JPH03144907A - Thin-film magnetic head and production thereof - Google Patents
Thin-film magnetic head and production thereofInfo
- Publication number
- JPH03144907A JPH03144907A JP28324589A JP28324589A JPH03144907A JP H03144907 A JPH03144907 A JP H03144907A JP 28324589 A JP28324589 A JP 28324589A JP 28324589 A JP28324589 A JP 28324589A JP H03144907 A JPH03144907 A JP H03144907A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- layer
- head
- flux density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000010410 layer Substances 0.000 claims abstract description 34
- 239000012792 core layer Substances 0.000 claims abstract description 13
- 230000004907 flux Effects 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000004070 electrodeposition Methods 0.000 claims abstract description 8
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 4
- 239000000956 alloy Substances 0.000 claims abstract description 4
- 229910020630 Co Ni Inorganic materials 0.000 claims abstract description 3
- 229910002440 Co–Ni Inorganic materials 0.000 claims abstract description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 claims abstract description 3
- 229910002059 quaternary alloy Inorganic materials 0.000 claims abstract description 3
- 229910002058 ternary alloy Inorganic materials 0.000 claims abstract 2
- 239000004020 conductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910001004 magnetic alloy Inorganic materials 0.000 claims 2
- 229910000889 permalloy Inorganic materials 0.000 abstract description 10
- 239000000463 material Substances 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910017112 Fe—C Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度記録再生用の薄膜磁気ヘッド及びその製
造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a thin film magnetic head for high-density recording and reproduction and a method of manufacturing the same.
従来の技術
従来の高密度記録用の薄膜磁気ヘッドにおいては磁気コ
ア層としてはＢ ｓ ＝ ９ ｋＧａｕｓｓの大きさを
もったパーマロイ薄膜の使用が中心的であり、またヘッ
ドの製法としてはたとえばハードディスク用の薄ｒＩｓ
、磁気ヘッドにおいては、コイルを形成する導体層を挟
んで高分子材料の絶縁層を用いるのが通常であるため、
この絶縁層の耐熱性の問題から高温で熱処理されなけれ
ば良好な軟質磁気特性が得られない磁性１１１１を磁気
コア層としては用いられないため、湿式の合金電着（電
気メツキ法）で摂氏数十度で良好な磁気特性の得られる
パーマロイ薄膜が磁気コア層として一般的であった。Conventional technology In conventional thin film magnetic heads for high-density recording, a permalloy thin film with a size of B s = 9 kGauss is mainly used as the magnetic core layer. Thin rIs
In magnetic heads, it is common to use an insulating layer made of a polymeric material with a conductor layer forming the coil in between.
Because of the heat resistance of this insulating layer, magnetic 1111 cannot be used as a magnetic core layer because good soft magnetic properties cannot be obtained unless it is heat-treated at high temperatures. Permalloy thin films, which have good magnetic properties at 10°C, have been commonly used as magnetic core layers.
発明が解決しようとする課題
磁気コア層としてパーマロイ薄膜をもちたい場合、その
飽和磁束密度（Ｂｓ）はおよそ９ ｋＧａｕｓｓである
ため、これは高保磁力の磁気記録媒体の十分な記録特性
を得るためには磁気コア層の磁気ギャップ付近のヘッド
先端部の磁気飽和がおこるため不十分であり、さらに大
きな飽和磁束密度を有する軟１を磁性薄膜が磁気コア層
として必要であった。従って、磁気ヘッド先端部に磁気
飽和が起こりにくい高Ｂｓ値を持った軟磁性薄膜をもち
い、高温の熱処理をしなくとも良好な軟質磁気特性の得
られる磁気コアを使ったＦｉｌｌ！ヘッド、及びその製
造法が望まれていた。Problems to be Solved by the Invention When using a permalloy thin film as a magnetic core layer, its saturation magnetic flux density (Bs) is approximately 9 kGauss, so this is necessary to obtain sufficient recording characteristics for a high coercivity magnetic recording medium. This is insufficient because magnetic saturation occurs at the tip of the head near the magnetic gap of the magnetic core layer, and a magnetic thin film of soft 1 having an even higher saturation magnetic flux density is required as the magnetic core layer. Therefore, Fill! uses a soft magnetic thin film with a high Bs value that makes magnetic saturation less likely to occur at the tip of the magnetic head, and uses a magnetic core that provides good soft magnetic properties without high-temperature heat treatment. A head and method for manufacturing the same are desired.
