JPH04182907A - Magnetic head - Google Patents

Magnetic head

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Publication number
JPH04182907A
JPH04182907A JP31351190A JP31351190A JPH04182907A JP H04182907 A JPH04182907 A JP H04182907A JP 31351190 A JP31351190 A JP 31351190A JP 31351190 A JP31351190 A JP 31351190A JP H04182907 A JPH04182907 A JP H04182907A
Authority
JP
Japan
Prior art keywords
layer
soft magnetic
nitrogen
magnetic film
ferrite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP31351190A
Other languages
Japanese (ja)
Other versions
JP2579063B2 (en
Inventor
Toru Hori
徹 堀
Takeshi Takahashi
健 高橋
Akihiro Ashida
芦田 晶弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2313511A priority Critical patent/JP2579063B2/en
Priority to US07/769,852 priority patent/US5227193A/en
Publication of JPH04182907A publication Critical patent/JPH04182907A/en
Application granted granted Critical
Publication of JP2579063B2 publication Critical patent/JP2579063B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PURPOSE:To obtain the magnetic head which hardly forms a pseudo magnetic gap by providing three layers; a layer of a soft magnetic film which contains at least nitrogen, a layer of a soft magnetic film which does not contain the nitrogen and a layer of a soft magnetic film which contains the nitrogen in the section where the soft magnetic films come into contact with ferrite. CONSTITUTION:The three layers; the layer 14 of the soft magnetic film which contains the nitrogen, the layer 15 of the soft magnetic film which does not contain the nitrogen and the layer 13 of the soft magnetic film which contains the nitrogen are provided in the section where the soft magnetic films come into contact with the ferrite at the head of an MIG type disposed with the soft magnetic films in the gap part of the ferrite cores. The nitrogen ligther than metal atoms diffuses from the nitrided layer 14 adjacent to the ferrite 12 further to the non-nitrided layer 15 adjacent thereto at the time of the heat treatment for gap formation. If the non-nitrided layer 15 pinched by the nitrided layer 14 is as thin as the nitrided layer 14, the compsn. of the metal is larger in the non-nitrided layer 15 by as much as the nitrogen-content and, therefore, the concn. of the nitride of the metal of the initial non-nitrided layer 15 is sufficiently larger than the concn. of the nitride of the metal of the first nitrided layer 14 and this nitride completely suppresses the diffusion of the elements, such as oxygen, from the ferrite 12. The influence of the pseudo gap is suppressed in this way and the degradation of the head magnetic characteristics is prevented.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は磁気ヘッド、特に磁気ギャップ部に高飽和磁束
密度、高透磁率の磁性材を配置した、いわゆるMIGタ
イプの磁気ヘッドに関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic head, and particularly to a so-called MIG type magnetic head in which a magnetic material having a high saturation magnetic flux density and high magnetic permeability is arranged in a magnetic gap portion.

従来の技術 近年、映像、音響、情報関連機器の進歩はめざましい。Conventional technology In recent years, advances in video, audio, and information-related equipment have been remarkable.

これらの分野での記録の主流は磁気記録であり、記録密
度の高密度化への強い要求により、高保磁カメタル媒体
、及びそれに対応すべく十分な記録能力を持つ磁気ヘッ
ドの開発が精力的に進められている。
The mainstream of recording in these fields is magnetic recording, and due to the strong demand for higher recording densities, efforts are being made to develop high-coercive metal media and magnetic heads with sufficient recording capacity to meet these demands. It is progressing.

