JPH02302908A - Magnetic head - Google Patents

Magnetic head

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Publication number
JPH02302908A
JPH02302908A JP12378789A JP12378789A JPH02302908A JP H02302908 A JPH02302908 A JP H02302908A JP 12378789 A JP12378789 A JP 12378789A JP 12378789 A JP12378789 A JP 12378789A JP H02302908 A JPH02302908 A JP H02302908A
Authority
JP
Japan
Prior art keywords
film
magnetization
films
magnetic
changed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12378789A
Other languages
Japanese (ja)
Inventor
Tokuo Itonaga
糸永 徳雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP12378789A priority Critical patent/JPH02302908A/en
Publication of JPH02302908A publication Critical patent/JPH02302908A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To obtain a necessary frequency characteristic by changing the film forming conditions of each metallic magnetic film for each film, changing a magnetization facilitating axis direction for each film and making the films into a magnetization anisotropy and magnetization isotropy metallic magnetic films. CONSTITUTION:Metallic magnetic films 1... in four layers to form a laminate layer 3 are made into the magnetization anisotropy films, and simultaneously, the directions of magnetization facilitating axes A1, A2, B1, B2, C1, C2, D1 and D2 are changed for respective films and respective cores 5 and 6. In such a way, when the directions A1, A2, B1, B2, C1, C2, D1 and D2 of the magnetization facilitating axes in respective magnetization anisotropy metallic magnetic films 1... in four layers of the laminate layer 3 are changed for respective films and respective cores 5 and 6, the frequency characteristics of a head output are made different for respective metallic magnetic films 1... of respective cores 5 and 6. Thus, by properly changing the combinations, the arbitrary frequency characteristic can be obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は磁気ヘッドに関し、詳しくは高飽和磁束密度を
有する金属磁性膜を積層したラミネート層を非磁性体基
板で挾み込んだ構造の積層型高密度記録用磁気ヘッドに
関するものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a magnetic head, and more specifically, a laminate having a structure in which a laminate layer of metal magnetic films having a high saturation magnetic flux density is sandwiched between non-magnetic substrates. The present invention relates to a high-density recording magnetic head.

〔従来の技術〕[Conventional technology]

VTR装置やFDD装置等の磁気記録再生装置に使用さ
れる高密度記録用磁気ヘッドには積層型のものがある。
There is a multilayer type magnetic head for high-density recording used in magnetic recording and reproducing devices such as VTR devices and FDD devices.

この積層型高密度記録用磁気ヘッドは、第7図及び第8
図に示すように高飽和磁束密度を有するセンダストやパ
ーマロイ等の金属磁性膜(1)(1:l−・−とSi0
2やAl209等の絶縁薄膜(2)(2)−・−・とを
交互に積層したラミネート層(3)を、セラミック等の
非磁性体基板(4)(4)で両側から挾み込んだ一対の
コア(5)(6)を接合一体化したコアチップ(7)で
構成される。コア(5)(6>は、一方のコア(6)の
下部に設けられたガラス溜り部(8)の低融点ガラス(
9)により、接合一体化されている。このコアチップ(
7)の、磁気記録媒体が摺接する頂端面(10)では、
上記コア(5)(6)の接合面(5a)  (6a)間
に Si02等の非磁性体薄膜を介在させることにより
磁気ギャップgが形成される。この磁気ギャップgでは
、上記金属磁性膜(1)(1)・−及び絶縁薄膜(2)
(2)−からなるラミネート層(3)の厚みがトラック
幅(T)となる。上記ラミネート層(3)を構成する金
属磁性膜 (1)(1)・・−間に絶縁薄膜(2)(2
)−をに電気的に絶縁し、磁束通過時に渦電流が発生す
ることを抑制して、高周波特性の劣化を未然に防止して
いる。尚、上記コアチップ(7)には、コア(5)(6
)の側部に設けられた巻線挿通穴(11〉及び巻線係止
溝(12)  (13)を利用することにより絶縁被覆
処理した線材(14)を所定ターン数巻回してコイル(
15)を形成する。
This laminated high-density recording magnetic head is shown in FIGS. 7 and 8.
As shown in the figure, metal magnetic films such as sendust and permalloy with high saturation magnetic flux density (1) (1: l-・- and Si0
A laminate layer (3) consisting of alternately laminated insulating thin films (2) (2), (2), etc., such as Al209 and Al209 is sandwiched between non-magnetic substrates (4), such as ceramic (4), from both sides. It is composed of a core chip (7) in which a pair of cores (5) and (6) are joined and integrated. The cores (5) (6> are made of low melting point glass (
9), they are joined and integrated. This core chip (
7), at the top end surface (10) where the magnetic recording medium slides,
A magnetic gap g is formed by interposing a non-magnetic thin film such as Si02 between the bonding surfaces (5a) and (6a) of the cores (5) and (6). In this magnetic gap g, the metal magnetic films (1) (1), - and the insulating thin film (2)
(2) The thickness of the laminate layer (3) consisting of - becomes the track width (T). Insulating thin film (2) (2) between metal magnetic films (1) (1) composing the above laminate layer (3)
) - is electrically insulated to suppress the generation of eddy currents when magnetic flux passes, thereby preventing deterioration of high frequency characteristics. Note that the core chip (7) includes cores (5) (6).
) The coil (
15).

