JPS6157016A - Magnetic head - Google Patents

Abstract

PURPOSE:To provide an excellent recording characteristic by forming a declined area containing one of the elements among nitrogen, carbon, and boron in near part abutting on one of magnetic recording media of a magnetic pole by using the ion implantation method to a part of ferro-alloy or ferro-base alloy film. CONSTITUTION:Iron thin film 2 is coated as a master magnetic pole film on a non-magnetic board 1. A pattern forming is performed for the head geometry which is so narrowed that the width of the magnetic pole tip part is equal to the specified track width. Nitrogen ion is ion-implanted on the iron thin film 2 to create the master magnetic pole film 2 with a high saturation magnetic flux density. In addition, a film 3 to reduce the magnetic resistance of the master magnetic pole film 2 is formed on that film, and then patterning is performed to remove permalloy film 3 near the tip of the master magnetic pole film 2. If carbon or boron ion is implanted in the master magnetic pole consisting of ferro-alloy or ferro-base magnetic alloy instead of nitrogen ion, the recording density can be also improved as in the case of nitrogen ion. In such a way, the saturated magnetic flux density of the ferro-alloy or ferro-base alloy is improved, and a magnetic head considerably excellent in recording characteristic is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a magnetic head, and more particularly to a magnetic head using a magnetic material with an extremely high saturation magnetic flux density as part of a magnetic pole, and a method for manufacturing the same.

[Background of the invention]

In recent years, magnetic recording technology has made significant progress with the development of high coercivity tapes and high performance magnetic head materials for tapes. In particular, when using a metal tape with high coercive force, there is a significant increase in output compared to the conventional technology in the area of high recording densities from recording wavelengths of 11 m to less than 1.
/N (output-noise ratio) has been achieved, and a significant improvement in recording density has been achieved in fields where high recording density is required, such as VTR.
2. In magnetic heads using ferrite that have been used, the saturation magnetic flux density of ferrite is about 5000 Gauss or less, so the recording magnetic field is not large enough, and it is difficult to use a high coercivity monochrome metal tape. A magnetic head using a metallic magnetic material with a high saturation magnetic flux density has become necessary. As such a metal magnetic material, Fe-Al1
-8i alloy (saturation magnetic flux density approximately 10kG), Fe-Ni
system alloy (saturation magnetic flux density approximately 8kG), Fe-8i system alloy (
saturation magnetic flux density approximately 1akG), or Fe, Go, N
A metal-nonmetal amorphous alloy containing B, C, N, 80, SL, P, etc. in at least one of i, or
Y, Ti, Zr, at least one of Fe, Co, and Ni
There are metal-metal amorphous alloys containing Hf, Nb, Ta, etc. Among these materials, the material with the highest saturation magnetic flux density is an Fe-8i alloy with a Si content of approximately 6% by weight.

Its saturation magnetic flux density is about 18 kG.

On the other hand, the gap length of recent VTR magnetic heads has become narrower in order to realize high-density magnetic recording, and the gap length, which used to be 0.5 pm, has decreased to 0.3 pm in recent years, and even further in the future. is required to have a gap length of 0.1 to 0.2 AIIn(7). As described above, when the gap length is narrowed, the strength of the leakage magnetic field from the head is significantly reduced. In addition, in recent years, in order to realize high-density magnetic recording, the coercive force of magnetic recording media has continued to increase, and the coercive force of conventional oxide-based magnetic tapes has increased to about 3,000.
The coercive force of e has increased to about 7,000 e, and with the advent of magnetic tapes using metal magnetic powder in recent years, magnetic tapes with a coercive force of about 15,000 e have been manufactured. As mentioned above, when using a magnetic head with a small gap length on a magnetic tape with extremely high coercive force, the problem is the lack of recording ability, especially in the long wavelength region. A magnetic head material with high magnetic flux density is required. In the future, there is a trend that the coercive force of magnetic recording media will further increase and the gap length of magnetic heads will become even narrower, so the demand for higher saturation magnetic flux density of magnetic head materials will become stronger.

Furthermore, in recent years, in magnetic heads for perpendicular magnetic recording, research has been progressing, in order to improve the recording density, recording and reproduction are performed on perpendicular magnetic recording media = 4- The thickness of the main pole is made extremely thin. Must.

As described above, when the main magnetic pole is extremely thin, magnetic saturation at the tip of the magnetic pole tends to occur during recording, and when magnetic saturation occurs, it becomes difficult to record on a perpendicular magnetic recording medium. In order to solve these problems, it is necessary to increase the saturation magnetic flux density of the magnetic material used for the main pole as much as possible.