課題を解決するための手段
本発明によるｌＩｉ膜磁気ヘッドおよび製造方法は磁気
コアの磁気ギャップ付近における磁気飽和を改善するた
め少なくとも記録媒体と面した磁気ギャップ先端付近の
磁気コア層か、或はコア層全体を極めてＢｓ値の高い（
Ｂ ｓ ＞１６ｋＧａｕｓｓ ） Ｆ ｅ−Ｃｏ−Ｎｉ
Ｓ元系合金電着膜（特願昭６３−２４３０１６号および
特願昭６３−２２０９３５号）およびＦｅ−Ｃ。Means for Solving the Problems In order to improve magnetic saturation in the vicinity of the magnetic gap of the magnetic core, the IIi film magnetic head and manufacturing method of the present invention include at least the magnetic core layer near the tip of the magnetic gap facing the recording medium, or the core. The entire layer has an extremely high Bs value (
B s >16kGauss ) Fe-Co-Ni
S-based alloy electrodeposition film (Japanese Patent Application No. 63-243016 and Japanese Patent Application No. 63-220935) and Fe-C.
−Ｎｉ−Ｃｒ４元系合金電着１１１（特願平１−１０９
３６２号）の内の少なくとも１種類を用いて構成、およ
び作製する。ものである。-Ni-Cr quaternary alloy electrodeposition 111 (Patent application No. 1-109
No. 362). It is something.
作用
上記の構成によれば従来のパーマロイ合金（Ｂｓ ＝
９ ｋＧａｕｓｓ ）を用いた磁気コア層を有する同寸
法、同膜厚の薄膜磁気ヘッドで比較すれば磁性材料の飽
和磁束密度の大きな差から、より磁気ギャップ先端付近
の磁気飽和が生じにくく、保磁力の大きな高密度磁気記
録用媒体にも適した十分な記録再生特性が得られるもの
である。Effect According to the above configuration, conventional permalloy alloy (Bs =
When compared with a thin-film magnetic head of the same size and thickness using a magnetic core layer (9 kGauss), due to the large difference in the saturation magnetic flux density of the magnetic materials, magnetic saturation near the tip of the magnetic gap is less likely to occur, and the coercive force is lower. Sufficient recording and reproducing characteristics suitable for high-density magnetic recording media with a large capacity can be obtained.
実施例
第１図は本発明にもとすいて作製された薄膜磁気ヘッド
の断面構成を示すものである。１は非磁性基板、２およ
び３は下部磁性層、４は磁気ギャップ層、５は絶縁層、
６はコイルを形成する導体層、７および８は上部磁性層
、９は保ｆ！膜層をそれぞれ示す。Embodiment FIG. 1 shows a cross-sectional structure of a thin film magnetic head manufactured according to the present invention. 1 is a non-magnetic substrate, 2 and 3 are lower magnetic layers, 4 is a magnetic gap layer, 5 is an insulating layer,
6 is a conductor layer forming a coil, 7 and 8 are upper magnetic layers, and 9 is a holding f! The membrane layers are shown respectively.