磁気ヘッドに関して言えば、高飽和磁束密度を有するセ
ンダストやCo基アモルファス、Fe基合金等を用いた
多種多様の磁気ヘッドが開発され、既に一部については
実用化されている。それらの中にあって、主コアが磁性
フェライトからなり、ギャップに対して平行に高飽和磁
束密度、高透磁率の金属磁性膜が形成されたタイプのヘ
ッド、いわゆる平行ギヤツブ型MrGヘッドは、比較的
単純な構造で生産性に冨むという長所がありながら、熱
処理時の反応、拡散に起因して、フェライトと金属膜の
界面での疑似ギャップの生成による疑似信号が発生する
ため、実用化は困難であった。そこで近年、フェライト
との反応、拡散の少ない金属膜や非磁性の反応防止膜等
の研究が行われ、平行ギャップ型のMIGヘッドも実用
化しつ一つある。
Regarding magnetic heads, a wide variety of magnetic heads using materials such as Sendust, Co-based amorphous, and Fe-based alloys having high saturation magnetic flux density have been developed, and some of them have already been put into practical use. Among these, the so-called parallel gear type MrG head, which has a main core made of magnetic ferrite and a metal magnetic film with high saturation magnetic flux density and high magnetic permeability formed parallel to the gap, is comparatively Although it has the advantage of having a simple structure and high productivity, it is difficult to put it into practical use because it generates false signals due to the generation of a false gap at the interface between the ferrite and metal film due to reaction and diffusion during heat treatment. It was difficult. Therefore, in recent years, research has been carried out on metal films and nonmagnetic reaction prevention films that have less reaction with ferrite and diffusion, and parallel gap type MIG heads are also being put into practical use.

(例えば、口日本応用磁気学会誌J12.103−10
6(1988)あるいは「日本応用磁気学会誌J13.
277−280(1989))発明が解決しようとする
課題 しかしながら上記の平行ギヤツブ型MIGヘッドでは、
フェライトとの反応、拡散の少ない金属膜を使用する場
合には、既に開発され、他の型の磁気ヘッドで実用され
ている高飽和磁束密度、高透磁率の金属磁性膜をそのま
ま応用することができず、それに適した組成を新たに開
発しなければならない。また、非磁性の反応防止膜を使
用する場合には、その非磁性膜自体がギャップとなるた
め、疑似ギャップの生成を完全に抑えることかできない
という課題を有していた。
(For example, Journal of the Japanese Society of Applied Magnetics J12.103-10
6 (1988) or “Journal of the Japanese Society of Applied Magnetics J13.
277-280 (1989)) Problems to be Solved by the Invention However, in the above-mentioned parallel gear type MIG head,
When using a metal film with low reaction and diffusion with ferrite, it is possible to directly apply metal magnetic films with high saturation magnetic flux density and high magnetic permeability that have already been developed and are used in other types of magnetic heads. Therefore, a new composition suitable for this purpose must be developed. Further, when a non-magnetic reaction prevention film is used, the non-magnetic film itself becomes a gap, so there is a problem in that the generation of pseudo gaps cannot be completely suppressed.

本発明は上記課題に鑑み、既に実用化されている高飽和
磁束密度、高透磁率の金属磁性膜をそのまま、単純な構
造で生産性に冨む平行ギヤツブ型MIGヘッドに応用し
、しかも疑似ギャップのほとんど生成しない磁気ヘッド
を提供するものである。
In view of the above-mentioned problems, the present invention applies a metal magnetic film with high saturation magnetic flux density and high magnetic permeability that has already been put into practical use directly to a parallel gear type MIG head that has a simple structure and high productivity. The present invention provides a magnetic head that generates almost no energy.

課題を解決するための手段 上記課題を解決するために本発明の磁気ヘッドは、軟磁
性膜を、フェライトコアのキャップ部に配したMIGタ
イプのヘッドにおいて、軟磁性膜がフェライトと接する
部位に、ブエライト側に、少なくとも、窒素を含む軟磁
性膜の層、窒素を含まない軟磁性膜の層、窒素を含む軟
磁性膜の層の3層を設けるという構成を備えたものであ
る。
Means for Solving the Problems In order to solve the above problems, the magnetic head of the present invention is an MIG type head in which a soft magnetic film is disposed on the cap portion of a ferrite core, in which the soft magnetic film is in contact with the ferrite. The structure is such that at least three layers are provided on the Buerite side: a layer of a soft magnetic film containing nitrogen, a layer of a soft magnetic film not containing nitrogen, and a layer of a soft magnetic film containing nitrogen.

