JPH0416106B2 - - Google Patents

Info

Publication number
JPH0416106B2
JPH0416106B2 JP60015949A JP1594985A JPH0416106B2 JP H0416106 B2 JPH0416106 B2 JP H0416106B2 JP 60015949 A JP60015949 A JP 60015949A JP 1594985 A JP1594985 A JP 1594985A JP H0416106 B2 JPH0416106 B2 JP H0416106B2
Authority
JP
Japan
Prior art keywords
organic film
resist
water
pattern
contrast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60015949A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61179535A (ja
Inventor
Masaru Sasako
Masataka Endo
Kenichi Takeyama
Noboru Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60015949A priority Critical patent/JPS61179535A/ja
Publication of JPS61179535A publication Critical patent/JPS61179535A/ja
Publication of JPH0416106B2 publication Critical patent/JPH0416106B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60015949A 1985-01-30 1985-01-30 パターン形成方法 Granted JPS61179535A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60015949A JPS61179535A (ja) 1985-01-30 1985-01-30 パターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60015949A JPS61179535A (ja) 1985-01-30 1985-01-30 パターン形成方法

Publications (2)

Publication Number Publication Date
JPS61179535A JPS61179535A (ja) 1986-08-12
JPH0416106B2 true JPH0416106B2 (en, 2012) 1992-03-23

Family

ID=11903007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60015949A Granted JPS61179535A (ja) 1985-01-30 1985-01-30 パターン形成方法

Country Status (1)

Country Link
JP (1) JPS61179535A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62133444A (ja) * 1985-12-04 1987-06-16 Matsushita Electric Ind Co Ltd パタ−ン形成有機材料
JPH06255016A (ja) * 1993-03-01 1994-09-13 Afuiniteii Kk 自律応答積層体と製法及びそれを使用した窓

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061373B2 (ja) * 1984-05-14 1994-01-05 株式会社東芝 パタ−ン形成方法
US4663275A (en) * 1984-09-04 1987-05-05 General Electric Company Photolithographic method and combination including barrier layer

Also Published As

Publication number Publication date
JPS61179535A (ja) 1986-08-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term