JPS63112809A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPS63112809A JPS63112809A JP25723586A JP25723586A JPS63112809A JP S63112809 A JPS63112809 A JP S63112809A JP 25723586 A JP25723586 A JP 25723586A JP 25723586 A JP25723586 A JP 25723586A JP S63112809 A JPS63112809 A JP S63112809A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- thin
- ceramics
- mica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims abstract description 18
- 239000000919 ceramic Substances 0.000 claims abstract description 17
- 239000010445 mica Substances 0.000 claims abstract description 16
- 229910052618 mica group Inorganic materials 0.000 claims abstract description 16
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims abstract description 6
- 229910000702 sendust Inorganic materials 0.000 claims abstract description 5
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 abstract description 14
- 239000000463 material Substances 0.000 abstract description 11
- 239000010408 film Substances 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000005520 cutting process Methods 0.000 abstract description 5
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 230000006866 deterioration Effects 0.000 abstract description 2
- 238000007740 vapor deposition Methods 0.000 abstract description 2
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000004804 winding Methods 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000007499 fusion processing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、VTR,ディジタルオーディオ等の高保磁力
の磁気記録媒体に高周波信号を高密度に記録、再生する
ために好適な磁気ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic head suitable for recording and reproducing high frequency signals at high density on a high coercive force magnetic recording medium such as a VTR or digital audio.
従来の技術
VTR,ディジタルオーディオ等の高密度磁気記録再生
装置においては、磁気記録媒体の保持力Hcを大きくす
れば有利であることは良く知られているが、高保持力の
磁気記録媒体に情報を記録するためには、強い磁場が必
要となる。ところが現在磁気ヘッドに多用されているフ
ェライト材は、その飽和磁束密度Bsが4000〜50
00ガウス程度であるため、得られる記録磁界の強さに
限界があり、磁気記録媒体の保磁力Hc、が1000エ
ルステツドを越える場合には、記録が不十分になるとい
う欠点を有している。Conventional Technology It is well known that it is advantageous to increase the coercive force Hc of a magnetic recording medium in high-density magnetic recording and reproducing devices such as VTRs and digital audio. A strong magnetic field is required to record. However, the ferrite material currently widely used in magnetic heads has a saturation magnetic flux density Bs of 4000 to 50.
Since it is about 1,000 Gauss, there is a limit to the strength of the recording magnetic field that can be obtained, and if the coercive force Hc of the magnetic recording medium exceeds 1,000 Oersteds, recording becomes insufficient.
一方金属磁性材料で総称されるFe−A7!−3i合金
(センダストと称される)、Ni−1’e合金(パーマ
ロイ)等の結晶質磁性合金、あるいは、非晶質合金を用
いた磁気ヘッドは、一般にフェライト材より飽和磁束密
度が高く、かつ摺動ノイズも少ないという優れた特徴を
有するが、加工が難しく、歩留りが悪くコストが高くな
るという欠点を有していた。On the other hand, Fe-A7 is a generic name for metallic magnetic materials! Magnetic heads using crystalline magnetic alloys such as -3i alloy (referred to as sendust) and Ni-1'e alloy (permalloy), or amorphous alloys generally have a higher saturation magnetic flux density than ferrite materials. Although it has excellent features such as low sliding noise, it has the drawbacks of being difficult to process, resulting in poor yield and high cost.
