JPH04325906A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPH04325906A
JPH04325906A JP9716291A JP9716291A JPH04325906A JP H04325906 A JPH04325906 A JP H04325906A JP 9716291 A JP9716291 A JP 9716291A JP 9716291 A JP9716291 A JP 9716291A JP H04325906 A JPH04325906 A JP H04325906A
Authority
JP
Japan
Prior art keywords
soft magnetic
head
layer
ferrite
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9716291A
Other languages
Japanese (ja)
Inventor
Toru Hori
徹 堀
Takeshi Takahashi
健 高橋
Akihiro Ashida
芦田 晶弘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP9716291A priority Critical patent/JPH04325906A/en
Priority to US07/769,852 priority patent/US5227193A/en
Publication of JPH04325906A publication Critical patent/JPH04325906A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide the high-performance magnetic head by suppressing the reaction between the ferrite cores and metallic films in the MIG head having good productivity thereby decreasing pseudo signals. CONSTITUTION:At least three layers; layers consisting of soft magnetic films 14 contg. nitrogen, layers 15 consisting of soft magnetic films without contg. the nitrogen, and layers 14 consisting of soft magnetic films contg. the nitrogen are provided, successively from the ferrite core 12 side of the soft magnetic films 13 between antireaction layers 17 and soft magnetic films 13 in the head of the MIG type disposed with the soft magnetic films in the gap part of the ferrite cores.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は磁気ヘッド、特に磁気ギ
ャップ部に高飽和磁束密度、高透磁率の磁性材を配置し
た、いわゆるMIGタイプの磁気ヘッドに関するもので
ある。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head, and particularly to a so-called MIG type magnetic head in which a magnetic material having a high saturation magnetic flux density and high magnetic permeability is arranged in a magnetic gap.

【0002】0002

【従来の技術】近年、映像、音響、情報関連機器の進歩
はめざましい。これらの分野での記録の主流は磁気記録
であり、記録密度の高密度化への強い要求により、高保
磁力メタル媒体、及びそれに対応すべく十分な記録能力
を持つ磁気ヘッドの開発が精力的に進められている。
[Background Art] In recent years, advances in video, audio, and information-related equipment have been remarkable. The mainstream of recording in these fields is magnetic recording, and due to the strong demand for higher recording densities, efforts are being made to develop high coercive force metal media and magnetic heads with sufficient recording capacity to meet this demand. It is progressing.

【0003】磁気ヘッドに関して言えば、高飽和磁束密
度を有するセンダストやCo基アモルファス、Fe基合
金等を用いた多種多様の磁気ヘッドが開発され、既に一
部については実用化されている。それらの中にあって、
主コアが磁性フェライトからなり、ギャップに対して平
行に高飽和磁束密度、高透磁率の金属磁性膜が形成され
たタイプのヘッド、いわゆる平行ギャップ型MIGヘッ
ドは、比較的単純な構造で生産性に富むという長所があ
りながら、熱処理時の反応、拡散に起因して、フェライ
トと金属膜の界面での疑似ギャップの生成による疑似信
号が発生するため、実用化は困難であった。そこで近年
、フェライトとの反応、拡散の少ない組成の金属膜や、
窒化層と非窒化層の組合せ、あるいは非磁性の反応防止
膜等の研究が行われ、平行ギャップ型のMIGヘッドも
実用化されつつある。(例えば、「日本応用磁気学会誌
」12、103−106(1988)あるいは「日本応
用磁気学会誌」13、277−280(1989))
Regarding magnetic heads, a wide variety of magnetic heads using materials such as Sendust, Co-based amorphous, and Fe-based alloys having high saturation magnetic flux density have been developed, and some of them have already been put into practical use. Among them,
The so-called parallel gap type MIG head, which has a main core made of magnetic ferrite and a metal magnetic film with high saturation magnetic flux density and high magnetic permeability formed parallel to the gap, has a relatively simple structure and high productivity. Although it has the advantage of being rich in ferrite, it has been difficult to put it into practical use because pseudo signals are generated due to the generation of pseudo gaps at the interface between the ferrite and metal film due to reaction and diffusion during heat treatment. Therefore, in recent years, metal films with compositions that have less reaction with ferrite and less diffusion,
Research is being conducted on combinations of nitrided and non-nitrided layers, non-magnetic reaction prevention films, etc., and parallel gap type MIG heads are also being put into practical use. (For example, "Journal of Japan Applied Magnetics Society" 12, 103-106 (1988) or "Journal of Japan Applied Magnetics Society" 13, 277-280 (1989))


