JPS63217515A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPS63217515A JPS63217515A JP5053887A JP5053887A JPS63217515A JP S63217515 A JPS63217515 A JP S63217515A JP 5053887 A JP5053887 A JP 5053887A JP 5053887 A JP5053887 A JP 5053887A JP S63217515 A JPS63217515 A JP S63217515A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- head
- magnetic
- glass
- zirconia ceramics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 38
- 239000010409 thin film Substances 0.000 claims abstract description 21
- 239000000919 ceramic Substances 0.000 claims abstract description 15
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims description 16
- 229910000702 sendust Inorganic materials 0.000 claims description 5
- 239000000758 substrate Substances 0.000 abstract description 17
- 239000000463 material Substances 0.000 abstract description 12
- 239000011521 glass Substances 0.000 abstract description 9
- 239000010410 layer Substances 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000005520 cutting process Methods 0.000 abstract description 5
- 239000010408 film Substances 0.000 abstract description 4
- 239000000853 adhesive Substances 0.000 abstract description 3
- 230000001070 adhesive effect Effects 0.000 abstract description 3
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 abstract description 3
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 abstract description 3
- 238000004804 winding Methods 0.000 abstract description 3
- 239000011241 protective layer Substances 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 238000003466 welding Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007499 fusion processing Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はビデオテープレコーダ(VTR)または、デジ
タルオーディオ等に用いられる高保磁力の磁気記録媒体
に高周波信号を記録するのに好適な磁気ヘッドに関する
。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic head suitable for recording high frequency signals on a high coercivity magnetic recording medium used for video tape recorders (VTRs), digital audio, and the like.
従来の技術
VTR、デジタルオーディオ等の高密度磁気記録再生装
置においては、磁気記録媒体の保磁力Hcを大きくすれ
ば、有利であることは良く知られているが、高保磁力の
磁気記録媒体に情報を記録するためには強い磁場が必要
になる。ところが現在磁気ヘッドに多用されているフェ
ライト材は、その飽和磁束密度が4000〜5000ガ
ウス程度であるため、得られる記録磁界の強さに限界が
あり、磁気記録媒体の保磁力が1000エルステツド程
度以上になると記録が不十分になるという欠点を有して
いる。Conventional Technology It is well known that it is advantageous to increase the coercive force Hc of a magnetic recording medium in high-density magnetic recording and reproducing devices such as VTRs and digital audio. A strong magnetic field is required to record. However, the ferrite material currently widely used in magnetic heads has a saturation magnetic flux density of about 4,000 to 5,000 Gauss, so there is a limit to the strength of the recording magnetic field that can be obtained, and the coercive force of the magnetic recording medium is about 1,000 Oe or more. This has the disadvantage that records are insufficient.
一方、金属磁性材料で総称されるFe−Al−3i合金
(センダストと称される)、Ni−Fe合金(パーマロ
イ)等の結晶質磁性合金、或は非晶質合金を用いた磁気
ヘッドは、一般にフェライト材より飽和磁束密度が高く
、かつ、摺動ノイズも少ないと言う優れた特徴を有する
が、加工が難しく、歩留りが悪いためコストが高(なる
という欠点を有していた。On the other hand, magnetic heads using crystalline magnetic alloys or amorphous alloys such as Fe-Al-3i alloy (referred to as sendust) and Ni-Fe alloy (permalloy), which are collectively known as metal magnetic materials, In general, it has superior features such as higher saturation magnetic flux density and less sliding noise than ferrite materials, but it has the drawbacks of being difficult to process and having a low yield, resulting in high costs.
発明が解決しようとする問題点
特に、金属磁性薄膜を主コアとして用いる場合には、通
常これを蒸着または、スフバタリング等の方法により、
適当な基板上に形成した後、基板と同一の材料で、金属
磁性薄膜を挟み込むように接着したのち加工、ヘッド化
される。しかしながら、このような基板には厳しい条件
が求められる。Problems to be Solved by the Invention In particular, when a metal magnetic thin film is used as the main core, it is usually deposited by a method such as vapor deposition or sulfur battering.
After being formed on a suitable substrate, a metal magnetic thin film is bonded using the same material as the substrate, and then processed and made into a head. However, strict conditions are required for such a substrate.
