JPH09190607A - Floating magnetic head and its production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the size over the entire part of a magnetic core and the inductance of windings and to improve high-frequency characteristic by providing a magnetic head with a pair of front core half bodies and thin-film coils for winding these cores. SOLUTION: The front head core 1 is constituted by joining a pair of the front core half bodies 1A, 1B respectively having magnetic films via a gap spacer. A housing 2 is joined to one end face orthogonal with the magnetic film of the front head core 1 and the back core 3 has a magnetic path (not shown in Fig.) connected to the respective magnetic films of a pair of the front core half bodies 1A, 1B. The thin-film coils (not shown in Fig.) are formed by winding the magnetic films of at least either of a pair of the front core half bodies 1A, 1B formed on the back core 3. As a result, the winding part is formed by the thin-film coils and, therefore, the slider size is reduced without receiving the size limitation by a winding window and further, the increase in the inductance is suppressed even if the number of the windings is increased.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a floating magnetic head used in a magnetic disk device, and more particularly to a monolithic floating magnetic head using a thin film laminated core as a head core (core chip) and The present invention relates to a manufacturing method thereof.

[0002]

2. Description of the Related Art In recent years, Fe--S has been used as a head core because it is commonly used in magnetic disk devices and the like, and can achieve high density recording and narrow tracks.
i-Al alloy (Sendust), Fe-C alloy, Fe-
Attention has been paid to a monolithic floating magnetic head that uses a thin film laminated core formed by laminating a magnetic thin film made of an N-based alloy, an amorphous magnetic substance, or the like on a substrate.

This type of floating magnetic head is disclosed in Japanese Unexamined Patent Publication No.
Although disclosed in Japanese Patent No. 240818, etc., FIG. 4 illustrates an example of a monolithic floating magnetic head proposed by the present applicant in Japanese Patent Application No. 3-84441. Such a floating magnetic head has a slider 5 with a head core provided with a housing 2 and a head core 1, and is connected to an actuator of the apparatus main body through a leaf spring support mechanism (not shown).

In such a flying type magnetic head, the C core 18 or the I core 19 constituting the head core 1 is usually
In this example, the C core 18 having a predetermined thickness (t) has a shape protruding from the slider 5, whereby the winding 200 is provided in the winding window 20 of the head core 1.

As described above, in the floating magnetic head, when the C core 18 or the I core 19 is projected from the slider 5 in order to apply the winding 200, (1) the projected C core 18 Or I core 19 is ABS
(Air Bearing Surface) Surface 4 may adversely affect the levitation action of the magnetic head. Therefore, the housing 2 or the ABS surface 4 is required to have a special shape. (2) The protruding C core 18 or I core 19 is the winding 2
In order to withstand 00, the size must be, for example, about 250 μm square, and therefore the inductance becomes large, which causes deterioration of high frequency characteristics. (3) When handling the magnetic head, extreme caution is required so as not to damage the protruding C core 18 or I core 19. There is a problem.

On the other hand, JP-A-1-260606, JP-A-2-270111, and JP-A-2-813.
There is a flying type magnetic head having a structure as disclosed in Japanese Patent Laid-Open No. 14 and Japanese Patent Laid-Open No. 4-3308.

That is, in this type of floating magnetic head, as shown in FIG. 5, a cutout portion 5A is formed at a corner of the slider 5.
In addition, in the case of this example, the head core 1 configured by bonding the ferrite core chip 1b to the non-magnetic substrate 1a is fitted.

In such a flying type magnetic head, the corner portion 5B of the cutout portion 5A of the slider 5 cannot be processed at a right angle by a normal blade processing.
In reality, as shown in FIGS. 5 and 6A, the shape is rounded. Further, with such a shape, it becomes difficult to finish with good flatness by polishing. Therefore, when the head core 1 is bonded to the cutout portion 5A with the molded glass M, a large amount of the glass surface is exposed on the ABS surface 4, and the CSS (Contac
t Start Stop) The problem is that the characteristics deteriorate.

Further, the head core 1 of these floating magnetic heads uses a ferrite core chip 1a, and therefore, as shown in FIGS. 5 and 6B, the track width must be processed. Therefore, since the molded glass M is embedded in the thin portion of the ferrite core chip 1b, the glass surface is largely exposed on the ABS surface, and the CSS characteristics are further deteriorated.

