JPH051343Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The present invention applies a liquid to the surface of a semiconductor substrate, ceramic substrate, glass substrate, etc. (hereinafter referred to as a substrate) while holding it in a rotary chuck and rotating it. Regarding the rotary coating device that applies the liquid, it is particularly important to efficiently clean the liquid that adheres to the inner surface of the cup attached around the rotary chuck, as well as the powdery fine dust that has dried from the liquid (hereinafter referred to as the liquid). related to the device.

[Prior Art] The above-mentioned spin coating device is generally called a "spinner", and as is well known, it is used for the process of applying a photoresist agent or dopant agent to a substrate, and the process of developing after pattern exposure. applied to.

In these applications, in order to prevent the supplied liquid from scattering due to the centrifugal force of the rotating part and contaminating the surroundings of the equipment, ordinary rotary processing equipment is
A cylindrical shielding plate called a cup is attached around the rotating part. However, when using a liquid that solidifies when dried, such as photoresist, a film of dried liquid forms on the inner surface of the cup, and fragments of the liquid form due to vibrations during rotation or the impact force of the flying liquid. This scatters as dust and adheres to the surface of the substrate to be processed, causing defective products.

One way to deal with this inconvenience is to pour a cleaning liquid that can dissolve the liquid used on the inner surface of the cup during application to immediately wash away any liquid that has spattered from the rotating parts and adhered to the inner wall of the cup. things are being done.

[Problems to be solved by the invention] When cleaning the inner wall of the cup described above, if the cup has a simple cylindrical shape, it is easy to supply the cleaning liquid to the inner wall surface, and it is possible to However, the cup actually used in a rotary coating device has a shape as shown in Figure 3, for example, with a conical cover 2 attached to the top of a cylindrical wall surface 1. Further, a flange 3 is formed on the inner edge thereof toward the vicinity of the outer edge of the substrate to be processed. With such a shaped cup, it becomes quite difficult to supply cleaning liquid to the inner wall surface.

Of course, if you are simply pouring the cleaning solution onto the inner wall surface, you can install a spray tube at an appropriate location, but this will not allow you to clean the solution that adheres to the spray tube itself, so there is no way to solve the problem. It won't be.

[Means for Solving the Problems] The spin coating device of the present invention has an annular conduit through which the cleaning liquid flows into the conical cover of the cup, and connects the cover and flange of the cup from the conduit. A suitable number of liquid feeding tubes are provided toward the joint, and the tips of the tubes are opened at the joint, and the cleaning liquid is pressurized into the tubes and injected from the opening at the tip of each liquid feeding tube. The water flows down along the inner surfaces of the cover and flange.

[Operation] Cleaning liquid is injected and supplied in a spiral direction to the inner surface of the joint between the cover and the flange located at the uppermost end of the cup, and flows down along the inner wall, allowing efficient cleaning.

[Embodiment] Fig. 1 is a plan view showing a cup of an embodiment of the device of the present invention, and Fig. 2 is a sectional view taken along the line - Fig. 1.

The cylindrical side wall 11 of the cup, the conical cover part 12, and the flange 13 formed to hang downward from the inner circumferential edge of the cover part 12 are constructed according to the means shown in the third figure above. .

In the device of the present invention, an annular projecting part 14 is integrally formed on the upper surface of the cover part 12, and a conduit 15 is provided in an annular shape inside the projecting part 14.

A cleaning liquid supply pipe 16 communicating with the conduit 15 is provided at a suitable location on the outer circumferential surface of the overhanging part 14, and
The inside of the conduit 15, the cover part 12 and the flange 13
A plurality of liquid feed pipes 17 are connected between the first
As shown in the figure, it is provided in a spiral shape.

By a pump device (not shown) as a cleaning liquid supply means, the cleaning liquid is sent from the supply pipe 16 to the conduit 15 through each liquid sending pipe 17 to the joint between the cover part 12 and the flange 13 of the cup, and then The liquid is ejected from the end opening, adheres to the surfaces of the cover portion 12 and the flange 13, and flows down along those surfaces, as shown by the arrows in FIG.

