layer 10, and the coil layer 12 are also shown.
【００２２】図５は、上部シールド層兼下部コア層の凸
部８１の記録媒体対向面近傍部と底部８２との間に厚さ
１０〜２００ｎｍの非磁性薄膜８３を介在させた例を示
しており、図６は、凸部８１の記録媒体対向面近傍部以
外の部分と底部８２との間に厚さ１０〜２００ｎｍの非
磁性薄膜８３を介在させた例を示しており、図７は、図
６の例に比べて非磁性薄膜８３の端が記録媒体対向面か
ら遠ざかった例を示している。FIG. 5 shows an example in which a nonmagnetic thin film 83 having a thickness of 10 to 200 nm is interposed between a portion near the recording medium facing surface of the projection 81 of the upper shield layer and the lower core layer and the bottom 82. FIG. 6 shows an example in which a nonmagnetic thin film 83 having a thickness of 10 to 200 nm is interposed between a portion other than the vicinity of the recording medium facing surface of the protrusion 81 and the bottom 82, and FIG. 6 shows an example in which the end of the non-magnetic thin film 83 is farther from the recording medium facing surface than in the example of FIG.
【００２３】図５〜図７に示した各実施例における凸部
８１及び底部８２の磁区構造は各々少しずつ異なるが、
いずれの場合でも凸部８１の記録媒体対向面近傍部にお
いては還流磁区８９が観測されず、特に、図６及び図７
の例においては、記録媒体対向面近傍部の単磁区化領域
が拡がっている。Although the magnetic domain structure of the convex portion 81 and the bottom portion 82 in each of the embodiments shown in FIGS.
In any case, the return magnetic domain 89 is not observed in the vicinity of the convex portion 81 in the vicinity of the recording medium facing surface.
In the example, the single magnetic domain forming region near the recording medium facing surface is expanded.
【００２４】また、凸部８１と底部８２との間の全面に
非磁性薄膜８３を介在させても、該非磁性薄膜が凸部８
１と底部８２とを磁気的に分離してしまうような厚いも
のでなければ（具体的には、従来例のように厚さが数μ
ｍにも達するようなものでなければ）、記録媒体対向面
近傍部における還流磁区の発生が抑制される。Further, even if the non-magnetic thin film 83 is interposed on the entire surface between the convex portion 81 and the bottom portion 82, the non-magnetic thin film
1 and the bottom 82 are not thick enough to magnetically separate them (specifically, the thickness is several μm as in the conventional example).
m), the generation of return magnetic domains near the recording medium facing surface is suppressed.
【００２５】[0025]
【発明の効果】本発明によれば、複合型薄膜磁気ヘッド
を構成する誘導型ヘッドの下部コア層の記録媒体対向面
近傍部における還流磁区の発生が抑制され、該複合型薄
膜磁気ヘッドの記録能力が向上する。According to the present invention, the generation of the return magnetic domain in the vicinity of the recording medium facing surface of the lower core layer of the induction type head constituting the composite type thin film magnetic head is suppressed, and the recording of the composite type thin film magnetic head is performed. Ability is improved.
【図１】本発明に関係する複合型薄膜磁気ヘッドの記録
媒体対向面図である。FIG. 1 is a recording medium facing surface view of a composite type thin film magnetic head related to the present invention.
【図２】本発明に関係する複合型薄膜磁気ヘッドの製造
方法を説明するための斜視図である。FIG. 2 is a perspective view for explaining a method of manufacturing a composite thin-film magnetic head according to the present invention.
【図３】本発明に関係する複合型薄膜磁気ヘッドの製造
方法を説明するための斜視図である。FIG. 3 is a perspective view for explaining a method of manufacturing a composite thin-film magnetic head according to the present invention.
【図４】本発明に関係する複合型薄膜磁気ヘッドの誘導
型ヘッド部の下部コア層の磁区構造を示す平面図及び断
面図である。4A and 4B are a plan view and a cross-sectional view showing a magnetic domain structure of a lower core layer of an induction type head portion of a composite type thin film magnetic head according to the present invention.
