KR100324730B1 - Method for fabricating magnetic head - Google Patents

Abstract

PURPOSE: A method for fabricating a magnetic head is provided to laminate a soft magnetic thin film containing Al and Si and a soft magnetic thin film having Al, Si and Ru to form a magnetic film, thereby improving magnetic characteristic and adhesiveness of the multi-layered structured magnetic film. CONSTITUTION: A magnetic film(20) having high-saturation magnetic density is formed on a magnetic substrate(10), a non-magnetic film is formed on the magnetic film in a predetermined thickness, and then the core of the magnetic film adheres to the core of the non-magnetic film, to fabricate a magnetic head. The magnetic film is formed in such a manner that FeAlSi(11,11') and FeAlSiRu(12,12') are alternately laminated on the substrate using sputtering and heat-treated in the nitrogen ambient for a predetermined period of time.

Description

Manufacturing method of magnetic head

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a magnetic head. In particular, a soft magnetic thin film containing iron (Fe) , aluminum (Al) , and silicon (Si) and a soft magnetic thin film containing ruthenium (Ru) are laminated to provide magnetic properties. It relates to a method of manufacturing a magnetic head to improve the.

Recently, V Mr. Al (V C R) or a camcorder, and such a magnetic recording and reproducing apparatus is more and the like, high-density and high-frequency of the recording density is in progress in order to process larger amounts of information, in particular tape or disk, to increase the recording density and In the manufacture of the same recording medium, a metal tape or ferromagnetic metal material using a powder of ferromagnetic metal such as iron (Fe), cobalt (Co) and nickel (Ni) is deposited on a magnetic component. The vapor deposition tape formed on the plastic base film by the method is put into practical use.

In the case of the tape, the magnetic recording medium improves the surface roughness to minimize the gap loss with the head, and also increases the coercive force, which is the size of the external magnetic field that reverses the magnetization direction on the tape. Therefore, it is proportional to the required magnetic flux size from the head.

Therefore, the magnetic head must have a high saturation magnetic flux density to correspond to such a high coercive force medium. In the conventional case, the ferrite material used for the magnetic head has a low saturation magnetic flux density and thus cannot cope with the high coercive force medium. To form a soft magnetic thin film having a high saturation magnetic flux density on a magnetic substrate, and to form a non-magnetic thin film with a predetermined thickness as a head spacing material on the soft magnetic thin film, MIG (Metal In) Gap-type heads were mainly used.

Claim that one turn shown the MIG type head according to the prior art for each type, (a), as the head gap (4) and the magnetic film (2) a mounting surface is parallel to parallel MIG heads, (B) and It said head gap (4) and the magnetic film (2) is inclined TSS (tilted Semdust Sputtered) head, (c) Here, as the film formation (2) cross-head to intersect with the center of the head gap (4) as have.

In this case, the magnetic film of each head is made of cobalt-based amorphous alloy or Fe-Al-Si alloy, especially when the alloys are used for glass bonding (glass bonding) at a temperature of about 500 ~ 600 ℃ thermal stability Excellent Fe-Al-Si alloys are mainly used.

And the actual manufacturing process of the head can be largely divided into raw material processing process, thin film manufacturing process, glass bonding process, post-processing and assembly process, more specifically, in the raw material processing process in the raw material grinding and precision There are lapping process, track process, and winding groove processing, and the thin film process includes sputtering process of magnetic thin film and sputtering process of nonmagnetic film for head spacing. Heat treatment at proper temperature (550 ℃ ~ 630 ℃) is necessary in consideration of soft magnetic characteristics, and if high temperature is applied, magnetic properties deteriorate and low melting point that can be fused at low temperature of 450 ℃ ~ 550 ℃ Fe-Al-Si-Ru type thin films made of glass or with a few percent of ruthenium added to the soft magnetic thin film may be used. It is advantageous to use Fe-Al-Si-Ru type thin film in consideration of thermal characteristics and durability, because it may reduce the reliability and life of the head. In the case of soft magnetic thin film, 3㎛ ~ 30㎛ It is deposited by vacuum deposition to a thickness or by using an electron beam.

However, in the case of the magnetic head using the Fe-Al-Si-Ru type soft magnetic thin film as described above, the soft magnetic thin film is a single layer, and when the thickness becomes thicker than several micrometers, the structure is changed into a columnar structure. There is a problem that the stress of the increase, and thus the magnetic properties of the thin film material and the adhesion to the ferrite substrate is deteriorated.

Therefore, the magnetic characteristics of the laminated soft magnetic thin film and the soft magnetic thin film thereto is further added a ruthenium composed mainly of iron, aluminum and silicon multi-layer structure by forming a magnetic film in order to solve the problems object is as described above of the present invention and the attached It is to provide a method of manufacturing a magnetic head that can improve the properties.