Similar problems also exist in the case of conventional thin film heads for longitudinal recording used in computer storage devices and the like.

That is, in a thin film head, magnetic saturation is more likely to occur because the cross-sectional area of the magnetic pole near the working gap is smaller than that in a bulk type head. Therefore, there is a strong demand for magnetic head materials having high saturation magnetic flux density even in thin film heads.

[Purpose of the invention]

An object of the present invention is to solve the above-mentioned problems of the conventional technology, and to create a magnetic head with even better recording characteristics than before by constructing the magnetic pole of the magnetic head with a magnetic material having a higher saturation magnetic flux density than before. An object of the present invention is to provide RAD and a method for producing the same.

[Summary of the invention]

In order to achieve the above object, the present invention comprises an iron or iron-based magnetic alloy film in the vicinity of at least one of the magnetic poles of a magnetic head in contact with a magnetic recording medium, and at least one of the iron or iron-based magnetic alloy films. A region containing at least one element among nitrogen, carbon, and boron is formed in a part by an ion implantation method, and the saturation magnetic flux density of the element-containing region is made higher than that of conventional high saturation magnetic flux density magnetic materials. By doing so, it is possible to obtain a magnetic head with better recording characteristics than the conventional one.

When a thin iron film is made by vapor deposition or sputtering in a nitrogen-containing atmosphere, under appropriate conditions,
It is known that films with higher saturation magnetic flux density than iron can be obtained (Solid State Physics).

Vol. 7, No. 9 (1972) p.
'483-495). However, in order to fabricate a film with high saturation magnetic flux density using this method, it is necessary to perform troublesome operations such as accurately controlling the partial pressure of nitrogen in the atmosphere and the temperature of the sample. There is a problem that the density decreases rapidly.

The present invention solves the above problems by implanting and incorporating nitrogen into an iron or iron-based magnetic alloy film using an ion implantation method. It has the advantage that the content can be easily controlled, and therefore a magnetic film having a high saturation magnetic flux density can be easily produced. Similar results can be obtained with carbon or boron in addition to nitrogen.

Examples of infiltrating nitrogen into iron or iron-based alloys by ion implantation are Phys and StatusSol.
ids, 80(1) (1983) p, 211
222, but there is no mention of the magnetic properties of the obtained sample. ? - More specifically, in the magnetic head for perpendicular magnetic recording of the present invention, after the main pole is formed using a thin film of iron or an iron-based magnetic alloy, at least a portion of the main pole near the sliding surface of the magnetic recording medium is formed. Perpendicular magnetic recording with extremely excellent recording characteristics is achieved by implanting at least one element of nitrogen, carbon, and boron into the iron or iron-based alloy by ion implantation to increase the saturation magnetic flux density of the iron or iron-based alloy in the implanted area. The present invention is designed to obtain a magnetic head for use.

Furthermore, in the magnetic head for longitudinal magnetic recording of the present invention,
At least a portion near the working gap forming surface of the magnetic head is made of iron or an iron-based magnetic alloy film, and nitrogen, carbon, and boron are added to the iron or iron-based magnetic alloy film on the working gap forming surface of the magnetic head by ion implantation. By implanting and containing one type of element, the saturation magnetic flux density of iron or iron-based magnetic alloy in the implanted portion is increased, thereby obtaining a longitudinal recording magnetic head with excellent recording characteristics.

Another advantage of the magnetic head for longitudinal magnetic recording of the present invention is as follows. That is, when a magnetic film with a high saturation magnetic flux density is deposited on the working gap forming surface of the magnetic head by vapor deposition or sputtering, the interface between the magnetic substrate and the magnetic film with a high saturation magnetic flux density formed thereon is Since it is parallel to the gap surface, a contour effect occurs, but when a magnetic film with a high saturation magnetic flux density is formed on the working gap forming surface by the ion implantation method as in the present invention, the implanted element Since the concentration changes gradually in the depth direction, the saturation magnetic flux density also changes gradually in the depth direction, which has the advantage that contour effects are less likely to occur.

The foregoing can also be applied to magnetic fields for ring-type perpendicular magnetic recording.

As described above, the present invention provides a magnetic head with extremely excellent recording characteristics.

In the magnetic head of the present invention, when the sample is heated to a temperature of 500° C. or lower and 70° C. or higher after ion implantation in the manufacturing process, a magnetic film with a high saturation magnetic flux density may be stably obtained. However, if the heating temperature is set to 500° C. or higher, the phase having a high saturation magnetic flux density may decompose and the saturation magnetic flux density may decrease, which is not preferable.

