JPH0416427Y2 - - Google Patents
Info
- Publication number
- JPH0416427Y2 JPH0416427Y2 JP512986U JP512986U JPH0416427Y2 JP H0416427 Y2 JPH0416427 Y2 JP H0416427Y2 JP 512986 U JP512986 U JP 512986U JP 512986 U JP512986 U JP 512986U JP H0416427 Y2 JPH0416427 Y2 JP H0416427Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- sulfuric acid
- tank body
- liquid
- solenoid valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 37
- 238000001514 detection method Methods 0.000 claims description 7
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 42
- 238000001816 cooling Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 11
- 239000002699 waste material Substances 0.000 description 9
- 238000002844 melting Methods 0.000 description 7
- 230000008018 melting Effects 0.000 description 7
- 238000004090 dissolution Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000002351 wastewater Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP512986U JPH0416427Y2 (cs) | 1986-01-20 | 1986-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP512986U JPH0416427Y2 (cs) | 1986-01-20 | 1986-01-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62118432U JPS62118432U (cs) | 1987-07-28 |
| JPH0416427Y2 true JPH0416427Y2 (cs) | 1992-04-13 |
Family
ID=30786426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP512986U Expired JPH0416427Y2 (cs) | 1986-01-20 | 1986-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416427Y2 (cs) |
-
1986
- 1986-01-20 JP JP512986U patent/JPH0416427Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62118432U (cs) | 1987-07-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4736758A (en) | Vapor drying apparatus | |
| JP2001028358A (ja) | 洗浄・乾燥処理装置及びその方法 | |
| JPH0416427Y2 (cs) | ||
| JPH0128674Y2 (cs) | ||
| JPH0416432Y2 (cs) | ||
| JPH0416429Y2 (cs) | ||
| JPH0578737B2 (cs) | ||
| JPH0770507B2 (ja) | 半導体ウエハ用洗浄装置 | |
| US3113445A (en) | Fabric cleaning apparatus with recovery control means | |
| JPH0416431Y2 (cs) | ||
| JPH0416434Y2 (cs) | ||
| JPS63182818A (ja) | 乾燥装置 | |
| JPS62166532A (ja) | 半導体のオ−プナ装置 | |
| JP3440784B2 (ja) | 真空冷却装置 | |
| JPH0642810A (ja) | 電気温水器 | |
| JPH0579168B2 (cs) | ||
| KR950009614Y1 (ko) | 자동디캡(Auto Decap)장치 | |
| JP2003031543A (ja) | 基板の洗浄・乾燥処理装置 | |
| JPS5931387B2 (ja) | 蒸気洗滌装置 | |
| JPH069656Y2 (ja) | 蒸気滅菌器用水蒸気排出装置 | |
| JPH0497799A (ja) | アイロン装置 | |
| JPH06257804A (ja) | 加湿器 | |
| KR19990001479A (ko) | 잔류 염소제거 시스템에서의 잔류 염소농도 측정장치 | |
| KR810000572Y1 (ko) | 누에고치 처리장치 | |
| JP4342618B2 (ja) | 浴水浄化装置 |