KR950001603B1 - Magnetic head for multi-layer - Google Patents

Magnetic head for multi-layer Download PDF

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Publication number
KR950001603B1
KR950001603B1 KR1019920008869A KR920008869A KR950001603B1 KR 950001603 B1 KR950001603 B1 KR 950001603B1 KR 1019920008869 A KR1019920008869 A KR 1019920008869A KR 920008869 A KR920008869 A KR 920008869A KR 950001603 B1 KR950001603 B1 KR 950001603B1
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KR
South Korea
Prior art keywords
magnetic
magnetic head
film
layer
thin layer
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KR1019920008869A
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Korean (ko)
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KR930023921A (en
Inventor
안동훈
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주식회사금성사
이헌조
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Priority to KR1019920008869A priority Critical patent/KR950001603B1/en
Publication of KR930023921A publication Critical patent/KR930023921A/en
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Publication of KR950001603B1 publication Critical patent/KR950001603B1/en

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/147—Structure or manufacture of heads, e.g. inductive with cores being composed of metal sheets, i.e. laminated cores with cores composed of isolated magnetic layers, e.g. sheets
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/133—Structure or manufacture of heads, e.g. inductive with cores composed of particles, e.g. with dust cores, with ferrite cores with cores composed of isolated magnetic particles

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

The magnetic head enhancing the desired magnetic properties of the magnetic head uses the ferrite thin layer (6) instead of the normal dielectric substance when the magnetic material thin layer and the dielectric thin layer are formed on the non magnetic base plate (1).

Description

적층자기헤드Stacked Magnetic Head

제1도는 일반적인 적층형 자기헤드 구조 사시도.1 is a perspective view of a general stacked magnetic head structure.

제2도는 제1도의 코아부분 상세도.2 is a detailed view of the core portion of FIG.

제3도는 본 발명에 따른 주파수와 투자율의 특성도.3 is a characteristic diagram of frequency and permeability according to the present invention.

제4도는 본 발명의 자기헤드 공정 사시도.4 is a perspective view of a magnetic head process of the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 비자성기판 2 : 자성적층막1: nonmagnetic substrate 2: magnetic laminated film

3 : 자성막 4 : 유전체막3: magnetic film 4: dielectric film

5 : 갭 6 : 페라이트박막5: gap 6: ferrite thin film

본 발명은 자기헤드에 관한 것으로서, 특히 고밀도 기록을 위해 고주파 대역까지 큰 투자율을 갖도록 한 적층 자기헤드에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to magnetic heads and, more particularly, to stacked magnetic heads having a high permeability up to a high frequency band for high density recording.

최근의 자기헤드(Heed), 특히 VTR용 영상헤드에 있어서는 고화질, 고밀도 기록을 위해서는 사용하는 주파수 대역이 점차 높아지고 있으며 테이프의 보자력도 커지고 있는 실정이다.In recent magnetic heads, especially VTR video heads, the frequency band used for high quality and high density recording is gradually increasing, and the coercive force of the tape is also increasing.

따라서 이에 대응되는 자기헤드도 높은 포화자화 값을 가져야하며 또한, 고주파에 대응하기 위해 자기헤드의 구조에 대해서도 여러가지로 연구되고 있다.Therefore, the corresponding magnetic head must also have a high saturation magnetization value, and has been studied in various ways in the structure of the magnetic head to cope with high frequency.

최근의 자기헤드중 가장 대표적인 것은 단결정 Mn-Zn페라이트를 이용한 자기헤드로써, 가공성 마모특성 주파수 대응성 등에서 우수한 특성을 갖고 있어 널리 사용되고 있으나, 테이프의 보자력이 높아짐에 따라 페라이트 헤드의 대응에는 한계가 있어 자기헤드의 갭(Gap)부분에 포화 자화값이 큰 센더스트나 아모르포스(Sendust or Amorphous)등의 금속을 형성시킨 이른바 Metal-In-Gap(MIG)헤드가 최근에는 개발되어 많이 적용되고 있으며 고주파화 됨에 따라 와전류 손실에 기인되는 특성 열화를 방지하기 위해 금속자성막을 적층화시킨 소위 적층형 자기헤드(Lamination Head)가 개발되고 있다.The most representative of recent magnetic heads are magnetic heads using single crystal Mn-Zn ferrites, which are widely used because of their excellent characteristics in machinability, abrasion characteristics, frequency response, etc. The so-called Metal-In-Gap (MIG) head, which has formed a metal such as Sendust or Amorphous, which has a large saturation magnetization value in the gap portion of the magnetic head, has been recently developed and applied a lot. In order to prevent the deterioration of characteristics caused by eddy current loss, so-called lamination heads in which metal magnetic films are laminated are being developed.

이러한 종래의 적층형 자기헤드를 첨부된 도면을 참조하여 설명하면 다음과 같다.The conventional stacked magnetic head will be described with reference to the accompanying drawings.

제1도는 일반적인 적층형 자기헤드 구조를 나타내고, 제2도는 제1도의 코어부분 상세도를 나타낸 것으로써 제1도와 같이 비자성기판(1)에 권선홈과 트랙홈이 형성되어 그 위에 자성적층막(2)이 형성된다.FIG. 1 shows a general stacked magnetic head structure, and FIG. 2 shows a detailed view of the core portion of FIG. 1, in which winding grooves and track grooves are formed in the nonmagnetic substrate 1 as shown in FIG. 2) is formed.