第１図において下部磁性層２、および上部磁性層８を構
成する材料として従来のパーマロイにかえて電着法で作
製した高Ｂｓ値を有するＦｅ、、Ｃｏ ｚｏＮ ｉ ｚ
ｓｆ！膜（Ｂ ｓ −１８ＫＧａｕｓｓ ）を用い、ｌ
および７の各磁性層についてやはり電着法で作製したパ
ーマロイ薄膜を用いた。第１図の構成をもったハードデ
ィスク用薄膜磁気ヘッドのオーバーライド特性を第２図
中に示した。比較のため同図中には上下の磁性層全てを
パーマロイで作製した従来のヘッドの特性についても示
した。ヘッドの仕様は２４ターンコイル、トラック幅１
２μｍ１コア厚２．０ａｍでギャップ長が０．５μｍの
ものを用い、浮上量０．２μｍの条件で４．５ＭＨｚで
記録した後１８ＭＨｚでオーバライドした。高Ｂｓ値を
有する電着磁性膜を磁気コア層としてもちいた事によっ
て従来のパーマロイのみを用いた磁気ヘッドと比較して
約５ｄＢオーバーライドが向上し、ヘッドとしての優位
性かたしかめられた。In FIG. 1, the material constituting the lower magnetic layer 2 and the upper magnetic layer 8 is Fe, Co zoN i z , which has a high Bs value and is manufactured by electrodeposition method instead of the conventional permalloy
SF! Using a membrane (B s -18K Gauss), l
For each of the magnetic layers in Examples and No. 7, a permalloy thin film also produced by electrodeposition was used. The override characteristics of the thin film magnetic head for a hard disk having the configuration shown in FIG. 1 are shown in FIG. For comparison, the same figure also shows the characteristics of a conventional head in which the upper and lower magnetic layers are all made of permalloy. Head specifications: 24 turn coil, track width 1
Using a device with a core thickness of 2 μm, 2.0 am, and a gap length of 0.5 μm, recording was performed at 4.5 MHz under the condition of a flying height of 0.2 μm, and then overriding was performed at 18 MHz. By using an electroplated magnetic film with a high Bs value as the magnetic core layer, the override was improved by about 5 dB compared to a conventional magnetic head using only permalloy, confirming its superiority as a head.
上記のＦ ｅ ａｓＣｏ ｚｏＮ ｉ ：ＩＳの代わり
にＦｅ、、Ｃ０１？Ｎ １３ａＣｒ ２磁性膜を用いた
場合についてもまた同様なヘッド特性における優位性が
確かめられた。The above Fe asCo zoN i : Fe,, C01 instead of IS? Similar superiority in head characteristics was also confirmed in the case of using the N 13aCr 2 magnetic film.
発明の効果
本発明によって保磁力の大きな磁気記録媒体にも十分対
応できる磁気コア先端の磁気飽和の生じにくい薄膜磁気
ヘッドを得ることができ、より良好な磁気記録再生特性
が期待できる。Effects of the Invention According to the present invention, it is possible to obtain a thin film magnetic head in which magnetic saturation at the tip of the magnetic core is less likely to occur, which is sufficiently compatible with magnetic recording media having a large coercive force, and better magnetic recording and reproducing characteristics can be expected.
第１図は本発明の一実施例として作製された薄膜磁気ヘ
ッドの構成図、第２図は第１図の構成をもち、高Ｂｓ値
を有する電着膜を磁気コア層として採用した本発明のハ
ードディスク用薄膜フライングヘッド（Ａ）と従来のパ
ーマロイ磁性膜のみで構成されたヘッド（Ｂ）のそれぞ
れについてオーバーライド特性を測定したグラフである
。
１・・・・・・非磁性基板、２．３・・・・・・下部磁
性層、４・・・・・・磁気ギャップ層、５・・・・・・
絶縁層、６・・・・・・コイル、７．８・・・・・・上
部磁性層、９・・・・・・保護膜層、（Ａ）・・・・・
・本発明による薄膜磁気ヘッド、（Ｂ）・・・・・・従
来の薄膜磁気ヘッド。FIG. 1 is a configuration diagram of a thin film magnetic head manufactured as an example of the present invention, and FIG. 2 is a diagram of the present invention having the configuration shown in FIG. 1, but employing an electrodeposited film having a high Bs value as the magnetic core layer. 2 is a graph showing override characteristics measured for a thin-film flying head for a hard disk (A) and a conventional head (B) composed only of a permalloy magnetic film. 1...Nonmagnetic substrate, 2.3...Lower magnetic layer, 4...Magnetic gap layer, 5...
Insulating layer, 6...Coil, 7.8...Top magnetic layer, 9...Protective film layer, (A)...
- Thin film magnetic head according to the present invention, (B)... Conventional thin film magnetic head.
Claims (4)
体層を間に挟んだ絶縁層、上部磁性層を順次形成させた
構成を基本構成とする薄膜磁気ヘッドであって少なくと
も上下磁性層（磁気コア層）の磁気ギャップ先端の記録
媒体に面する部分にバックコア部より高飽和磁束密度を
もつ軟磁性薄膜を用いた薄膜磁気ヘッド。(1) A thin-film magnetic head having a basic configuration in which a lower magnetic layer, a magnetic gap layer, an insulating layer with a conductor layer sandwiched therebetween, and an upper magnetic layer are sequentially formed on a nonmagnetic substrate, at least the upper and lower magnetic layers. A thin film magnetic head that uses a soft magnetic thin film that has a higher saturation magnetic flux density than the back core part at the tip of the magnetic gap (magnetic core layer) facing the recording medium.