発明が解決しようとする問題点
特に、金属磁性薄膜を主コアとして用いる場合には、通
常これを、蒸着または、スパッタリング等で磁性または
非磁性の基板上に形成したのち、基板と同一の材料で金
属磁性薄膜を挟め込むように接着して加工、ヘット化さ
れる。しかしながら、この基板には厳しい条件が求めら
れる。例えば、金属磁性薄膜の磁気特性を劣化させない
ために金属磁性薄膜の熱膨張係数に近いこと、加工性が
良いこと、テープとの摺動に際し適度に摩耗し偏摩耗を
生じさせないことなどである。これらの条件を十分に満
足する材料は極めて限られており、従来は、フェライト
、または、チタン酸系セラミクス等が用いられて来たが
一長一短であり、適当な基板材料の選定が重要な問題と
なっていた。Problems to be Solved by the Invention In particular, when a metal magnetic thin film is used as the main core, it is usually formed on a magnetic or non-magnetic substrate by vapor deposition or sputtering, and then made of the same material as the substrate. It is processed and made into a head by adhering a metal magnetic thin film between them. However, strict conditions are required for this substrate. For example, the thermal expansion coefficient should be close to that of the metal magnetic thin film so as not to deteriorate the magnetic properties of the metal magnetic thin film, it should have good workability, and it should wear moderately when sliding with the tape and not cause uneven wear. Materials that fully satisfy these conditions are extremely limited, and ferrite or titanate ceramics have been used in the past, but they have advantages and disadvantages, and the selection of an appropriate substrate material is an important issue. It had become.
問題点を解決するための手段
本発明は、上記問題点について、基板として、マイカセ
ラミクスを用いることにより解決を図ろうとするもので
ある。マイカセラミクスは、近年、快削性セラミクスと
して開発されたものであるが、これは、雲母ことにフッ
素金雲母の結晶粒が、ガラス等の結合剤によって固めら
れたような組織を有するものである。[機能材料198
6.6月号。Means for Solving the Problems The present invention attempts to solve the above problems by using mica ceramics as the substrate. Mica ceramics, which have been developed in recent years as free-cutting ceramics, have a structure in which crystal grains of mica, particularly fluorophlogopite, are hardened with a binder such as glass. . [Functional materials 198
6. June issue.
P16]以下にその特徴をあげると、 (11金属用工具により精密な加工が可能である。P16] The following are its characteristics: (Precise processing is possible with 11 metal tools.
(2)7察係数が小さく自己潤滑性がある。(2) Self-lubricating property with a small coefficient of 7.
(3)耐熱性に優れている。(3) Excellent heat resistance.
(4)熱膨張係数が金属に近(、金属との組合せ使用が
可能である。(4) Thermal expansion coefficient is close to that of metals (can be used in combination with metals).
(5)耐食性に優れる。(5) Excellent corrosion resistance.
などである。以上の特徴は、金属磁性薄膜を主コアとす
る磁気ヘッドの基板材として極めて好ましい性質である
。etc. The above characteristics are extremely desirable properties for a substrate material of a magnetic head having a main core made of a metal magnetic thin film.
作用
基板材としてマイカセラミクスを用いることにより、金
属磁性薄膜を主コアとする磁気へ・7Fの製造が容易と
なり、歩留りが向上し、製造コストを大きく改善するこ
とができるとともに、性能上も、焼き付きや、偏摩耗の
少ない良好なへ・7ドが提供できる。By using mica ceramics as the working substrate material, it is easy to manufacture magnetic 7F with a metal magnetic thin film as the main core, improving yield and greatly reducing manufacturing costs. It is possible to provide a good heel/7d with less uneven wear.
実施例
以下本発明の一実施例について、図面を参照しながら説
明する。EXAMPLE An example of the present invention will be described below with reference to the drawings.
第1図は、本発明の構造を示す磁気ヘッドの斜視図であ
る。主コアである金属磁性薄膜lの両面をマイカセラミ
クス2が挟持する構造となっている。FIG. 1 is a perspective view of a magnetic head showing the structure of the present invention. It has a structure in which mica ceramics 2 sandwich both sides of a metal magnetic thin film 1, which is the main core.
以下にこの磁気ヘッドの具体的な製造方法を示す。A specific method of manufacturing this magnetic head will be shown below.
