JPH04341910A - Recording/reproduction separate type thin film head - Google Patents
Recording/reproduction separate type thin film headInfo
- Publication number
- JPH04341910A JPH04341910A JP3141350A JP14135091A JPH04341910A JP H04341910 A JPH04341910 A JP H04341910A JP 3141350 A JP3141350 A JP 3141350A JP 14135091 A JP14135091 A JP 14135091A JP H04341910 A JPH04341910 A JP H04341910A
- Authority
- JP
- Japan
- Prior art keywords
- soft magnetic
- film
- magnetic film
- recording
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 20
- 239000010408 film Substances 0.000 claims abstract description 74
- 239000000758 substrate Substances 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000001552 radio frequency sputter deposition Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 229910000889 permalloy Inorganic materials 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- 229910018404 Al2 O3 Inorganic materials 0.000 description 1
- -1 Co--Nb--Zr Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Hall/Mr Elements (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、一組の軟磁性膜間に記
録用の磁気ギャップを設けるとともに、軟磁性膜の外面
に再生用のＭＲ素子を被着して記録直後に再生を可能に
した記録再生分離型薄膜ヘッドに関する。[Industrial Application Field] The present invention provides a magnetic gap for recording between a pair of soft magnetic films, and attaches an MR element for reproduction to the outer surface of the soft magnetic film, thereby enabling reproduction immediately after recording. The present invention relates to a separate recording/reproduction type thin film head.
【０００２】0002
【従来の技術】磁気ヘッドにおける再生用のＭＲ素子は
、磁気記録媒体に書き込まれた信号磁界を受けることに
よりＭＲ素子内部の磁化方向が変化し、この磁化方向の
変化に応じたＭＲ素子の内部抵抗の変化を外部出力とし
ている。また記録用の一組の磁性膜間の磁気ギャップは
、内部に設けたコイル電流の変化で磁気ギャップ間に磁
気変化を生じさせて、磁気記録媒体に磁気的に記録する
ようになっている。これら再生用のＭＲ素子と記録用の
磁気ギャップとを一体に組込んだ記録再生分離型薄膜ヘ
ッドがある。例えば磁気記録媒体に接触するヨークがヘ
ッドギャップ部の上または下に形成されるとともに、こ
のヨークを磁路として磁気的に結合された磁気抵抗素子
を内設した薄膜磁気ヘッドが知られている。この種の磁
気ヘッドにおいて磁気特性を良くするため、ヨークを被
着させる基板にＳｉＯ２ を塗布し、ヨークを被着する
基板側の表面を凹凸のない平坦化したものが提案されて
いる（特開昭６１−２４８２１３）。[Prior Art] An MR element for reproduction in a magnetic head changes the magnetization direction inside the MR element by receiving a signal magnetic field written on a magnetic recording medium, and the inside of the MR element changes according to the change in the magnetization direction. Changes in resistance are output externally. Further, the magnetic gap between a pair of magnetic films for recording is such that a magnetic change is caused between the magnetic gaps by a change in a coil current provided inside, and magnetic recording is performed on a magnetic recording medium. There is a separate recording/reproducing type thin film head that integrates these MR elements for reproducing and a magnetic gap for recording. For example, a thin film magnetic head is known in which a yoke that contacts a magnetic recording medium is formed above or below a head gap, and a magnetoresistive element is internally connected to the yoke, which is magnetically coupled to the yoke as a magnetic path. In order to improve the magnetic properties of this type of magnetic head, it has been proposed that the substrate to which the yoke is attached is coated with SiO2, and the surface of the substrate to which the yoke is attached is flattened without any irregularities. (Sho 61-248213).