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところで、上述した磁気ヘッドにおいてラミネートN(
3)の金属磁性膜(1) −はスパッタリングにより各
膜毎に同一の成膜条件で形成しているが、その際、ヘッ
ドの周波数特性を決定する膜質を設定することはできず
、所望の周波数特性を得ること□が困難であった。
By the way, in the above-mentioned magnetic head, laminate N (
The metal magnetic film (1) - in 3) is formed by sputtering under the same film forming conditions for each film, but at that time, it is not possible to set the film quality that determines the frequency characteristics of the head, and it is not possible to set the desired film quality. It was difficult to obtain frequency characteristics.

〔課題を解決するための手段〕 本発明は高飽和磁束密度を有する金属磁性膜と絶縁膜と
を交互に積層したラミネート層を非磁性体基板で挾み込
んでなるコアを、一対、接合一体化して磁気ギヤツブを
形成した磁気ヘッドにおいて、上記各金属磁性膜の成膜
条件を各膜毎に変えて磁化容易軸方向を各膜毎に変更可
能にして、磁化異方性及び磁化等方性金属磁性膜とし、
ヘッド出力の周波数特性を制御するようにしたことを特
徴とする。
[Means for Solving the Problems] The present invention combines a pair of cores made by sandwiching non-magnetic substrates between laminate layers in which metal magnetic films and insulating films having high saturation magnetic flux density are alternately laminated, and a pair of cores are integrally bonded. In a magnetic head in which a magnetic gear is formed by forming a magnetic gear, the film forming conditions for each of the above-mentioned metal magnetic films are changed for each film, so that the axis of easy magnetization can be changed for each film, thereby improving magnetization anisotropy and magnetization isotropy. As a metal magnetic film,
It is characterized by controlling the frequency characteristics of the head output.

〔作用〕[Effect]

上記技術的手段によれば、異方性金属磁性膜の磁化容易
軸の方向、及び等方性金属磁性膜のそれぞれにおいて相
異なる特有のヘッド出力の周波数特性を持つため、それ
らの組合わせにより任意のヘッド出力の周波数特性を設
定できる。
According to the above technical means, since the direction of the easy axis of magnetization of the anisotropic metal magnetic film and the frequency characteristic of the head output are different from each other in the isotropic metal magnetic film, any combination thereof can be used. You can set the frequency characteristics of the head output.

