JPH03238606A - Magnetic head and production thereof - Google Patents

Abstract

PURPOSE:To obtain the magnetic head which obviates the generation of a pseudo gap at a high yield by forming a magnetic metallic thin film of a magnetic material contg. nitrogen. CONSTITUTION:Wedge-shaped grooves 51, 52 are formed on a pair of ferrite substrates 11, 12 and the magnetic metallic thin film 2 is formed to <=5mum on the one half split ferrite substrate 11. A groove 6 to serve as a window hole for winding is formed on the one half split ferrite substrate 12 and the substrates are bonded while the substrates are brought into pressurized contact by inserting a nonmagnetic thin film and glass therebetween; thereafter, the winding is applied thereto to obtain the magnetic head. The magnetic metallic thin film is formed by reactive sputtering of Co82Nb15Zr3 in a gaseous mixture composed of gaseous N2+gaseous Ar. Thus, the magnetic head is efficiently constituted of an amorphous magnetic metallic material which withstands a high-temp. process.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] In the present invention, a pair of oxide magnetic materials having a metal magnetic thin film formed on at least one of them are brought together via a non-magnetic thin film. The present invention relates to improvements in a so-called metal-in-gap type magnetic head, and relates to a magnetic head suitable for magnetic recording and reproduction using a recording medium having a high coercive force, and a method for manufacturing the same.

[Conventional technology]

Conventionally, metal-in-gap magnetic heads use Ni-Zn ferrite and Mn as oxide magnetic materials.
-Zn ferrite etc. have been used.

Also, as a metal magnetic thin film, Sendas (FeAlsi)
, and Co-based amorphous alloys (CoNbZr, etc.) have been studied.

As a magnetic head for this machine, for example, JP-A-63-300
Examples include those described in Publication No. 412.

Furthermore, Fe is a material with a very high saturation magnetic flux density.
alloy materials (FaCoSiAl, FeAIG・, Fe
Ga51) etc. are known.

[Problem to be solved by the invention]

In the conventional technique described above, when a solitary wave is reproduced, the influence of a pseudo gap that generates a small peak in addition to a main peak may be observed in the reproduced signal.

Regarding the sendust thin film, if the orientation of the ferrite is selected, a pseudo gap will not occur at low temperatures, but it is necessary to bond with glass, etc., which has good sliding properties and is less likely to be damaged by sliding. about,
It is necessary to choose a material with a high melting point (melting point 550-650°C).

Therefore, if the temperature during glass bonding is high,
Since mutual diffusion occurs between the oxide magnetic material and the metal magnetic thin film, a degraded layer (non-magnetic) on the order of 111 μm is likely to be formed, forming a pseudo gap.

By using the Go thread amorphous material as the metal magnetic material, and by roughening the surface of the oxide magnetic material and making the interface non-parallel, the effect of the pseudo gap can be avoided, but the saturation magnetic flux density is low (the fourth (Bs in the figure is 1 T or less), it is impossible to perform melt pressure bonding with high melting point glass.

Therefore, there is a problem with the wear resistance of the glass portion.

The present invention uses a high melting point glass crimped K11tf and a soft magnetic metal thin Wi& having a high saturation magnetic flux aF degree, and metal-
By constructing an in-gap type head.

It is an object of the present invention to provide a magnetic head with high yield and no generation of pseudo gaps, and a method for manufacturing the same.

[Means to solve the problem]

The above purpose is to use nitride, an amorphous magnetic material, for the metal magnetic thin film, and as a manufacturing technology, glass bonding is used to form a magnetic head along the length of a block (magnetic head slider) in which several tens of magnetic heads are connected. In order to improve the soft magnetic properties of the film, the nitride of the amorphous magnetic material is applied in the 1g4 thickness direction so that it is maximum at the interface. This is achieved by using a multi-M film whose composition is changed.

[Effect]

FIG. 3 is a diagram showing the outline of the profile in the direction 1-1 of FIG. 1 based on AES analysis when a conventional magnetic head made of ferrite and sendust is heat-treated at 600°C, and 02 in the ferrite is near the interface. It decreases in the middle of the alteration layer, and shows a maximum value in the center of the altered layer.

Along with this, A1 in the sendust decreases near the interface and reaches a maximum f111 at the center of the altered layer.

This is thought to be the result of mutual diffusion at the interface, where A1, which is easily oxidized, reacted with 0□ in the ferrite and remained at the interface.