【０００３】また従来の薄膜ヘッドには図３に示すよう
な記録再生分離型薄膜ヘッドも知られている。この場合
、非磁性基板１１の平坦面にスパッタ等により下側軟磁
性膜１２を２〜４μｍの厚さで被着し、その表面に全周
を絶縁層１３で被ったコイル１４を配置する。そしてコ
イル１４の外面側に上側軟磁性膜１５をスパッタ等によ
り２〜４μｍの厚さに被着する。この場合、コイル１４
の部分は下側軟磁性膜１２にから上方に突出しているの
で、コイル１４が存在する部分に相当する箇所の上側軟
磁性膜１５も部分的に上方に突出し、表面は高さ約６μ
ｍ程の差のある凹凸状になる。上側軟磁性膜１５の上面
に被着するＭＲ素子１６は、平坦でないと再生特性が低
下するため、上側軟磁性膜１５の上面に絶縁材１７を被
着させて表面を平坦にし、その後に平坦な絶縁材１７の
表面にＭＲ素子１６を被着している。Furthermore, as a conventional thin film head, there is also known a separate recording/reproducing type thin film head as shown in FIG. In this case, a lower soft magnetic film 12 with a thickness of 2 to 4 μm is deposited on the flat surface of the nonmagnetic substrate 11 by sputtering or the like, and a coil 14 whose entire circumference is covered with an insulating layer 13 is arranged on the surface thereof. Then, an upper soft magnetic film 15 is deposited on the outer surface of the coil 14 to a thickness of 2 to 4 μm by sputtering or the like. In this case, coil 14
Since the portion of the upper soft magnetic film 12 protrudes upward from the lower soft magnetic film 12, the upper soft magnetic film 15 at the portion corresponding to the portion where the coil 14 is present also partially protrudes upward, and the surface has a height of approximately 6 μm.
It becomes uneven with a difference of about m. If the MR element 16 attached to the upper surface of the upper soft magnetic film 15 is not flat, the reproduction characteristics will deteriorate. The MR element 16 is adhered to the surface of the insulating material 17.
【０００４】0004
【発明が解決しようとする課題】前記従来技術の前者の
ヘッドは、外側軟磁性膜が平坦でない点で磁気特性上あ
まり望ましいものではなかった。また後者の記録再生分
離型薄膜ヘッドは、再生用のＭＲ素子を被着する前に、
外側軟磁性膜の外面側に絶縁材を被着して表面を平坦化
しなければならないので、製造が煩雑となる。また外側
軟磁性膜は突出するコイルの外側に設けられるので凹凸
が生じ、それがために軟磁性膜の磁気特性が劣化してし
まう。さらに記録用の磁気ギャップと再生用のＭＲ素子
との間隔は、コイル部分が存在するために５〜７μｍと
大きくなり、記録直後に再生する場合の信号処理があま
り望ましいものとはいえなかった。そこで本発明は、再
生用ＭＲ素子を被着させる外側軟磁性膜が平坦になる構
成にして、従来のような平坦化処理を不要にするととも
に外側軟磁性膜の磁気特性を良くし、しかも再生用ＭＲ
素子と記録用の磁気ギャップとの間隔を小さくして信号
処理を都合良くすることを目的とする。The former head of the prior art is not very desirable in terms of magnetic properties because the outer soft magnetic film is not flat. Furthermore, in the latter type of separate recording/reproducing thin film head, before the MR element for reproduction is attached,
Manufacturing becomes complicated because an insulating material must be applied to the outer surface of the outer soft magnetic film to flatten the surface. Furthermore, since the outer soft magnetic film is provided outside the protruding coil, unevenness occurs, which deteriorates the magnetic properties of the soft magnetic film. Furthermore, the distance between the magnetic gap for recording and the MR element for reproducing is as large as 5 to 7 μm due to the presence of the coil portion, making signal processing undesirable when reproducing immediately after recording. Therefore, the present invention has a structure in which the outer soft magnetic film on which the reproducing MR element is attached is flat, thereby eliminating the need for the conventional flattening process and improving the magnetic properties of the outer soft magnetic film. MR
The purpose is to make signal processing more convenient by reducing the distance between the element and the magnetic gap for recording.
【０００５】[0005]
【課題を解決するための手段】本発明は、非磁性基板上
に下側軟磁性膜、コイル、上側軟磁性膜の順に積層する
とともに２つの軟磁性膜間に磁気ギャップを形成し、上
側軟磁性膜の外面にＭＲ素子を被着してなる記録再生分
離型薄膜ヘッドにおいて、上記目的を達成したものであ
る。そのため、基板表面にコイルを収容する凹所を形成
しておいて、その表面に下側軟磁性膜を被着し、下側軟
磁性膜上の凹所相当箇所に全周を絶縁膜で被ったコイル
を配置してその上面側を平坦面に形成する。そしてその
絶縁層の平坦面上に、上側軟磁性膜、ＭＲ素子の順に積
層した。[Means for Solving the Problems] The present invention stacks a lower soft magnetic film, a coil, and an upper soft magnetic film in this order on a nonmagnetic substrate, forms a magnetic gap between the two soft magnetic films, and forms an upper soft magnetic film. The above object has been achieved in a separate recording/reproducing type thin film head in which an MR element is adhered to the outer surface of a magnetic film. Therefore, a recess for accommodating the coil is formed on the surface of the substrate, a lower soft magnetic film is deposited on the surface of the recess, and the entire circumference of the lower soft magnetic film corresponding to the recess is covered with an insulating film. The upper surface side of the coil is formed into a flat surface. Then, the upper soft magnetic film and the MR element were laminated in this order on the flat surface of the insulating layer.