0004】
[
0004

【発明が解決しようとする課題】一般に、ヘッドの強度
を上げるためには、作業温度の高いガラスを使用するこ
とが望ましい。しかしながらフェライトとの反応、拡散
の少ない組成の金属膜や、窒化層と非窒化層の組合せで
は、600℃程度以上の熱処理に耐えることは難しい。 その上フェライトとの反応、拡散の少ない組成の金属膜
を使用する場合には材料が限定され、既に開発されて他
の型のヘッドで使用されている一般的な磁性材料を、そ
のまま使用することが出来ないという制約があった。ま
た非磁性の反応防止膜を使用する場合には、熱処理温度
が高くなると必要な膜厚が増大して、その非磁性膜自体
が疑似ギャップの原因となるという課題を有していた。
Generally, in order to increase the strength of the head, it is desirable to use glass that has a high working temperature. However, it is difficult to withstand heat treatment of about 600° C. or higher with a metal film having a composition that is less likely to react or diffuse with ferrite, or with a combination of a nitrided layer and a non-nitrided layer. Furthermore, when using a metal film with a composition that has little reaction with ferrite or diffusion, the materials are limited, and general magnetic materials that have already been developed and are used in other types of heads can be used as they are. There was a restriction that it was not possible. Furthermore, when a nonmagnetic reaction prevention film is used, there is a problem in that as the heat treatment temperature increases, the required film thickness increases, and the nonmagnetic film itself causes a pseudo gap.

【0005】本発明は上記課題に鑑み、既に実用化され
ている高飽和磁束密度、高透磁率の金属磁性膜をそのま
ま、単純な構造で生産性に富む平行ギャップ型MIGヘ
ッドに応用し、しかも高い温度で熱処理を施しても疑似
ギャップのほとんど生成しない磁気ヘッドを提供するも
のである。
In view of the above-mentioned problems, the present invention applies a metal magnetic film with high saturation magnetic flux density and high magnetic permeability that has already been put into practical use as is to a parallel gap type MIG head with a simple structure and high productivity. An object of the present invention is to provide a magnetic head in which almost no pseudo gap is generated even when heat treatment is performed at a high temperature.

【0006】[0006]

【課題を解決するための手段】上記課題を解決するため
に本発明の磁気ヘッドは、軟磁性膜をフェライトコアの
キャップ部に配し、軟磁性膜とフェライトとの間に反応
防止層を形成したMIGタイプのヘッドにおいて、軟磁
性膜のフェライト側から順に少なくとも、窒素を含む軟
磁性膜の層、窒素を含まない軟磁性膜の層、窒素を含む
軟磁性膜の層、の3層を設けるという構成を備えたもの
である。
[Means for Solving the Problems] In order to solve the above problems, the magnetic head of the present invention includes a soft magnetic film disposed in the cap portion of the ferrite core, and a reaction prevention layer formed between the soft magnetic film and the ferrite. In the MIG type head, at least three layers are provided in order from the ferrite side of the soft magnetic film: a layer of soft magnetic film containing nitrogen, a layer of soft magnetic film not containing nitrogen, and a layer of soft magnetic film containing nitrogen. It has the following configuration.