実施例1
第2図に示すように、厚さ1鶴のマイカセラミクス基板
2の両面にCOを主成分とするアモルファス合金薄膜1
を厚さ21μmにスパッタリングにより形成し、その上
に保護層として0.5〜1μmの厚さのS iO2膜(
図面では省略)を形成する。更に、前記と同様のマイカ
セラミクス基板の両面に厚さ3μmのガラス層(図面で
は省略)を形成したものを用意し、前者3枚、後者4枚
(但し、外側に積層される基板にはガラス層は、片側に
のみ形成する)を交互に積層し、ガラス融着温度にて加
熱、加圧してガラス層を溶融して接着し積層ブロック3
を得る。次に第3図の点線に示すように所定のアジマス
角に応じて切断し、第4図に示す一対のコア半体対4,
4゛ を得る。−方のコア半体4に巻線溝加工を施した
後、コア半体対4,4゛の突き合せ面を研磨加工したの
ち所定のギャップ長になるようギャップ材としてS i
O2及び接着ガラスの薄膜を形成し、電気炉中で接着し
、第5図に示すギャップ形成バー5を得る。その後破線
に示すように積層ピンチに応じて切断することにより第
6図に示すスライスパー6を得、更に破線に示すように
巻線溝ピッチに応じて切断することにより第1図に示す
ようなヘッドチップが得られる。その後、ヘッドチップ
は、ベース板に接着されテープ摺動面の曲面加工、研磨
、巻線などの工程を経て磁気ヘッドとして完成する。Example 1 As shown in FIG. 2, an amorphous alloy thin film 1 containing CO as a main component was deposited on both sides of a mica ceramic substrate 2 with a thickness of 1 mm.
was formed by sputtering to a thickness of 21 μm, and a 0.5-1 μm thick SiO2 film (
(omitted in the drawing). Furthermore, we prepared mica ceramic substrates similar to those described above with glass layers (omitted in the drawing) having a thickness of 3 μm formed on both sides. (The layers are formed only on one side) are laminated alternately, heated and pressurized at a glass fusing temperature to melt and bond the glass layers to form a laminated block 3.
get. Next, it is cut according to a predetermined azimuth angle as shown by the dotted line in FIG. 3, and a pair of core halves 4, as shown in FIG.
Get 4゛. After winding grooves are formed on the core half 4 on the - side, the abutting surfaces of the pair of core halves 4, 4' are polished, and Si is used as a gap material to obtain a predetermined gap length.
A thin film of O2 and bonding glass is formed and bonded in an electric furnace to obtain the gap forming bar 5 shown in FIG. Thereafter, the slicer 6 shown in FIG. 6 is obtained by cutting according to the lamination pinch as shown by the broken line, and the slicer 6 shown in FIG. 1 is obtained by cutting according to the winding groove pitch as shown by the broken line. You will get a head chip. Thereafter, the head chip is bonded to a base plate, and the magnetic head is completed through processes such as curving the tape sliding surface, polishing, and winding.
実施例2
実施例1のアモルファス合金薄膜1の代りに、マイカセ
ラミクス基板両面に、センダスト薄膜を真空蒸着により
、21μmの厚さに形成する。その他は、実施例1と同
様の工程でヘッドを作製する。Example 2 Instead of the amorphous alloy thin film 1 of Example 1, a sendust thin film with a thickness of 21 μm was formed on both sides of the mica ceramic substrate by vacuum deposition. Otherwise, a head is manufactured using the same steps as in Example 1.
発明の効果
以上のように、本発明は、主コアである金属磁性薄膜の
蒸着基板でありかつ保持材としてマイカセラミクスを用
いることにより、その良好な加工性のため第3.5.6
図に示すような精密な切断加工が容易である。また熱膨
張係数が11×10′61/に程度とアモルファス合金
やセンゲス1〜薄膜の熱膨張係数12〜13X1(1′
61/kに近いので、磁歪等の影響による特性劣化が少
なく良好な磁気特性を示す。また、耐熱性に優れており
、600°C程度の加熱が可能であり、接着のためにガ
ラスを用いることができること、また耐食性に優れてい
ることなどから高い信頼性を有するヘッドの製造が可能
である。更にテープとの摺動に於て、雲母をその中に含
むため、自己潤滑性を有し、かつ適度な摩耗性を有する
ため偏摩耗等のない良好な摺動面を維持し得る等、優れ
た特徴を多く有しており、加工歩留りが良く安価に製造
できるとともに、特性が良好でかつ高い信頼性を有する
ヘッドが製造できる。Effects of the Invention As described above, the present invention uses mica ceramics as the evaporation substrate of the metal magnetic thin film as the main core and as the holding material.