Further, in Japanese Unexamined Patent Publication (Kokai) No. 62-75927, as shown in FIG. 7, the ferrite chip 1 is embedded in the groove 5A of the slider 5, and thereafter, as shown by line AA in FIG. A flying type magnetic head is disclosed in which the overall size is reduced by grinding the ferrite core chip 1 from the end face side of the slider 5 until it is exposed. However, this flying type magnetic head also has a problem that the mold glass used when the core chip 1 is first embedded in the groove 5A is exposed on the ABS 4 and the CSS characteristic is deteriorated.

Further, Japanese Patent Laid-Open No. 63-74115 discloses a floating magnetic head in which a groove is formed on a side surface of a slider and a magnetic film is attached to the groove to form a core. This floating magnetic head is a method in which a magnetic film is applied to the entire surface of the slider side surface and then an unnecessary portion is removed by polishing, and there is a problem that the magnetic film to be removed is wasted and the cost increases.

[0012]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to prevent a half core such as a C core or an I core having a magnetic thin film from protruding from the magnetic head, which adversely affects the floating of the magnetic head. Therefore, it is an object of the present invention to provide a floating magnetic head which does not require a special shape of the housing or the ABS surface and is easy to handle.

Another object of the present invention is to assemble a head core composed of a pair of core halves to an end surface of a slider by depositing a glass thin film on the adhesive surface and heating and fusing the head core. It is an object of the present invention to provide a flying magnetic head having excellent CSS characteristics, since the glass surface exposed on the ABS surface can be extremely reduced.

Another object of the present invention is to use a thin-film coil to reduce the size of the entire magnetic core and the inductance of the winding, which is a floating type excellent in high frequency characteristics. The purpose is to provide a magnetic head.

[0015]

[Means and Actions for Solving the Problems]
This is achieved by the flying magnetic head and the method of manufacturing the same according to the present invention. In summary, the present invention provides a front head core formed by joining a pair of front core halves each having a magnetic film through a gap spacer, and one end surface of the front head core orthogonal to the magnetic film. At least one of a housing bonded to the back core, a back core having magnetic paths connected to respective magnetic films of the pair of front core halves, and the pair of front core halves formed on the back core. A flying magnetic head, comprising: a thin-film coil that winds one magnetic film.

In such a floating magnetic head, (a) a step of forming a magnetic film on one surface of a front core non-magnetic substrate; (b) a plurality of front core non-magnetic substrates on which the magnetic film is formed. Laminating and integrally bonding via laminated glass to form a magnetic film laminated body; (c) cutting the magnetic film laminated body in a direction orthogonal to the magnetic film surface to form a pair of first and second magnetic films. A step of cutting out the second core plate; (d) a step of grooving for an apex part forming groove in a direction orthogonal to the magnetic film on one or both surfaces of the first and second core plates (E) preparing a housing plate and joining the housing plate with the first core plate and the second core plate to produce a front core slider laminate; (f) the front Coasla A step of cutting the da laminate with a predetermined thickness in a direction perpendicular to the magnetic film to cut a front core slider laminate plate; (g) forming a front core connecting magnetic path on the non-magnetic substrate for the back core. A step; (h) a step of forming a thin film coil on a non-magnetic substrate for a back core on which the magnetic path for connecting the front core is formed to produce a back core plate; (i) a step of forming the thin film coil A step of joining a back core plate and the front core slider laminate plate to produce a core slider laminate plate; (j) cutting the core slider laminate plate into a predetermined width to produce a slider with a head core And a manufacturing method of a floating magnetic head.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION Next, a floating magnetic head and a method for manufacturing the same according to the present invention will be described in detail with reference to the drawings.

FIG. 1 shows an embodiment of a monolithic floating magnetic head according to the present invention. The floating magnetic head includes a front head core 1, a housing 2,
A slider 5 with a head core including a back core 3 is provided. To further explain, the front core 1 includes front head core halves 1A and 1B each having a pair of magnetic films 14.
Are joined together via the gap spacer 41.

A magnetic path 7 connected to the magnetic films 14 of the front head core halves 1A and 1B is formed in the back core 3, and in this embodiment, it is the same as the front head core on a non-magnetic substrate. It is formed by sputtering a magnetic film on the entire surface.

