JPH04141809A - Magnetic head - Google Patents

Abstract

PURPOSE:To improve recording and reproducing characteristics by disposing soft magnetic materials alternately laminated with amorphous alloys or fine crystal alloys and the nitrides thereof in the gap part of ferrite cores and forming the layers in contact with the ferrite of the soft magnetic materials as nitride layers or nitrogen enriched layers. CONSTITUTION:This magnetic head has the constitution which is disposed with the soft magnetic materials 15 alternately laminated with the amorphous alloys or the fine crystal alloys and the nitrides thereof or the soft magnetic materials of the nitrided amorphous alloys or nitrided fine crystal alloys modulated at least in the compsn. of the nitrogen in the film thickness direction in the gap part 11 of the ferrite cores 12 and in which the layers in contact with the ferrite of the soft magnetic materials are the nitride layer or the nitrogen enriched layers. Then, the diffusion of elements between the multilayered films and the ferrite is suppressed at the time of the heat treatment for the purpose of forming the gap. The influence of a pseudo gap is suppressed in this way and the degradation in head characteristics is suppressed.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic head, and particularly to a so-called MIG type magnetic head in which a magnetic material having a high saturation magnetic flux density and high magnetic permeability is arranged in a magnetic gap portion.

Conventional technology In recent years, advances in video, audio, and information-related equipment have been remarkable.

The mainstream of recording in these fields is magnetic recording, and due to rapid progress in magnetic heads, various types of heads such as laminated heads and thin film heads are being researched to meet various demands. ing.

Among these heads, the metal-in-gap (MIG) type, which has already been put into practical use in terms of manufacturing costs and wear resistance, has a magnetic material with high saturation magnetic flux density and high magnetic permeability arranged in the magnetic gap part. The head is excellent.

However, with conventional magnetic materials, their saturation magnetic flux density and magnetic permeability have almost reached their limits in response to the increasing coercive force of media and miniaturization of unit recording area, which are progressing with the increasing density of recording media. .

Therefore, as a magnetic material with higher saturation magnetic flux density and magnetic permeability, a multilayer film of Co-based amorphous and its nitride (for example, "IEICE Technical Research Report J MR
87-14 (1987)) or a multilayer film of Fe-based amorphous and its nitride (for example, [IEICE technical research report JMR88-55 (1989)), etc. have been studied.

Problems to be Solved by the Invention However, the above-mentioned multilayer film of Co-based or Fe-based amorphous and its nitride was originally developed as a laminated type head material on ceramic or glass substrates, so MrG When a film is deposited on ferrite as a type of head and heat treated to form a gear ring,
Diffusion of elements such as 0 and CO occurs between the ferrite and the ferrite.

Therefore, it is applied to the type of MIG where the interface between the ferrite and soft magnetic film is parallel to the main gap (hereinafter referred to as parallel gap type MIG), which is the easiest to manufacture and has the lowest cost among MIG type heads. In this case, a problem arises in that a pseudo gap occurs, causing undulations in the frequency characteristics of the head output.

In view of the above problems, the present invention uses a film such as a multilayer film of the above-mentioned Co-based or Fe-based amorphous and its nitride, which has higher saturation magnetic flux density and magnetic permeability than conventional magnetic materials, and which is free from the effects of pseudo gaps. A small parallel gear MIG type magnetic head is provided.

Means for Solving the Problems In order to solve the above problems, the magnetic head of the present invention has a soft magnetic film in which an amorphous alloy or a microcrystalline alloy and a nitride thereof are alternately laminated, or a soft magnetic film in which at least nitrogen is added in the film thickness direction. In a MIG type magnetic head in which a soft magnetic film of an amorphous nitride alloy or a microcrystalline nitride alloy with a modulated composition is placed on the cap of a ferrite core, the layer of the soft magnetic film in contact with the ferrite is a nitride layer or a nitrogen-rich layer. It has a structure of layers.

