JPH0418670U - - Google Patents
Info
- Publication number
- JPH0418670U JPH0418670U JP6021490U JP6021490U JPH0418670U JP H0418670 U JPH0418670 U JP H0418670U JP 6021490 U JP6021490 U JP 6021490U JP 6021490 U JP6021490 U JP 6021490U JP H0418670 U JPH0418670 U JP H0418670U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- substrate
- substrate holder
- heating means
- divided
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 229910003460 diamond Inorganic materials 0.000 claims description 5
- 239000010432 diamond Substances 0.000 claims description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000003786 synthesis reaction Methods 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001237 Raman spectrum Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6021490U JPH0418670U (enrdf_load_stackoverflow) | 1990-06-08 | 1990-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6021490U JPH0418670U (enrdf_load_stackoverflow) | 1990-06-08 | 1990-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418670U true JPH0418670U (enrdf_load_stackoverflow) | 1992-02-17 |
Family
ID=31587386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6021490U Pending JPH0418670U (enrdf_load_stackoverflow) | 1990-06-08 | 1990-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418670U (enrdf_load_stackoverflow) |
-
1990
- 1990-06-08 JP JP6021490U patent/JPH0418670U/ja active Pending
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