Further, the back core includes at least one of the front head core halves 1A and 1B of the magnetic film 1.
4 is formed, and in the present embodiment, the thin film coil 6 that is wound around both the magnetic films 14 of the front head core halves 1A and 1B is formed.

The slider 5 with head core is made of ABS.
The surfaces 4 and 4 are processed so that the magnetic film 14 and the gap spacer 41 are located on at least one ABS surface.

The slider 5 with a head core is connected to an actuator of the magnetic disk device body through a leaf spring support mechanism (not shown) to form a flying magnetic head.

According to the levitation type magnetic head of the present invention, since the winding portion is formed by the thin film coil 6, the slider size can be reduced without being restricted by the size of the winding window. Even if the number is increased, the increase in inductance can be suppressed.

Further, since the head core does not project, the ABS surface does not need to have a special shape. In addition, handling becomes easy.

Further, since the glass surface exposed on the ABS surface can be extremely reduced, the CSS characteristics are excellent.

Next, FIG. 2 shows an embodiment of a method of manufacturing a flying magnetic head according to the present invention.

First, the non-magnetic substrate 11 is prepared. In this embodiment, a ceramic containing CoO-NiO as a main component is used (FIG. 2 (A)).

The magnetic film 14 is formed on the non-magnetic substrate 11 (FIG. 2 (B)).

That is, referring to FIG. 3, the non-magnetic substrate 1
In the present embodiment, the number 1 is Fe-Si-by the sputtering method.
The Al alloy film 12 is formed to a film thickness of 1 to 20 μm, and then
The non-magnetic insulating film 13 is formed on the Fe-Si-Al alloy film 12 with a film thickness of 0.03 to
It is formed by the sputtering method at 0.5 μm (Fig. 3
(B)). As the nonmagnetic insulating film 13, SiO ₂ , Al ₂ O ₃ or the like is used. By repeating this process, Fe-Si-Al alloy film 1
2 and the non-magnetic insulating film 13 are stacked a required number of times to obtain a film thickness t
The alloy magnetic thin film layer (magnetic film) 14 of is formed on the substrate 11 (FIG. 3C). Then, on the magnetic film 14 of the non-magnetic substrate 11, for example, using a high melting point glass having a softening point of 600 ° C. or higher, preferably 600 to 800 ° C., the laminated glass layer 15 has a thickness of 0.05 to 1.0 μm. Is formed by a sputtering method or the like (FIG. 3D). As laminated glass, SiO ₂ -Al ₂
O ₃ -Na ₂ O based glass or SiO ₂ -B ₂ O ₃ -Na ₂ O based glass is suitable.

Next, the non-magnetic substrate 11 having the magnetic film 14 is formed.
Are stacked, the dummy substrate 21 is arranged on the uppermost part, and the dummy substrate 21 is housed in a jig or the like and heated and pressed. As a result, the non-magnetic substrates 11, 11 ... And the dummy substrate 21 are welded by the laminated glass and integrally joined to each other, and the magnetic film laminate 30 is formed (FIG. 2C).

After this, the magnetic film laminate 30 is shown in FIG.
A plurality of pairs of first and second core plates 40, 40 ′ for manufacturing the front head core halves 1A, 1B by cutting in the laminated thickness direction as shown by the dashed line in (C). Cut out (FIG. 2 (D)).

Next, for example, the same CoO-Ni as the non-magnetic substrate is used.
A housing plate 50 made of a non-magnetic material such as ceramics containing O as a main component is prepared, and the housing plate 50 and the first core plate 40 are bonded through a bonding glass (see FIG. )).

Next, the first and second core plates 40, 4
At least one or both of 0'is subjected to grooving for the apex portion forming groove 42 at a pitch P in a direction orthogonal to the magnetic film 14 (FIG. 2 (F)).

Next, the joint surfaces of the first core plate 40 and the second core plate 40 'are mirror-polished to form the gap spacer 41, so that at least one of the surfaces is made of a non-magnetic gap material such as SiO _2. The bonding glass is formed by a sputtering method or the like. Well, both core plates 4
When the gap material is not formed on 0 and 40 ', the bonding glass itself is the gap material, that is, the gap spacer 41.
Function as As a bonding glass, the softening point is 500 ° C
Above, preferably high melting point glass of 500 ~ 650 ℃, for example, SiO ₂ -Al ₂ O ₃ -Na ₂ O-based glass or SiO ₂ -B ₂ O ₃
-Na ₂ O based glass is preferable. The thickness of the gap spacer, that is, the gap length can be set to 0.1 to 0.7 μm, for example.

