JPH0414187B2 - - Google Patents

Info

Publication number
JPH0414187B2
JPH0414187B2 JP56194058A JP19405881A JPH0414187B2 JP H0414187 B2 JPH0414187 B2 JP H0414187B2 JP 56194058 A JP56194058 A JP 56194058A JP 19405881 A JP19405881 A JP 19405881A JP H0414187 B2 JPH0414187 B2 JP H0414187B2
Authority
JP
Japan
Prior art keywords
deposited film
annealing
treatment
substrate
corrosion resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56194058A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5896631A (ja
Inventor
Hideki Yoshida
Kaji Maezawa
Junichi Inaba
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP19405881A priority Critical patent/JPS5896631A/ja
Publication of JPS5896631A publication Critical patent/JPS5896631A/ja
Publication of JPH0414187B2 publication Critical patent/JPH0414187B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Vapour Deposition (AREA)
JP19405881A 1981-12-02 1981-12-02 蒸着膜の表面処理法 Granted JPS5896631A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19405881A JPS5896631A (ja) 1981-12-02 1981-12-02 蒸着膜の表面処理法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19405881A JPS5896631A (ja) 1981-12-02 1981-12-02 蒸着膜の表面処理法

Publications (2)

Publication Number Publication Date
JPS5896631A JPS5896631A (ja) 1983-06-08
JPH0414187B2 true JPH0414187B2 (enrdf_load_html_response) 1992-03-12

Family

ID=16318240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19405881A Granted JPS5896631A (ja) 1981-12-02 1981-12-02 蒸着膜の表面処理法

Country Status (1)

Country Link
JP (1) JPS5896631A (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142439A (enrdf_load_html_response) * 1974-04-27 1975-11-17

Also Published As

Publication number Publication date
JPS5896631A (ja) 1983-06-08

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