作用 本発明は、上記した構成によってギャップ形成のための
熱処理時に、フェライトに隣接する窒化層からさらに隣
接する非窒化層に、まず金属原子に比べて軽い窒素原子
が拡散する。次に窒化層に挟まれた上記非窒化層が、フ
ェライトに隣接する窒化層と同程度に薄ければ、もとも
と非窒化層の方が窒素の分だけ金属の組成が大きいので
、初めの非窒化層の金属の窒化物の濃度が、初めの窒化
層の金属の窒化物の濃度に比べて充分に高くなり、これ
がフェライトからの酸素等の元素の拡散を完全に抑えて
しまう。従ってフェライトからの拡散は、高々最初の窒
化層までであり、しかも既に窒化されているこの層には
、酸素等の元素は非常に拡散しにくい。
According to the present invention, with the above-described configuration, during heat treatment for forming a gap, nitrogen atoms, which are lighter than metal atoms, first diffuse from the nitrided layer adjacent to the ferrite to the non-nitrided layer adjacent to the ferrite. Next, if the non-nitrided layer sandwiched between the nitrided layers is as thin as the nitrided layer adjacent to the ferrite, the non-nitrided layer originally has a higher metal composition by the amount of nitrogen, so The metal nitride concentration of the layer becomes sufficiently high compared to the metal nitride concentration of the initial nitrided layer that it completely suppresses the diffusion of elements such as oxygen from the ferrite. Therefore, diffusion from ferrite is limited to at most the first nitrided layer, and it is extremely difficult for elements such as oxygen to diffuse into this already nitrided layer.

即ち、窒化層と非窒化層を組み合わせて使用することに
よって、軟磁性膜とフェライトとの間での元素の拡散が
抑えられ、従って疑似ギャップの影響か抑えられて、ヘ
ッド特性の低下が防がれることとなる。
That is, by using a nitrided layer and a non-nitrided layer in combination, the diffusion of elements between the soft magnetic film and the ferrite is suppressed, thereby suppressing the effects of the pseudo gap and preventing deterioration of head characteristics. It will be.

実施例 実施例1 以下本発明の第1の実施例の磁気ヘッドについて、図面
を参照しながら説明する。第1図は本発明の、窒素を含
まない軟磁性膜をフェライトコアのキャップ部に配した
MIGタイプの磁気ヘッドの、磁気記録媒体との摺動面
のギャップ近傍を示した平面図、第2図は本発明の、窒
素を含む軟磁性膜をフェライトコアのキャップ部に配し
たMIGタイプの磁気ヘッドの、磁気記録媒体との摺動
面のギャップ近傍を示した平面図、第3図は従来の、高
飽和磁束密度、高透磁率の金属磁性膜をそのままフェラ
イトコアのキャップ部に配したMIGタイプの磁気ヘッ
ドの、磁気記録媒体との摺動面のギャップ近傍を示した
平面図、第4図は、窒素を含まない軟磁性膜を、その窒
化層1層のみを介して、フェライトコアのキャップ部に
配したMIGタイプの磁気ヘッドの、磁気記録媒体との
摺動面のギャップ近傍を示した平面図である。
Embodiments Embodiment 1 A magnetic head according to a first embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing the vicinity of the gap between the sliding surface and the magnetic recording medium of a MIG type magnetic head according to the present invention in which a nitrogen-free soft magnetic film is disposed on the cap portion of a ferrite core; The figure is a plan view showing the vicinity of the gap between the sliding surface and the magnetic recording medium of a MIG type magnetic head according to the present invention in which a soft magnetic film containing nitrogen is disposed on the cap of a ferrite core. FIG. 4 is a plan view showing the vicinity of the gap between the sliding surface and the magnetic recording medium of a MIG type magnetic head in which a metal magnetic film with high saturation magnetic flux density and high magnetic permeability is directly arranged on the cap part of a ferrite core. The figure shows the vicinity of the gap between the sliding surface and the magnetic recording medium of a MIG type magnetic head in which a nitrogen-free soft magnetic film is placed on the cap of a ferrite core through only one nitride layer. FIG.