Effect of the Invention The present invention suppresses the diffusion of elements between the multilayer film and the ferrite during heat treatment for gap formation by the above-described structure, thereby suppressing the influence of pseudo gap and preventing deterioration of head characteristics. This will result in a break.

Embodiments Embodiment 1 A magnetic head according to a first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing the vicinity of the gap between the sliding surface of the magnetic head and the magnetic recording medium before heat treatment in all the embodiments of the present invention.

In FIG. 1, 11 is a main gap, 12 is a ferrite core, and 15 is a soft magnetic film, which immediately after film formation consists of a nitrogen-rich layer shown at 13 and a nitrogen-depleted layer shown at 14. In the figure, several layers of nitrogen-rich layer 13 and nitrogen-depleted layer 14 are shown only in the soft magnetic film below the main gap, but in reality, all the soft magnetic films 15 on both sides of the main gap are nitrogen-rich. It is composed of a rich layer 13 and a nitrogen-deficient layer 14. However, after heat treatment, depending on the material, the layered structure may almost completely disappear. 16 is molded glass. In the first example, 13 in FIG. 1 has a composition immediately after deposition of Co53.5Nb3.5Zrz N++, 1
The thickness of the layer is 270, and the composition of 14 is COs immediately after deposition.
s, sN bs, 5Zrz, the thickness of one layer is 270, and the thickness of the soft magnetic film 15 is 5.4 μm.

Regarding the magnetic head configured as above, the cylinder 2 is as follows.
, 3, 4 and 5, its operation will be explained.

First of all, Figure 2 shows the distribution of each element in the film thickness direction immediately after deposition of a soft magnetic film fabricated so that the non-nitrided layer is first bonded to the ferrite, at the junction between the soft magnetic film and the ferrite. Figure 3 shows the distribution of each element in the film thickness direction after annealing at 550"C for 1 hour in the soft magnetic film shown in Figure 2, measured by Auger electron spectroscopy in the vicinity of Figure 4, which was measured by Auger electron spectroscopy near the junction between the soft magnetic film and ferrite, shows the soft magnetic film immediately after deposition, where the nitride layer was first bonded to the ferrite. The distribution state of each element in the thickness direction was measured by Auger electron spectroscopy near the junction between the soft magnetic film and ferrite. The distribution state of each element in the film thickness direction after annealing at °C for 1 hour is measured by Auger electron spectroscopy in the vicinity of the junction between the soft magnetic film and the ferrite. 4 and 5, the horizontal axis indicates the position in the thickness direction of the film, and the vertical axis indicates the energy intensity of Auger electrons from each element observed.In each figure, 21.
22.23.24.25 are respectively Co, 0, Fe,
This is the energy intensity of Auger electrons of Nb,,N.

The clear distinction between the nitride layer and the non-nitride layer seen in Figures 2 and 4 disappears after annealing, but if you compare Figures 3 and 5, it is clear that the nitride layer is separated from the ferrite layer. When the film is deposited, the diffusion of elements between the soft magnetic film and the ferrite is suppressed to a smaller extent than when the non-nitride film is deposited.

Table 1 shows that the composition immediately after deposition is C05a, 5Nbs, and sZ.
A magnetic head fabricated on a ferrite layer from a layer of
In a magnetic head fabricated on ferrite from a layer of
Phantom image output at magnetomotive force 550 mA turn and writing frequency 65 kHz (output VM at the pseudo gap vs. output VM at the main gap).

(ratio) and the waviness of the frequency characteristics.

Table 1 From Table 1, the influence of the pseudo gap is smaller in soft magnetic films made from nitrided layers where element diffusion is small than in soft magnetic films made from non-nitrided layers where element diffusion is large. I understand that.