Generally, magnetic alloys containing interstitial elements such as nitrogen, carbon, and boron in iron and iron-based magnetic alloys are known to have magnetic anisotropy induced by heat treatment in a magnetic field.

This is because the interstitial elements in the iron or iron-based magnetic alloy move to a position where their energy is reduced relative to the direction of magnetization, thereby stabilizing the direction of magnetization. If such induced magnetic anisotropy increases, magnetic permeability decreases, which may be undesirable as a magnetic head. Furthermore, imparting an appropriate amount of magnetic anisotropy in a certain direction may be effective for improving the characteristics of the magnetic head.

As described above, it is necessary to control the magnitude and direction of induced magnetic anisotropy in order to obtain a magnetic head with excellent characteristics. The induced magnetic anisotropy as described above can be controlled by applying a magnetic field while heating the sample. Also, in the present invention! In this case, the induced magnetic anisotropy can be controlled by applying a unidirectional magnetic field or a rotating magnetic field within the plane of the sample during the ion implantation process.

The thickness of the ion implantation layer formed by the ion implantation method used in the present invention varies depending on the ion acceleration voltage, but it is difficult to make the thickness of the ion implantation layer more than about one tone. Therefore, in order to obtain an ion-implanted layer of about 1- or more, the process of forming a thin film of iron or iron-based magnetic alloy of IIIrn or less and the process of implanting ions into this film to form an ion-implanted layer are performed multiple times. It can be obtained by repeatedly stacking ion implantation layers.

In addition, the coercive force can be increased by inserting a ferromagnetic or nonmagnetic intermediate layer between each of these ion implantation layers or between each ion implantation layer block when multiple ion implantation layers are combined into one ion implantation layer block. Alternatively, magnetic properties such as magnetic permeability can also be improved.

[Embodiments of the invention]

The present invention will be explained in detail below using examples.

Example 1
! An iron thin film having a thickness of 0.15IIIn was formed on a glass substrate by sputtering, and then nitrogen ions were implanted into the iron thin film, and the substrate was further heat-treated at 350° C. for 30 minutes. Figure 1 shows the average content of nitrogen in this iron film and the changes in its saturation magnetic flux density. As is clear from the figure, as the amount of nitrogen ions implanted increases, the average nitrogen concentration in the iron film gradually increases. The maximum increase is about 15% at a concentration of about 12 at%.

When the average nitrogen concentration exceeds this, the saturation magnetic flux density decreases rapidly, and at an average nitrogen concentration of 20 at%, it becomes equivalent to that of an iron film. From the above results, the saturation magnetic flux density is the average nitrogen concentration Oat
%, less than 20 at%, more preferably 5 at%
It can be seen that there is an effect of increasing the content in the range of ~18 at%.

Next, a method for manufacturing a perpendicular magnetic recording head using the above-mentioned magnetic film having a high saturation magnetic flux density as the main pole is shown schematically in FIG. 2 (see Japanese Patent Application No. 179854/1982). As shown in FIG. 2(A), a film with a thickness of 0.15 mm was formed by sputtering as a main magnetic pole film on a non-magnetic substrate 1 made of Photoceram (trade name of crystallized glass manufactured by Corning Glass Co., USA).
A 1 m thick iron thin film 2 was deposited and patterned into a head shape in which the width of the tip of the magnetic pole was narrowed to a predetermined track width. After that, nitrogen ions were added 5×1 on the iron thin film 2.
Ion implantation was performed at a density of 0'' ions/al, and then heated at 350°C for 30 minutes to remove the distortion caused by ion implantation and at the same time stabilize the phase exhibiting high saturation magnetic flux density. A magnetic pole film 2 was produced.Furthermore,
As shown in FIG. 2(b), after forming a film 3 on the main pole film 2 using a permalloy film to reduce the magnetic resistance of the main pole film 2, patterning is performed to reduce the magnetic resistance of the main pole film 2. The permalloy film 3 near the tip is removed to a length of about 2 to 5 inches. Next, an insulating layer 4 made of Sio is formed on the entire surface by sputtering to a thickness of approximately 3 mm, and a glossy film is further deposited thereon by a mask evaporation method to form a layer with a width of 61 M and a height of 4 mm.
．． 0#I++, spiral type A1 with a predetermined number of turns
After forming the windings 5, a resin layer 6 is applied and cured so as to fill the gaps between the windings and at the same time cover the upper surface, and then a □Co-W-Zr based amorphous magnetic alloy film is applied on top of the resin layer 6. An auxiliary magnetic pole 7 was formed. A plan view of the perpendicular magnetic head manufactured in this manner is shown in FIG. In this figure, 1 is a nonmagnetic substrate, 7 is an auxiliary magnetic pole, 5 is a winding, 8 is a lead wire portion of the winding 5, and 9 is a recording medium sliding surface.