【図５】本発明第１実施例による複合型薄膜磁気ヘッド
の誘導型ヘッド部の下部コア層の磁区構造を示す平面図
及び断面図である。FIGS. 5A and 5B are a plan view and a sectional view showing a magnetic domain structure of a lower core layer of an inductive head portion of the composite thin film magnetic head according to the first embodiment of the present invention.
【図６】本発明第２実施例による複合型薄膜磁気ヘッド
の誘導型ヘッド部の下部コア層の磁区構造を示す平面図
及び断面図である。FIGS. 6A and 6B are a plan view and a sectional view showing a magnetic domain structure of a lower core layer of an inductive head portion of a composite thin film magnetic head according to a second embodiment of the present invention.
【図７】本発明第３実施例による複合型薄膜磁気ヘッド
の誘導型ヘッド部の下部コア層の磁区構造を示す平面図
及び断面図である。FIG. 7 is a plan view and a sectional view showing a magnetic domain structure of a lower core layer of an inductive head portion of a composite thin film magnetic head according to a third embodiment of the present invention.
【図８】従来例による複合型薄膜磁気ヘッドの誘導型ヘ
ッド部の磁気コア層の磁区構造を示す平面図である。FIG. 8 is a plan view showing a magnetic domain structure of a magnetic core layer of an induction type head portion of a composite type thin film magnetic head according to a conventional example.
１ 基板 ２ 下部保護層 ３ 下部シールド層 ４ 下部シールド層と磁気抵抗効果素子層との間のギ
ャップスペーサ層 ５ 磁気抵抗効果素子層 ６ 磁気抵抗効果素子層に通電するための導体層 ７ 磁気抵抗効果素子層と上部シールド層との間のギ
ャップスペーサ層 ８ 上部シールド層兼下部コア層 ８１ 上部シールド層兼下部コア層の底部（上部シール
ド層相当部） ８２ 上部シールド層兼下部コア層の凸部（下部コア層
相当部） ８３ 上部シールド層相当部と下部コア層相当部との間
の非磁性薄膜 ９ ギャップスペーサ層 １０ 上部コア層 １１ 上部保護層 １２ コイル層DESCRIPTION OF SYMBOLS 1 Substrate 2 Lower protective layer 3 Lower shield layer 4 Gap spacer layer between lower shield layer and magnetoresistive element layer 5 Magnetoresistive element layer 6 Conductor layer for supplying electricity to magnetoresistive element layer 7 Magnetoresistive effect Gap spacer layer between element layer and upper shield layer 8 Upper shield layer and lower core layer 81 Bottom of upper shield layer and lower core layer (corresponding to upper shield layer) 82 Projection of upper shield layer and lower core layer ( (Lower core layer equivalent portion) 83 Nonmagnetic thin film between upper shield layer equivalent portion and lower core layer equivalent portion 9 Gap spacer layer 10 Upper core layer 11 Upper protective layer 12 Coil layer
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平５−266432（ＪＰ，Ａ) 特開 平７−201021（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) G11B 5/39 G11B 5/31 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-5-266432 (JP, A) JP-A-7-201021 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) G11B 5/39 G11B 5/31
Claims (4)
える磁気抵抗効果型ヘッドと磁気コア層及びコイル層を
備える誘導型ヘッドとを基板上に積み重ねて形成した複
合型薄膜磁気ヘッドにおいて、 前記誘導型ヘッドの下部コア層は、少なくとも記録媒体
対向面近傍部において該誘導型ヘッドの上部コア層と略
同一の平面形状を有し、 前記磁気抵抗効果型ヘッドの上部シールド層は、前記誘
導型ヘッドの上部コア層よりも拡がった平面形状を有
し、 前記下部コア層の記録媒体対向面近傍部と前記上部シー
ルド層との間には、非磁性薄膜が介在しており、 前記下部コア層の記録媒体対向面近傍部以外の部分は、
前記上部シールド層に直接接触していることを特徴とす
る複合型薄膜磁気ヘッド。1. A composite thin film magnetic head formed by stacking a magnetoresistive head including a magnetoresistive element layer and a shield layer and an inductive head including a magnetic core layer and a coil layer on a substrate, The lower core layer of the type head has substantially the same planar shape as the upper core layer of the induction type head at least in the vicinity of the recording medium facing surface, and the upper shield layer of the magnetoresistive head includes the induction type head A non-magnetic thin film is interposed between the upper shield layer and a portion near the recording medium facing surface of the lower core layer; The portion other than the portion near the recording medium facing surface is
A composite thin-film magnetic head, which is in direct contact with the upper shield layer.