Next, the magnetic films of both core plates 40 and 40 'are aligned so that they are aligned with each other (track alignment).
Then, the core plates 40 and 40 'are joined by heating and pressurizing, and the front core slider laminate 60 is manufactured (FIG. 2G).

Next, this front core slider laminated body 6
0 is cut in the direction orthogonal to the magnetic film 14, and the front core slider laminated plate 62 is cut out to a thickness (T) (FIG. 2 (H)).

Next, the surface of the front core slider laminated plate 62 opposite to the abex portion is processed by means of polishing or the like so that the non-magnetic material filled in the apex portion forming groove 42 is exposed. (FIG. 2 (I)).

Next, a groove having a shape and a depth corresponding to the pattern of the thin film coil formed on the back core is formed on the surface of the front core slider laminated plate 62 opposite to the abex portion. (FIG. 2 (J)).

On the other hand, the magnetic path of the back core is a magnetic path which is formed by sputtering the same magnetic film as the front core on the surface of the non-magnetic substrate and is connected to the respective magnetic films of the pair of front core halves. It An insulating layer pattern 71 is formed on the non-magnetic substrate on which the magnetic path is formed (see FIG. 2).
(K)), a thin film coil pad 72 is then formed on the insulating layer pattern 71 (FIG. 2 (L)), and an insulating layer pattern 73 is further formed on the thin film coil pad 72. A lower layer thin film coil pattern 74 is formed on the insulating layer pattern 73 (FIG. 2 (M)), an insulating layer pattern 75 is further formed on the lower layer thin film coil pattern 74, and an insulating layer pattern is further formed. An upper layer thin film coil pattern 76 is formed on the upper layer 75 (FIG. 2 (N)), an insulating layer pattern 77 is further formed on the upper layer thin film coil pattern 76, and an insulating layer pattern 7 is formed.
A thin film coil pad 78 is formed on 7 to form a thin film coil formed on the back core (FIG. 2 (O)).

The back core plate 30 and the front core slider laminated plate 62 thus produced are bonded to either or both of them by sputtering to form a lath, and the pattern of the thin film coil 6 is formed. The core slider and the magnetic film of the front core are aligned so that they are aligned with each other, and they are heated and pressed to be bonded to each other, whereby the core slider laminated plate 70 is manufactured (FIGS. 2 (P) and (Q)).

Next, the core slider laminated plate is cut in a direction parallel to the magnetic film 14 to form the core slider chip 7.
2 is obtained (FIG. 2 (R)).

Furthermore, the central groove 101 and the inflow end portion 102
Slider 5 with head core by processing the ABS surface 4 etc.
Is obtained (FIG. 1).

Thereafter, the slider 5 with head core is finally attached with a leaf spring support mechanism (not shown),
It is a floating magnetic head.

In the above embodiment, the housing plate 50
And the order of joining the first core plate 40 and the second core plate 40 ′, the example of joining the housing plate 50 and the first core plate 40 and then the second core plate 40 ′. However, after joining the first core plate 40 and the second core plate 40 ', the housing plate 50 is joined, or the housing plate 50 is joined.
The first core plate 40 and the second core plate 40 'may be joined at the same time, and the order thereof does not matter.

Further, although the example in which the apex portion forming groove 42 is formed in both the first core plate 40 and the second core plate 40 'has been described, it may be formed in either one.

Further, in order to adjust the width of the slider 5 with the head core, when a plurality of non-magnetic substrates 11 having the magnetic film 14 are laminated, a non-magnetic substrate of a dummy is inserted between the non-magnetic substrates 11. It may be stacked.

Although the thin film coil 6 has been described as an example of balanced winding, it goes without saying that other winding methods may be used. Further, although the example in which the number of coil layers is two has been described,
Of course, one layer or three or more layers may be used.

Although the Fe-Si-Al alloy magnetic film has been described as the magnetic thin film, Fe-C type alloy, Fe-Ni type alloy, amorphous magnetic film and the like may be used.