〔実施例〕〔Example〕

本発明に係る磁気ヘッドの一実施例を第1図乃至第6図
を参照して以下に説明する。第7図と同一参照符号は同
一部分を示しその説明を省略する。本発明の特徴は、第
2図乃至第4図に示すように、ラミネート層(3)を形
成する4層の金属磁性膜(1)・・−を磁化異方性膜に
すると共に、各膜及び各コア(5)(6)毎に磁化容易
軸(Ai )  (A2 )  (Bt )  (B2
 )  (Ct )(C2)  (Di )  (D!
 )の方向を変えたことである。即ち、本発明の基本的
考えとして第6図に示すように、ラミネート層(3)を
1方向の磁化異方性金属磁性膜で形成した時の周波数に
対するヘッド規格化出力曲線(Pl) 、及びラミネー
ト層(3)を磁化等方性金属磁性膜で形成した時の周波
数に対するヘッド規格化出力曲線(B2)はそれぞれ特
有の特性を持つことが知られており、更に異方性の磁化
容易軸方向を変えてヘッド出力曲線(B3)の周波数特
性を変えることができる。そこで、上述したように、ラ
ミネート層(3)の4層の各磁化異方性金属磁性膜(1
)・−においてその磁化容易軸の方向(A1)(A2 
)(Bl )(B2 )(Ct )(C2)(Dt )
(D2)を各膜、各コア(5)(6)毎に変えると、ヘ
ッド出力の周波数特性は各コア(5)(6)の各金属磁
性膜(1)・−毎に相異なる。そのため、それらの組合
わせを適宜、変えることにより、任意の周波数特性を得
ることができ、ヘッド出力の周波数特性を所望のものに
設定することが可能となる。
An embodiment of the magnetic head according to the present invention will be described below with reference to FIGS. 1 to 6. The same reference numerals as in FIG. 7 indicate the same parts, and the explanation thereof will be omitted. The feature of the present invention is that, as shown in FIGS. 2 to 4, the four metal magnetic films (1) forming the laminate layer (3) are made into magnetization anisotropic films, and each film is and the axis of easy magnetization (Ai) (A2) (Bt) (B2) for each core (5) (6).
) (Ct) (C2) (Di) (D!
) has changed direction. That is, as shown in FIG. 6, the basic idea of the present invention is that the head normalized output curve (Pl) versus frequency when the laminate layer (3) is formed of a metal magnetic film with magnetization anisotropy in one direction, and It is known that the head normalized output curve (B2) with respect to frequency when the laminate layer (3) is formed of an isotropic metal magnetic film has unique characteristics. By changing the direction, the frequency characteristics of the head output curve (B3) can be changed. Therefore, as mentioned above, each of the four magnetization anisotropic metal magnetic films (1
)・-, the direction of the axis of easy magnetization (A1) (A2
)(Bl)(B2)(Ct)(C2)(Dt)
If (D2) is changed for each film and each core (5), (6), the frequency characteristics of the head output will be different for each metal magnetic film (1), - of each core (5), (6). Therefore, by appropriately changing the combination thereof, it is possible to obtain any frequency characteristic, and it is possible to set the frequency characteristic of the head output to a desired one.

又、上記組合わせとしては上記実施例の他、例えば磁化
容易軸方向(AI )  (A2 )  (Dt )(
D2)の異方性膜を等方性膜にすると共に、磁化容易軸
方向(C1)(C2)の異方性膜を磁化容易軸方向(B
l)(B2)にすること等があり、又、他の組合わせも
任意に与えられる。
In addition to the above-mentioned embodiments, the above combinations include, for example, the easy axis direction of magnetization (AI) (A2) (Dt) (
The anisotropic film in D2) is made an isotropic film, and the anisotropic film in the easy axis direction of magnetization (C1) (C2) is made into an isotropic film in the easy axis direction of magnetization (B
l) (B2), and other combinations may also be given arbitrarily.

