JPH051343Y2 - - Google Patents
Info
- Publication number
- JPH051343Y2 JPH051343Y2 JP7395286U JP7395286U JPH051343Y2 JP H051343 Y2 JPH051343 Y2 JP H051343Y2 JP 7395286 U JP7395286 U JP 7395286U JP 7395286 U JP7395286 U JP 7395286U JP H051343 Y2 JPH051343 Y2 JP H051343Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- cup
- conduit
- cover part
- cleaning liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 claims description 53
- 238000004140 cleaning Methods 0.000 claims description 31
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 description 7
- 239000000428 dust Substances 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7395286U JPH051343Y2 (da) | 1986-05-19 | 1986-05-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7395286U JPH051343Y2 (da) | 1986-05-19 | 1986-05-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62187679U JPS62187679U (da) | 1987-11-28 |
| JPH051343Y2 true JPH051343Y2 (da) | 1993-01-13 |
Family
ID=30918741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7395286U Expired - Lifetime JPH051343Y2 (da) | 1986-05-19 | 1986-05-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051343Y2 (da) |
-
1986
- 1986-05-19 JP JP7395286U patent/JPH051343Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62187679U (da) | 1987-11-28 |
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