例えば、金属磁性薄膜の磁気特性を劣化させないために
基板の熱膨張係数が金属磁性薄膜のそれに近いこと、加
工性がよいこと、テープとの摺動に際し適度に摩耗し偏
摩耗を生じさせないことなどである。これらの条件を十
分に満足する材料は極めて限られており、従来は、フェ
ライトまたは結晶ガラス等が用いられてきたが、一長一
短であり、適当な基板材料の選択が重要な問題となって
いた。For example, the thermal expansion coefficient of the substrate should be close to that of the metal magnetic thin film in order not to deteriorate the magnetic properties of the metal magnetic thin film, it should have good workability, and it should wear moderately when sliding with the tape and not cause uneven wear. It is. Materials that fully satisfy these conditions are extremely limited, and conventionally, ferrite or crystal glass has been used, but these have advantages and disadvantages, and selection of an appropriate substrate material has been an important issue.
問題点を解決するための手段
本発明は、上記問題点について、基板として、ジルコニ
アセラミクスを用いることにより解決を図ろうとするも
のである。ジルコニアセラミクスは、熱膨張係数が90
〜130xlO7と金属磁性薄膜のそれに近いこと、金
属用工具により精密な加工が可能であること、耐熱性に
優れていること、適度な摩耗性を有していること等金属
磁性薄膜を主コアとする磁気ヘッドの基板材として好ま
しい性質を有している。特に安定化材としてCeO□を
8−30%含むものは熱膨張係数が100〜130xl
O°7と金属磁性薄膜のそれと良く整合しかつまた上記
磁気ヘッドの基板として必要な特徴を兼ね備えており極
めて好ましい特徴を有している。Means for Solving the Problems The present invention attempts to solve the above problems by using zirconia ceramics as the substrate. Zirconia ceramics has a coefficient of thermal expansion of 90
~130xlO7 is close to that of metal magnetic thin films, precision processing is possible with metal tools, excellent heat resistance, moderate abrasion resistance, etc. Metal magnetic thin films are used as the main core. It has desirable properties as a substrate material for magnetic heads. In particular, those containing 8-30% of CeO□ as a stabilizing material have a thermal expansion coefficient of 100-130xl.
O°7, which matches well with that of a metal magnetic thin film, and also has characteristics necessary for the substrate of the above-mentioned magnetic head, so it has extremely desirable characteristics.
作用
基板材としてジルコニアセラミクスを用いることにより
金属磁性薄膜を主コアとする高性能な磁気ヘッドの製造
が容易となり歩留りが向上し、製造コストを大きく改善
することができると共に、焼き付きや偏摩耗の少ない高
い信頼性を有するヘッドを提供できる。By using zirconia ceramics as the working substrate material, it is easy to manufacture high-performance magnetic heads with a metal magnetic thin film as the main core, improving yields and greatly reducing manufacturing costs, as well as reducing seizure and uneven wear. A highly reliable head can be provided.
実施例
第1図は、本発明の構造を示す磁気へラドの斜視図であ
る。主コアである金属磁性薄膜il+の両面をジルコニ
アセラミクス(2)が挟持する構造となっている。以下
にこのヘッドの具体的な製造方法を示す。Embodiment FIG. 1 is a perspective view of a magnetic helad showing the structure of the present invention. It has a structure in which zirconia ceramics (2) sandwich both sides of the metal magnetic thin film il+, which is the main core. A specific method for manufacturing this head will be shown below.
実施例1
第2図に示すように、厚さ1龍のジルコニアセラミクス
基板2 (Ce O2/ Z r O2のモル比が16
/84、熱膨張係数がL20xlO°7)の両面にCo
を主成分とするアモルファス合金薄siを厚さ21μm
にスパッタリングにより形成し、その上に保護層として
0.5〜1μmの厚さのSiO□膜(図面では省略)を
形成する。更に、前記と同様のジルコニアセラミクス基
板の両面に厚さ3μmのガラス層(図面では省略)を形
成したものを用意し、前者3枚、後者4枚(但し、外側
に積層される基板にはガラス層は片側にのみ形成する)
を交互に積層し、ガラス融着温度(500℃)にて接着
し積層ブロック3を得る。Example 1 As shown in FIG.
/84, thermal expansion coefficient L20xlO°7)
Amorphous alloy thin Si with a thickness of 21 μm mainly composed of
A SiO□ film (not shown in the drawing) with a thickness of 0.5 to 1 μm is formed thereon as a protective layer. Furthermore, we prepared 3 μm thick glass layers (omitted in the drawing) on both sides of the same zirconia ceramic substrate as above, 3 of the former and 4 of the latter (however, the outer layer of the substrate was laminated with glass). layer is formed only on one side)
are alternately laminated and bonded at a glass fusing temperature (500° C.) to obtain a laminated block 3.
次に第3図の点線に示すように所定のアジマス角に応じ
て切断し、第4図に示すコア半体対4.4”をうる、一
方のコア半体4に巻線溝加工を施した後、コア半体4.