ここで、磁、化容易軸の方向を変えるに際しては、スパ
ッタリングにより金属磁性膜(1)を被着する際、その
コア(5)(6)に対するイオンビームの方向を変え、
結晶の成長する方向を変えるようにすればよく、等方性
膜を作る場合には、より顕著にイオンビームの方向を変
えてやる。
Here, when changing the direction of the magnetic easy axis, when depositing the metal magnetic film (1) by sputtering, change the direction of the ion beam toward the cores (5) and (6).
It is sufficient to change the direction in which the crystal grows, and in the case of making an isotropic film, the direction of the ion beam is changed more markedly.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、金属磁性膜と絶縁膜とを交互に積層し
たラミネート層を非磁性体基板で挾み込んだ構造の積層
型磁気ヘッドにおいて、金属磁性膜の磁化容易軸方向を
各膜毎に変えるようにしたから、それらの組合わせを変
えてヘッド出力の周波数特性を設定し、その所望のもの
を得ることができる。
According to the present invention, in a multilayer magnetic head having a structure in which laminate layers in which metal magnetic films and insulating films are alternately laminated are sandwiched between nonmagnetic substrates, the easy axis direction of magnetization of the metal magnetic films is determined for each film. Since the frequency characteristics of the head output can be set by changing their combination, the desired result can be obtained.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係る磁気ヘッドの一実施例を示す斜視
図、第2図乃至第5図は第1図の磁気ヘッドの金属磁性
膜における各膜、各コア毎の磁化容易軸方向を示す磁気
ヘッドの斜視図、第6図は異方性及び等方性金属磁性膜
のヘッド出力の周波数特性を示すグラフ、第7図と第8
図は従来の磁気ヘッドの一具体例を示す斜視図とその要
部上面図である。 (1) −金属磁性膜、  (2) −絶縁薄膜、(3
) −ラミネート層、(4)−・非磁性体基板、(5)
(6)、−−−コア、  (g ) −磁気ギャップ、
(A1)(A2 )(Bl )(B2 )(Ct )(
C2)  (DI )  (D2 )−磁化容易軸方向
FIG. 1 is a perspective view showing an embodiment of the magnetic head according to the present invention, and FIGS. 2 to 5 show the directions of the easy magnetization axes of each film and each core in the metal magnetic film of the magnetic head of FIG. 1. FIG. 6 is a perspective view of the magnetic head shown in FIG.
The figures are a perspective view and a top view of essential parts of a specific example of a conventional magnetic head. (1) - Metal magnetic film, (2) - Insulating thin film, (3
) - laminate layer, (4) - non-magnetic substrate, (5)
(6),---core, (g) -magnetic gap,
(A1)(A2)(Bl)(B2)(Ct)(
C2) (DI) (D2) - Easy magnetization axis direction.

Claims (1)

【特許請求の範囲】[Claims] (1)高飽和磁束密度を有する金属磁性膜と絶縁膜とを
交互に積層したラミネート層を非磁性体基板で挾み込ん
でなるコアを、一対、接合一体化して磁気ギャップを形
成した磁気ヘッドにおいて、 上記各金属磁性膜の成膜条件を各膜毎に変えて磁化容易
軸方向を各膜毎に変更可能にして、磁化異方性及び磁化
等方性金属磁化膜とし、ヘッド出力の周波数特性を設定
するようにしたことを特徴とする磁気ヘッド。
(1) A magnetic head in which a pair of cores made by sandwiching laminate layers of alternately laminated metal magnetic films and insulating films with high saturation magnetic flux density between non-magnetic substrates are bonded together to form a magnetic gap. In this step, the film forming conditions for each of the above metal magnetic films are changed for each film so that the easy axis direction of magnetization can be changed for each film to obtain a metal magnetic film with magnetization anisotropy and magnetization isotropy, and the frequency of the head output is changed. A magnetic head characterized in that characteristics can be set.
JP12378789A 1989-05-16 1989-05-16 Magnetic head Pending JPH02302908A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12378789A JPH02302908A (en) 1989-05-16 1989-05-16 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12378789A JPH02302908A (en) 1989-05-16 1989-05-16 Magnetic head

Publications (1)

Publication Number Publication Date
JPH02302908A true JPH02302908A (en) 1990-12-14

Family

ID=14869290

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12378789A Pending JPH02302908A (en) 1989-05-16 1989-05-16 Magnetic head

Country Status (1)

Country Link
JP (1) JPH02302908A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018048945A (en) * 2016-09-23 2018-03-29 国立大学法人九州大学 Angle detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018048945A (en) * 2016-09-23 2018-03-29 国立大学法人九州大学 Angle detector

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