第1.第2.第3.第4図において、11はメインギャ
ップ、12はフェライトコア、16はモールドガラスで
ある。また第1図において13はCoNbZrおよびF
eAeSi、14はCoNbZrNおよびFeA1!S
iN、15は13と同じであり、第2図において、13
はFeNbN、14は13と同じ、15はFeNbであ
り、第3図において、13はCoNbZr、FeAeS
iおよびFeNbNであり、第4図において13はCo
NbZrおよびFeAQ Si、14はCoNbZrN
およびFeAf!SiNである。なお第1の実施例に於
いては、第1〜第4図中の軟磁性膜13の厚さは4.2
μm、窒化層14および非窒化層15の1層の厚さは2
70人、窒化層14での窒素含有量は原子%でほぼ9%
、磁気ギャップの形成温度は550℃である。
1st. Second. Third. In FIG. 4, 11 is a main gap, 12 is a ferrite core, and 16 is a molded glass. In addition, in FIG. 1, 13 is CoNbZr and F
eAeSi, 14 is CoNbZrN and FeA1! S
iN, 15 is the same as 13, and in Fig. 2, 13
is FeNbN, 14 is the same as 13, 15 is FeNb, and in Fig. 3, 13 is CoNbZr, FeAeS.
i and FeNbN, and in FIG. 4 13 is Co
NbZr and FeAQ Si, 14 is CoNbZrN
and FeAf! It is SiN. In the first embodiment, the thickness of the soft magnetic film 13 in FIGS. 1 to 4 is 4.2 mm.
μm, and the thickness of one layer of the nitrided layer 14 and the non-nitrided layer 15 is 2
70 people, nitrogen content in nitride layer 14 is approximately 9% in atomic percent
, the magnetic gap formation temperature is 550°C.

以上のように構成された磁気ヘッドについて、以下第1
表を用いてその特徴を説明する。
Regarding the magnetic head configured as described above, the following describes the first part.
Explain its characteristics using a table.

第1表は、第1〜第4図に示したそれぞれの磁気ヘッド
の、ヘッドと磁気記録媒体(メタルパウダーの塗布テー
プ)との相対速度が3.1m/sの時の、起磁力550
mA−tu rn、書き込み周波数65kHz、に於け
る疑似出力(メインギャップに於ける出力vMに対する
、疑似ギャップにおける出力vGの比)と、周波数特性
のうねりを示したものである。
Table 1 shows the magnetomotive force 550 of each magnetic head shown in Figures 1 to 4 when the relative speed between the head and the magnetic recording medium (metal powder coated tape) is 3.1 m/s.
It shows the pseudo output (ratio of the output vG in the pseudo gap to the output vM in the main gap) and the waviness of the frequency characteristics at mA-turn and a writing frequency of 65 kHz.

(以 下 余 白) 第1表から、従来の第3図の構成のヘッドに比べて、本
発明の窒化層と非窒化層を組み合わせたヘッドの方が、
疑似ギャップの影響が小さくなっていることが分かる。
(Margins below) From Table 1, it can be seen that compared to the conventional head with the configuration shown in Figure 3, the head that combines the nitrided layer and non-nitrided layer of the present invention has
It can be seen that the influence of the pseudo gap has become smaller.