Manufacturing method of the magnetic head of the present invention for achieving the above object, in forming a magnetic film having a saturation magnetic flux density and on the magnetic substrate, and bonding the both cores hanhu form a non-magnetic thin film to the magnetic film to a desired thickness In the method of manufacturing a magnetic head, the magnetic film is formed by alternately stacking a Fe _a Al _b Si _c layer and a Fe _a Al _b Si _c Ru _d layer.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

First, as shown in FIG. 2, the magnetic film of the present invention has a Fe _a Al _b Si _c layer (11, 11 ') and a Fe _a Al _b' Si _{c '} Ru _d layer (12, 12) on the substrate 10. ') Is formed by alternating lamination. Fe _a Al _b Si _c layer (11,11') and Fe _{a '} Al _b' Si _{c '} Ru _d layer (12, 12') are each weight ratio a, b When expressed as, c, a ', b', c ', d, the following compositional conditions must be satisfied.

That is, the Fe _a Al _b Si _c layer (11, 11 ') is 75≤a≤94, 2≤b≤10, 4≤c≤15, and a, b, c represents the percentage of each weight The sum should be 100, and the Fe _a Al _b Si _c Ru _d layers 12 and 12 'are 65≤a'≤93, 2≤b'≤10, 4≤c'≤15, and 1≤d≤ 10 and the sum of a ', b', c ', and d should be 100.

In addition, the thickness of each Fe _a Al _b Si _c layer (11, 11 ') and Fe _a Al _b' Si _{c '} Ru _d layer (12, 12') is about 0.1 µm to 1 µm.

(A) to (c) of FIG. 3 apply the magnetic film to the parallel MIG head, the TSS head, and the cross head in order. As a target for sputtering on the ferrite 21 substrate after material processing, The input power is 200Wt in the RF-sputtering device using Fe ₈₂ Al ₇ Si ₁₁ and Fe ₇₈ Al ₆ Si ₉ Ru ₇ , the distance between the target and the substrate is 50mm ~ 100mm, and the substrate temperature is 20 ℃ or less. Sputtering with the initial vacuum degree of 5 × 10 ^-7 Torr and the pressure of argon (Ar) gas at 3 × 10 ^-3 Torr to 7 × 10 ³ Torr, followed by heat treatment at 590 ° C. for 1 hour in a nitrogen atmosphere. The magnetic film 20 in which the _a Al _b Si _c layers 11 and 11 'and the Fe _a Al _b' Si _{c '} Ru _d layers 12 and 12' are stacked is formed to a thickness of about 20 μm.

First and coercive force (Hc) (broken line) according to the thickness of each layer it is 4 degrees, the internal stress (σ) (solid line) and initial permeability (μ i) by showing a (one-dot chain line), the coercive force (Hc) and the internal stress (σ) is better as the layer thickness is smaller, and initial permeability (μi) is better as the layer thickness is larger, so that the stress and coercivity are small and the initial permeability is large in the range of about 0.1 μm to 1 μm, Select the appropriate value according to the use.

FIG. 5 compares the output change according to the frequency of the magnetic head to which the magnetic film is applied and the magnetic head according to the prior art. It can be seen that the recording reproduction output (solid line) is improved evenly at all frequencies, for example, about 2 dB at 5 MHz and about 3 dB at 7 MHz.

According to the present invention As described above, by multiple stacked iron and aluminum, soft soft magnetic thin film was further added to the magnetic thin film and the resulting ruthenium composed mainly of silicon, as well as high durability and heat stability by forming a magnetic film of a magnetic head Small internal stress and increased permeability have the effect of improving mechanical properties and corrosion resistance.

1 is a structural diagram of a magnetic head according to the prior art.

2 is a vertical sectional view of a magnetic film according to the present invention.

3 is a structural diagram of a magnetic head according to the present invention.

4 is a graph showing the characteristics of each layer thickness of the magnetic angle according to the present invention.

Figure 5 is a graph comparing the output change according to the frequency of the magnetic head according to the prior art and the present invention.

***** Explanation of symbols for main parts of drawing *****

10: substrate 11, 11 ': Fe _a Al _b Si _c layer

12,12 ': Fe _a Al _b Si _c Ru _d Layer 20: Magnetic film

21: ferrite 22: laminated glass

23: head spacing

Claims (1)

A method of manufacturing a time of formation and on the magnetic substrate a magnetic film having a saturation magnetic flux density, and bonding the both cores hanhu form a non-magnetic thin film to the magnetic film to a predetermined thickness on the magnetic head, the magnetic film is sputtering a weight ratio to the substrate _{by, 75≤a≤94, 2≤b≤10, Fe a Al} b Si c layer and the weight ratio of 4≤c≤15 65≤a'≤93, 2≤b'≤10, 4≤c Method for manufacturing a magnetic head, characterized in that formed by alternately stacking the Fe _{a '} Al _b' Si _{c '} Ru _d layer of _' ≤ 15, 1≤d≤10 , and then heat treatment for a predetermined time in a nitrogen atmosphere .