여기서, 자성적층막(2)은 제2도와 같이 자성박막(3)과 유전체막(4)이 적층된다. 자성박막(3)으로는 센더스트(Fe-Al-Si)나 Co계의 비정질 합금등이 사용되며 유전체막(4)으로는 실리콘 산화막(SiO2) 또는 알류미늄 산화막(Al2O3)등이 사용된다.In the magnetic laminated film 2, the magnetic thin film 3 and the dielectric film 4 are stacked as shown in FIG. 2. As the magnetic thin film 3, a sender (Fe-Al-Si) or Co-based amorphous alloy is used. As the dielectric film 4, a silicon oxide film (SiO 2 ) or an aluminum oxide film (Al 2 O 3 ) is used. Used.

또한 비자성기판(1)의 제료로써는 노이즈를 줄이기 위해 페라이트(Ferrite) 대신 CaTio3, MnO-NiO, Al2O3-TiC, CoO-NiO 또는 결정화 유리등이 사용되고, 코어를 이와 같은 본 발명을 첨부된 도면 및 표를 참조하여 상세히 설명하면 다음과 같다.In addition, as a material of the nonmagnetic substrate 1, CaTio 3 , MnO-NiO, Al 2 O 3 -TiC, CoO-NiO, or crystallized glass, etc., are used instead of ferrite to reduce noise. When described in detail with reference to the accompanying drawings and tables as follows.

본 발명의 자기헤드는 제1도 및 제2도에 도시한 바와 같이 종래의 자기헤드와 구조는 같으나, 자성적층막의 유전체를 다르게 한 것으로 종래와 비교하여 실시예를 표1에 나타내고 제조방법을 제4도에 나타내었다.As shown in FIGS. 1 and 2, the magnetic head of the present invention has the same structure as the conventional magnetic head, but the dielectric of the magnetic laminated film is different. 4 is shown.

즉, 제4a도와 같이 본 발명은 CaTio3비자성기판(1)에 관선홈과 트랙홈을 형성한 뒤 초기진공도(5.5×10-7Torr)에서 센더스트를 3.2mTorr의 압력으로 5㎛두께가 스퍼터링하여 자성막(3)을 형성하고, 제4b도와 같이 자성막(3)위에 페라이트 박막(6)을 10% O2+Ar가스를 사용하여 7.0mTorr의 압력으로 3000Å두께로 스퍼터링하여 자성절연체를 형성한다.That is, as shown in FIG. 4a, the present invention forms a tubular groove and a track groove in the CaTio 3 nonmagnetic substrate 1, and then, in the initial vacuum degree (5.5 × 10 -7 Torr), the sendust is 5 μm thick at a pressure of 3.2 mTorr. By sputtering to form the magnetic film 3, as shown in FIG. 4b, the ferrite thin film 6 was sputtered on the magnetic film 3 at a thickness of 3,000 kPa at a pressure of 7.0 mTorr using 10% O 2 + Ar gas to form the magnetic insulator. Form.

제4c도와 같이 자성막(3)과 페라이트박막(6)을 4번 박복하여 4층 자성적층막을 형성한다. 그리고 제4d도와 같이 비자성기판(1a)을 접착한다.As shown in FIG. 4C, the magnetic film 3 and the ferrite thin film 6 are overlapped four times to form a four-layer magnetic laminated film. Then, the nonmagnetic substrate 1a is bonded as shown in FIG. 4d.

여기서, 본 발명의 센더스트 타게트(target)는 Fe84Al6Si10을 사용하여 성막하기전에 프리 스퍼터링(Pre-Sputtering)을 약 30분간 한다. 그리고, 페라이트 타게트는 Mn-Zn페라이트를 사용한다.Here, the sender target of the present invention is subjected to pre-sputtering for about 30 minutes before film formation using Fe 84 Al 6 Si 10 . The ferrite target uses Mn-Zn ferrite.

이상에서 설명한 바와 같이 본 발명의 자기헤드 제조방법에 있어서는 주파수에 따른 투자율 변화를 종래와 본 발명으로 나누어 비교한 제3도와 같이 종래의 실시예(a,b)보다 본 발명에 의한 실시예(C)가 고주파 대역까지 큰 투자율을 갖고 있으므로 고밀도, 고화질로 기록하고 재생할 수 있는 효과가 있다.As described above, in the method of manufacturing the magnetic head of the present invention, the embodiment according to the present invention is compared to the conventional embodiments (a, b) as shown in FIG. ) Has a high permeability up to a high frequency band, so that it is possible to record and play back at high density and high quality.

또한, 자성박막으로 센더스트외에 Fe계 연자성 합금, 비정질 합금, 퍼몰로이(Permalloy)등을 사용해도 동일 효과를 얻을 수 있음은 물론이다.In addition, the same effect can be obtained by using a Fe-based soft magnetic alloy, an amorphous alloy, Permalloy, etc. in addition to the sender as the magnetic thin film.

Claims (1)

비자성 기판상에 자성박막과 유전체막이 교대로 적층하여서 된 적층자기 헤드에 있어서, 상기 유전체막이 페라이트(ferrite)박막인 것을 특징으로 하는 적층자기헤드.A laminated magnetic head in which a magnetic thin film and a dielectric film are alternately stacked on a nonmagnetic substrate, wherein the dielectric film is a ferrite thin film.
KR1019920008869A 1992-05-25 1992-05-25 Magnetic head for multi-layer KR950001603B1 (en)

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KR1019920008869A KR950001603B1 (en) 1992-05-25 1992-05-25 Magnetic head for multi-layer

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KR1019920008869A KR950001603B1 (en) 1992-05-25 1992-05-25 Magnetic head for multi-layer

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KR950001603B1 true KR950001603B1 (en) 1995-02-27

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