As described above, according to this example, the composition immediately after deposition is CO2.
1+3. sNb! , 5. In a MIG type head in which a soft magnetic film made by alternately laminating 270 amorphous alloys of Zr zN II, Co, sN bs, and sZr is placed on the cap part of the ferrite core, The layer in contact with the ferrite of the soft magnetic film is coated with CO8
3,5N b3. By forming the s Z r z Nz layer, the diffusion of elements between the soft magnetic film and the ferrite is suppressed, the influence of the pseudo-I gap is reduced, and the high saturation magnetic flux density and high magnetic permeability of the soft magnetic film are utilized. A MIG head can be provided.

Example 2 A second example of the present invention will be described below with reference to FIG. 1 and Table 2.

In FIG. 1, in this embodiment, 14 is a layer of M and T, and 13 is a nitride layer of 14. In the above, M is F
e, Co, Ni, Mn, T is Nb, Zr, Ti, Ta, Hf, Cr,
It is one or more elements selected from the group consisting of W and Mo.

Table 2 shows the relative speed between the head and the magnetic recording medium for a magnetic head fabricated with the non-nitrided layer first bonded to the ferrite and a magnetic head fabricated such that the nitrided layer first bonded to the ferrite. 3.1m/s, magnetomotive force 550mA-turn, writing frequency 65kHz,
Pseudo output at (output at main gear knob).

The figure shows the composition dependence of the waviness of the frequency characteristics.

Table 2 From Table 2, M is one or more metals selected from the group consisting of Fe5Co, Ni, and Mn, and T is Nb, Zr, and Ti5.
It can be seen that when one or more elements are selected from the group consisting of Ta, Hf5Cr, W, and Mo, the influence of the pseudo gap is smaller in the soft magnetic film made from the nitride layer.

As described above, according to this embodiment, before heat treatment, there is a laminated film of M and T layers and their nitride layers, and in the above, M is Fe.
, Co, Ni, Mn, T is Nb, Zr, Ti, Ta, Hf, Cr, W
In a MIG type head in which a soft magnetic film made of one or more elements selected from the group consisting of SMo is arranged on the cap part of the ferrite core, the layer in contact with the ferrite of the soft magnetic film is made of M, T, and N. By forming a layer of
It is possible to provide an MIG head that takes advantage of high magnetic permeability.

Example 3 A third example of the present invention will be described below with reference to FIG. 1 and Table 3.

In FIG. 1, in this embodiment, 14 is a layer of M, T, and U, and 13 is a nitride layer of 14. In the above, M is one or more metals selected from the group consisting of Fe, Co, Ni, and Mn, and T is Nb, Zr, Ti, Ta, Hf, Cr.
, W, Mo, Re, , Ru, and U is one or more elements selected from the group consisting of B, Si, Ge, and AI.

Table 3 shows the relative speed between the head and the magnetic recording medium for a magnetic head manufactured so that the non-nitrided layer first joins to the ferrite and a magnetic head manufactured so that the nitrided layer first joins the ferrite. 3. b+/s, magnetomotive force 550mA-turn, writing frequency 65k) lz
Pseudo output at , (output at main gap ■).

, the output at the pseudo gap ■. (ratio of ) and composition dependence of waviness in frequency characteristics.

(Margin below) Table 3 From Table 3, M is one or more metals selected from the group consisting of Fe5Co and NiXMn, and T is Nb, Zr, Ti,
One or more elements selected from the group consisting of Ta, Hf, Cr, W, Mo, Re, Ru, U, B, Si, Ge
, AI, the influence of the pseudo gap is smaller in the soft magnetic film made from the nitride layer.

As described above, according to this embodiment, before the heat treatment, there is a laminated film of M, T, and U layers and their nitride layers, where M is made of Fe, Co, Ni, and Mn. one or more metals selected from T is Nb, Zr, Ti5Ta, Hf, C
A soft magnetic film is formed in which one or more elements are selected from the group consisting of r, W, Mo, Re, and Ru, and U is one or more elements selected from the group consisting of B, St, Ge, and AI. In the MIG type head disposed on the cap of the ferrite core, the layer in contact with the ferrite of the soft magnetic film is
By forming layers of M, T, U, and N, the diffusion of elements between the soft magnetic film and the ferrite is suppressed, the influence of the pseudo gap is reduced, and the high saturation magnetic flux density and high magnetic permeability of the soft magnetic film are achieved. We can provide MIG heads that take full advantage of this.