またギャップ部に配した軟磁性膜が窒素を含まない場合
、軟磁性膜とフェライトとが接する面に、単に窒化層1
層だけを設けるよりも、窒化層、非電化層、窒化層の3
層を設けた方が、疑似ギャップの影響が小さくなってい
ることが分かる。
In addition, if the soft magnetic film disposed in the gap part does not contain nitrogen, simply add a nitride layer to the surface where the soft magnetic film and ferrite are in contact.
Rather than providing only one layer, three layers of nitrided layer, non-electrified layer, and nitrided layer are used.
It can be seen that the effect of the pseudo gap is smaller when the layer is provided.

上記のヘッドをギャップ面に平行に、フェライトの近く
の軟磁性膜の面で切断し、オージェ電子分光法で解析す
ると、窒化層1層だけを設けたヘッドでは、フェライト
の酸素が窒化層を越えて軟磁性膜中まで少量拡散してい
るのに対し、窒化層、非電化層、窒化層の3層を設けた
ヘッドでは、フェライトの酸素は非窒化層中にはな(、
拡散している酸素の絶対量も少ない。
When the above head is cut parallel to the gap plane at the surface of the soft magnetic film near the ferrite and analyzed using Auger electron spectroscopy, it is found that in the head with only one nitride layer, the oxygen in the ferrite exceeds the nitride layer. In contrast, in a head with three layers: a nitrided layer, a non-electrified layer, and a nitrided layer, the oxygen in the ferrite does not diffuse into the non-nitrided layer.
The absolute amount of oxygen diffused is also small.

以上のように本実施例によれば、窒化層と非窒化層を組
み合わせて使用することによって、既に実用化されてい
る高飽和磁束密度、高透磁率の金属磁性膜をそのまま、
単純な構造で生産性に冨む平行ギヤツブ型MIGヘッド
に応用しても、軟磁性膜とフェライトとの間の元素の拡
散を抑えて疑似ギャップの影響の小さなMIGヘッドを
提供することができる。
As described above, according to this embodiment, by using a combination of a nitrided layer and a non-nitrided layer, a metal magnetic film with high saturation magnetic flux density and high magnetic permeability that has already been put into practical use can be used as is.
Even when applied to a parallel gear type MIG head, which has a simple structure and high productivity, it is possible to suppress the diffusion of elements between the soft magnetic film and the ferrite, thereby providing a MIG head with a small influence of pseudo gaps.

実施例2 以下本発明の第2の実施例について第1図と第2表を参
照しながら説明する。
Example 2 A second example of the present invention will be described below with reference to FIG. 1 and Table 2.

第2表は、第1図の軟磁性膜]3にCoNbZ rを用
いたヘッドに於いて、窒化層14と非窒化層15の厚さ
を変化させた場合の、550℃での元素の拡散の様子を
オージェ電子分光法で解析した結果である。表中で○は
元素の拡散が殆ど見えないもの、△は少しだけ見えるも
の、×はかなり多量の元素の拡散が観察されるものを示
している。
Table 2 shows the diffusion of elements at 550°C when the thicknesses of the nitrided layer 14 and the non-nitrided layer 15 are changed in a head using CoNbZr as the soft magnetic film 3 in Figure 1. This is the result of analyzing the situation using Auger electron spectroscopy. In the table, ○ indicates that the diffusion of the element is hardly visible, △ indicates that it is only slightly visible, and × indicates that a considerably large amount of element diffusion is observed.

く以 下 余 白) 第  2  表 第2表から、窒素を含む層の厚さAと、窒素を含まない
層の厚さBが、それぞれ 50Å<A<100OA、50Å<B<1000Åの範
囲にある場合に、軟磁性膜とフェライトとの間の拡散が
非常に少なくなっていることが分かる。
Table 2 From Table 2, the thickness A of the layer containing nitrogen and the thickness B of the layer not containing nitrogen are in the ranges of 50 Å < A < 100 OA and 50 Å < B < 1000 Å, respectively. It can be seen that in some cases the diffusion between the soft magnetic film and the ferrite is very low.