When recording on a He 10000e Go-Cr perpendicular magnetic recording medium using the magnetic head of this example, compared to a magnetic head that does not implant ions into the main pole, the recording density Dso (recording/reproducing output is lower than the recording density The recording density, which is half the output of All the above,
In the magnetic head of the present invention, it was confirmed that the recording density could be improved by implanting ions into the main pole to impart a high saturation magnetic flux density. Instead of nitrogen ions,
It was also found that when carbon or boron ions were implanted into the main pole made of iron or iron-based magnetic alloys, they had the same effect of improving the recording density as in the case of nitrogen ions (().

Example 2 In a magnetic head using a magnetic thin film as described in Example 1, it is important to control the magnetic anisotropy of the magnetic thin film. Generally, in a magnetic thin film, the magnetic permeability in the direction perpendicular to the direction of easy magnetization tends to be greater than the direction of easy magnetization, and therefore, the direction perpendicular to the direction in which magnetic flux flows in the magnetic head coincides with the direction of easy magnetization of the magnetic thin film. It is better to configure it like this. In the magnetic head of the present invention, the magnetic anisotropy of the main pole can be controlled by performing ion implantation while applying a magnetic field. In this example, ion implantation was performed while applying a magnetic field of 500 e in the track width direction of the main pole film, that is, in the direction A in FIG. The conditions for ion implantation other than the application of a magnetic field were the same as in Example 1. Thereafter, a magnetic head for perpendicular magnetic recording was manufactured in the same manner as in Example 1, and recording was performed on the same Co--Cr perpendicular magnetic recording medium as in Example 1. The recording/reproducing gyuto used at this time is a magnetic spatula that does not apply a magnetic field to the main pole film during the ion implantation process.
It was about 2 dB larger than the id. As described above, it was confirmed that it is effective to control the magnetic anisotropy of the main pole film by applying a magnetic field during the ion implantation process.

Example 3 FIG. 4 schematically shows a method for manufacturing a magnetic head for longitudinal magnetic recording according to the present invention, which is made of a sputtered film of Mn--Zn ferrite and an iron-based magnetic alloy. The magnetic head of this embodiment has a structure described in Japanese Patent Application Laid-Open No. 58-15513.

As shown in FIG. 4(a), two substrates 11 made of Mn-Zn ferrite are prepared, and flat portions 13 are left at a predetermined interval on one surface 12 that should be the gap-opposing surface. A pair of adjacent 7-shaped grooves 14 are formed between the portions I3 by grinding or the like. In this case, the top of the inverted V-shaped protrusion 15 of the substrate 11 sandwiched between a pair of adjacent 7-shaped grooves 14 is made to be lower than the flat part 23 by a predetermined length.

As shown in FIG. 4(b), an iron film 16 having a thickness of about 10/111 is formed by sputtering on the surface 12 side of the substrate 11 after groove processing.

As shown in FIG. 4 (c), -16 coated with iron film 16
= The low melting point glass layer 17 was melted and formed so as to at least fill the 7-shaped groove 14 on the iron film 16 of the substrate 11.

As shown in FIG. 4(d), the glass layer side of the substrate 11 on which the glass layer 15 is formed is ground and polished to the flat portion 13.

At this time, a portion of the iron film 16 on the tip of the inverted V-shaped protrusion 15 of the substrate 11 is polished and removed to make it flat, and an operating gap forming surface 18 having a predetermined track width is obtained.

As shown in FIG. 4(e), V'! shaped groove 14
A groove 19 for the winding window is formed by grinding or the like at right angles to the magnetic helix core half-dead block 20.

The substrate 11 obtained in Figure (D) is used as a magnetic head core half-dead block 20'. Next, nitrogen ions are applied to the iron film portion 21 of the working gap forming surface 18 of the magnetic head core semi-annual block 20 near the working gap and the corresponding iron film portion of the magnetic head core semi-annual block 20' at a density of 5×101s/d. After the ion implantation, an Sio2 film-18=, which will become a gap forming layer, is deposited by sputtering to a thickness of 0.15p on the working gap forming surface of the magnetic heald core half-dead block 20, 20'.

