JPH0419753Y2 - - Google Patents

Info

Publication number
JPH0419753Y2
JPH0419753Y2 JP1987057151U JP5715187U JPH0419753Y2 JP H0419753 Y2 JPH0419753 Y2 JP H0419753Y2 JP 1987057151 U JP1987057151 U JP 1987057151U JP 5715187 U JP5715187 U JP 5715187U JP H0419753 Y2 JPH0419753 Y2 JP H0419753Y2
Authority
JP
Japan
Prior art keywords
heating element
heater
supply port
reaction tube
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987057151U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63164194U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987057151U priority Critical patent/JPH0419753Y2/ja
Publication of JPS63164194U publication Critical patent/JPS63164194U/ja
Application granted granted Critical
Publication of JPH0419753Y2 publication Critical patent/JPH0419753Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Resistance Heating (AREA)
  • Furnace Details (AREA)
JP1987057151U 1987-04-15 1987-04-15 Expired JPH0419753Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987057151U JPH0419753Y2 (enrdf_load_stackoverflow) 1987-04-15 1987-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987057151U JPH0419753Y2 (enrdf_load_stackoverflow) 1987-04-15 1987-04-15

Publications (2)

Publication Number Publication Date
JPS63164194U JPS63164194U (enrdf_load_stackoverflow) 1988-10-26
JPH0419753Y2 true JPH0419753Y2 (enrdf_load_stackoverflow) 1992-05-06

Family

ID=30886595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987057151U Expired JPH0419753Y2 (enrdf_load_stackoverflow) 1987-04-15 1987-04-15

Country Status (1)

Country Link
JP (1) JPH0419753Y2 (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5473578A (en) * 1977-11-24 1979-06-12 Toshiba Corp Pattern exposure method of semiconductor substrate and pattern exposure apparatus
JPS5514791U (enrdf_load_stackoverflow) * 1978-07-18 1980-01-30
JPS5778790A (en) * 1980-11-04 1982-05-17 Mitsubishi Heavy Ind Ltd Telescopic slide insulating and supporting device for electric heater
JPS5950439U (ja) * 1982-09-27 1984-04-03 キヤノン株式会社 半導体露光装置

Also Published As

Publication number Publication date
JPS63164194U (enrdf_load_stackoverflow) 1988-10-26

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