JPH0418435U - - Google Patents

Info

Publication number
JPH0418435U
JPH0418435U JP5803890U JP5803890U JPH0418435U JP H0418435 U JPH0418435 U JP H0418435U JP 5803890 U JP5803890 U JP 5803890U JP 5803890 U JP5803890 U JP 5803890U JP H0418435 U JPH0418435 U JP H0418435U
Authority
JP
Japan
Prior art keywords
chemical
piping line
tank
filter device
chemical liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5803890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5803890U priority Critical patent/JPH0418435U/ja
Publication of JPH0418435U publication Critical patent/JPH0418435U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP5803890U 1990-06-01 1990-06-01 Pending JPH0418435U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5803890U JPH0418435U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-06-01 1990-06-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5803890U JPH0418435U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-06-01 1990-06-01

Publications (1)

Publication Number Publication Date
JPH0418435U true JPH0418435U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-02-17

Family

ID=31583285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5803890U Pending JPH0418435U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-06-01 1990-06-01

Country Status (1)

Country Link
JP (1) JPH0418435U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113792A1 (ja) * 2009-03-31 2010-10-07 栗田工業株式会社 エッチング液の処理装置及び処理方法
JP2021197421A (ja) * 2020-06-12 2021-12-27 株式会社プレテック 基板処理ノズル

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6294939A (ja) * 1985-10-22 1987-05-01 Nec Corp 薬液の循環濾過システム
JPS63110731A (ja) * 1986-10-29 1988-05-16 Nec Kyushu Ltd 半導体基板処理装置
JPH01244622A (ja) * 1988-03-25 1989-09-29 Nec Corp シリコン基板の処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6294939A (ja) * 1985-10-22 1987-05-01 Nec Corp 薬液の循環濾過システム
JPS63110731A (ja) * 1986-10-29 1988-05-16 Nec Kyushu Ltd 半導体基板処理装置
JPH01244622A (ja) * 1988-03-25 1989-09-29 Nec Corp シリコン基板の処理装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010113792A1 (ja) * 2009-03-31 2010-10-07 栗田工業株式会社 エッチング液の処理装置及び処理方法
KR20120002522A (ko) * 2009-03-31 2012-01-05 쿠리타 고교 가부시키가이샤 에칭액의 처리 장치 및 처리 방법
CN102356454A (zh) * 2009-03-31 2012-02-15 栗田工业株式会社 蚀刻液的处理装置以及处理方法
CN102356454B (zh) * 2009-03-31 2014-03-26 栗田工业株式会社 蚀刻液的处理装置以及处理方法
JP5477375B2 (ja) * 2009-03-31 2014-04-23 栗田工業株式会社 エッチング液の処理装置及び処理方法
JP2021197421A (ja) * 2020-06-12 2021-12-27 株式会社プレテック 基板処理ノズル

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