JPH0418769B2 - - Google Patents
Info
- Publication number
- JPH0418769B2 JPH0418769B2 JP8006185A JP8006185A JPH0418769B2 JP H0418769 B2 JPH0418769 B2 JP H0418769B2 JP 8006185 A JP8006185 A JP 8006185A JP 8006185 A JP8006185 A JP 8006185A JP H0418769 B2 JPH0418769 B2 JP H0418769B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- window
- circular
- reference position
- inspecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Closed-Circuit Television Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8006185A JPS61239146A (ja) | 1985-04-17 | 1985-04-17 | 被検査対象物体の検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8006185A JPS61239146A (ja) | 1985-04-17 | 1985-04-17 | 被検査対象物体の検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61239146A JPS61239146A (ja) | 1986-10-24 |
| JPH0418769B2 true JPH0418769B2 (index.php) | 1992-03-27 |
Family
ID=13707714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8006185A Granted JPS61239146A (ja) | 1985-04-17 | 1985-04-17 | 被検査対象物体の検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61239146A (index.php) |
-
1985
- 1985-04-17 JP JP8006185A patent/JPS61239146A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61239146A (ja) | 1986-10-24 |
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