【０００６】[0006]
【作用】上記の記録再生分離型薄膜ヘッドでは、上側軟
磁性膜を被着するコイルの外側面が平坦に形成されるの
で、上側軟磁性膜も平坦状に被着され、そのために上側
軟磁性膜の磁気特性が劣化することはない。また一組の
軟磁性膜間の記録用磁気ギャップと、再生用のＭＲ素子
との間隔が小さく、記録直後すぐに再生可能となり、信
号処理上都合が良い。下側軟磁性膜は、コイル収容のた
めの凹所を有する基板表面に被着されるため、磁気特性
が劣化し易いが、コイルを収容する前に熱処理をして磁
気特性を所定のものに改良することができる。[Operation] In the above-mentioned recording/reproducing separated thin film head, the outer surface of the coil to which the upper soft magnetic film is applied is formed flat, so the upper soft magnetic film is also applied in a flat manner, and therefore the upper soft magnetic film is The magnetic properties of the film will not deteriorate. Furthermore, the distance between the magnetic gap for recording between a pair of soft magnetic films and the MR element for reproduction is small, and reproduction is possible immediately after recording, which is convenient for signal processing. Since the lower soft magnetic film is adhered to the surface of the substrate that has a recess for accommodating the coil, its magnetic properties tend to deteriorate; however, before accommodating the coil, it is heat-treated to maintain the magnetic properties to the desired level. It can be improved.
【０００７】[0007]
【実施例】本発明の記録再生分離型薄膜ヘッドを図１、
２により説明する。記録再生分離型薄膜ヘッドは、例え
ばＮｉＯ−ＭｎＯ等の非磁性基板１の上面に、順に下側
軟磁性膜２、絶縁膜３により全周を被ったコイル４、上
側軟磁性膜５、再生用のＭＲ素子６を被着し、２つの軟
磁性膜２、５の間に記録用の磁気ギャップ７を形成した
構成になっている。２つの軟磁性膜２、５としてはパー
マロイ、Ｃｏ−Ｎｂ−Ｚｒやセンダストを使用でき、絶
縁膜３としてはＳｉＯ２ 、Ａｌ２ Ｏ３ を使用でき
る。基板１には、コイル４を収容するための凹所１ａが
形成され、コイル４をその凹所１ａに配置することによ
り、コイル４を被う絶縁膜３の外面が平坦に形成され、
上側軟磁性膜５とＭＲ素子６とを平坦に形成した。[Example] Fig. 1 shows a recording/reproducing separated thin film head of the present invention.
2 will be explained. The recording/reproducing separated thin film head includes a lower soft magnetic film 2, a coil 4 whose entire circumference is covered with an insulating film 3, an upper soft magnetic film 5, and a reproducing layer on the upper surface of a non-magnetic substrate 1 made of, for example, NiO-MnO. MR element 6 is deposited thereon, and a magnetic gap 7 for recording is formed between two soft magnetic films 2 and 5. Permalloy, Co--Nb--Zr, or Sendust can be used as the two soft magnetic films 2 and 5, and SiO2 or Al2 O3 can be used as the insulating film 3. A recess 1a for accommodating the coil 4 is formed in the substrate 1, and by placing the coil 4 in the recess 1a, the outer surface of the insulating film 3 covering the coil 4 is formed flat,
The upper soft magnetic film 5 and the MR element 6 were formed flat.
