JPH04126416U - Frequency adjustment mask - Google Patents

Abstract

(57) [Summary] [Purpose] To prevent misalignment and blurring of the vapor deposition pattern caused by the mask used when adjusting the frequency of a hermetic seal type piezoelectric vibrator.
To eliminate short circuits and facilitate mask positioning. [Structure] A frequency adjustment mask 1 in which a frequency adjustment hole 2 similar to the pattern of the electrode 6 of a piezoelectric oscillation piece 5 and a hermetic seal plug hole 3 are formed in one plate.
Furthermore, the frequency adjustment mask 1 has integral holes continuously drilled, the material of the frequency adjustment mask 1 is metal, and at least one side is insulated.

Description

[Detailed explanation of the idea]

0001

[Industrial application field]

The present invention relates to a mask used when adjusting the frequency of a piezoelectric vibrator.

0002

[Conventional technology]

A plan view of a conventional frequency adjustment mask 59 is shown in FIG. 4, and a cross-sectional view is shown in FIG.

0003 Electrodes 54 are formed on the front and back sides of the piezoelectric oscillation piece 51 using means such as vapor deposition.

0004 This is fixed to the plug 52 using solder 53 or the like, and a hermetic seal type piezoelectric It was set as a vibrator 62.

[0005] Next, insert the lead 56 of the plug 52 into the jig 55, and connect this jig 55 to the F tuning jig ( (Frequency adjustment ring) 57.

[0006] The F tuning jig 57, in which a large number of plugs 52 are set in this way, is used in a frequency adjustment machine. By setting the boat 58 on a machine and heating it in a vacuum, metals such as Ag60 is deposited on the electrode 54 of the piezoelectric oscillation piece 51 to adjust the frequency of the piezoelectric vibrator 62. Ta.

[0007] At this time, in order to evaporate Ag60 etc. along the shape of the electrode 54 of the piezoelectric oscillation piece 51. A frequency adjustment mask 59 is attached between the piezoelectric oscillation piece 51 and the boat 58.

[0008] This frequency adjustment mask 59 has a smaller frequency adjustment mask similar to the shape of the electrode 54. A hole 61 (rectangular in the case of FIG. 4) is made for this purpose.

[0009] The Ag60 etc. evaporated by the boat 58 are used for frequency adjustment of the frequency adjustment mask 59. It is narrowed down to a certain amount by the holes 61 and is deposited on the electrode 54 of the piezoelectric oscillation piece 51.

0010

[Problem that the idea aims to solve]

However, with conventional technology, the distance between the piezoelectric oscillation piece and the frequency adjustment mask is large. Because of this, it is not deposited inside the electrode of the piezoelectric oscillation piece, and may become misaligned or blurred, affecting the characteristics. This could cause a short circuit if it was applied to the piezoelectric oscillation piece or wrapped around the side of the piezoelectric oscillation piece.

[0011] In addition, as piezoelectric oscillator pieces become smaller, these trends become even more severe, and become a source of defects. It was the cause.

0012 Furthermore, it is necessary to adjust the position of the piezoelectric oscillation piece and the frequency adjustment mask each time, and the position It was difficult and troublesome to put it down.

[0013]

[Means to solve the problem]

Therefore, this invention aims to solve the above problems. 1. In the mask used when adjusting the frequency of a hermetically sealed piezoelectric vibrator , a hermetic seal and holes for frequency adjustment similar to the electrode pattern of the piezoelectric oscillation piece. It is characterized by having a hole for the plug inserted in a single plate. 2. The material of the frequency adjustment mask is metal, and at least one side is insulated. be a sign. 3. Make sure that the hole for frequency adjustment and the hole for the plug are consecutively drilled at a certain interval. Features.

[0014]

【Example】

An embodiment of the present invention will be described with reference to a plan view in FIG. 1 and a sectional view in FIG. 2.

[0015] As shown in Fig. 1, the frequency adjustment mask 1 of the present invention is made of a single plate material for frequency adjustment. The hole 2 and the plug hole 3 into which the hermetic seal plug is inserted are integrally formed.

[0016] The frequency adjustment mask 1 is set in the F tone jig 4.

[0017] As shown in Figure 1, the frequency adjustment mask 1 has a frequency adjustment hole 2 and a plug for insertion. A set of plug holes 3 are continuously opened at constant intervals.

[0018] Electrodes 6 are formed on the front and back sides of the piezoelectric oscillation piece 5 using means such as vapor deposition.