【0007】[0007]

【作用】本発明は上記した反応防止層と、窒化層・非窒
化層の組合せとを併用することによって、窒化層・非窒
化層の組合せだけでは達成できなかった高い温度での熱
処理が可能となり、また反応防止層だけでは熱処理温度
が高くなると、必要な膜厚が増大して反応防止層自体が
疑似ギャップの原因となっていたが、窒化層・非窒化層
の組合せと併用することにより、600℃程度の高い熱
処理時にも、疑似ギャップとして問題にならない程度に
充分に薄い層厚で、軟磁性膜とフェライトとの反応を充
分に抑制することができる。
[Operation] By using the above-mentioned reaction prevention layer together with a combination of a nitrided layer and a non-nitrided layer, the present invention enables heat treatment at a high temperature that could not be achieved with the combination of a nitrided layer and a non-nitrided layer alone. In addition, when using only a reaction prevention layer, the required film thickness increases as the heat treatment temperature increases, and the reaction prevention layer itself causes a pseudo gap, but by using it in conjunction with a combination of nitrided and non-nitrided layers, Even during heat treatment at a high temperature of about 600° C., the reaction between the soft magnetic film and the ferrite can be sufficiently suppressed with a sufficiently thin layer thickness that does not pose a problem as a pseudo gap.

【0008】即ち、単純な構造で生産性に富む平行ギャ
ップ型MIGヘッドで、疑似ギャップの影響によるヘッ
ド特性の低下なしに、ヘッドの強度を上げるために作業
温度の高いガラスを使用することができ、生産性と良好
な磁気特性と信頼性とが両立できることとなる。
That is, the parallel gap type MIG head has a simple structure and is highly productive, and glass with a high working temperature can be used to increase the strength of the head without deteriorating the head characteristics due to the influence of the pseudo gap. , it is possible to achieve both productivity, good magnetic properties, and reliability.

【0009】[0009]

【実施例】【Example】

(実施例1)以下本発明の第1の実施例の磁気ヘッドに
ついて、図面を参照しながら説明する。(図1)は本発
明の磁気ヘッドの、磁気記録媒体との摺動面のギャップ
近傍を示した平面図、(図2)、(図3)は従来のMI
Gタイプの磁気ヘッドの、磁気記録媒体との摺動面のギ
ャップ近傍を示した平面図である。
(Embodiment 1) A magnetic head according to a first embodiment of the present invention will be described below with reference to the drawings. (FIG. 1) is a plan view showing the vicinity of the gap between the sliding surface of the magnetic head of the present invention and the magnetic recording medium.
FIG. 3 is a plan view showing the vicinity of the gap between the sliding surface of the G-type magnetic head and the magnetic recording medium.

【0010】(図1)、(図2)、(図3)において、
11はメインギャップ、12はフェライトコア、13は
軟磁性薄膜であり本実施例においてはCoNbZrある
いはFeAlSiである。14は窒化層であり、本実施
例の場合はCoNbZrNあるいはFeAlSiN、1
5は非窒化層であり、本実施例の場合には13と同一で
ある。16はモールドガラス、17は反応防止膜であり
、本実施例においてはSiO2 である。なお本実施例
に於いては、(図1)、(図2)および(図3)中の軟
磁性膜13の厚さは4μm、 (図1)、(図3)の窒
化層14および非窒化層15の1層の厚さは27nm、
窒化層14での窒素含有量は原子%でほぼ9%、(図1
)のSiO2 厚は5nm、(図2)のSiO2 厚は
5nm、10nmと20nmである。
[0010] In (FIG. 1), (FIG. 2), and (FIG. 3),
11 is a main gap, 12 is a ferrite core, and 13 is a soft magnetic thin film, which in this embodiment is CoNbZr or FeAlSi. 14 is a nitride layer, in this example CoNbZrN or FeAlSiN, 1
5 is a non-nitrided layer, which is the same as 13 in this embodiment. 16 is a molded glass, and 17 is a reaction prevention film, which is SiO2 in this example. In this example, the thickness of the soft magnetic film 13 in FIGS. 1, 2, and 3 is 4 μm, and the thickness of the nitride layer 14 in FIGS. The thickness of one layer of the nitride layer 15 is 27 nm,
The nitrogen content in the nitride layer 14 is approximately 9% in atomic percent (Fig.
) has a SiO2 thickness of 5 nm, and (FIG. 2) has a SiO2 thickness of 5 nm, 10 nm, and 20 nm.