実施例3 以下本発明の第3の実施例について第1図と第3表を参
照しながら説明する。
Example 3 A third example of the present invention will be described below with reference to FIG. 1 and Table 3.

第3表は、第1図の軟磁性膜]3にCoNbZ rを用
いたヘッドに於いて、窒化層14の窒素濃度を変化させ
た場合の、550℃での元素の拡散の様子をオージェ電
子分光法で解析した結果である。表中で○は元素の拡散
が殆ど見えないもの、△は少しだけ見えるもの、×かな
り多量の元素の拡散が観察されるものを示している。
Table 3 shows the state of element diffusion at 550°C when the nitrogen concentration of the nitride layer 14 is changed in a head using CoNbZr as the soft magnetic film shown in Figure 1. This is the result of analysis using spectroscopy. In the table, ○ indicates that the element diffusion is hardly visible, △ indicates that it is only slightly visible, and × indicates that a considerably large amount of element diffusion is observed.

第3表から、窒化層の窒素濃度Cが、原子%で、3%<
A<50%の範囲にある場合に、軟磁性膜とフェライト
との間の拡散が非常に少なくなっていることが分かる。
From Table 3, it can be seen that the nitrogen concentration C of the nitrided layer is 3%<3% in atomic %.
It can be seen that when A<50%, the diffusion between the soft magnetic film and the ferrite becomes very small.

なお、第1の実施例に於いて軟磁性膜13はCoNbZ
r、FeAe SiまたはFeNbNとしたが、Co−
M (M=Nb、Ta、Z r、T i 。
Note that in the first embodiment, the soft magnetic film 13 is made of CoNbZ.
r, FeAe Si or FeNbN, but Co-
M (M=Nb, Ta, Z r, T i .

Hf、B、S i、Ga)等の他のCo系アモルファス
やF e −M−3i (M=Ae 、 Ga、 Ru
)等のセンダスト系合金あるいはF e −M (M−
Ti、Zr、B、Hf、Nb、Ta、Ae 、Mo)、
Fe−M−C(M=TI、Zr、Hf−、V、Nb。
Other Co-based amorphous materials such as Hf, B, Si, Ga) and Fe-M-3i (M=Ae, Ga, Ru
) or other sendust alloys such as F e -M (M-
Ti, Zr, B, Hf, Nb, Ta, Ae, Mo),
Fe-M-C (M=TI, Zr, Hf-, V, Nb.

Ta)、Fe−N等の他の鉄基合金でもよい。また第2
.第3の実施例でも、軟磁性膜13はCoNbZ rと
したが、同様に他の軟磁性膜でもよい。
Other iron-based alloys such as Ta) and Fe-N may also be used. Also the second
.. In the third embodiment as well, the soft magnetic film 13 is made of CoNbZr, but other soft magnetic films may be used as well.