Isolated by this magnetic hekudo g1. When regenerated, the effect of a pseudo-gap is seen, but when heat treated at a much lower temperature, no altered layer is generated, and no effect of a pseudo-gap is observed.

Since the pseudo gap position calculated from the reproduction peak due to the pseudo gap and the width of the altered layer are approximately the same, it is clear that this altered layer becomes a pseudo gap.

The same phenomenon as described above occurs when a Co-based amorphous alloy is heat treated at a temperature close to the crystallization temperature but below the crystallization temperature.

Especially during depressurization (10-2 to 102 Torr@degrees), 0□
If heat treatment is performed while the material remains, a maximum peak of the added element will occur at the interface.

As a result, the saturation magnetic flux density of the entire film decreases, and the film exhibits the same characteristics as when it is partially crystallized.

Figure 2 is an ABS analysis of a magnetic hect according to the present invention made of ferrite and a Go nitride amorphous alloy as shown in Figure 1 I-1.
FIG. 4 is a diagram schematically showing the profile of the direction, and when the same study as above is performed, even if thermal treatment is performed at a temperature higher than the crystallization temperature of non-nitride, G.

The diffusion of other additive elements may simply be reduced at the interface.
It can be considered that there is only mutual diffusion. Furthermore, the saturation magnetic flux density of the entire layer does not decrease.

Figure 4 shows the dependence of Bs5lIIIt thermal temperature on N2 partial pressure in CoNbZr nitride. Experimental values of degrees are shown.

When the N2 partial pressure is 2096 or higher, a Co amorphous metal with good heat resistance can be obtained.

Among them, if the N2 partial pressure is low, the saturation magnetic flux density and the heat resistance temperature cannot be improved.

This is thought to be because when the N2 partial pressure is low, nitriding is not performed sufficiently due to the effects of residual gas and the like.

Also, when carrying out the S treatment, the effects of oxygen in the atmosphere should be avoided as much as possible.

This is because, as described above, in the presence of 0□ and under high temperature conditions, the oxidation of the added element cannot be ignored.

Therefore, bonding process 8 needs to be performed during the N2 flow.

Further, in glass bonding, in order to control the magnetic anisotropy of Ii4, it is necessary to apply the entire static magnetic field in a direction perpendicular to the direction of magnetic flux propagation.

Therefore, bonding is performed by applying a magnetic field in a direction parallel to the magnetic gap on the sliding surface.

Furthermore, when Go thread amorphous alloy is nitrided, soft magnetic properties may not be easily obtained.

It is known that this is because perpendicular magnetic anisotropy is generated by nitriding.

In this case, it is possible to reduce the coercive force and improve the soft magnetic properties by forming a multilayer film in which a non-nitrided layer and a nitrided layer are stacked on the order of tens of OA.

Specifically, it is necessary to maximize the nitrogen content of the Co nitride-based amorphous alloy at the interface, and to set the thickness of the nitride layer to about several 100 to 100X.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

<Embodiment 1> FIG. 1 is a perspective view illustrating an embodiment of the magnetic head according to the present invention, in which wedge-shaped grooves 51 and 52 are formed in a pair of ferrite substrates 11 and 12, and one half of the ferrite substrate is formed with wedge-shaped grooves 51 and 52. A metal magnetic thin film 2 is formed on the substrate 11 to a thickness below Sam, and a groove 6' is formed on one half of the ferrite substrate 12 to serve as a window hole for the winding wire.
T-formed and non-magnetic! 1.4 Bonding is performed while pressing and bonding with glass in between, and then winding is performed to obtain a magnetic head.

The metal magnetic thin film is COg2N b15Z 15'ff
It was formed by reactive sputtering in a mixed gas of N2 gas and Ar gas.

The total gas pressure was on the order of 10-3 Torr, and the N2 partial pressure was 20% or more.

For the sputtering method, a DC facing sputtering device was used. Other sputtering methods are also possible in principle.

Glass bonding was performed at 600°C for 30 minutes. A static magnetic field of 11 kOft was applied so as to match the direction of the magnetic gap on the sliding surface.

With the magnetic hect obtained in this way, the isolated fIR is reproduced,
A peak ratio of 40 dB or more was achieved. Among them, the playback output of the main gap was also reproduced at the same level as the conventional one. (Example 2) CoTaZrt was used in the same manner as in Example 1.

In this case, the metal magnetic thin film is C0g2 T J15 Z
r3 was formed using an RF sputter.

Nitrided CoTaZr has a saturation magnetic flux density of 1.4 T or more, but a coercive force of 500 or more, so it cannot be directly applied to a metal-in-gap head.