【0011】以上のように構成された磁気ヘッドについ
て、以下(表1)を用いてその特徴を説明する。
The characteristics of the magnetic head constructed as described above will be explained below using Table 1.

【0012】(表1)は、(図1)、(図2)および(
図3)に示した磁気ヘッドを、様々な温度で熱処理した
場合の、フェライトと軟磁性膜との間での反応の様子を
示したものである。反応はオージェ電子分光分析によっ
て解析し、反応のほとんど無いものを○、少し見られる
ものを△、かなり存在するものを×とした。
(Table 1) shows (Figure 1), (Figure 2) and (
This figure shows the reaction between the ferrite and the soft magnetic film when the magnetic head shown in FIG. 3) is heat-treated at various temperatures. Reactions were analyzed by Auger electron spectroscopy, and those with almost no reaction were rated ○, those with a little reaction were rated △, and those with a considerable amount of reaction were rated ×.

【0013】[0013]

【表1】 (表1)から、本発明の窒化層と非窒化層の組み合わせ
と反応防止層を併用したヘッドの方が、従来の(図3)
の構成のヘッドに比べて、より高い温度でも反応を起こ
さずに熱処理出来ることが分かる。また従来の(図2)
の構成のヘッドに比べると、より薄い反応防止層で同等
の反応防止効果が得られることが分かる。
[Table 1] From (Table 1), the head that uses the combination of the nitrided layer and non-nitrided layer of the present invention together with the reaction prevention layer is superior to the conventional head (Fig. 3).
It can be seen that heat treatment can be performed at higher temperatures without causing any reaction compared to the head with the above configuration. Also, conventional (Fig. 2)
It can be seen that the same reaction prevention effect can be obtained with a thinner reaction prevention layer compared to the head with the configuration shown in FIG.

【0014】以上のように本実施例によれば、窒化層と
非窒化層の組み合わせと反応防止層を併用して使用する
ことによって、既に実用化されている高飽和磁束密度、
高透磁率の金属磁性膜をそのまま、単純な構造で生産性
に富む平行ギャップ型MIGヘッドに応用しても、高温
での熱処理に対しても、軟磁性膜とフェライトとの間の
元素の拡散を抑え、かつそれ自体が疑似ギャップの原因
となる反応防止層の層厚を薄くすることができ、従って
疑似ギャップの影響の小さなMIGヘッドを提供するこ
とができる。
As described above, according to this embodiment, by using a combination of a nitrided layer and a non-nitrided layer and a reaction prevention layer, a high saturation magnetic flux density, which has already been put into practical use, can be achieved.
Even if the metal magnetic film with high magnetic permeability is applied as it is to a parallel gap type MIG head with a simple structure and high productivity, the diffusion of elements between the soft magnetic film and the ferrite can be achieved even when heat treatment is performed at high temperatures. It is possible to reduce the thickness of the reaction prevention layer, which itself causes a pseudo gap, and thus to provide a MIG head with less influence of pseudo gaps.

【0015】(実施例2)以下本発明の第2の実施例の
磁気ヘッドについて、(図1)と(表2)を参照しなが
ら説明する。
(Embodiment 2) A magnetic head according to a second embodiment of the present invention will be described below with reference to (FIG. 1) and (Table 2).