At this time, since each liquid feed pipe 17 is formed in a spiral shape, the jetted cleaning liquid flows in the circumferential direction of the cup. Therefore, the cleaning liquid is more likely to adhere to the surface of the flange 13 than when it is sprayed vertically toward the surface of the flange 13, and is connected to the inner surface of the cover portion 12 and the flange 13, as well as to the lower end of the outer periphery of the cover portion 12. The cleaning liquid can be efficiently supplied to the inner surface of the side wall portion 11 for cleaning.

In addition, the inner surface of the cup is treated with an appropriate coating to make it more easily wetted, which means it has an affinity for the cleaning liquid, which improves the adhesion of the cleaning liquid, resulting in a greater cleaning effect. be able to.

In the above embodiment, the conduit 15 and a plurality of liquid feeding tubes 17 are provided in a tunnel shape in the overhanging portion 14 formed integrally with the cup, but the present invention is not necessarily limited to the above configuration. It is not something that will be done. For example, an annular pipe corresponding to the conduit 15 shown in the second drawing and a cover section and a flange are installed on the outer wall surface of the cup of a ready-made spin coating device as shown in the third figure. As mentioned above, install an appropriate number of spiral pipes between the joint and the joint. It is also possible to configure the cleaning liquid injection means substantially similar to the first and second illustrated means.

Although the liquid feeding tube is shown as a slightly curved tube in FIG. 1, it may be a straight tube. In addition, in order to efficiently supply the cleaning liquid to the inner surface of the cup, the direction of the liquid feeding tube at the opening of the liquid feeding tube should be set as close as possible to the tangential direction of the circumference of the joint between the cover part and the flange. This is desirable.

[Effects of the invention] (1) By jetting the cleaning liquid along the circumferential direction onto the uppermost inner wall surface of the truncated cone-shaped cover portion of the cup of the rotary coating device, the cleaning liquid can be efficiently supplied and the coating operation can be completed. The coating liquid, powdery dust, etc. that adhere to the inner surface of the cup during cleaning can be reliably washed away with a small amount of cleaning liquid.

(2) There is only a cleaning liquid jet opening on the inside of the cup, and no other cleaning liquid jetting means such as pipes are located inside the cup.
There is no risk that the cleaning liquid spraying means itself will become contaminated.

[Brief explanation of the drawing]

Fig. 1 is a plan view of a first embodiment of the device of the present invention;
The figure is a sectional view taken along the line of FIG. 1, and FIG. 3 is a sectional view schematically showing a conventional device. 1...Cup side wall, 2...Cover part, 3...Flange, 11...Cup side wall, 12 Cover part, 1
3... Flange, 14... Overhanging portion, 15... Conduit, 16... Cleaning liquid supply pipe, 17... Liquid sending pipe.

Claims (1)

[Claims for Utility Model Registration] (1) A cylindrical side wall 11 surrounding the rotating part, a truncated conical cover part 12 connected to the upper end thereof,
In a rotary coating device equipped with a cup consisting of a cylindrical flange 13 vertically disposed on the inner periphery of a cover part 12, an annular conduit 15 attached to the upper surface of the cover part 12, and the conduit 15 and the cover part 12 and the flange 13, a plurality of liquid feeding pipes 17 are disposed in a spiral manner, and the ends thereof open to the inner surface of the joint part, and the conduit 1
a cleaning liquid supplying means for feeding the cleaning liquid into the liquid pipe 17 and spouting it from the end of the liquid feeding pipe 17. (2) Utility model registration claim No. 1 in which an annular projecting part 14 is formed on the upper surface of the cover part 12, and a conduit 15 and a plurality of liquid feeding pipes 17 are penetrated therein in the form of a tunnel. The rotary coating device described in section.