【０００８】ＮｉＯ−ＭｎＯからなる基板１に凹所１ａ
を形成する場合、図２（ａ）に示すように、基板１の平
坦面にマスク用Ｃｕ膜８を約５μｍの厚さで被着する。
次いで基板１の表面に、ＣＦ４ プラズマを放射してリ
アクティブイオンエッチングにより５〜１０μｍの深さ
に削った（図２（ｂ））。次に、塩酸又は硝酸等のエッ
チング液によりＣｕ膜８を溶かし（図２（ｃ））、凹所
１ａを有する基板１を作成する。なお、凹所１ａの周囲
の起立面は外広がりの傾斜面に形成した。この後、凹所
１ａを有する基板１の表面に例えばパーマロイをＲＦス
パッタ法により２〜４μｍの厚さに被着し、さらに磁場
中４００℃で熱処理し、下側軟磁性膜２を作成する。下
側軟磁性膜２は基板１の凹凸のある表面に被着されるが
、熱処理により磁気特性の劣化は防止される。A recess 1a is formed in the substrate 1 made of NiO-MnO.
2A, a masking Cu film 8 is deposited on the flat surface of the substrate 1 to a thickness of about 5 μm. Next, the surface of the substrate 1 was etched to a depth of 5 to 10 μm by reactive ion etching by irradiating CF4 plasma (FIG. 2(b)). Next, the Cu film 8 is dissolved with an etching solution such as hydrochloric acid or nitric acid (FIG. 2(c)), and the substrate 1 having the recess 1a is created. Incidentally, the upright surface around the recess 1a was formed into an outwardly expanding inclined surface. Thereafter, permalloy, for example, is deposited on the surface of the substrate 1 having the recesses 1a to a thickness of 2 to 4 μm by RF sputtering, and further heat treated at 400° C. in a magnetic field to form the lower soft magnetic film 2. Although the lower soft magnetic film 2 is deposited on the uneven surface of the substrate 1, deterioration of the magnetic properties is prevented by heat treatment.
【０００９】次に下側軟磁性膜２の凹部に、ＲＦスパッ
タ法によりＡｌ２Ｏ３ を約２μｍの厚さにスパッタし
て絶縁膜３を被着させ、その上面に厚さ約３μｍのコイ
ル４を配置し、さらにその上にＡｌ２ Ｏ３ を約２μ
ｍの厚さにスパッタし、コイル４の全周を絶縁膜３で被
った。
また絶縁膜３の上面は、下側軟磁性膜２の凸部の高さと
同一にし、それら表面が平坦になるようにした。この後
、前記の絶縁膜３及び下側軟磁性膜２の突出表面とから
なる平坦面に、ＲＦスパッタ法によりパーマロイを２〜
４μｍの厚さに被着して上側軟磁性膜５を形成した。
そして下側と上側の軟磁性膜２、５の間に記録用の磁気
ギャップ７を形成した。次いで上側軟磁性膜５の平坦な
上面に、再生用のＭＲ素子６をＲＦスパッタ法により被
着した。Next, an insulating film 3 is deposited on the concave portion of the lower soft magnetic film 2 by sputtering Al2O3 to a thickness of approximately 2 μm by RF sputtering, and a coil 4 having a thickness of approximately 3 μm is placed on the upper surface of the insulating film 3. Then, on top of that, approximately 2μ of Al2O3 is added.
The entire circumference of the coil 4 was covered with the insulating film 3 by sputtering to a thickness of m. Further, the upper surface of the insulating film 3 was made to be the same height as the convex portion of the lower soft magnetic film 2, so that these surfaces were flat. Thereafter, two to two permalloy layers are coated on the flat surface formed by the insulating film 3 and the protruding surface of the lower soft magnetic film 2 by RF sputtering.
The upper soft magnetic film 5 was formed by depositing it to a thickness of 4 μm. Then, a magnetic gap 7 for recording was formed between the lower and upper soft magnetic films 2 and 5. Next, an MR element 6 for reproduction was deposited on the flat upper surface of the upper soft magnetic film 5 by RF sputtering.
【００１０】上記により得られた記録再生分離型薄膜ヘ
ッドについて記録再生を行ったところ、本発明の薄膜ヘ
ッドは前記従来例に比較して、記録再生特性が優れ、し
かも記録直後の再生信号の処理が都合良いものであった
。When recording and reproducing was carried out using the recording and reproducing separated type thin film head obtained as described above, it was found that the thin film head of the present invention had superior recording and reproducing characteristics as compared to the conventional example, and moreover, the processing of the reproduced signal immediately after recording was was convenient.