[0049]

As described above, according to the levitation type magnetic head of the present invention, since the winding portion is formed by the thin-film coil 6, the slider size is reduced without being restricted by the winding window. Even if the number of windings is increased, the increase in inductance can be suppressed. Moreover, since the head core does not protrude,
There is no need to make the S surface a special shape. In addition, handling becomes easy. Further, since the glass surface exposed on the ABS surface can be extremely reduced, it has excellent CSS characteristics.

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of a monolithic floating magnetic head according to the present invention.

FIG. 2 is a diagram showing an embodiment of a method of manufacturing a flying magnetic head according to the present invention.

FIG. 3 is a diagram showing details of a step of forming a magnetic film on a non-magnetic substrate.

FIG. 4 is a diagram showing a conventional monolithic floating magnetic head.

FIG. 5 is a diagram showing a conventional composite type flying magnetic head.

FIG. 6 is a diagram showing details of a slider notch portion of a conventional composite type flying magnetic head.

FIG. 7 is a diagram showing a conventional composite type floating magnetic head.

[Explanation of symbols]

 1 Front head core 1A, 1B Front head core half body 2 Housing 6 Thin film coil

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] March 5, 1996

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0039

[Correction method] Change

[Correction contents]

On the other hand, the magnetic path of the back core is a magnetic path which is formed by sputtering the same magnetic film as the front core on the surface of the non-magnetic substrate and is connected to the respective magnetic films of the pair of front core halves. It The insulating layer pattern 71 is formed on the non-magnetic substrate on which the magnetic path is formed (see FIG. 2).
(K)), a thin film coil pad 72 is then formed on the insulating layer pattern 71 (FIG. 2 (L)), an insulating layer pattern 73 is further formed on the thin film coil pad 72, and an insulating layer pattern 73 is further formed. A lower layer thin film coil pattern 74 is formed on the upper layer (FIG. 2M), an insulating layer pattern 75 is further formed on the lower layer thin film coil pattern 74, and an upper layer thin film coil pattern 76 is further formed on the insulating layer pattern 75 ( 2 (N), an insulating layer pattern 77 is further formed on the upper layer thin film coil pattern 76, and the insulating layer pattern 7 is further formed.
A thin-film coil pad 78 is formed on the back core 1 to form a thin-film coil formed on the back core (FIG. 2 (O)).

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0040

[Correction method] Change

[Correction contents]

The back core plate 30 and the front core slider laminated plate 62 thus produced are formed on one or both of them by bonding glass, and the pattern of the thin film coil 6 and the magnetic film of the front core are formed. Are aligned so that they coincide with each other, and they are heated and pressed to be bonded to each other, whereby the core slider laminated plate 70 is manufactured (FIGS. 2 (P) and (Q)). ─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] March 29, 1996

[Procedure amendment 1]

[Document name to be amended] Statement

[Name of item to be corrected] 0003

[Correction method] Change

[Correction contents]

This type of floating magnetic head is disclosed in Japanese Unexamined Patent Publication No.
Although disclosed in Japanese Patent No. 240818, etc., FIG. 7 shows an example of a monolithic floating magnetic head proposed by the present applicant in Japanese Patent Application No. 3-84441. Such a floating magnetic head has a slider 5 with a head core including a housing 2 and a head core 1, and is connected to an actuator of the apparatus main body through a leaf spring support mechanism (not shown).

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0007

[Correction method] Change

[Correction contents]

That is, this type of floating magnetic head is
As illustrated in FIG. 8 , a cutout portion 5A is formed at a corner of the slider 5.
In addition, in the case of this example, the head core 1 configured by bonding the ferrite core chip 1b to the non-magnetic substrate 1a is fitted.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0008

[Correction method] Change

[Correction contents]

In such a flying type magnetic head, the corner portion 5B of the cutout portion 5A of the slider 5 cannot be processed at a right angle by using a normal blade.
Actually, as shown in FIG. 8 and FIG. 9 (A), the a rounded shape. Further, with such a shape, it becomes difficult to finish with good flatness by polishing. Therefore, when the head core 1 is bonded to the cutout portion 5A with the mold glass M, a large amount of the glass surface appears on the ABS surface 4, and the CSS (Con)
There is a problem that the tact start stop characteristic is deteriorated.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction contents]