Example 4 A fourth example of the present invention will be described below with reference to FIG. 1 and Table 4.

In Figure 1, 14 is a layer of M, T, and Co, and 13 is 14
In this example, the nitrided layer is used. In the above M
is a metal selected from the group consisting of Fe and Mn, and T is an element selected from the group consisting of Nb, Zr, Ti, Ta, and Hf.

Table 4 shows the relative speed between the head and the magnetic recording medium for a magnetic head manufactured so that the non-nitrided layer first joins to the ferrite and a magnetic head manufactured so that the nitrided layer first joins the ferrite. At 3.1m/s, magnetomotive force 550mA -turn, writing frequency 65kHz
, pseudo output (output V1 at main gap)
4) and the ratio of the output V in the pseudo gap to
This shows the dependence of the waviness of the frequency characteristics on the composition.

Table 4 From Table 4, if M is one or more metals selected from the group consisting of Fe and Mn, and T is one or more elements selected from the group consisting of Nb, Zr, Ti, Ta, and Hf. It can be seen that the influence of the pseudo-I gap is smaller in the soft magnetic film made from the nitride layer.

As described above, according to this embodiment, before the heat treatment, there is a laminated film of M, T, and Co layers and their nitride layers;
is a metal selected from one or more of the group consisting of Fe and Mn, and T is NbZr, Ti.

In a MIG type head in which a soft magnetic film made of one or more elements selected from the group consisting of Ta and Hf is arranged on the cap part of the ferrite core, the layer of the soft magnetic film in contact with the ferrite is made of M and T. By using a layer of CO, N, and CO, the diffusion of elements between the soft magnetic film and ferrite is suppressed, and the influence of the pseudo gap is reduced. head can be provided.

Example 5 A fifth example of the present invention will be described below with reference to FIG. 1 and Table 5.

In FIG. 1, 14 is the layer of M, T, and U, and 13 is 14
In this example, the nitrided layer is used. In the above M
! , tFeSFe-Co, , a metal selected from the group consisting of Nf, T is an element selected from the group consisting of Nb, Ta, Nb-Ta, U is selected from the group consisting of B, 5i-B, Ge-B is the selected element.

Table 5 shows the relative speed between the head and the magnetic recording medium for a magnetic head manufactured so that the non-nitrided layer first joins to the ferrite and a magnetic head manufactured so that the nitrided layer first joins the ferrite. At 3.1m/s, magnetomotive force 550+wA-turn, writing frequency 65kHz
, pseudo output (output at main gap■9
The figure shows the composition dependence of the waviness of the frequency characteristic (the ratio of the output VG in the pseudo gap to

(Left below) Table 5 From Table 5, M is a metal selected from the group consisting of Fe, Fe-Co, and Ni, T is an element selected from the group consisting of Nb, Ta, and Nb-Ta, and U is an element selected from the group consisting of Nb, Ta, and Nb-Ta. B, Si-B, Ge-
It can be seen that when the element is selected from the group consisting of B, the influence of the pseudo gap is smaller in the soft magnetic film made from the nitride layer.

As described above, according to this embodiment, before the heat treatment, there is a laminated film of M, T, and U layers and their nitride layers, where M is selected from the group consisting of Fe, Fe-Co, and Ni. A soft magnetic film of selected metal, T is an element selected from the group consisting of Nb5Ta, Nb-Ta, and U is an element selected from the group consisting of B, 5i-B, Ge-B, is made of ferrite. In the MIG type head placed on the cap of the core,
By making the layer in contact with the ferrite of the soft magnetic film to be a layer of M, T, U, and N, the diffusion of elements between the soft magnetic film and the ferrite is suppressed, the influence of pseudo-image gamble is reduced, and the soft magnetic It is possible to provide an MIG head that takes advantage of the film's high saturation magnetic flux density and high magnetic permeability.

