JPH0171447U - - Google Patents
Info
- Publication number
- JPH0171447U JPH0171447U JP1987166516U JP16651687U JPH0171447U JP H0171447 U JPH0171447 U JP H0171447U JP 1987166516 U JP1987166516 U JP 1987166516U JP 16651687 U JP16651687 U JP 16651687U JP H0171447 U JPH0171447 U JP H0171447U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- support
- support arms
- processed
- processing liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims 1
- 230000000452 restraining effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166516U JPH0171447U (da) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166516U JPH0171447U (da) | 1987-10-30 | 1987-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171447U true JPH0171447U (da) | 1989-05-12 |
Family
ID=31453966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987166516U Pending JPH0171447U (da) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171447U (da) |
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1987
- 1987-10-30 JP JP1987166516U patent/JPH0171447U/ja active Pending