4゛の突合せ面を研磨加工した後所定のギャップ長にな
るようギャップ材としてS i 02及び接着ガラスの
薄膜を形成し、電気炉中にて加熱(500℃)、接着す
ることによりギャップ形成バー5を得る。その後破線に
示すように積層ピンチに応じて切断して第6図に示すス
ライスパー6を得、更に破線で示すように巻線溝ピッチ
に応じて切断することにより第1図に示すようなヘッド
チップが得られる。ヘッドチップはベース仮に接着され
テープ摺動面の曲面加工研磨、巻線等の工程を経て磁気
ヘッドとして完成する。Next, the core half 4 is cut according to a predetermined azimuth angle as shown by the dotted line in FIG. After that, core half 4.
After polishing the abutting surfaces of 4゛, a thin film of S i 02 and adhesive glass is formed as a gap material so as to have a predetermined gap length, and a gap forming bar is formed by heating (500℃) in an electric furnace and bonding. Get 5. Thereafter, the slicer 6 shown in FIG. 6 is obtained by cutting according to the lamination pinch as shown by the broken line, and the head as shown in FIG. 1 is obtained by cutting according to the winding groove pitch as shown by the broken line. You get chips. The head chip is temporarily attached to the base, and the magnetic head is completed through processes such as curved surface processing and polishing of the tape sliding surface, and winding.
以上のような工程に於て、主コアである金属磁性薄膜の
蒸着基板かつ保持材としてジルコニアセラミクスを用い
るので、その良好な加工性のため第3.5.6図に示す
ような精密な切断加工が容易であり、歩留りよく製造す
ることが可能であった。また熱膨張係数がアモルファス
合金Fi膜のそれに近いので、得られたヘッドの磁気特
性は磁歪等の影響による特性劣化が少なく良好であった
。In the above process, zirconia ceramics are used as the substrate and holding material for the metal magnetic thin film, which is the main core, so for its good workability, precise cutting as shown in Figure 3.5.6 is required. It was easy to process and could be manufactured with good yield. Furthermore, since the coefficient of thermal expansion was close to that of the amorphous alloy Fi film, the magnetic properties of the obtained head were good with little deterioration due to the effects of magnetostriction and the like.
また耐熱性に優れているため、500℃程度の加熱では
全く問題がな(接着のためにガラスを用いることができ
ること、また耐蝕性にも優れていること、更にテープと
の摺動に於て適度な摩耗性を有するので偏摩耗の発生が
少なく良好な摺動面を維持し得ること、等高い信頼性を
存するヘッドが得られた。In addition, it has excellent heat resistance, so there is no problem when heated to about 500℃ (glass can be used for adhesion, it has excellent corrosion resistance, and it also has excellent resistance to sliding with tape). Since the head has an appropriate abrasion resistance, uneven wear is less likely to occur and a good sliding surface can be maintained, resulting in a highly reliable head.
実施例2
実施例1のアモルファス合金薄膜lの代わりに、ジルコ
ニアセラミクス基板2 (Ce O2/ZrO2のモル
比が24/76、熱膨張係数が130xlO7)の両面
に、センダスト薄膜を真空蒸着により21μmの厚さに
形成する。その他は実施例1と同様の工程でヘッドを作
成することができる1本実施例の場合にはセンダスト薄
膜の耐熱性により、積層ブロック、ギャップ形成バーを
得る際の加熱温度は800℃程度が可能であり、高い融
着温度(800℃)の接着ガラスを用いた。Example 2 Instead of the amorphous alloy thin film l of Example 1, a Sendust thin film of 21 μm was deposited on both sides of the zirconia ceramic substrate 2 (CeO2/ZrO2 molar ratio 24/76, thermal expansion coefficient 130xlO7) by vacuum deposition. Form into a thick layer. Otherwise, the head can be created using the same process as in Example 1. In the case of this example, due to the heat resistance of the sendust thin film, the heating temperature when obtaining the laminated blocks and gap forming bars can be approximately 800°C. Therefore, adhesive glass with a high fusing temperature (800° C.) was used.
この場合にもジルコニアセラミクスの耐熱性には問題は
ない、こうして得られた磁気ヘッドの磁気特性、及び信
頼性は実施例1と同様に良好なものであった。In this case as well, there was no problem with the heat resistance of zirconia ceramics, and the magnetic properties and reliability of the thus obtained magnetic head were as good as in Example 1.