える磁気抵抗効果型ヘッドと磁気コア層及びコイル層を
備える誘導型ヘッドとを基板上に積み重ねて形成した複
合型薄膜磁気ヘッドにおいて、 前記誘導型ヘッドの下部コア層は、少なくとも記録媒体
対向面近傍部において該誘導型ヘッドの上部コア層と略
同一の平面形状を有し、 前記磁気抵抗効果型ヘッドの上部シールド層は、前記誘
導型ヘッドの上部コア層よりも拡がった平面形状を有
し、 前記下部コア層の記録媒体対向面近傍部以外の部分と前
記上部シールド層との間には、非磁性薄膜が介在してお
り、 前記下部コア層の記録媒体対向面近傍部は、前記上部シ
ールド層に直接接触していることを特徴とする複合型薄
膜磁気ヘッド。2. A composite thin film magnetic head formed by stacking a magnetoresistive head having a magnetoresistive element layer and a shield layer and an inductive head having a magnetic core layer and a coil layer on a substrate, The lower core layer of the type head has substantially the same planar shape as the upper core layer of the induction type head at least in the vicinity of the recording medium facing surface, and the upper shield layer of the magnetoresistive head includes the induction type head A non-magnetic thin film is interposed between a portion of the lower core layer other than a portion near the recording medium facing surface and the upper shield layer; A composite thin-film magnetic head, wherein a portion of the core layer near the recording medium facing surface is in direct contact with the upper shield layer.
部以外の部分においても前記上部コア層と略同一の平面
形状を有することを特徴とする請求項１または請求項２
に記載の複合型薄膜磁気ヘッド。3. The lower core layer has substantially the same planar shape as the upper core layer in a portion other than a portion near a recording medium facing surface.
3. The composite thin-film magnetic head according to item 1.
に介在する非磁性薄膜の厚さは、１０〜２００ｎｍであ
ることを特徴とする請求項１または請求項２に記載の複
合型薄膜磁気ヘッド。4. The composite thin film according to claim 1, wherein a thickness of the nonmagnetic thin film interposed between the lower core layer and the upper shield layer is 10 to 200 nm. Magnetic head.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26565094A JP2931529B2 (en) | 1994-10-28 | 1994-10-28 | Composite type thin film magnetic head |
| US08/761,933 US5739991A (en) | 1994-02-01 | 1996-12-09 | Composite thin film head having magnetoresistive and inductive head portions with nonmagnetic thin film interposed between core and shield portions of core layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26565094A JP2931529B2 (en) | 1994-10-28 | 1994-10-28 | Composite type thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH08129720A JPH08129720A (en) | 1996-05-21 |
| JP2931529B2 true JP2931529B2 (en) | 1999-08-09 |
Family
ID=17420089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26565094A Expired - Fee Related JP2931529B2 (en) | 1994-02-01 | 1994-10-28 | Composite type thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2931529B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3520170B2 (en) * | 1996-04-02 | 2004-04-19 | Ｔｄｋ株式会社 | Composite type thin film magnetic head |
| JP2001093120A (en) | 1999-09-27 | 2001-04-06 | Alps Electric Co Ltd | Thin film magnetic head |
-
1994
- 1994-10-28 JP JP26565094A patent/JP2931529B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH08129720A (en) | 1996-05-21 |
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