体層を間に挟んだ絶縁層、上部磁性層を順次形成させた
構成を基本構成とする薄膜磁気ヘッドであって、少なく
とも上下磁性層（磁気コア）の磁気ギャップ先端の記録
媒体に面する部分にバックコア部より高飽和磁束密度を
もつ軟磁性薄膜を用いた薄膜磁気ヘッドであって、前記
高飽和磁束密度軟磁性薄膜を合金電着法によって作製さ
せることを特徴とする薄膜磁気ヘッドの製造方法。(2) A thin-film magnetic head having a basic configuration in which a lower magnetic layer, a magnetic gap layer, an insulating layer with a conductor layer sandwiched therebetween, and an upper magnetic layer are sequentially formed on a nonmagnetic substrate, and the head has at least an upper and lower magnetic layer. A thin film magnetic head that uses a soft magnetic thin film having a higher saturation magnetic flux density than the back core part at the tip of the magnetic gap of a layer (magnetic core) facing the recording medium, the thin film magnetic head having the high saturation magnetic flux density soft magnetic thin film as an alloy. A method for manufacturing a thin film magnetic head, characterized in that it is manufactured by an electrodeposition method.
Ｆｅ−Ｃｏ−Ｎｉ三元系合金薄膜であることを特徴とす
る請求項（２）記載の薄膜磁気ヘッドの製造方法。(3) The method for manufacturing a thin film magnetic head according to claim (2), wherein the high saturation magnetic flux density soft magnetic alloy is a Fe-Co-Ni ternary alloy thin film produced by an electrodeposition method.
Ｆｅ−Ｃｏ−Ｎｉ−Ｃｒ四元系合金薄膜であることを特
徴とする請求項（２）記載の薄膜磁気ヘッドの製造方法
。(4) The method for manufacturing a thin film magnetic head according to claim (2), wherein the high saturation magnetic flux density soft magnetic alloy is an Fe-Co-Ni-Cr quaternary alloy thin film produced by an electrodeposition method. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28324589A JPH03144907A (en) | 1989-10-30 | 1989-10-30 | Thin-film magnetic head and production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28324589A JPH03144907A (en) | 1989-10-30 | 1989-10-30 | Thin-film magnetic head and production thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03144907A true JPH03144907A (en) | 1991-06-20 |
Family
ID=17662970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28324589A Pending JPH03144907A (en) | 1989-10-30 | 1989-10-30 | Thin-film magnetic head and production thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03144907A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5828533A (en) * | 1995-06-14 | 1998-10-27 | Nec Corporation | Thin film magnetic head with differing saturation magnetic flux density films and spacer between floating surface and coil patterns |
| KR100259386B1 (en) * | 1993-01-29 | 2000-06-15 | 윤종용 | Thin film magnetic head |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6010410A (en) * | 1983-06-27 | 1985-01-19 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Thin film magnetic converter |
| JPS6176642A (en) * | 1984-09-25 | 1986-04-19 | Hitachi Ltd | Thin film of ternary co-ni-fe alloy and its manufacture |
| JPS648605A (en) * | 1987-06-30 | 1989-01-12 | Sony Corp | Soft magnetic thin film |
-
1989
- 1989-10-30 JP JP28324589A patent/JPH03144907A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6010410A (en) * | 1983-06-27 | 1985-01-19 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Thin film magnetic converter |
| JPS6176642A (en) * | 1984-09-25 | 1986-04-19 | Hitachi Ltd | Thin film of ternary co-ni-fe alloy and its manufacture |
| JPS648605A (en) * | 1987-06-30 | 1989-01-12 | Sony Corp | Soft magnetic thin film |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100259386B1 (en) * | 1993-01-29 | 2000-06-15 | 윤종용 | Thin film magnetic head |
| US5828533A (en) * | 1995-06-14 | 1998-10-27 | Nec Corporation | Thin film magnetic head with differing saturation magnetic flux density films and spacer between floating surface and coil patterns |
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