JPH0420238U - - Google Patents
Info
- Publication number
- JPH0420238U JPH0420238U JP6022590U JP6022590U JPH0420238U JP H0420238 U JPH0420238 U JP H0420238U JP 6022590 U JP6022590 U JP 6022590U JP 6022590 U JP6022590 U JP 6022590U JP H0420238 U JPH0420238 U JP H0420238U
- Authority
- JP
- Japan
- Prior art keywords
- metal film
- coating
- ceramic base
- manufacturing process
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図ａ，ｂは本考案の一実施例の構成を示す
断面図である。 １……セラミツク製の基体、２……金属膜。
断面図である。 １……セラミツク製の基体、２……金属膜。
Claims (1)
- 半導体素子の製造プロセス中の性能試験に使用
するプローブ・ニールドで、セラミツクスの基体
の表面に金属膜を被覆してなるブローブ・ニード
ル。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6022590U JPH0420238U (ja) | 1990-06-08 | 1990-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6022590U JPH0420238U (ja) | 1990-06-08 | 1990-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0420238U true JPH0420238U (ja) | 1992-02-20 |
Family
ID=31587408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6022590U Pending JPH0420238U (ja) | 1990-06-08 | 1990-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0420238U (ja) |
-
1990
- 1990-06-08 JP JP6022590U patent/JPH0420238U/ja active Pending