JPH0414451Y2 - - Google Patents
Info
- Publication number
- JPH0414451Y2 JPH0414451Y2 JP18707485U JP18707485U JPH0414451Y2 JP H0414451 Y2 JPH0414451 Y2 JP H0414451Y2 JP 18707485 U JP18707485 U JP 18707485U JP 18707485 U JP18707485 U JP 18707485U JP H0414451 Y2 JPH0414451 Y2 JP H0414451Y2
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- gas
- raw material
- reactor
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002994 raw material Substances 0.000 claims description 37
- 239000007789 gas Substances 0.000 claims description 31
- 239000007788 liquid Substances 0.000 claims description 12
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 238000007664 blowing Methods 0.000 claims description 2
- 239000012495 reaction gas Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910052726 zirconium Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 1
- -1 Ta oxide Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18707485U JPH0414451Y2 (enrdf_load_stackoverflow) | 1985-12-03 | 1985-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18707485U JPH0414451Y2 (enrdf_load_stackoverflow) | 1985-12-03 | 1985-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6293367U JPS6293367U (enrdf_load_stackoverflow) | 1987-06-15 |
| JPH0414451Y2 true JPH0414451Y2 (enrdf_load_stackoverflow) | 1992-03-31 |
Family
ID=31137214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18707485U Expired JPH0414451Y2 (enrdf_load_stackoverflow) | 1985-12-03 | 1985-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0414451Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-12-03 JP JP18707485U patent/JPH0414451Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6293367U (enrdf_load_stackoverflow) | 1987-06-15 |
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