JPS5896631A - 蒸着膜の表面処理法 - Google Patents

蒸着膜の表面処理法

Info

Publication number
JPS5896631A
JPS5896631A JP56194058A JP19405881A JPS5896631A JP S5896631 A JPS5896631 A JP S5896631A JP 56194058 A JP56194058 A JP 56194058A JP 19405881 A JP19405881 A JP 19405881A JP S5896631 A JPS5896631 A JP S5896631A
Authority
JP
Japan
Prior art keywords
deposited film
treatment
substrate
annealing
corrosion resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56194058A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0414187B2 (enrdf_load_stackoverflow
Inventor
Hideki Yoshida
秀樹 吉田
Kaji Maezawa
可治 前澤
Junichi Inaba
純一 稲葉
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56194058A priority Critical patent/JPS5896631A/ja
Publication of JPS5896631A publication Critical patent/JPS5896631A/ja
Publication of JPH0414187B2 publication Critical patent/JPH0414187B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
JP56194058A 1981-12-02 1981-12-02 蒸着膜の表面処理法 Granted JPS5896631A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56194058A JPS5896631A (ja) 1981-12-02 1981-12-02 蒸着膜の表面処理法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56194058A JPS5896631A (ja) 1981-12-02 1981-12-02 蒸着膜の表面処理法

Publications (2)

Publication Number Publication Date
JPS5896631A true JPS5896631A (ja) 1983-06-08
JPH0414187B2 JPH0414187B2 (enrdf_load_stackoverflow) 1992-03-12

Family

ID=16318240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56194058A Granted JPS5896631A (ja) 1981-12-02 1981-12-02 蒸着膜の表面処理法

Country Status (1)

Country Link
JP (1) JPS5896631A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142439A (enrdf_load_stackoverflow) * 1974-04-27 1975-11-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142439A (enrdf_load_stackoverflow) * 1974-04-27 1975-11-17

Also Published As

Publication number Publication date
JPH0414187B2 (enrdf_load_stackoverflow) 1992-03-12

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