Example 6 A sixth example of the present invention will be described below with reference to FIG. 1 and Table 6.

In FIG. 1, 14 is the layer of M, T, and U, and 13 is 14
In this example, the nitrided layer is used. In the above M
FeXFe-Co, Fe-Ni,
A metal selected from the group consisting of Fe-Co-Ni, T is one or more elements selected from the group consisting of Nb, Ta, Zr, and Ti, and U is one or more elements selected from the group consisting of B, Si, and C. is the selected element.

Table 6 shows the relative speed between the head and the magnetic recording medium for a magnetic head fabricated with the non-nitrided layer first bonded to the ferrite and a magnetic head fabricated such that the nitrided layer first bonded to the ferrite. At 3.1 m/s, magnetomotive force 55 hA-turn, writing frequency 55 kHz, pseudo output (ratio of pseudo output (hereinafter the output at the gap) to output (■) at the main gap) and frequency characteristics This figure shows the dependence of the waviness on the composition.

Table 6 From Table 6, M is Fe, Fe-Co, with Fe as the main component.
, Fe-Ni, , a metal selected from the group consisting of Fe-Co-Ni, T is an element selected from one or more types from the group consisting of Nb, Ta, Zr, and Ti, and U is selected from B, Si, and C. It can be seen that when one or more elements are selected from the group, the influence of the pseudo gap is smaller in the soft magnetic film made from the nitride layer.

As described above, according to this embodiment, before heat treatment, there is a laminated film of M, T, and U layers and their nitrided layers, where M is mainly composed of Fe, Fe, Fe-Co, Fe-Ni, F
metal selected from the group consisting of e-Co-Ni, T is N
b, an element selected from the group consisting of Ta, Zr, and Ti; U is an element selected from the group consisting of B, Si, and C; In the MIG type head placed in the
This layer suppresses the diffusion of elements between the soft magnetic film and ferrite, reduces the influence of pseudo-magnetic bumps, and enables MIG heads that take advantage of the high saturation magnetic flux density and high magnetic permeability of the soft magnetic film. can be provided.

In addition, in the second, third, fourth, fifth, and sixth embodiments, M and T, M and T and U, M and T, Co5M and T and U, and M and T and Ul are possible, respectively. Among the combinations, the second,
A similar tendency exists for combinations not listed in Tables 3, 4, 5, and 6.

Further, in all the examples, the head gap formation temperature was 550°C, but it may be formed at a different temperature depending on the material of the mold glass. Although detailed composition ratios are not listed in Table 2 and below, soft magnetic films made from nitride layers have a higher saturation density, higher magnetic permeability, and a composition suitable for soft magnetic materials. The tendency for the influence of the pseudo gap to become smaller was similar.

Effects of the Invention As described above, the present invention provides a soft magnetic film in which an amorphous alloy or a microcrystalline alloy and its nitride are alternately laminated, or a nitrided amorphous alloy or a soft magnetic film in which at least the composition of nitrogen is modulated in the film thickness direction. In a MIG type head in which a soft magnetic film of microcrystalline nitride alloy is placed on the cap of a ferrite core, the layer of the soft magnetic film in contact with the ferrite is
To provide a MIG type magnetic head, which has a configuration of a nitride layer or a nitrogen-rich layer, so that the recording and reproducing characteristics of the head are superior to conventional MIG type heads, and the influence of pseudo gaps is sufficiently small. I can do it.

