JPH0419482B2 - - Google Patents

Info

Publication number
JPH0419482B2
JPH0419482B2 JP61161395A JP16139586A JPH0419482B2 JP H0419482 B2 JPH0419482 B2 JP H0419482B2 JP 61161395 A JP61161395 A JP 61161395A JP 16139586 A JP16139586 A JP 16139586A JP H0419482 B2 JPH0419482 B2 JP H0419482B2
Authority
JP
Japan
Prior art keywords
signal
outputs
light receiving
output
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61161395A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6324111A (ja
Inventor
Isamu Takemura
Hiromasa Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Original Assignee
Mitutoyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp filed Critical Mitutoyo Corp
Priority to JP61161395A priority Critical patent/JPS6324111A/ja
Publication of JPS6324111A publication Critical patent/JPS6324111A/ja
Publication of JPH0419482B2 publication Critical patent/JPH0419482B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Image Analysis (AREA)
JP61161395A 1986-07-09 1986-07-09 投影画像のエツジ検出装置 Granted JPS6324111A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61161395A JPS6324111A (ja) 1986-07-09 1986-07-09 投影画像のエツジ検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61161395A JPS6324111A (ja) 1986-07-09 1986-07-09 投影画像のエツジ検出装置

Publications (2)

Publication Number Publication Date
JPS6324111A JPS6324111A (ja) 1988-02-01
JPH0419482B2 true JPH0419482B2 (enrdf_load_stackoverflow) 1992-03-30

Family

ID=15734277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61161395A Granted JPS6324111A (ja) 1986-07-09 1986-07-09 投影画像のエツジ検出装置

Country Status (1)

Country Link
JP (1) JPS6324111A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6324111A (ja) 1988-02-01

Similar Documents

Publication Publication Date Title
US4652765A (en) Edge detecting device in optical measuring instrument
US4652738A (en) Edge detecting device in optical measuring instrument
UST102104I4 (en) Scanning optical system adapted for linewidth measurement in semiconductor devices
US4557602A (en) Edge detector in optical measuring instrument
JPH0419482B2 (enrdf_load_stackoverflow)
US3018378A (en) Radiant energy scanning system
JPS62144014A (ja) 光電式位置検出装置
JPS55154402A (en) Shape measuring apparatus
JPH0419481B2 (enrdf_load_stackoverflow)
JPH0378561B2 (enrdf_load_stackoverflow)
JPS6324112A (ja) 投影画像のエツジ検出装置
JPS61120905A (ja) 光学式測定機器におけるエツジ検出装置
JPS61118606A (ja) 光学式寸法測定機
JPH0346042B2 (enrdf_load_stackoverflow)
JPS63131011A (ja) 光学式エツジ検出装置
JPH0720564Y2 (ja) 光学式寸法測定装置
SU794365A1 (ru) Устройство дл контрол пЕРЕМЕщЕНий
JPS63191909A (ja) 光学式走査型測定装置
JPH0331367B2 (enrdf_load_stackoverflow)
JPS61281904A (ja) パタ−ン認識装置
JPS61213609A (ja) 光電式測定機器におけるエツジ検出装置
JPH09210620A (ja) 面位置検出装置
JPH0419483B2 (enrdf_load_stackoverflow)
JPS6179106A (ja) 光学式測定機器におけるエツジ検出装置
JPS62238403A (ja) 表面形状測定装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees