JPH05290315A - Magnetic head - Google Patents
Magnetic headInfo
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- JPH05290315A JPH05290315A JP4086899A JP8689992A JPH05290315A JP H05290315 A JPH05290315 A JP H05290315A JP 4086899 A JP4086899 A JP 4086899A JP 8689992 A JP8689992 A JP 8689992A JP H05290315 A JPH05290315 A JP H05290315A
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- magnetic
- head
- film
- magnetic head
- core
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Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は磁気ディスク装置に用い
る低インダクタンスでかつ高密度記録に対応可能な磁気
ヘッドに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head used in a magnetic disk device, which has a low inductance and is compatible with high density recording.
【０００２】[0002]
【従来の技術】近年、磁気記録技術の進歩は著しく、家
庭用のＶＴＲの分野では小型、軽量化のために、また磁
気ディスク装置の分野では小型大容量化のために、記録
密度の高密度化が進められている。特に、磁気ディスク
装置を考えてみた場合、記録の高密度化を実現するため
には、磁気ヘッドは高周波領域で使用されるため、磁気
コアのインダクタンスの低減と狭トラック化が必要であ
る。そこで、フェライトからなる磁気コアと非磁性材か
らなるスライダーを組み合わせて構成されるコンポジッ
ト型の磁気ヘッドが開発されてきた。さらに、現在で
は、高保磁力の媒体に記録可能な強い記録磁界を発生さ
せるために、磁気コアのギャップ近傍に高飽和磁束密度
を有する磁性膜を成膜したメタル イン ギャップ型のコ
ンポジットヘッドも実用化されている。図３は、メタル
イン ギャップ型コンポジットヘッドの磁気コアの一例
を示す外観斜視図であり、図４はその記録媒体対向面を
示す拡大平面図である。磁気ギャップ形成面側に磁性膜
８が成膜されたＩ型の磁気コア半体６と、Ｃ型の磁気コ
ア半体７をガラス１０によりボンディングして磁気コア
を構成する。この磁気コア１１を、例えば図５に示すよ
うなＣａＴｉＯ3製のスライダー１２に設けられた切り
欠け部に嵌挿し、ガラス１３で固定して磁気ヘッドを構
成する。2. Description of the Related Art In recent years, magnetic recording technology has been remarkably advanced. In order to reduce the size and weight in the field of household VTRs and to reduce the size and capacity in the field of magnetic disk devices, the recording density is high. Is being promoted. In particular, when considering a magnetic disk device, in order to realize high recording density, the magnetic head is used in a high frequency region, and therefore it is necessary to reduce the inductance of the magnetic core and narrow the track. Therefore, a composite type magnetic head constructed by combining a magnetic core made of ferrite and a slider made of a non-magnetic material has been developed. In addition, at present, in order to generate a strong recording magnetic field that can be recorded on a medium with a high coercive force, a metal-in-gap type composite head with a magnetic film with a high saturation magnetic flux density formed near the gap of the magnetic core is also put into practical use. Has been done. FIG. 3 is an external perspective view showing an example of the magnetic core of the metal-in-gap type composite head, and FIG. 4 is an enlarged plan view showing the recording medium facing surface thereof. The I-type magnetic core half body 6 having the magnetic film 8 formed on the magnetic gap forming surface side and the C-type magnetic core half body 7 are bonded with glass 10 to form a magnetic core. The magnetic core 11 is inserted into a notch provided in a slider 12 made of CaTiO 3 , for example, as shown in FIG. 5, and fixed with glass 13 to form a magnetic head.
【０００３】しかしながら、磁気回路の主要部がフェラ
イトで構成されている磁気コアでは、コアのインダクタ
ンス低減には限界があり、数十ＭＨｚの高周波領域にな
ると自然共鳴などによる損失が大きくなり透磁率が急激
に減少するため、更に記録の高密度化を実現することは
難しい。これらの欠点を補うものとして、Ｆｅ−Ａｌ−
Ｓｉ等の金属磁性膜を絶縁膜で積層した積層型のヘッド
が開発され、ＶＴＲ用として実用化されている（例え
ば、信学技報 ＭＲ７７−２、ＭＲ８４−３２、ＭＲ８
５−２９、ＭＲ８６−３１、日本応用磁気学会誌 １
２，９７（１９８８）等）。磁気ディスク用としては、
図６に示すような非磁性スライダー体にＦｅ−Ａｌ−Ｓ
ｉ／ＳｉＯ2の積層膜を成膜したものが開発されている
（例えば、信学技報 ＭＲ９０−３９、第１４回日本応
用磁気学会学術講演概要集 １５５（１９９０）等）。However, in the magnetic core in which the main part of the magnetic circuit is composed of ferrite, there is a limit to the reduction of the inductance of the core, and in the high frequency region of several tens MHz, the loss due to natural resonance becomes large and the magnetic permeability becomes large. Since it sharply decreases, it is difficult to realize higher recording density. To compensate for these drawbacks, Fe-Al-
A laminated head in which a magnetic metal film of Si or the like is laminated with an insulating film has been developed and put to practical use as a VTR (see, for example, Technical Bulletin MR77-2, MR84-32, MR8).
5-29, MR86-31, The Japan Society for Applied Magnetics 1
2, 97 (1988)). For magnetic disks,
Fe-Al-S is added to the non-magnetic slider body as shown in FIG.
Those in which a laminated film of i / SiO 2 is formed have been developed (for example, IEICE Technical Report MR90-39, Proceedings of the 14th Japan Society for Applied Magnetics 155 (1990), etc.).
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、図６に
示すようなスライダー体の側面全面に積層膜を成膜した
たものは、積層膜の全膜厚がトラック幅になるため、積
層膜の透磁率がかなり高くないと磁気ヘッド性能は悪く
なり、積層膜の透磁率を上げるとヘッドのインダクタン
スが上がってしまう。また、スライダーの形状が決まっ
ている場合、磁気コアのインダクタンス低減には積層膜
の全膜厚を薄くすることが一番効果的だが、全膜厚を薄
くすればするほどトラックずれが発生し易く、磁気ヘッ
ド特性に大きく影響を及ぼし、磁気ヘッド性能を悪くす
る。そのため、トラック合わせには高い精度が要求さ
れ、また、製造上の歩留りを下げる原因となる。この対
策として、磁気コアの寸法を小さくして積層膜の膜厚を
厚くしトラック絞りを行えば、磁気ヘッドの性能を下げ
ること無く、磁気コアのインダクタンスを下げることが
でき、製造上の歩留りを上げることができることを我々
は見いだした。しかしながら、積層膜を厚く付けるに
は、多大な時間と手間がかかるため、製造コストが高く
なってしまう。また、Ｆｅ−Ａｌ−Ｓｉ系合金膜は、熱
膨張係数が大きいため膜剥離や基板および接合ガラスの
クラック等の問題や、飽和磁束密度が１．１Ｔ程度であ
るため磁気記録の高密度化が進み記録媒体の保磁力が向
上してくると記録特性が劣化してくる問題がある。However, in the case where the laminated film is formed on the entire side surface of the slider body as shown in FIG. 6, since the total film thickness of the laminated film is the track width, the transparency of the laminated film is reduced. If the magnetic susceptibility is not very high, the magnetic head performance deteriorates, and if the magnetic permeability of the laminated film is increased, the inductance of the head increases. Also, if the slider shape is fixed, it is most effective to reduce the total film thickness of the laminated film to reduce the inductance of the magnetic core, but the thinner the total film thickness, the easier the track deviation occurs. , Greatly affect the magnetic head characteristics and deteriorate the magnetic head performance. Therefore, high accuracy is required for track alignment, and this also causes a reduction in manufacturing yield. As a countermeasure against this, if the dimension of the magnetic core is reduced and the thickness of the laminated film is increased to perform the track diaphragm, the inductance of the magnetic core can be reduced without lowering the performance of the magnetic head, and the manufacturing yield can be improved. We have found that we can raise. However, it takes a lot of time and labor to apply a thick laminated film, resulting in a high manufacturing cost. Further, the Fe-Al-Si alloy film has a large coefficient of thermal expansion, which causes problems such as film peeling and cracks in the substrate and the bonding glass, and a saturation magnetic flux density of about 1.1 T, which leads to high density magnetic recording. When the coercive force of the recording medium is improved, the recording characteristics are deteriorated.
【０００５】本発明は、上述した従来技術の欠点を解消
し、磁気コアのインダクタンスが小さく、高い記録磁界
を発生することができる生産性の高い磁気ヘッドを提供
することを目的とするものである。It is an object of the present invention to solve the above-mentioned drawbacks of the prior art and to provide a highly productive magnetic head having a small magnetic core inductance and capable of generating a high recording magnetic field. ..
【０００６】[0006]
【課題を解決するための手段】本発明の磁気ヘッドは、
二枚の基板の間に軟磁性合金膜と絶縁膜の積層膜を有す
る積層型の磁気コアを用いた磁気ヘッドであって、基板
のいずれか一方を軟磁性フェライトで構成し、磁気コア
のトラック形状は片絞り、または、両絞り形状とし、そ
の磁気コアを非磁性からなるスライダー体に組み込んだ
積層型の磁気ヘッドである。The magnetic head of the present invention comprises:
A magnetic head using a laminated magnetic core having a laminated film of a soft magnetic alloy film and an insulating film between two substrates, wherein one of the substrates is composed of a soft magnetic ferrite, and a track of the magnetic core is formed. The magnetic head is a laminated magnetic head having a single-stop or double-stop shape, and its magnetic core is incorporated in a slider body made of non-magnetic material.
【０００７】また、本発明において、積層膜を構成する
軟磁性合金膜は、一般式ＴxＭyＧz（ただしｘ，ｙ，ｚ
は各々組成比を原子％として表し、ＴはＦｅ，Ｃｏ，Ｎ
ｉよりなる群から選ばれた少なくとも一種の元素、Ｍは
Ｈｆ，Ｚｒ，Ｔａ，Ｎｂ，Ｔｉよりなる群から選ばれた
少なくとも一種の元素、ＧはＢ，Ｃ，Ｎ，Ｏよりなる群
から選ばれた少なくとも一種の元素を表し、４≦ｙ≦１
５，４≦ｚ≦２５，ｘ＋ｙ＋ｚ＝１００である。）で表
された軟磁性合金膜が望ましく、その膜を付着させる非
磁性、または、軟磁性フェライト基板の熱膨張係数は、
１１０〜１４０×１０-7／℃の範囲とするのが望まし
い。In the present invention, the soft magnetic alloy film constituting the laminated film is represented by the general formula TxMyGz (where x, y, z
Represents the composition ratio in atomic%, and T represents Fe, Co, N
At least one element selected from the group consisting of i, M is at least one element selected from the group consisting of Hf, Zr, Ta, Nb and Ti, and G is selected from the group consisting of B, C, N and O Is represented by at least one element, 4 ≦ y ≦ 1
5,4 ≦ z ≦ 25 and x + y + z = 100. ) Is desirable, and the thermal expansion coefficient of the non-magnetic or soft magnetic ferrite substrate to which the film is attached is
It is desirably in the range of 110~140 × 10- 7 / ℃.
【０００８】[0008]
【作用】二枚の基板の間に軟磁性合金膜と絶縁膜の積層
膜を有する積層型磁気ヘッドにおいて、基板のいずれか
一方にフェライトを使うことにより、同寸法のメタルイ
ン ギャップ型のコンポジットヘッドよりインダクタン
スを小さくすることができ、高周波対応が可能である。
また、積層膜の厚さがトラック幅と同じでもヘッド性能
を下げずに、インダクタンスを小さくすることが可能で
ある。本発明の磁気ヘッドは、軟磁性フェライト基板側
を片絞りまたは両絞り形状に、ラック絞り加工すること
により、磁気ヘッド特性が向上し、歩留り向上につなが
る。In a laminated magnetic head having a laminated film of a soft magnetic alloy film and an insulating film between two substrates, a metal-in-gap type composite head having the same size can be obtained by using ferrite on either one of the substrates. The inductance can be further reduced and high frequency can be supported.
Further, even if the thickness of the laminated film is the same as the track width, the inductance can be reduced without lowering the head performance. In the magnetic head of the present invention, the magnetic head characteristics are improved and the yield is improved by rack-drawing the soft magnetic ferrite substrate side into a single-drawing shape or a double-drawing shape.
【０００９】本発明の磁気ヘッドは、二枚の基板同志の
接合と磁気コアをスライダ−に組み込んで固定する際の
ガラス接合を最低２回は行わなければならないため、高
耐熱性を有する軟磁性膜を用いなければならない。一般
式ＴxＭyＧz（ただしｘ，ｙ，ｚは各々組成比を原子％
として表し、ＴはＦｅ，Ｃｏ，Ｎｉよりなる群から選ば
れた少なくとも一種の元素、ＭはＨｆ，Ｚｒ，Ｔａ，Ｎ
ｂ，Ｔｉよりなる群から選ばれた少なくとも一種の元
素、ＧはＢ，Ｃ，Ｎ，Ｏよりなる群から選ばれた少なく
とも一種の元素を表す。）で表された軟磁性合金膜は、
４≦ｙ≦１５，４≦ｚ≦２５，ｘ＋ｙ＋ｚ＝１００の組
成範囲において、６００℃以上の熱処理温度で軟磁気特
性が劣化せず、Ｂｓが１．３Ｔ以上の高飽和磁束密度を
有するため、この軟磁性合金膜を本発明の磁気ヘッドに
用いることにより、従来のメタルイン ギャップ型のコ
ンポジットヘッドやＦｅ−Ａｌ−Ｓｉ膜を用いた積層型
ヘッドに比べ、より高密度の記録が可能である。また、
この軟磁性合金膜を付着させる非磁性または軟磁性フェ
ライト基板に、熱膨張係数が１１０〜１４０×１０-7／
℃である基板を用いることにより、熱処理後の軟磁性合
金膜の内部応力を−１〜１×１０7Ｐａの範囲内にする
ことができる。そのため、軟磁性合金膜の磁気特性の劣
化を小さくすることができ、良好なヘッド特性を示す。In the magnetic head of the present invention, since the two substrates are bonded to each other and the glass core is bonded at least twice when the magnetic core is assembled and fixed in the slider, the soft magnetic material having high heat resistance is used. Membranes must be used. General formula TxMyGz (where x, y, and z are composition ratios in atomic%, respectively)
Where T is at least one element selected from the group consisting of Fe, Co and Ni, and M is Hf, Zr, Ta and N.
At least one element selected from the group consisting of b and Ti, and G represents at least one element selected from the group consisting of B, C, N, and O. ), The soft magnetic alloy film is
In the composition range of 4 ≦ y ≦ 15, 4 ≦ z ≦ 25, x + y + z = 100, the soft magnetic properties are not deteriorated at the heat treatment temperature of 600 ° C. or higher, and Bs has a high saturation magnetic flux density of 1.3 T or higher. By using this soft magnetic alloy film in the magnetic head of the present invention, higher density recording is possible as compared with the conventional metal-in-gap type composite head and the laminated type head using the Fe-Al-Si film. .. Also,
A non-magnetic or soft magnetic ferrite substrate to deposit the soft magnetic alloy film, the thermal expansion coefficient of 110 - 140 × 10- 7 /
By using a substrate having a temperature of ° C, the internal stress of the soft magnetic alloy film after heat treatment can be set within the range of -1 to 1 x 10 7 Pa. Therefore, deterioration of the magnetic characteristics of the soft magnetic alloy film can be reduced, and good head characteristics are exhibited.
【００１０】[0010]
（実施例１）本発明に従い以下の条件で積層型ヘッドを
作製し磁気ヘッド特性を調べた。その結果を表２にまと
める。(Example 1) According to the present invention, a laminated head was manufactured under the following conditions and the magnetic head characteristics were examined. The results are summarized in Table 2.
【００１１】非磁性基板‥‥‥‥‥‥‥ＭｎＯ−ＮｉＯ
系非磁性基板 α＝１２５×１０-7／℃ 軟磁性フェライト基板‥‥Ｍｎ−Ｚｎ系多結晶フェライ
ト基板 α＝１１５×１０-7／℃ 磁性膜の一層の厚さ‥‥‥２μｍ 絶縁膜の一層の厚さ‥‥‥ＳｉＯ2膜０．０５μｍ 積層膜の全膜厚‥‥‥‥‥１６μｍ フェライト基板の厚み‥‥４０μｍ 磁気コアの厚み‥‥‥‥‥１１６μｍ トラック幅‥‥‥‥‥‥‥８μｍ ギャップ長‥‥‥‥‥‥‥０．３μｍNon-magnetic substrate ‥‥‥‥‥‥‥‥‥‥ MnO-NiO
Of greater thickness ‥‥‥ 2 [mu] m insulating film systems nonmagnetic substrate α = 125 × 10- 7 / ℃ soft ferrite substrate ‥‥ Mn-Zn-based polycrystalline ferrite substrate α = 115 × 10- 7 / ℃ magnetic film Thickness of one layer: SiO 2 film 0.05 μm Total thickness of laminated film: 16 μm Ferrite substrate thickness: 40 μm Magnetic core thickness: 116 μm Track width:・ ・ ・ 8μm Gap length ‥‥‥‥‥‥‥‥‥ 0.3μm
【００１２】[0012]
【表１】 磁気ヘッドの評価は、保磁力Ｈｃ＝２０００ＯｅのＣｏ
-Ｃｒ-Ｔａ系のディスクを用いて、周速７．６２ｍ／
ｓ、浮上量０．１２μｍ、記録周波数４．６ＭＨｚ、記
録電流１２ｍＡ0-P、コイル巻き数４０ターンの条件で
行った。[Table 1] The evaluation of the magnetic head was performed with Co having a coercive force Hc = 2000 Oe
-Cr-Ta type disc, peripheral speed 7.62m /
s, flying height 0.12 μm, recording frequency 4.6 MHz, recording current 12 mA 0-P, and coil winding number 40 turns.
【００１３】[0013]
【表２】 [Table 2]
【００１４】Ｌはヘッドインダクタンス、Ｏ／Ｗはオー
バーライト、ＥNは規格化出力、Ｄ50は限界線記録密度
を表す。また、試料番号７はＣ型及びＩ型Ｍｎ−Ｚｎフ
ェライトの磁気コアのそれぞれギャップ形成面側にＦｅ
−Ａｌ−Ｓｉ系薄膜を付着させて作った両膜メタル イ
ン ギャップ型のコンポジットヘッドで、試料番号８は
Ｆｅ−Ａｌ−Ｓｉ系薄膜を用いた図６に示すような積層
型ヘッドを表す。表２により本発明の磁気ヘッドは、従
来のヘッドに比べ低インダクタンスで高記録密度に対応
可能なことがわかる。L is the head inductance, O / W is the overwrite, EN is the standardized output, and D50 is the limit linear recording density. Further, sample No. 7 is Fe on the gap forming surface side of each of the magnetic cores of C-type and I-type Mn-Zn ferrite.
A double-metal-in-gap type composite head made by adhering a -Al-Si thin film, and sample No. 8 represents a laminated head as shown in FIG. 6 using a Fe-Al-Si thin film. From Table 2, it can be seen that the magnetic head of the present invention has a lower inductance and can cope with a higher recording density than the conventional head.
【００１５】[0015]
【発明の効果】以上の説明から明らかなように、本発明
の磁気ヘッドは、生産性が高く、インダクタンスが低
く、高周波数でのヘッド特性の劣化が小さく、超高密度
の磁気記録を達成することができる。As is clear from the above description, the magnetic head of the present invention has high productivity, low inductance, little deterioration of head characteristics at high frequencies, and achieves ultrahigh density magnetic recording. be able to.
【図１】本発明の磁気コアのトラック両絞りの一例を示
す外観斜視図である。FIG. 1 is an external perspective view showing an example of both track diaphragms of a magnetic core of the present invention.
【図２】本発明の磁気コアのトラック片絞りの一例を示
す外観斜視図である。FIG. 2 is an external perspective view showing an example of the track single-sided stop of the magnetic core of the present invention.
【図３】従来のメタル−イン−ギャップ型の磁気コアの
一例を示す外観斜視図である。FIG. 3 is an external perspective view showing an example of a conventional metal-in-gap type magnetic core.
【図４】従来のメタル−イン−ギャップ型の磁気コア磁
気記録媒体対向面の拡大平面図である。FIG. 4 is an enlarged plan view of a surface facing a conventional metal-in-gap type magnetic core magnetic recording medium.
【図５】磁気コアを埋め込んだコンポジット型磁気ヘッ
ドの一例を示す外観斜視図である。FIG. 5 is an external perspective view showing an example of a composite type magnetic head in which a magnetic core is embedded.
【図６】従来の積層型磁気ヘッドの一例を示す外観斜視
図である。FIG. 6 is an external perspective view showing an example of a conventional laminated magnetic head.
【図７】従来の積層型磁気ヘッドの磁気記録媒体対向面
の拡大平面図である。FIG. 7 is an enlarged plan view of a surface of a conventional laminated magnetic head that faces a magnetic recording medium.
