JPH03263603A - Thin-film magnetic head and production thereof - Google Patents

Abstract

PURPOSE:To suppress a contour effect and to obtain excellent output characteristics by projecting the foremost ends of magnetic poles to the side surface side of a substrate and forming the core ends of these magnetic poles to a shape non-parallel with a gap. CONSTITUTION:The front end faces of the respective magnetic poles 9, 10 are partly masked to an approximately parallelogram shape by a resist 21 and the base 1a of a slider 1 is etched. Only the unmasked parts are then etched and the magnetic poles 9, 10 are made into the trapezoidal shape with which the foremost ends thereof are projected from the other parts so as to coincide with the shape of the masking. The front end faces of the magnetic poles 9, 10 are made respectively into the trapezoidal shape, by which the core ends 12, 13 thereof are formed non-parallel with the gap 11. The formation of a pseudo gap is prevented in this way and the contour effect is suppressed.

Description

[Detailed description of the invention]

[Industrial Field of Application] The present invention relates to a thin film magnetic nod and a method for manufacturing the same, which is applied to solid magnetic disk devices for combi-tars and the like. [Jubei's technology j Figures 4 to 6 show an example of a thin film magnetic heme 1. This thin film magnetic helad is made using photolithographic technology on the front surface of the slider 1, which is to be moved with its bottom surface lx (shown as the top surface in FIG. 4) facing a medium such as a magnetic disk. 5, the thin film magnetic head element 2 is provided with a thin film magnetic head element 2.1 The element 2 has a front surface 1h of the slider 1 as a substrate, as shown in FIG. Non-magnetic insulating layer 3, lower magnetic pole layer (lower:
Noah) 4, a coil conductor 7 encapsulated with a gap layer 5, an insulating layer 6, and a two-part magnetic pole NI (upper core) 8 are sequentially stacked C
By overlapping the tip portions 4 of each magnetic pole layer 4.8 with the gap layer 5 interposed therebetween, the magnetic pole layers 4.8
The tips of the magnetic poles 9 and 8 are used as a pair of magnetic poles (poles) 9 and 10, and a gap 11 is formed between them, and the tip surface of each magnetic pole 9 and 10 is exposed on the bottom surface la of the slider l. It is said to be composed of "Problem to be Solved by the Invention" By the way, in the thin film magnetism described above, the size of the magnetic pole 9.10 is extremely small compared to ferrite heads, etc., and their ball length Pl + P2 is about the same as the recording wavelength. The core end 12.13, that is, the edge of each magnetic pole 9.10 on the opposite side from the gear amplifier 11 is the gap 1.
1, so those core ends 12.13
becomes a pseudo gear band, and as shown in Figure 7, dips occur on both sides of the reproduced waveform, which is the so-called core edge effect (contour effect), and as a result, the output characteristics change. As shown in Figure 8, the problem of waving may occur. The present invention has been made in view of the above circumstances.
It is an object of the present invention to provide a thin film magnetic head that can suppress the effects and a method for manufacturing the same. "Means for Solving the Problem" The invention according to claim 1 is characterized by exposing the tip surfaces of each of a lower magnetic pole layer and an upper magnetic pole layer laminated on the surface of a substrate with a gap layer interposed therebetween on the side surface of the substrate. , in a thin film magnetic head in which the tips of the lower magnetic pole layer and the upper magnetic pole layer form a pair of magnetic poles with a gap therebetween, the tip ends of the magnetic poles protrude toward the side surface of the substrate; This is characterized in that the core end of the magnetic pole is formed in a shape non-parallel to the gap. In addition, in the invention of claim 2I75, a lower magnetic pole layer, a gap layer, and an upper magnetic pole layer are sequentially laminated on the surface of the substrate, and the tip surfaces of each of the lower magnetic pole layer and the upper magnetic pole layer are exposed on the side surface side of the substrate. Thereafter, by etching the peripheral edge of the tip surface of each of the magnetic pole layers from the side surface of the substrate, a magnetic pole with a core end shaped non-parallel to the gap is formed in a state in which it protrudes toward the side surface of the substrate. It is characterized by this. "Function" In the thin film magnetic head of claim 1, the leading edge of the magnetic poles protrudes toward the side surface of the substrate, and the core ends of these magnetic poles are shaped non-parallel to the gap. Azimuth loss occurs, thus preventing the formation of a false gap there, as would be the case if the core end were parallel to the gap, and suppressing contour effects. Further, in the manufacturing method of claim 2, by etching the peripheral edge of the tip surface of each magnetic pole layer exposed on the side surface side of the substrate from the side surface side of the substrate, the tip end portion of the magnetic pole is etched by an etching depth. In the protruding state, the shape of the tip surface is processed into a desired shape. "Embodiments" Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the thin film magnetic head in the following embodiments, the same components as those in the conventional thin film magnetic head described above are given the same reference numerals. First, referring to FIG. 1, a thin film magnetic head according to a first embodiment will be described along with a manufacturing method thereof. The thin-film magnetic head of this first embodiment has a thin-film magnetic head element 2 provided on the front surface of a slider 1 as in the conventional one.
As shown in FIG. 1, the front surface 1b of the slider 1 is used as a substrate, and an insulating layer 3 is formed on the upper surface thereof, a lift portion 20 is formed at a predetermined position on the surface, and then these insulating layers 3 are formed.
A lower magnetic pole layer 4 is laminated on the surface of the groove portion 20 as shown in (b), and a gap layer 5 is further layered on the surface.
form. Next, as shown in FIG.
The base portions of both magnetic pole layers 4.8 are overlapped with each other, and the tip portions of the magnetic pole layers 4.8 are overlapped with each other with the gap layer 5 interposed therebetween. As a result, the tips of both magnetic pole layers 4 and 8 become a pair of magnetic poles 9 and 10, a gap 11 is formed between them, and the tip surfaces of these magnetic poles 9 and 10 are arranged as shown in (d) on the slider. 1 is exposed on the bottom lx side (side surface side of the substrate). The above procedure is no different from the manufacturing procedure of conventional thin film magnetic heads, and therefore, the products manufactured from step 1 above are basically the same as those of conventional thin film magnetic heads. However, this Example 1: iE (the bottom pole layer is 4"/7 parts magnetic pole layer 8σ) thickness 7. is thicker than the conventional one. This is magnetic pole 9. ] Once the ball length of O has been secured, in the next step, the magnetic pole 9.