尚、以上の実施例に用いたジルコニアセラミクスの組成
以外に於ても、CeO□/ZrO2モル比が8/92〜
30/70の範囲のものであれば、各特性に多少の優劣
は存在するが、はぼ同様の効果かえられた。In addition to the composition of the zirconia ceramics used in the above examples, the CeO□/ZrO2 molar ratio is 8/92 to
If it was in the range of 30/70, there were some differences in each characteristic, but almost the same effect could be obtained.
発明の効果
以上のように本発明は、主コアである金属磁性薄膜の蒸
着基板かつ保持材としてジルコニアセラミクスを用いる
ことにより、その良好な加工性のため第3.5.6図に
示すような精密な切断加工が容易であること、また熱膨
張係数がアモルファス合金ff1llやセンダスト薄膜
のそれに近いので、磁歪等の影響による特性劣化が少な
く良好な磁気特性を示すこと、また耐熱性に優れている
ため、800℃程度の加熱が可能であり、接着のために
ガラスを用いることができること、また耐蝕性に優れて
いること等から高い信頼性を有するヘッドの製造が可能
である。更にテープとの摺動に於て適度な摩耗性を有す
るので偏摩耗の発生が少なく良好な摺動面を維持し得る
等価れた特徴を多く有しており、磁気特性が良好で信頼
性の高い磁気ヘッドが加工歩留り良く安価に製造できる
。Effects of the Invention As described above, the present invention uses zirconia ceramics as the substrate on which the metal magnetic thin film, which is the main core, is deposited and as the holding material. It is easy to perform precise cutting, and its thermal expansion coefficient is close to that of amorphous alloy ff1ll and Sendust thin film, so it exhibits good magnetic properties with little property deterioration due to the effects of magnetostriction, etc., and has excellent heat resistance. Therefore, it is possible to manufacture a highly reliable head because it can be heated to about 800° C., glass can be used for bonding, and it has excellent corrosion resistance. Furthermore, it has appropriate abrasion resistance when sliding with the tape, so it has many equivalent features that cause less uneven wear and can maintain a good sliding surface.It also has good magnetic properties and is highly reliable. A high-quality magnetic head can be manufactured at low cost with good processing yield.
第1図は本発明の磁気ヘッドの構造を示す斜視図、第2
図、第3図、第4図、第5図、第6図は本発明の実施例
におけるヘッドの製造方法を説明する斜視図である。
1・・・・・・金属磁性薄膜、2・・・・・・ジルコニ
アセラミクス、3・・・・・・積層ブロック、4.4゛
・・・・・・コア半体対、5・・・・・・ギャップ形成
バー、6・・・・・・スライスバー。
代理人の氏名 弁理士 中尾敏男 はか1名筆 231
第4図
第6図FIG. 1 is a perspective view showing the structure of the magnetic head of the present invention, and FIG.
3, 4, 5, and 6 are perspective views illustrating a method of manufacturing a head in an embodiment of the present invention. 1... Metal magnetic thin film, 2... Zirconia ceramics, 3... Laminated block, 4.4゛... Core half pair, 5... ... Gap forming bar, 6... Slice bar. Name of agent: Patent attorney Toshio Nakao Written by: 231 Figure 4 Figure 6
Claims (3)
ラミクスで挟持してなる構造を有する磁気ヘッド。(1) A magnetic head having a structure in which both sides of a metal magnetic thin film, which is the main core, are sandwiched between zirconia ceramics.
eO_2からなり、CeO_2/ZrO_2のモル比が
8/92〜30/70の範囲であることを特徴とする特
許請求の範囲第(1)項記載の磁気ヘッド。(2) Zirconia ceramics mainly consists of ZrO_2 and C
The magnetic head according to claim 1, wherein the magnetic head is made of eO_2 and has a molar ratio of CeO_2/ZrO_2 in the range of 8/92 to 30/70.
ト薄膜であることを特徴とする特許請求の範囲第(1)
項または第(2)項のいずれかに記載の磁気ヘッド。(3) Claim (1) characterized in that the metal magnetic thin film is an amorphous alloy or Sendust thin film.
The magnetic head according to any one of item (2) and (2).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5053887A JPS63217515A (en) | 1987-03-05 | 1987-03-05 | Magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5053887A JPS63217515A (en) | 1987-03-05 | 1987-03-05 | Magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63217515A true JPS63217515A (en) | 1988-09-09 |
Family
ID=12861783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5053887A Pending JPS63217515A (en) | 1987-03-05 | 1987-03-05 | Magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63217515A (en) |
-
1987
- 1987-03-05 JP JP5053887A patent/JPS63217515A/en active Pending
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