JPH0390431U - - Google Patents
Info
- Publication number
- JPH0390431U JPH0390431U JP15201389U JP15201389U JPH0390431U JP H0390431 U JPH0390431 U JP H0390431U JP 15201389 U JP15201389 U JP 15201389U JP 15201389 U JP15201389 U JP 15201389U JP H0390431 U JPH0390431 U JP H0390431U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- mounting
- spraying
- rotation
- spin coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15201389U JPH0390431U (da) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15201389U JPH0390431U (da) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0390431U true JPH0390431U (da) | 1991-09-13 |
Family
ID=31698293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15201389U Pending JPH0390431U (da) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0390431U (da) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216172A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Rotatory treatment device |
| JPS5364472A (en) * | 1976-11-22 | 1978-06-08 | Hitachi Ltd | Processing apparatus |
| JPS59232417A (ja) * | 1983-06-16 | 1984-12-27 | Toshiba Corp | 半導体ウエ−ハのレジスト現像装置 |
| JPS60116133A (ja) * | 1983-11-28 | 1985-06-22 | Seiko Epson Corp | 半導体製造装置 |
-
1989
- 1989-12-28 JP JP15201389U patent/JPH0390431U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216172A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Rotatory treatment device |
| JPS5364472A (en) * | 1976-11-22 | 1978-06-08 | Hitachi Ltd | Processing apparatus |
| JPS59232417A (ja) * | 1983-06-16 | 1984-12-27 | Toshiba Corp | 半導体ウエ−ハのレジスト現像装置 |
| JPS60116133A (ja) * | 1983-11-28 | 1985-06-22 | Seiko Epson Corp | 半導体製造装置 |