JPH0418434U

JPH0418434U -

Info

Publication number: JPH0418434U
Application number: JP1990058570U
Authority: JP
Priority date: 1990-06-01
Filing date: 1990-06-01
Publication date: 1992-02-17
Anticipated expiration: 2005-05-15
Also published as: JPH0720914Y2

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例を示す表面処理装置
の斜視図、第２図は処理液吐出ノズルの断面図、
第３図は２つ割り状に形成した一方のノズルを内
面より見た図で、第２図の−線矢視断面図、
第４図〜第５図はそれぞれ処理液吐出ノズルの配
置例を示す要部拡大図、第６図は第２の考案に係
る実施例装置の概要図、第７図はその実施例装置
の動作説明図、第８図は従来例を示す平面図であ
る。Ｗ……基板、４……吐出口、１０……処理液吐
出ノズル、１１……処理液、２０……コンベア、
ｂ……基板の横幅。 FIG. 1 is a perspective view of a surface treatment apparatus showing an embodiment of the present invention, FIG. 2 is a sectional view of a treatment liquid discharge nozzle,
Fig. 3 is a view of one of the nozzles formed in two halves, seen from the inside, and a sectional view taken along the - line in Fig. 2;
4 and 5 are enlarged views of main parts showing examples of arrangement of processing liquid discharge nozzles, FIG. 6 is a schematic diagram of an embodiment of the device according to the second invention, and FIG. 7 is an operation of the embodiment of the device. The explanatory diagram, FIG. 8, is a plan view showing a conventional example. W...substrate, 4...discharge port, 10...processing liquid discharge nozzle, 11...processing liquid, 20...conveyor,
b... Width of the board.

Claims

[Claims for Utility Model Registration] 1. In a substrate surface treatment apparatus comprising a conveyor for horizontally conveying a substrate and a treatment liquid discharge nozzle for discharging a treatment liquid onto the surface of the substrate, at least One or more sets of processing liquid discharge nozzles are arranged at intervals equal to or larger than the width of the substrate, and the discharge ports of the processing liquid discharge nozzles are opened in the form of slits and are arranged alternately parallel to the conveying direction of the substrate, 1. A surface processing apparatus for a substrate, characterized in that the processing liquid is discharged in a curtain-like manner at an angle in a direction intersecting the conveying direction of the substrate. 2. In a substrate surface treatment apparatus comprising a conveyor for horizontally conveying a substrate and a treatment liquid discharging nozzle for discharging a treatment liquid onto the surface of the substrate, a Processing liquid discharging nozzles are arranged at intervals, and the discharging ports of the processing liquid discharging nozzles are opened in a slit shape with a length longer than the width of the substrate, and the processing liquid discharged from each processing liquid discharging nozzle is directed in opposite directions. What is claimed is: 1. A substrate surface treatment apparatus, characterized in that the surface treatment of a substrate is performed while the conveyor is tilted forward and backward, and the substrate is reciprocated between treatment liquid discharge nozzles.