As shown in FIG. 4(F), the magnetic head core half-dead blocks 20 and 20' that have undergone the process shown in FIG. , heated at 380°C for 30 minutes to form glass layer 17
Melt and fix the comrades to magnetically rad core half-dead block 2
0.20' comrades were combined and integrated. Furthermore, this heating strengthened the bond between nitrogen and iron implanted into the iron film, thereby stabilizing the magnetic film with a high saturation magnetic flux density. Next, the integrated magnetic herad core half-break block 20.2
By cutting 0' along the dashed line, a magnetic head 22 as shown in FIG. 4(G) can be obtained. 23 is an operating gap.

Next, for comparison, the magnetic head core half-dead block 20 shown in FIG.
A magnetic head having the same shape as that shown in FIG. 4(H) was fabricated in the half block 20' without ion implantation. When these magnetic heads are used to record a signal with a wavelength of 5.81 M on a metal tape with a coercive force Hc = 1.5000 e, and the signal is reproduced using a conventional ferrite magnetic head, the ion implantation described above is performed. An increase in output of about 1.5 d13 was observed in the magnetic head that underwent ion implantation compared to the magnetic head that did not undergo ion implantation. This improvement in recording characteristics was also achieved by implanting carbon or boron ions instead of nitrogen ions.

〔Effect of the invention〕

As mentioned above, in magnetic heads for perpendicular magnetic recording, iron or iron-based alloys are used near the sliding surface of the magnetic recording medium of the main pole film, and in heads for longitudinal magnetic recording, on the side where the working gap is formed. By introducing at least one element among nitrogen, carbon, and boron into the vicinity of the gap by ion implantation, it is possible to improve the saturation magnetic flux density of iron or iron-based alloy and obtain a magnetic head with extremely excellent recording characteristics. did it.

[Brief explanation of the drawing]

Figure 1 is a diagram showing changes in the average nitrogen concentration and saturation magnetic flux density in the iron film with respect to the amount of nitrogen ions implanted into the iron film.
FIG. 2 is a schematic diagram for explaining a method of manufacturing a magnetic head for ice surface magnetic recording, which is an embodiment of the present invention, and FIG.
Plan view of the magnetic bed for accidental magnetic recording obtained from the figure, i
FIG. 4 is a schematic explanatory diagram of a method for manufacturing a magnetic head for longitudinal magnetic recording, which is another embodiment of the present invention.・
Permalloy 7 4... Insulating layer 5... Winding wire
6...Resin layer 7...Auxiliary magnetic pole 8
．． 8'...Lead wire 9...Magnetic recording medium sliding surface 11...Mn-Zn ferrite substrate □12...One surface 13 of the substrate 11 that should be opposite to the gap □...
Flat part 14... Seven-shaped groove 15... Inverted V-shaped projection part 16 of substrate 11... Iron film 17... Glass layer 18
... Gap configuration surface of iron film 16 21 = 19 ... Winding window groove 20.20' ... Magnetic rad core half-closed block z1.
...Nitrogen ion implantation portion 22 of iron film 16...Magnetic head

Claims (6)

[Claims] (1) In a magnetic head, the vicinity of at least one of the magnetic poles of the magnetic head in contact with the magnetic recording medium is composed of an iron or iron-based magnetic alloy film, and ions are implanted into at least a part of the iron or iron-based magnetic alloy film. 1. A magnetic head comprising a region containing at least one element selected from nitrogen, carbon, and boron. (2) In the magnetic head according to claim 1, the average concentration of the element in the region containing one of nitrogen, carbon, and boron exceeds 0 at%;
A magnetic head characterized in that it is less than 20 at%. (3) In the magnetic head according to claim 1, the average concentration of the element in the region containing at least one element among nitrogen, carbon, and boron is 5a.
A magnetic head characterized in that the magnetic head is t% to 18 at%. (4) In the magnetic head according to claim 1, 2, or 3, nitrogen is
A magnetic head characterized in that the iron or iron-based magnetic alloy film in which the region containing at least one of carbon and boron is formed is heat-treated at a temperature of 500° C. or less after the ion implantation. (5) In the magnetic head according to claim 1, 2, or 3, nitrogen is
An iron or iron-based magnetic alloy film in which a region containing at least one of carbon and boron is formed is exposed to a magnetic field that rotates in one direction within the film surface or within the film surface relative to the film surface. A magnetic head characterized in that ion implantation is performed while applying . (6) In the magnetic head according to claim 1, 2, or 3, nitrogen is
An iron or iron-based magnetic alloy film in which a region containing at least one element among carbon and boron is formed is exposed to a magnetic field that rotates in one direction within the film surface or within the film surface relative to the film surface. 1. A magnetic head characterized in that it is heat-treated at a temperature of 500° C. or less while applying .