Precise cutting as shown in the figure is easy. In addition, the coefficient of thermal expansion is about 11 x 10'61/, and the coefficient of thermal expansion of amorphous alloys and Senges 1 to thin films is 12 to 13 x 1 (1'
Since it is close to 61/k, it exhibits good magnetic properties with little characteristic deterioration due to the effects of magnetostriction and the like. In addition, it has excellent heat resistance, allowing heating to around 600°C, allowing the use of glass for bonding, and excellent corrosion resistance, making it possible to manufacture heads with high reliability. It is. Furthermore, when sliding with the tape, it has self-lubricating properties because it contains mica, and has moderate abrasion resistance, so it can maintain a good sliding surface without uneven wear. This head has many characteristics such as high processing yield, can be manufactured at low cost, has good characteristics, and can be manufactured with high reliability.
第1図は本発明の磁気ヘッドの構造を示す斜視図、第2
図から第6図は本発明の一実施例におけるヘッドの製造
方法を説明するヘッドの斜視図である。
1・・・・・・金属磁性薄膜、2・・・・・・マイカセ
ラミクス、3・・・・・・積層ブロック、4,4′ ・
・・・・・コア半休対、5・・・・・・ギャソフ形成バ
ー、6・・・・・・スライスバー。
代理人の氏名 弁理士 中尾敏男 はか1名二
区
] Oつ−派
第4図
第5図
第6図FIG. 1 is a perspective view showing the structure of the magnetic head of the present invention, and FIG.
6 to 6 are perspective views of a head illustrating a method of manufacturing a head in an embodiment of the present invention. 1...Metal magnetic thin film, 2...Mica ceramics, 3...Laminated block, 4, 4' ・
... Core half-rest pair, 5 ... Gasoff forming bar, 6 ... Slice bar. Name of agent: Patent attorney Toshio Nakao Haka 1 and 2
Ward] Otsu-ha Figure 4 Figure 5 Figure 6
Claims (2)
クスで挟持してなる構造の磁気ヘッド。(1) A magnetic head with a structure in which both sides of a metal magnetic thin film, which is the main core, are sandwiched between mica ceramics.
ダスト薄膜であることを特徴とする特許請求の範囲第(
1)項記載の磁気ヘッド。(2) Claim No. 1, characterized in that the metal magnetic thin film is an amorphous alloy or a sendust thin film.
1) The magnetic head described in item 1).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25723586A JPS63112809A (en) | 1986-10-29 | 1986-10-29 | Magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25723586A JPS63112809A (en) | 1986-10-29 | 1986-10-29 | Magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63112809A true JPS63112809A (en) | 1988-05-17 |
Family
ID=17303558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25723586A Pending JPS63112809A (en) | 1986-10-29 | 1986-10-29 | Magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63112809A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006188945A (en) * | 2001-05-10 | 2006-07-20 | Hiroshi Asaka | Aseismatic door type entrance door structure |
JP2009064884A (en) * | 2007-09-05 | 2009-03-26 | Tdk Corp | Manufacturing method of multilayered electronic component |
-
1986
- 1986-10-29 JP JP25723586A patent/JPS63112809A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006188945A (en) * | 2001-05-10 | 2006-07-20 | Hiroshi Asaka | Aseismatic door type entrance door structure |
JP2009064884A (en) * | 2007-09-05 | 2009-03-26 | Tdk Corp | Manufacturing method of multilayered electronic component |
JP4609466B2 (en) * | 2007-09-05 | 2011-01-12 | Tdk株式会社 | Manufacturing method of multilayer electronic component |
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