[Brief explanation of the drawing]

FIG. 1 shows a magnetic head according to a first embodiment of the present invention.
A plan view showing the vicinity of the gap between the sliding surface and the magnetic recording medium. Figure 2 shows the distribution of each element in the film thickness direction of a soft magnetic film fabricated from a non-nitrided layer onto ferrite immediately after film deposition. Figure 3 shows the 550° angle of a soft magnetic film fabricated on ferrite from a non-nitrided layer.
FIG. 4 is a diagram showing the distribution state of each element in the film thickness direction after annealing at C for 1 hour measured by Auger electron spectroscopy, and a diagram showing the distribution state of each fourth element measured by Auger electron spectroscopy. 11...Main gap, 12...Ferrite core, 13...Nitrogen rich layer, 14...
...Nitrogen-depleted layer, 15...Soft magnetic film, 16
...Mold glass, 21...Energy intensity of Auger electrons from Co, 22...
Energy intensity of Auger electron from 0, 23...
...Energy intensity of Auger electrons from Fe, 24.
...Energy intensity of Auger electrons from Nb,
25... Energy intensity of Auger electrons from N. Name of agent: Patent attorney Akira Okaji and two others

Claims (6)

[Claims] (1) A soft magnetic film in which an amorphous alloy or microcrystalline alloy and a nitride of the amorphous alloy or microcrystalline alloy are alternately laminated, or an amorphous nitride alloy or nitride in which at least the composition of nitrogen is modulated in the film thickness direction. 1. A magnetic head of the MIG type in which a soft magnetic film of microcrystalline alloy is disposed in a gap portion of a ferrite core, wherein a layer of the soft magnetic film in contact with the ferrite is a nitride layer or a nitrogen-rich layer. (2) The soft magnetic film is a laminated film of M and T layers and their nitride layers, or a soft magnetic film of M, T, and N in which at least the nitrogen composition is modulated in the film thickness direction, and , M is F
e, Co, Ni, Mn, T is Nb, Zr, Ti, Ta, Hf, Cr,
2. The magnetic head according to claim 1, wherein the magnetic head is one or more elements selected from the group consisting of W and Mo. (3) The soft magnetic film is a laminated film of M, T, and U layers and their nitride layers, or a soft magnetic film of M, T, U, and N in which at least the nitrogen composition is modulated in the film thickness direction. , in the above, M is one or more metals selected from the group consisting of Fe, Co, Ni, and Mn, and T is Nb, Zr, Ti, Ta, and Hf.
, Cr, W, Mo, Re, Ru, U is one or more elements selected from the group consisting of B, Si, Ge, Al, C, N is nitrogen. The magnetic head according to claim 1, characterized in that: (4) The soft magnetic film is a laminated film of M, T, and Co layers and their nitride layers, or a soft magnetic film of M, T, Co, and N in which at least the nitrogen composition is modulated in the film thickness direction. In the above, M is one or more metals selected from the group consisting of Fe and Mn, T is one or more elements selected from the group consisting of Nb, Zr, Ti, Ta, and Hf, and N is nitrogen. The magnetic head according to claim 1, characterized in that: (5) The soft magnetic film is a laminated film of M, T, and U layers and their nitride layers, or a soft magnetic film of M, T, U, and N in which at least the nitrogen composition is modulated in the film thickness direction. , in the above, M is a metal selected from the group consisting of Fe, Fe-Co, and Ni, T is an element selected from the group consisting of Nb, Ta, and Nb-Ta, and U is B, Si-B. , Ge--B, and N is nitrogen. (6) The soft magnetic film is a laminated film of M, T, and U layers and their nitride layers, or a soft magnetic film of M, T, U, and N in which at least the nitrogen composition is modulated in the film thickness direction. , in the above, M has Fe as the main component, Fe, Fe-Co, Fe-N
i, a metal selected from the group consisting of Fe-Co-Ni;
T is one or more elements selected from the group consisting of Nb, Ta, Zr, and Ti; U is one or more elements selected from the group consisting of B, Si, and C; and N is nitrogen. A magnetic head according to claim (1).