[This is in order to perform Yutching and reduce the length of those Jt et al. That is, after masking a portion of the tip end surface of each of the magnetic poles 9 and 10 formed above in a substantially parallelogram shape using a resist 211 as shown in (E)-4, a mask is applied to the bottom surface 1a of the slider. Then do the Gotching. As a result, only the portions that are not masked 11 are etched, and the leading edge of the magnetic pole 910 protrudes from the other portions as shown in (f) -c'
Match the masking shape j as shown in c h ).
4. The thin film magnetic head of this embodiment is thus completed. In the thin film magnetic head manufactured as described above, the magnetic pole 9. ] Since the shapes of the tip surfaces of the magnetic poles 0 are each trapezoidal, the ends 12 and 13 of the FLs are parallel to each other, that is, the magnetic poles 9 and 10 are parallel to each other.
0 ball length or a vine that changes in the direction of magnetic pole radiation -) At 0), = -17 end 12. At 13, the un' mass loss is t-4:, and ]'7 end 12. In the conventional thin-film magnetic/node where 13 is parallel to the gap 11, the raw U6:i>tar effect is suppressed, and the output characteristics are prevented from becoming wavy. In addition, as shown in FIG. 1 (1), the magnetic pole 9I7)j5
The difference between the large ball length P1 and the minimum ball length 1'1 miΩ is 1 modulus ΔP1, and the difference between the maximum ball length P2cax and the minimum ball length P2w1n of the magnetic pole lO is the j-modulum ΔP, which is 1 of the recording wavelength, respectively. The shape of the core end 12.13 is set so that it is within the range of about 3 to about 2 times σ) 1, and Ji<
, the contour effect can be reduced more significantly,
Moreover, it is preferable to do 0. . Then, as in Q) above, the shapes of t11 and others are added by etching from the tip side of the magnetic poles 9 and 1.0]2
By doing this, not only can the shape of the magnetic pole 910 be freely and easily set depending on the shape of the massing 21, but also the shape of the magnetic pole 910 can be easily set by performing such calculation. , 1.0 volume reduction is minimal //,,
However, some problems do not occur, such as the head efficiency being reduced due to the magnetic resistance of the magnetic circuit being 1-1, saturation, etc. First, it may be possible to process the shape of the tip surface of the magnetic pole 10 by machining and sawching the upper magnetic pole 8 from the surface side.
In this case, the entire surface of the tip of the magnetic pole 10 will be eroded, and the volume of the magnetic pole 10 will be greatly reduced, resulting in a decrease in Rad efficiency as described below. This caused the problem of inviting
Preferable. <none). The first embodiment has been described above, but with reference to FIG.
The second embodiment will now be described. This second embodiment of the thin film magnetic head 1", the lower magnetic pole Iw4
The thickness of the part of the pole layer 8 is about the same as that of a conventional thin film magnet, and the tip surface of the magnetic pole 9.10 is approximately 11-sided in shape. , A person manufacturing the thin film embodiment head of this second embodiment has the following steps:
As shown in Fig. 1(a), the previous song 1b of base &1 is placed on the board [
, form the insulating layer 3 on the 1st corner of the magnetic pole layer 4, and 2nd place the rift 1 part 20, 22 on the surface 1- of the 4th part at the base and tip of the F part of the magnetic pole layer 4. The lower magnetic pole layer 4 is controlled as shown in Table 1\ff1iJ2+, = (b). As a result, the lower magnetic field aAIW
4. Apply a force of 1 inch to the tip of the beam by section 22.
,) ゛[An inclined inclined portion 4a is formed. Next, (c) 11. T'
After removing the tip of the magnetic pole layer 4 near the tip (L end) of the inclined portion 4a, the gap layer 5 is deposited on the surface thereof, and (d)
After forming the conductor coil 7 covered with the insulating layer 6 shown in FIG. .8's base part and head are overlapped 2- and the tip part and part thereof are overlapped via the gap layer 5 t)+i. At this time, the tip of the −L portion magnetic pole layer 8 @
Since the portion of the upper magnetic pole layer 8 is naturally inclined in part by the force t and the direction is −), the inclined portion 8a of the upper magnetic pole layer 8