発明の効果 以上のように本発明は、窒素を含む軟磁性膜を、フェラ
イトコアのキャップ部に配したMIGタイプのヘッドに
おいて、軟磁性膜がフエライトと接する部位に、フェラ
イト側から順に、少なくとも、窒素を含む軟磁性膜の層
、前記軟磁性膜から窒素だけを除いた層、の2層を設け
る、あるいは、窒素を含まない軟磁性膜を、フェライト
コアのキャップ部に配したMIGタイプのヘッドにおい
て、軟磁性膜がフェライトと接する部位に、フェライト
側から順に、少な(とも、前記軟磁性膜の窒化層、窒素
を含まない軟磁性膜の層、前記軟磁性膜の窒化層、の3
層を設けるという構成を備えることにより、既に実用化
されている高飽和磁束密度、高透磁率の金属磁性膜をそ
のまま、単純な構造で生産性に冨む平行ギヤツブ型Mr
Gヘッドに応用し、しかも疑似ギャップのほとんど生成
しない磁気ヘッドを提供することができる。
Effects of the Invention As described above, the present invention provides a MIG type head in which a soft magnetic film containing nitrogen is disposed on the cap portion of a ferrite core, in which the soft magnetic film is in contact with the ferrite, at least in order from the ferrite side. A MIG type head in which two layers are provided, a layer of a soft magnetic film containing nitrogen and a layer obtained by removing only nitrogen from the soft magnetic film, or a soft magnetic film not containing nitrogen is placed on the cap portion of a ferrite core. At the part where the soft magnetic film is in contact with the ferrite, in order from the ferrite side, a nitrided layer of the soft magnetic film, a layer of the soft magnetic film not containing nitrogen, and a nitrided layer of the soft magnetic film are applied.
By having a structure of providing layers, it is possible to create a parallel gear type Mr with a simple structure and high productivity by using a metal magnetic film with high saturation magnetic flux density and high magnetic permeability that has already been put into practical use.
It is possible to provide a magnetic head that can be applied to a G head and generates almost no pseudo gap.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の窒素を含まない軟磁性膜をフェライト
コアのキャップ部に配したMIGタイプの磁気ヘッドの
磁気記録媒体との摺動面のギャップ近傍を示した平面図
、第2図は本発明の窒素を含む軟磁性膜をフェライトコ
アのキャップ部に配したMIGタイプの磁気ヘッドの磁
気記録媒体との摺動面のギャップ近傍を示した平面図、
第3図は従来の高飽和磁束密度、高透磁率の金属磁性層
をそのままフェライトコアのキャップ部に配したMIG
タイプの磁気ヘッドの磁気記録媒体との摺動面のギャッ
プ近傍を示した平面図、第4図は窒素を含まない軟磁性
膜をその窒化層1層のみを介して、フェライトコアのキ
ャップ部に配したMIGタイプの磁気ヘッドの磁気記録
媒体との摺動面のギャップ近傍を示した平面図である。 11・・・・・−メインギャップ、12・・・・・・フ
ェライトコア、13・・・・・・軟磁性膜、14・・・
・・・窒化層、15・・・・・・非窒化層、16・・・
・・・モールドガラス。 代理人の氏名 弁理士小蝦治明 ほか2名第1図 !!メインfイノ7゜ 14窒化層 第3図 tfメインキ°fツデ / 第4図 \ /l:檻往喚
FIG. 1 is a plan view showing the vicinity of the gap between the sliding surface of a MIG type magnetic head in which the nitrogen-free soft magnetic film of the present invention is disposed on the cap of a ferrite core, and the sliding surface between the magnetic recording medium and the magnetic recording medium. A plan view showing the vicinity of the gap between the sliding surface and the magnetic recording medium of a MIG type magnetic head in which the nitrogen-containing soft magnetic film of the present invention is disposed on the cap portion of the ferrite core;
Figure 3 shows an MIG in which a conventional metal magnetic layer with high saturation magnetic flux density and high magnetic permeability is placed directly on the cap of the ferrite core.
Figure 4 is a plan view showing the vicinity of the gap between the sliding surface of this type of magnetic head and the magnetic recording medium. FIG. 3 is a plan view showing the vicinity of the gap between the sliding surface of the MIG type magnetic head and the magnetic recording medium arranged therein. 11...-main gap, 12...ferrite core, 13...soft magnetic film, 14...
...Nitrided layer, 15...Non-nitrided layer, 16...
...Molded glass. Name of agent: Patent attorney Haruaki Koebi and two others Figure 1! ! Main f Ino 7゜14 Nitride layer Figure 3 tf Main key °f Tsude / Figure 4\ /l: Cage return

Claims (4)