[0009] The head core 1 of these flying magnetic head is used a ferrite core chip 1a, Therefore, as is shown in FIGS. 8 and FIG. 9 (B), the must track width processing. Therefore, since the mold glass M is embedded in the thin portion of the ferrite core chip 1b, the glass surface is largely exposed on the ABS surface, and the CSS characteristics are further deteriorated.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0010

[Correction method] Change

[Correction contents]

Furthermore, Japanese Patent Publication No. Sho 62-75927, as shown in FIG. 10, the embedded ferrite chip 1 in the groove 5A of the slider 5, then further line 10 A-
As shown by A, a flying type magnetic head is disclosed in which the overall size is reduced by grinding from the end surface side of the slider 5 until the ferrite core chip 1 is exposed. However, this flying magnetic head also has a problem that the mold glass used when the core chip 1 is first embedded in the groove 5A is exposed on the ABS 4 and the CSS characteristics deteriorate.

[Procedure correction 6]

[Document name to be amended] Statement

[Correction target item name] 0026

[Correction method] Change

[Correction contents]

Next, FIGS. 2 to 5 show an embodiment of a method of manufacturing a floating magnetic head according to the present invention.

[Procedure amendment 7]

[Document name to be amended] Statement

[Name of item to be corrected] 0029

[Correction method] Change

[Correction contents]

That is, referring to FIG. 6 , the non-magnetic substrate 1
In the present example, Fe-
The Si—Al alloy film 12 is formed to a film thickness of 1 to 20 μm, and then the nonmagnetic insulating film 13 is formed on the Fe—Si—Al alloy film 12 to a film thickness of 0.03 to 0.5 μm by the sputtering method. It formed in (FIG. 6 (B)). Non-magnetic insulating film 1
As 3, SiO ₂ , Al ₂ O ₃ or the like is used. By repeating this process, the Fe—Si—Al alloy film 12 and the non-magnetic insulating film 13 are stacked a necessary number of times, and the alloy magnetic thin film layer (magnetic film) 14 having a film thickness t is formed on the substrate 11. (Figure
6 (C)). Then, the magnetic film 14 of the non-magnetic substrate 11
On top of that, for example, a softening point of 600 ° C. or higher, preferably 6
Using a high-melting-point glass of 00-800 ° C., layered glass layer 15 is formed by sputtering or the like to a thickness of 0.05 to 1.0 [mu] m (FIG. 6 (D)). As the laminated glass, SiO ₂ —Al ₂ O ₃ —Na ₂ O based glass or SiO
₂ -B ₂ O ₃ -Na ₂ O-based glass is preferred.

[Procedure amendment 8]

[Document name to be amended] Statement

[Correction target item name] 0035

[Correction method] Change

[Correction contents]

Next, the magnetic films of both core plates 40 and 40 'are aligned so that they are aligned with each other (track alignment).
Then, the core plates 40 and 40 ′ are joined by heating and pressurizing, and the front core slider laminate 60 is manufactured (FIG.
3 (G)).

[Procedure amendment 9]

[Document name to be amended] Statement

[Correction target item name] 0037

[Correction method] Change

[Correction contents]

Next, the surface of the front core slider laminated plate 62 opposite to the abex portion is processed by means of polishing or the like so that the non-magnetic material filled in the apex portion forming groove 42 is exposed ( FIG. 3 (I)).

[Procedure amendment 10]

[Document name to be amended] Statement

[Correction target item name] 0038

[Correction method] Change

[Correction contents]

Next, a groove having a shape and depth corresponding to the pattern of the thin film coil formed on the back core is formed on the surface of the front core slider laminated plate 62 opposite to the abex portion (FIG. 3 ). (J)).

[Procedure amendment 11]

[Document name to be amended] Statement

[Correction target item name] 0039

[Correction method] Change

[Correction contents]

On the other hand, the magnetic path of the back core is on the non-magnetic substrate.
For sputtering the same magnetic film as the front core on the surface
Formed by the magnetism of each of the pair of front core halves
The magnetic path is connected to the film. This magnetic path is not formed
The insulating layer pattern 71 is formed on the magnetic substrate (see FIG.4
(K)), and then the thin film coil pattern is formed on the insulating layer pattern 71.
The pad 72 is formed (Fig.4(L)), and the thin film carp
An insulating layer pattern 73 is formed on the pad 72,
The lower layer thin film coil pattern 74 is formed on the insulating layer pattern 73.
Formed (figure4(M)), further lower layer thin film coil pattern
An insulating layer pattern 75 is formed on the insulating layer 74, and the insulating layer pattern 75 is further formed.
An upper layer thin film coil pattern 76 is formed on the turn 75.
(Figure4(N)), and further on the upper layer thin film coil pattern 76.
The insulating layer pattern 77 is formed, and the insulating layer pattern 7 is further formed.
A thin film coil pad 78 is formed on the back core 1,
The thin film coil is formed on the4(O)).

