JPH042018U - - Google Patents
Info
- Publication number
- JPH042018U JPH042018U JP4246490U JP4246490U JPH042018U JP H042018 U JPH042018 U JP H042018U JP 4246490 U JP4246490 U JP 4246490U JP 4246490 U JP4246490 U JP 4246490U JP H042018 U JPH042018 U JP H042018U
- Authority
- JP
- Japan
- Prior art keywords
- mounting table
- wafer
- fixing structure
- resist
- removably
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図および第２図はこの考案の一実施例を示
し、第１図はウエハの固定構造の要部断面図、第
２図は全体を縮小した外観斜視図、第３図および
第４図は従来例を示し、第３図は載置台上にウエ
ハを固定してレジストを塗布した状態の要部断面
図、第４図はウエハのエツジ部にエツジリンスを
吹き付けてレジストを除去した状態の要部断面図
である。
１……半導体ウエハ、６……フオトレジスト、
７……エツジ部（周辺部分）、１０……載置台、
１２……押え部材。
Figures 1 and 2 show an embodiment of this invention, with Figure 1 being a cross-sectional view of the main parts of the wafer fixing structure, Figure 2 being a perspective view of the overall reduced size, and Figures 3 and 4. 3 shows a conventional example, and FIG. 3 is a cross-sectional view of the main part with the wafer fixed on the mounting table and resist applied, and FIG. FIG. 1... Semiconductor wafer, 6... Photoresist,
7... Edge part (peripheral part), 10... Mounting table,
12... Pressing member.
Claims (1)
が平坦面に形成された載置台と、 前記載置台の外周に設けられ、前記ウエハの周
辺部分を覆つてその周辺部分を前記載置台上に係
脱可能に押え付ける押え部材と、 を具備してなるウエハの固定構造。[Claims for Utility Model Registration] A mounting table having a flat mounting surface on which a wafer to be coated with a resist is placed; A wafer fixing structure comprising: a holding member that removably presses the peripheral portion onto the mounting table;
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990042464U JP2530716Y2 (en) | 1990-04-23 | 1990-04-23 | Wafer fixing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990042464U JP2530716Y2 (en) | 1990-04-23 | 1990-04-23 | Wafer fixing structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH042018U true JPH042018U (en) | 1992-01-09 |
| JP2530716Y2 JP2530716Y2 (en) | 1997-03-26 |
Family
ID=31554033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990042464U Expired - Lifetime JP2530716Y2 (en) | 1990-04-23 | 1990-04-23 | Wafer fixing structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2530716Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59141406A (en) * | 1982-12-27 | 1984-08-14 | ユナイテッド・テクノロジ−ズ・コ−ポレ−ション | Rapid starting type methanol reactor |
| JPS61942U (en) * | 1984-06-08 | 1986-01-07 | シチズン時計株式会社 | Wire guide for dot printing head |
-
1990
- 1990-04-23 JP JP1990042464U patent/JP2530716Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59141406A (en) * | 1982-12-27 | 1984-08-14 | ユナイテッド・テクノロジ−ズ・コ−ポレ−ション | Rapid starting type methanol reactor |
| JPS61942U (en) * | 1984-06-08 | 1986-01-07 | シチズン時計株式会社 | Wire guide for dot printing head |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2530716Y2 (en) | 1997-03-26 |