The tip (lower @) of the lower magnetic pole layer 4 and the tip (upper end) of the inclined portion 41 of the lower magnetic pole layer 4 are overlapped with each other with the gear/p layer 5 interposed therebetween. Next, attach the tips of the overlapping magnetic pole layers 4.8 to (d).
As shown by the chain lines in the middle, cutting is performed at the inclined portions 4a, 8a or polished to the positions shown in (E). As a result, the tips of each of the magnetic pole layers 4 and 8 become magnetic poles 9 and 10, and the tip surfaces thereof become the bottom surface 1a of the slider 1 as shown in (f).
be exposed to. In this way, the tip of each magnetic pole layer 4.8 is connected to the inclined portion 4*, 8
By cutting or polishing diagonally to the thickness at point a, the thickness at the exposed surface of both magnetic pole layers 4.8, that is, the pole length of the magnetic poles 9 and 10 at this stage, is made smaller than the thickness of each magnetic pole layer 4, 8 itself. Therefore, even if the thickness of each magnetic pole layer 9 and 10 is made as thin as the conventional one, the ball length can be made as thick as in the first embodiment. ! , 8! The pole length can be adjusted simply by adjusting the inclination angle and cutting position. Therefore, as shown in (g), after masking the tip surfaces of the magnetic poles 9 and 10 with resist 23,
When the bottom surface 1a of the magnetic pole 9. is etched, the magnetic pole 9. is etched as in the first embodiment. As shown in (H), the leading edge of IO is in a shape that is more prominent than the other parts, and (
As shown in Figure 2), it is processed into an approximately pentagonal shape that matches the shape of the masking. In the thin film magnetic head of this second embodiment, the shape of the core end 12.13 of the magnetic pole 9° 10 is chevron-shaped, and the gap 11
Since they are non-parallel to each other, the contour effect can be suppressed by the azimuth loss as in the case of the first embodiment. In particular, the maximum ball length P wax and the minimum ball length P
A more significant effect can be obtained by setting the win difference ΔP to about ⅓ to twice the recording waveform. In addition to producing the same effects as in the first embodiment, the manufacturing method of the second embodiment also forms an upwardly inclined portion 4a at the tip of the lower magnetic pole layer 4, and layer 4 and upper magnetic pole layer 8 with their sloped portions 4g;
Since the section 8a is cut diagonally with respect to the thickness, even if the lower magnetic pole layer 4 and the upper magnetic pole layer 8 are as thin as a conventional thin film magnetic head, the magnetic pole 9
There is an advantage that the pole length P of 10° can be made larger than the thickness of the pole layer 4.8. The first and second embodiments have been described above, but in order to reduce the contour effect, it is sufficient that the core ends 12.13 are non-parallel to the gap 11. Therefore, the shape of the magnetic poles 9, 10 is The shape is not limited to that shown in the second embodiment, but any suitable shape can be adopted, such as making the core i12.13 into a double circular arc shape as shown in FIG. Furthermore, etching for processing the magnetic poles 9 and 10 does not need to be performed on the entire bottom surface of the slider 1;
．． It is sufficient to perform this only on the surrounding area including the periphery of 10. "Effects of the Invention" As explained in detail above, the thin film magnetic helix according to claim 1 has the leading edge of the magnetic poles protruding toward the side surface of the substrate, and the core ends of the magnetic poles being non-parallel to the gap. Since it is formed in the shape of , azimuth loss does not occur at the core end and a pseudo gear 7 is not formed there, and as a result, the contour effect is suppressed and excellent output characteristics are achieved. It has the effect of making it possible to obtain something. Further, in the manufacturing method of claim 2, by etching the peripheral edge of the tip surface of each magnetic pole layer exposed on the side surface of the substrate, the magnetic pole whose core end is shaped non-parallel to the gap is formed on the side surface of the substrate. Since it is formed in a state where it protrudes to the side, the tip surface of the magnetic pole can be easily formed into the desired shape, and the overall volume of the magnetic pole is not significantly reduced, thereby reducing head efficiency. I won't invite you,
This effect is achieved and it is suitable for use in manufacturing the thin film magnetic head of claim 1.

