JPH0418461U - - Google Patents
Info
- Publication number
- JPH0418461U JPH0418461U JP5975490U JP5975490U JPH0418461U JP H0418461 U JPH0418461 U JP H0418461U JP 5975490 U JP5975490 U JP 5975490U JP 5975490 U JP5975490 U JP 5975490U JP H0418461 U JPH0418461 U JP H0418461U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- glass
- sensor device
- vacuum chamber
- mixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- 239000006103 coloring component Substances 0.000 claims description 2
Landscapes
- Pressure Sensors (AREA)
Description
第１図はこの考案の一実施例である半導体圧力
センサー装置の断面図、第２図は従来の半導体圧
力センサー装置の断面図である。
図において、２は半導体センサーチツプ、３は
陽極接合部、４は真空室、７は発色成分を混在さ
せたガラスを示す。なお、図中、同一符号は同一
、または相当部分を示す。
FIG. 1 is a sectional view of a semiconductor pressure sensor device which is an embodiment of this invention, and FIG. 2 is a sectional view of a conventional semiconductor pressure sensor device. In the figure, 2 is a semiconductor sensor chip, 3 is an anode junction, 4 is a vacuum chamber, and 7 is glass mixed with a coloring component. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
有する絶対圧形圧力センサーにおいて、前記ガラ
スに発色成分を混在させたことを特徴とする半導
体圧力センサー装置。 1. A semiconductor pressure sensor device having an absolute pressure type pressure sensor having a vacuum chamber formed by anodic bonding with glass, characterized in that a coloring component is mixed in the glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975490U JPH0418461U (en) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975490U JPH0418461U (en) | 1990-06-06 | 1990-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418461U true JPH0418461U (en) | 1992-02-17 |
Family
ID=31586532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5975490U Pending JPH0418461U (en) | 1990-06-06 | 1990-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418461U (en) |
-
1990
- 1990-06-06 JP JP5975490U patent/JPH0418461U/ja active Pending