JPS6293367U - - Google Patents

Info

Publication number
JPS6293367U
JPS6293367U JP18707485U JP18707485U JPS6293367U JP S6293367 U JPS6293367 U JP S6293367U JP 18707485 U JP18707485 U JP 18707485U JP 18707485 U JP18707485 U JP 18707485U JP S6293367 U JPS6293367 U JP S6293367U
Authority
JP
Japan
Prior art keywords
cylinder
gas
gas inlet
raw material
vapor phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18707485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0414451Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18707485U priority Critical patent/JPH0414451Y2/ja
Publication of JPS6293367U publication Critical patent/JPS6293367U/ja
Application granted granted Critical
Publication of JPH0414451Y2 publication Critical patent/JPH0414451Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP18707485U 1985-12-03 1985-12-03 Expired JPH0414451Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18707485U JPH0414451Y2 (enrdf_load_stackoverflow) 1985-12-03 1985-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18707485U JPH0414451Y2 (enrdf_load_stackoverflow) 1985-12-03 1985-12-03

Publications (2)

Publication Number Publication Date
JPS6293367U true JPS6293367U (enrdf_load_stackoverflow) 1987-06-15
JPH0414451Y2 JPH0414451Y2 (enrdf_load_stackoverflow) 1992-03-31

Family

ID=31137214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18707485U Expired JPH0414451Y2 (enrdf_load_stackoverflow) 1985-12-03 1985-12-03

Country Status (1)

Country Link
JP (1) JPH0414451Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0414451Y2 (enrdf_load_stackoverflow) 1992-03-31

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