[Brief explanation of drawings]

FIGS. 1(A) to 1(G) are diagrams for explaining the manufacturing procedure of the thin film magnetic head of the first embodiment of the present invention, and FIGS. 2(A) to 2(G)
Figures 1 and 3 are diagrams showing other examples of the shape of the magnetic pole. Figures 4 to 8 show examples of conventional i[magnetic heads. A partial cross-sectional view, Fig. 6 is a diagram showing the 9Ll@quotient of the magnetic pole, Fig. 7 is a diagram showing the output waveform,
Figure B is Figure C showing the output characteristics. 1...Slider, 1! ......rM of slider: surface, lb...Front surface of slider (substrate), 2
... Thin film magnetic head element, 3... Insulating layer,
4...Lower magnetic pole layer, 4a...Slope portion, 5...
...Gap coral, 6...Insulating layer, 7...
...Conductor 'l-1il, 8...Top pole layer,
8a... Slanted part, 9.10... Magnetic pole, I
I...Gear lug, 12.13...Core end, P, P,, P2...Borl length.

Claims (2)

[Claims] (1) By exposing the tip surfaces of the lower magnetic pole layer and the upper magnetic pole layer, which are laminated on the surface of the substrate with a gap layer in between, to the side surface of the substrate, the tip portions of the lower magnetic pole layer and the upper magnetic pole layer can be exposed. In a thin film magnetic head having a pair of magnetic poles with a gap between them, the leading edge of the magnetic poles protrudes toward the side surface of the substrate, and the core ends of the magnetic poles are formed in a shape non-parallel to the gap. A thin film magnetic head characterized by: (2) After sequentially laminating a lower magnetic pole layer, a gap layer, and an upper magnetic pole layer on the surface of the substrate, and exposing the tip surfaces of each of the lower magnetic pole layer and the upper magnetic pole layer to the side surface of the substrate, By etching the periphery of the tip surface of each of the magnetic pole layers from the side surface side, a magnetic pole is formed in which the core end is shaped non-parallel to the gap and protrudes toward the side surface side of the substrate. A method for manufacturing a thin film magnetic head.