【0016】(表2)は、(図1)に示した磁気ヘッド
の反応防止層17に、様々な材質を用いて600℃で熱
処理した場合の、フェライトと軟磁性膜との間での反応
の様子を示したものである。反応はオージェ電子分光分
析によって解析し、反応のほとんど無いものを○、少し
見られるものを△、かなり存在するものを×とした。
(Table 2) shows the reaction between the ferrite and the soft magnetic film when various materials are used for the reaction prevention layer 17 of the magnetic head shown in (FIG. 1) and heat treated at 600°C. This shows the situation. Reactions were analyzed by Auger electron spectroscopy, and those with almost no reaction were rated ○, those with a little reaction were rated △, and those with a considerable amount of reaction were rated ×.

【0017】[0017]

【表2】 (表2)から、本発明の窒化層と非窒化層の組み合わせ
と反応防止層を併用したヘッドにおいては、600℃の
熱処理においても5nm以下の反応防止層で、よく反応
が防止できていることが分かる。
[Table 2] From Table 2, it can be seen that in the head that uses the combination of the nitrided layer and non-nitrided layer of the present invention in combination with the reaction prevention layer, the reaction prevention layer with a thickness of 5 nm or less prevents reactions well even in heat treatment at 600°C. I can see that it's done.

【0018】以上のように本実施例によれば、窒化層と
非窒化層の組み合わせと反応防止層を併用して使用する
ことによって、600℃の熱処理でも軟磁性膜とフェラ
イトとの間の元素の拡散を抑え、かつそれ自体が疑似ギ
ャップの原因となる反応防止層の層厚を5nm以下とす
ることができ、従って疑似ギャップの影響の小さなMI
Gヘッドを提供することができる。
As described above, according to this embodiment, by using a combination of a nitrided layer and a non-nitrided layer and a reaction prevention layer, the elements between the soft magnetic film and the ferrite can be maintained even during heat treatment at 600°C. The thickness of the reaction prevention layer, which is itself a cause of pseudo gaps, can be reduced to 5 nm or less.
G head can be provided.

【0019】なお本実施例に於いて軟磁性膜13はCo
NbZrあるいはFeAlSiとしたが、他の軟磁性材
料を用いてもよい。また軟磁性膜13が窒化物である場
合には、窒化層14のうちフェライトから遠い側の層は
必ずしも必要ではない。
In this embodiment, the soft magnetic film 13 is made of Co
Although NbZr or FeAlSi is used, other soft magnetic materials may be used. Further, when the soft magnetic film 13 is made of nitride, the layer on the side far from the ferrite of the nitride layer 14 is not necessarily necessary.

【0020】[0020]

【発明の効果】以上のように本発明は、軟磁性膜をフェ
ライトコアのキャップ部に配し、軟磁性膜とフェライト
との間に反応防止層を形成したMIGタイプのヘッドに
おいて、軟磁性膜のフェライト側から順に少なくとも、
窒素を含む軟磁性膜の層、窒素を含まない軟磁性膜の層
、窒素を含む軟磁性膜の層、の3層を設けるという構成
を備えることにより、単純な構造で生産性に富む平行ギ
ャップ型MIGヘッドで、疑似ギャップの影響によるヘ
ッド特性の低下なしに、ヘッドの強度を上げるために作
業温度の高いガラスを使用することができ、生産性と良
好な磁気特性と信頼性とが両立できることとなる。
As described above, the present invention provides an MIG type head in which a soft magnetic film is disposed on the cap portion of a ferrite core, and a reaction prevention layer is formed between the soft magnetic film and the ferrite. At least in order from the ferrite side of
By having a configuration of three layers: a soft magnetic film layer containing nitrogen, a soft magnetic film layer not containing nitrogen, and a soft magnetic film layer containing nitrogen, a parallel gap with a simple structure and high productivity can be achieved. In the MIG head, it is possible to use glass with a high working temperature to increase the strength of the head without deteriorating the head characteristics due to the effects of pseudo gaps, and it is possible to achieve both productivity, good magnetic characteristics, and reliability. becomes.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の磁気ヘッドの、磁気記録媒体との摺動
面のギャップ近傍を示した平面図である。
FIG. 1 is a plan view showing the vicinity of the gap between the sliding surface of the magnetic head and the magnetic recording medium of the present invention.

