JPH0420227U - - Google Patents
Info
- Publication number
- JPH0420227U JPH0420227U JP6142290U JP6142290U JPH0420227U JP H0420227 U JPH0420227 U JP H0420227U JP 6142290 U JP6142290 U JP 6142290U JP 6142290 U JP6142290 U JP 6142290U JP H0420227 U JPH0420227 U JP H0420227U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer chuck
- motor
- developing device
- pressure nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6142290U JPH0420227U (da) | 1990-06-11 | 1990-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6142290U JPH0420227U (da) | 1990-06-11 | 1990-06-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0420227U true JPH0420227U (da) | 1992-02-20 |
Family
ID=31589661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6142290U Pending JPH0420227U (da) | 1990-06-11 | 1990-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0420227U (da) |
-
1990
- 1990-06-11 JP JP6142290U patent/JPH0420227U/ja active Pending
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