Therefore, in order to reduce the coercive edge metal, non-nitrided-nitrided
An r1 film was formed and heat treated (600°C for 50 minutes) to reduce the coercive force to 1150e or less.

Among them, to prevent the formation of a variable X layer at the interface.

Only the thickness of the nitride layer at the interface is set to 5001, and the other parts are set to 20.
Nitrided and non-nitrided M were alternately stacked at intervals of 0.01.

A solitary wave was reproduced using the magnetic head formed in this manner, and a peak ratio of 40 dB or more was achieved.

<Example 3> lj! Using the same method as in Example 2, F nitride was added to the metal magnetic thin film.
It was formed using eAl5it-.

In this case, a metal magnetic thin film FeAl5it- is used.

Sputtering was performed by introducing Ar gas mixed with 20% or more nitrogen.

For the sputtering method, a DC facing sputtering device was used.

Of course, other sputtering methods are also possible in principle.

Glass bonding was performed at 600°C for 30 minutes.

During bonding, the direction of the static magnetic field was aligned with the direction of the magnetic gap on the sliding surface, and 11 kOe was applied.

The magnetic head obtained in this manner also reduced the reproduction of pseudo earrings, reproduced solitary waves, and achieved a peak ratio of 40 dB or more.

〔Effect of the invention〕

As explained above, according to the present invention, ? The magnetic head can be constructed from an amorphous metallic magnetic material that can withstand fE temperature processes.

In this way, it is possible to use a material with a melting point of 600° C. or higher for the filling glass, making it possible to select a material with good sliding properties, high hardness, and little warping from a wider range.

Therefore, the amorphous metal nitride can improve the hardness of the film, thereby increasing the wear life and - reducing the wear.

Furthermore, by imparting magnetic anisotropy at a high temperature during bonding, as long as subsequent steps do not exceed the temperature during bonding, the magnetic properties will not be affected by the II magnetic anisotropy and the magnetic properties will not deteriorate.

Among these, when nitride sendust is used, a magnetic head having similarly good recording and reproducing characteristics can be obtained.

Except for the problems of the prior art described above, it is possible to provide a magnetic head with excellent functionality and a method for manufacturing the same.

[Brief explanation of drawings]

Fig. 1 is a perspective view illustrating an embodiment of the magnetic head according to the present invention, and Fig. 2 is a perspective view illustrating an embodiment of the magnetic head according to the present invention.
FIG. 1 wcS diagram showing an outline of the profile in the direction of FIG. FIG. 4 is a diagram showing the N2 partial pressure dependence of the allowable temperature of CoNbZrK nitride and BS. 2... Metal magnetic thin film, 5... Magnetic gap, 11... Ferrite substrate (I core), 1
2... Ferrite substrate (C core), 6...
...Window hole, 41#42...Glass, 51.52
...Glass filled groove. 1st Article 20 SPIJTTERIN & TIME (1A [1n L-Utl') part)

Claims (1)

[Scope of Claims] 1. A pair of cores made of an oxide magnetic material, one of which has a concave portion serving as a winding window hole, and a metal magnetic thin film formed on at least one of the cores, and a non-magnetic core formed in contact with the metal magnetic thin film. a thin film;
a conductor coil wound around the core of the oxide magnetic material through the winding window hole; What is claimed is: 1. A magnetic head bonded by bonding, wherein the metal magnetic thin film is made of a nitrogen-containing magnetic material. 2. The magnetic head according to claim 1, wherein the metal magnetic thin film is an amorphous magnetic material containing nitrogen. 3. In the method for manufacturing a magnetic head according to claim 1, when bonding the pair of cores of oxide magnetic material with glass or the like, the cores are bonded in a nitrogen flow and in a direction parallel to the sliding direction of the magnetic head. A method of manufacturing a magnetic head, characterized in that a static magnetic field is applied in a direction perpendicular to the surface and parallel to the surface on which the metal magnetic thin film is formed. 4. In the magnetic head according to claim 1, the nitrogen content of the nitrogen-containing amorphous metal magnetic thin film changes periodically in the film thickness direction, and the nitrogen content of the nitrogen-containing amorphous metal magnetic thin film changes periodically in the film thickness direction, and the nitrogen content of the nitrogen-containing amorphous metal magnetic thin film changes periodically in the film thickness direction. A magnetic head characterized in that the nitrogen content is maximized in the region where the material contacts the ferrite substrate.