【００１１】[0011]
【発明の効果】本発明によれば、基板にコイル収容の凹
所を形成しているので、コイルの上面側の上側軟磁性膜
を被着させる面が平坦となり、そのために再生用のＭＲ
素子を配置する前の平坦化処理が不要になり、しかも上
側軟磁性膜は平坦な面に形成されるので磁気特性の劣化
がない。またコイルを配置する前に下側軟磁性膜を形成
するので、それを凹凸のある基板に被着させても、熱処
理により磁気特性を良いものにすることができる。さら
にＭＲ素子を平坦な上側軟磁性膜上面に被着できるので
、記録ギャップと再生ギャップとが近接し、信号処理に
都合が良い。According to the present invention, since the recess for accommodating the coil is formed in the substrate, the surface on which the upper soft magnetic film is deposited on the upper surface of the coil is flat, and therefore, the MR for reproduction
There is no need for flattening treatment before placing the elements, and since the upper soft magnetic film is formed on a flat surface, there is no deterioration in magnetic properties. Furthermore, since the lower soft magnetic film is formed before arranging the coil, even if it is applied to an uneven substrate, the magnetic properties can be improved by heat treatment. Furthermore, since the MR element can be deposited on the flat top surface of the upper soft magnetic film, the recording gap and the reproducing gap are close to each other, which is convenient for signal processing.
【図１】本発明の記録再生分離型薄膜ヘッドの要部拡大
断面図である。FIG. 1 is an enlarged cross-sectional view of a main part of a separate recording/reproducing thin film head of the present invention.
【図２】本発明の薄膜ヘッドの製造工程を示す説明図で
ある。FIG. 2 is an explanatory diagram showing the manufacturing process of the thin film head of the present invention.
【図３】従来の薄膜ヘッドの要部拡大断面図である。FIG. 3 is an enlarged sectional view of a main part of a conventional thin film head.
１ 基板 １ａ 凹所 ２ 下側軟磁性膜 ４ コイル ５ 上側軟磁性膜 ６ ＭＲ素子 1 Board 1a Recess 2 Lower soft magnetic film 4 Coil 5 Upper soft magnetic film 6 MR element
Claims (1)
、上側軟磁性膜の順に積層するとともに２つの軟磁性膜
間に磁気ギャップを形成し、上側軟磁性膜の外面側にＭ
Ｒ素子を被着してなる記録再生分離型薄膜ヘッドにおい
て、基板表面にコイルを収容する凹所が形成されるとと
もに基板表面に下側軟磁性膜が被着され、下側軟磁性膜
上の凹所に相当する部分にコイルが配置されるとともに
、コイル全周が絶縁膜で被われて絶縁膜の上面側が平坦
に形成され、その平坦な上面側に上側軟磁性膜、ＭＲ素
子の順で積層されていることを特徴とする記録再生分離
型薄膜ヘッド。Claim 1: A lower soft magnetic film, a coil, and an upper soft magnetic film are laminated in this order on a nonmagnetic substrate, a magnetic gap is formed between the two soft magnetic films, and an M layer is formed on the outer surface of the upper soft magnetic film.
In a separate recording/reproduction type thin film head having an R element deposited thereon, a recess for accommodating a coil is formed on the substrate surface, a lower soft magnetic film is deposited on the substrate surface, and a recess on the lower soft magnetic film is formed on the substrate surface. A coil is placed in a portion corresponding to the recess, and the entire circumference of the coil is covered with an insulating film so that the upper surface of the insulating film is flat, and an upper soft magnetic film and an MR element are placed on the flat upper surface in that order. A separate recording/reproducing thin film head characterized by being laminated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141350A JPH04341910A (en) | 1991-05-17 | 1991-05-17 | Recording/reproduction separate type thin film head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3141350A JPH04341910A (en) | 1991-05-17 | 1991-05-17 | Recording/reproduction separate type thin film head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04341910A true JPH04341910A (en) | 1992-11-27 |
Family
ID=15289929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3141350A Pending JPH04341910A (en) | 1991-05-17 | 1991-05-17 | Recording/reproduction separate type thin film head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04341910A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06295418A (en) * | 1993-04-09 | 1994-10-21 | Nec Corp | Combined magnetic head and magnetic recording and reproducing device |
-
1991
- 1991-05-17 JP JP3141350A patent/JPH04341910A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06295418A (en) * | 1993-04-09 | 1994-10-21 | Nec Corp | Combined magnetic head and magnetic recording and reproducing device |
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