【図2】従来の、反応防止層を用いたMIGタイプの磁
気ヘッドの、磁気記録媒体との摺動面のギャップ近傍を
示した平面図である。
FIG. 2 is a plan view showing the vicinity of the gap between the sliding surface and the magnetic recording medium of a conventional MIG type magnetic head using a reaction prevention layer.

【図3】従来の、窒化層と非窒化層の組合せで反応を防
止したMIGタイプの磁気ヘッドの、磁気記録媒体との
摺動面のギャップ近傍を示した平面図である。 11  メインギャップ 12  フェライトコア 13  軟磁性膜 14  窒化層 15  非窒化層 16  モールドガラス 17  反応防止層
FIG. 3 is a plan view showing the vicinity of the gap between the sliding surface and the magnetic recording medium of a conventional MIG type magnetic head in which reactions are prevented by a combination of a nitrided layer and a non-nitrided layer. 11 Main gap 12 Ferrite core 13 Soft magnetic film 14 Nitrided layer 15 Non-nitrided layer 16 Mold glass 17 Reaction prevention layer

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】  軟磁性膜をフェライトコアのキャップ
部に配し、軟磁性膜とフェライトとの間に反応防止層を
形成したMIGタイプのヘッドにおいて、軟磁性膜のフ
ェライト側から順に少なくとも、窒素を含む軟磁性膜の
層、窒素を含まない軟磁性膜の層、窒素を含む軟磁性膜
の層、の3層を設けたことを特徴とする磁気ヘッド。
1. In a MIG type head in which a soft magnetic film is disposed on the cap portion of a ferrite core, and a reaction prevention layer is formed between the soft magnetic film and the ferrite, at least nitrogen is added in order from the ferrite side of the soft magnetic film. 1. A magnetic head comprising three layers: a soft magnetic film layer containing nitrogen, a nitrogen-free soft magnetic film layer, and a nitrogen-containing soft magnetic film layer.
【請求項2】  反応防止層が珪素の酸化物、アルミニ
ウムの酸化物、白金族の元素の何れかであることを特徴
とする請求項1記載の磁気ヘッド。
2. The magnetic head according to claim 1, wherein the reaction prevention layer is any one of a silicon oxide, an aluminum oxide, and a platinum group element.
【請求項3】  反応防止層がSiO2であることを特
徴とする請求項1記載の磁気ヘッド。
3. The magnetic head according to claim 1, wherein the reaction prevention layer is made of SiO2.
JP9716291A 1990-10-02 1991-04-26 Magnetic head Pending JPH04325906A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9716291A JPH04325906A (en) 1991-04-26 1991-04-26 Magnetic head
US07/769,852 US5227193A (en) 1990-10-02 1991-10-02 Method for manufacturing magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9716291A JPH04325906A (en) 1991-04-26 1991-04-26 Magnetic head

Publications (1)

Publication Number Publication Date
JPH04325906A true JPH04325906A (en) 1992-11-16

Family

ID=14184877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9716291A Pending JPH04325906A (en) 1990-10-02 1991-04-26 Magnetic head

Country Status (1)

Country Link
JP (1) JPH04325906A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0620571A2 (en) * 1993-03-31 1994-10-19 Matsushita Electric Industrial Co., Ltd. Soft magnetic multilayer films for magnetic head

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0620571A2 (en) * 1993-03-31 1994-10-19 Matsushita Electric Industrial Co., Ltd. Soft magnetic multilayer films for magnetic head
EP0620571A3 (en) * 1993-03-31 1995-02-08 Matsushita Electric Ind Co Ltd Soft magnetic multilayer films for magnetic head.
US5452167A (en) * 1993-03-31 1995-09-19 Matsushita Electric Industrial Co., Ltd. Soft magnetic multilayer films for magnetic head

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