１ 積層膜 ２ 軟磁性フェライト基板 ３ 非磁性基板 ４ ギャップ膜 ５ ガラス ６ フェライト基板（Ｉ型コア） ７ フェライト基板（Ｃ型コア） ８ 磁性膜 ９ ギャップ膜 １０ ガラス １１ 磁気コア １２ 非磁性スライダー １３ ガラス １４ 積層膜 １５ 非磁性スライダー １６ ガラス １７ 磁性膜 １８ 絶縁膜 １９ ギャップ膜 1 laminated film 2 soft magnetic ferrite substrate 3 non-magnetic substrate 4 gap film 5 glass 6 ferrite substrate (I-type core) 7 ferrite substrate (C-type core) 8 magnetic film 9 gap film 10 glass 11 magnetic core 12 non-magnetic slider 13 glass 14 laminated film 15 non-magnetic slider 16 glass 17 magnetic film 18 insulating film 19 gap film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小池 修治 埼玉県熊谷市三ケ尻5200番地 日立金属株 式会社磁性材料研究所内 (72)発明者 野口 一美 埼玉県熊谷市三ケ尻5200番地 日立金属株 式会社磁性材料研究所内 (72)発明者 諏訪部 繁和 埼玉県熊谷市三ケ尻5200番地 日立金属株 式会社磁性材料研究所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Shuji Koike 5200 Sankejiri, Kumagaya-shi, Saitama, Hitachi Metals Co., Ltd. Magnetic Materials Research Laboratories (72) Kazumi Noguchi 5200 Sankejiri, Kumagaya-shi, Saitama Hitachi Metals Co., Ltd. Inside the Magnetic Materials Research Center (72) Inventor Shigekazu Suwabe 5200 Mikajiri Kumagaya City Saitama Prefecture Hitachi Metals Co., Ltd.
Claims (3)
の積層膜を有する積層型の磁気コアを用いた磁気ヘッド
であって、 基板のいずれか一方を軟磁性フェライトで構成し、 磁気コアのトラック形状は片絞りまたは両絞り形状と
し、 その磁気コアを非磁性からなるスライダー体に組み込ん
だことを特徴とする磁気ヘッド。1. A magnetic head using a laminated magnetic core having a laminated film of a soft magnetic alloy film and an insulating film between two substrates, wherein one of the substrates is made of soft magnetic ferrite. The magnetic head is characterized in that the track shape of the magnetic core is a single stop or a double stop shape, and the magnetic core is incorporated in a slider body made of non-magnetic material.
各々組成比を原子％として表し、ＴはＦｅ，Ｃｏ，Ｎｉ
よりなる群から選ばれた少なくとも一種の元素、ＭはＨ
ｆ，Ｚｒ，Ｔａ，Ｎｂ，Ｔｉよりなる群から選ばれた少
なくとも一種の元素、ＧはＢ，Ｃ，Ｎ，Ｏよりなる群か
ら選ばれた少なくとも一種の元素を表し、４≦ｙ≦１
５，４≦ｚ≦２５，ｘ＋ｙ＋ｚ＝１００である。）で表
される軟磁性合金膜を磁気コアに用いたことを特徴とす
る請求項１に記載の磁気ヘッド。2. A general formula TxMyGz (where x, y and z are composition ratios expressed in atomic%, and T is Fe, Co and Ni).
At least one element selected from the group consisting of, M is H
f, Zr, Ta, Nb, at least one element selected from the group consisting of Ti, G represents at least one element selected from the group consisting of B, C, N, O, 4 ≦ y ≦ 1
5,4 ≦ z ≦ 25 and x + y + z = 100. The magnetic head according to claim 1, wherein a soft magnetic alloy film represented by (4) is used for the magnetic core.
℃である非磁性または軟磁性フェライト基板を用いた請
求項１、または、２に記載の磁気ヘッド。3. A thermal expansion coefficient of 110 - 140 × 10- 7 /
The magnetic head according to claim 1, wherein a non-magnetic or soft-magnetic ferrite substrate having a temperature of 0 ° C. is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4086899A JPH05290315A (en) | 1992-04-08 | 1992-04-08 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4086899A JPH05290315A (en) | 1992-04-08 | 1992-04-08 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05290315A true JPH05290315A (en) | 1993-11-05 |
Family
ID=13899687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4086899A Pending JPH05290315A (en) | 1992-04-08 | 1992-04-08 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05290315A (en) |
-
1992
- 1992-04-08 JP JP4086899A patent/JPH05290315A/en active Pending
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