JPH0414187B2 - - Google Patents
Info
- Publication number
- JPH0414187B2 JPH0414187B2 JP56194058A JP19405881A JPH0414187B2 JP H0414187 B2 JPH0414187 B2 JP H0414187B2 JP 56194058 A JP56194058 A JP 56194058A JP 19405881 A JP19405881 A JP 19405881A JP H0414187 B2 JPH0414187 B2 JP H0414187B2
- Authority
- JP
- Japan
- Prior art keywords
- deposited film
- annealing
- treatment
- substrate
- corrosion resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56194058A JPS5896631A (ja) | 1981-12-02 | 1981-12-02 | 蒸着膜の表面処理法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56194058A JPS5896631A (ja) | 1981-12-02 | 1981-12-02 | 蒸着膜の表面処理法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5896631A JPS5896631A (ja) | 1983-06-08 |
| JPH0414187B2 true JPH0414187B2 (enrdf_load_stackoverflow) | 1992-03-12 |
Family
ID=16318240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56194058A Granted JPS5896631A (ja) | 1981-12-02 | 1981-12-02 | 蒸着膜の表面処理法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5896631A (enrdf_load_stackoverflow) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50142439A (enrdf_load_stackoverflow) * | 1974-04-27 | 1975-11-17 |
-
1981
- 1981-12-02 JP JP56194058A patent/JPS5896631A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5896631A (ja) | 1983-06-08 |
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