JPH0418434U - - Google Patents
Info
- Publication number
- JPH0418434U JPH0418434U JP1990058570U JP5857090U JPH0418434U JP H0418434 U JPH0418434 U JP H0418434U JP 1990058570 U JP1990058570 U JP 1990058570U JP 5857090 U JP5857090 U JP 5857090U JP H0418434 U JPH0418434 U JP H0418434U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing liquid
- discharging
- nozzles
- treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 15
- 238000004381 surface treatment Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 7
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
- Weting (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990058570U JPH0720914Y2 (ja) | 1990-06-01 | 1990-06-01 | 基板の表面処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990058570U JPH0720914Y2 (ja) | 1990-06-01 | 1990-06-01 | 基板の表面処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0418434U true JPH0418434U (de) | 1992-02-17 |
JPH0720914Y2 JPH0720914Y2 (ja) | 1995-05-15 |
Family
ID=31584304
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990058570U Expired - Lifetime JPH0720914Y2 (ja) | 1990-06-01 | 1990-06-01 | 基板の表面処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0720914Y2 (de) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06196859A (ja) * | 1992-12-24 | 1994-07-15 | Tokyo Kakoki Kk | 化学処理装置および電着装置 |
JP2002239485A (ja) * | 2000-12-15 | 2002-08-27 | Shibaura Mechatronics Corp | 基板の洗浄装置及び洗浄方法 |
WO2003100842A1 (fr) * | 2002-05-23 | 2003-12-04 | Sumitomo Precision Products Co., Ltd | Dispositif de traitement de substrats equipe d'un mecanisme de transport |
JP2008219043A (ja) * | 2001-07-05 | 2008-09-18 | Tokyo Electron Ltd | 液処理装置および液処理方法 |
-
1990
- 1990-06-01 JP JP1990058570U patent/JPH0720914Y2/ja not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06196859A (ja) * | 1992-12-24 | 1994-07-15 | Tokyo Kakoki Kk | 化学処理装置および電着装置 |
JP2002239485A (ja) * | 2000-12-15 | 2002-08-27 | Shibaura Mechatronics Corp | 基板の洗浄装置及び洗浄方法 |
JP4602567B2 (ja) * | 2000-12-15 | 2010-12-22 | 芝浦メカトロニクス株式会社 | 基板の洗浄装置 |
JP2008219043A (ja) * | 2001-07-05 | 2008-09-18 | Tokyo Electron Ltd | 液処理装置および液処理方法 |
JP4643684B2 (ja) * | 2001-07-05 | 2011-03-02 | 東京エレクトロン株式会社 | 液処理装置および液処理方法 |
WO2003100842A1 (fr) * | 2002-05-23 | 2003-12-04 | Sumitomo Precision Products Co., Ltd | Dispositif de traitement de substrats equipe d'un mecanisme de transport |
Also Published As
Publication number | Publication date |
---|---|
JPH0720914Y2 (ja) | 1995-05-15 |
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