【特許請求の範囲】[Claims] (1)軟磁性膜を、フェライトコアのキャップ部に配し
たMIGタイプのヘッドにおいて、軟磁性膜がフェライ
トと接する部位に、フェライト側から順に、少なくとも
、窒素を含む軟磁性膜の層、窒素を含まない軟磁性膜の
層、窒素を含む軟磁性膜の層の3層を設けることを特徴
とする磁気ヘッド。
(1) In a MIG type head in which a soft magnetic film is arranged on the cap part of a ferrite core, at least a layer of a soft magnetic film containing nitrogen and a layer of a soft magnetic film containing nitrogen are applied to the part where the soft magnetic film contacts the ferrite, starting from the ferrite side. A magnetic head comprising three layers: a soft magnetic film layer that does not contain nitrogen, and a soft magnetic film layer that contains nitrogen.
(2)窒素を含む層の厚さAと、窒素を含まない層の厚
さBが、それぞれ 50Å<A<1000Å 50Å<B<1000Å であることを特徴とする請求項(1)記載の磁気ヘッド
(2) The magnetism according to claim (1), wherein the thickness A of the layer containing nitrogen and the thickness B of the layer not containing nitrogen are 50 Å<A<1000 Å and 50 Å<B<1000 Å, respectively. head.
(3)窒素を含む層の窒素濃度Cが、原子%で、3%<
C<50% であることを特徴とする請求項(1)記載の磁気ヘッド
(3) The nitrogen concentration C of the nitrogen-containing layer is 3%<3% in atomic %
The magnetic head according to claim 1, characterized in that C<50%.
(4)窒素を含む層の厚さAと、窒素を含まない層の厚
さBが、それぞれ 50Å<A<1000Å 50Å<B<1000Å であり、かつ窒素を含む層の窒素濃度Cが、原子%で、 3%<C<50% であることを特徴とする請求項(1)記載の磁気ヘッド
(4) The thickness A of the layer containing nitrogen and the thickness B of the layer not containing nitrogen are 50 Å<A<1000 Å and 50 Å<B<1000 Å, respectively, and the nitrogen concentration C of the layer containing nitrogen is atomic The magnetic head according to claim 1, wherein 3%<C<50%.
JP2313511A 1990-10-02 1990-11-19 Magnetic head Expired - Fee Related JP2579063B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2313511A JP2579063B2 (en) 1990-11-19 1990-11-19 Magnetic head
US07/769,852 US5227193A (en) 1990-10-02 1991-10-02 Method for manufacturing magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2313511A JP2579063B2 (en) 1990-11-19 1990-11-19 Magnetic head

Publications (2)

Publication Number Publication Date
JPH04182907A true JPH04182907A (en) 1992-06-30
JP2579063B2 JP2579063B2 (en) 1997-02-05

Family

ID=18042196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2313511A Expired - Fee Related JP2579063B2 (en) 1990-10-02 1990-11-19 Magnetic head

Country Status (1)

Country Link
JP (1) JP2579063B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100244187B1 (en) * 1992-10-07 2000-02-01 구자홍 Composite magnetic head and the manufacturing method
CN1084907C (en) * 1996-09-09 2002-05-15 松下电器产业株式会社 Magnetic head and manufacturing method therefor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01315109A (en) * 1988-06-15 1989-12-20 Alps Electric Co Ltd Amorphous soft magnetic film and magnetic head
JPH02208811A (en) * 1989-02-08 1990-08-20 Matsushita Electric Ind Co Ltd Magnetic head and its production
JPH03238606A (en) * 1990-02-16 1991-10-24 Hitachi Ltd Magnetic head and production thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01315109A (en) * 1988-06-15 1989-12-20 Alps Electric Co Ltd Amorphous soft magnetic film and magnetic head
JPH02208811A (en) * 1989-02-08 1990-08-20 Matsushita Electric Ind Co Ltd Magnetic head and its production
JPH03238606A (en) * 1990-02-16 1991-10-24 Hitachi Ltd Magnetic head and production thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100244187B1 (en) * 1992-10-07 2000-02-01 구자홍 Composite magnetic head and the manufacturing method
CN1084907C (en) * 1996-09-09 2002-05-15 松下电器产业株式会社 Magnetic head and manufacturing method therefor

Also Published As

Publication number Publication date
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