[Procedure amendment 12]

[Document name to be amended] Statement

[Correction target item name] 0040

[Correction method] Change

[Correction contents]

The back core plate 30 and the front core slider laminated plate 62 thus produced are formed on one or both of them by bonding glass, and the pattern of the thin film coil 6 and the magnetic film of the front core are formed. Are aligned so that they coincide with each other, and they are heated and pressed to be bonded to each other to manufacture the core slider laminated plate 70 (FIGS. 5 (P) and (Q)).

[Procedure amendment 13]

[Document name to be amended] Statement

[Correction target item name] 0041

[Correction method] Change

[Correction contents]

Next, the core slider laminated plate is cut in a direction parallel to the magnetic film 14 to cut the core slider chip 7.
2 is obtained (FIG. 5 (R)).

[Procedure Amendment 14]

[Document name to be amended] Statement

[Correction target item name] Brief description of drawings

[Correction method] Change

[Correction contents]

[Brief description of the drawings]

FIG. 1 is a diagram showing an embodiment of a monolithic floating magnetic head according to the present invention.

FIG. 2 ~

FIG. 5 is a diagram showing an embodiment of a method of manufacturing a flying magnetic head according to the present invention.

FIG. 6 is a diagram showing details of a step of forming a magnetic film on a non-magnetic substrate.

FIG. 7 is a diagram showing a conventional monolithic floating magnetic head.

FIG. 8 is a diagram showing a conventional composite type flying magnetic head.

FIG. 9 is a diagram showing details of a slider notch portion of a conventional composite type flying magnetic head.

FIG. 10 is a diagram showing a conventional composite type flying magnetic head.

[Explanation of reference numerals] 1 front head core 1A, 1B front head core half body 2 housing 6 thin film coil

[Procedure Amendment 15]

[Document name to be amended] Drawing

[Correction target item name] All figures

[Correction method] Change

[Correction contents]

FIG.

[Fig. 2]

FIG. 7

[Figure 8]

[Figure 9]

[Figure 3]

FIG. 4

FIG. 10

[Figure 5]

FIG. 6

Claims (2)

[Claims] 1. A front head core formed by joining a pair of front core halves each having a magnetic film via a gap spacer and one end surface of the front head core orthogonal to the magnetic film. Housing,
A back core having a magnetic path connected to each magnetic film of the pair of front core halves, and at least one magnetic film of the pair of front core halves formed on the back core is wound. And a thin-film coil for controlling the levitation type magnetic head. 2. A step of: (a) forming a magnetic film on one surface of the non-magnetic substrate for the front core; (b) laminating a plurality of non-magnetic substrates for the front core on which the magnetic film is formed, with a laminated glass interposed therebetween. And integrally bonding to form a magnetic film laminated body; (c) cutting the magnetic film laminated body in a direction orthogonal to the magnetic film surface to cut out a pair of first and second core plates. (D) a step of grooving for an apex part forming groove in a direction orthogonal to the magnetic film on one or both surfaces of the first and second core plates; (e) housing pre- To prepare a front core slider laminated body by joining the housing plate, the first core plate and the second core plate to each other; and (f) the front core slider laminated body Perpendicular to the magnetic film Cutting the front core slider laminated plate in a predetermined direction in a predetermined direction; (g) forming a front core connecting magnetic path on the back core non-magnetic substrate; (h) connecting the front core A step of forming a thin film coil on a non-magnetic substrate for a back core on which a magnetic path is formed to produce a back core plate; (i) a back core plate on which the thin film coil is formed and the front core slider. A step of manufacturing a core slider laminated plate by joining with a laminated plate; (j) cutting the core slider laminated plate into a predetermined width to produce a slider with a head core; Type magnetic head manufacturing method.