[0019] This was fixed to the plug 7 using solder 8 or the like to form a piezoelectric vibrator 13.

[0020] Next, insert the lead 10 of the plug 7 into the jig 9, and secure this jig 10 to the F adjustment jig 4. to be determined.

[0021] At this time, the plug 7 is located in the plug hole 3 of the frequency adjustment mask 1 into which the plug is inserted. determined and fixed.

[0022] Since the plug 7 and the piezoelectric oscillating piece 5 are positioned and fixed by the solder 8, the frequency The number adjustment holes 2 and the electrodes 6 are necessarily positioned.

[0023] Hole 2 for frequency adjustment has a similar shape to electrode 6, but is slightly smaller. It is better to

[0024] Attach the F tuning jig 4 set in this way to a frequency adjustment machine (not shown). By heating the boat 11 in a vacuum, a metal such as Ag12 is made into a piezoelectric oscillating piece. 5 and the frequency of the piezoelectric vibrator 13 is adjusted.

[0025] The plug 7 and piezoelectric oscillation piece 5 are positioned and fixed with solder 8, etc., so the plug The lug 7 and the piezoelectric oscillation piece 5 are within a certain size range.

[0026] The frequency adjustment hole 2 of the frequency adjustment mask 1 and the plug hole 3 into which the plug is inserted are the same. Since the hole is made by the body, when plug 7 is set, it is necessary to open hole 2 for frequency adjustment and the electrode. 6 is positioned, so the pattern of Ag12 etc. deposited on the electrode 6 is the shape of the electrode 6. A pattern that follows the shape of the frequency adjustment hole 2 is formed without shifting. Become.

[0027] If the frequency adjustment mask 1 is made of a thin metal plate, it will be easier to drill holes and it will be more durable. be.

[0028] As another embodiment of the present invention, as shown in the cross-sectional view of FIG. If you apply a thin layer of adhesive 15 (organic adhesive, etc.), the plug 7 will fit into the plug hole 3. The piezoelectric oscillating piece 5 contacts the frequency adjustment mask 1 without causing any damage. Since it is insulated even when the oscillation occurs, it is possible to adjust the frequency without stopping oscillation.

[0029] Although the frequency adjustment mask 1 of the present invention was explained as a metal plate in this embodiment, it is made of a thin insulator. For example, it is possible to use ceramics, vinyl chloride resin, polyimide resin, etc. Not even.

[0030]

[Effect of the idea]

As described above, the frequency adjustment mask of the present invention is similar to the electrode pattern of the piezoelectric oscillation piece. A hole for inserting the hole and a hole for the hermetic seal into the plug are drilled in one plate. Therefore, when adjusting the frequency, the deposition pattern may be misaligned or blurred when depositing Ag, etc. The frequency of the piezoelectric oscillator piece with good characteristics can be adjusted without causing any No more short circuits.

[0031] Furthermore, we provide a frequency adjustment mask that can be used even if the piezoelectric oscillation piece becomes smaller. can.

[0032] Also, once the piezoelectric oscillation piece and frequency adjustment mask are set, it is ready. There is no need to make adjustments each time, improving work efficiency.

[0033] In this way, the dimensional accuracy of the vapor deposition pattern during frequency adjustment is significantly improved.

[0034] In addition, by insulating the frequency adjustment mask or making it from an insulating material, it is possible to Frequency adjustment work becomes possible without causing any damage to the plug or stopping the oscillation of the piezoelectric oscillation piece. Also, by drilling holes continuously at a certain interval, it becomes easier to set the piezoelectric vibrator.

[Brief explanation of drawings]

FIG. 1 is a plan view of a frequency adjustment mask of the present invention.

FIG. 2 is a sectional view of the frequency adjustment mask of the present invention.

FIG. 3 is a sectional view showing another embodiment of the present invention.

FIG. 4 is a plan view of a conventional frequency adjustment mask.

FIG. 5 is a cross-sectional view of a conventional frequency adjustment mask.

[Explanation of symbols]

1 Frequency adjustment mask 2 Hole for frequency adjustment 3 Plug hole 4 F adjustment jig 5 Piezoelectric oscillation piece 6 Electrode 7 Plug 8 Solder 9 Jig 10 lead 11 Boat 12 Ag 13 Piezoelectric vibrator 14 Metal plate 15 Insulating agent 51 Piezoelectric oscillation piece 52 Plug 53 Solder 54 Electrode 55 Jig 56 Lead 57 F adjustment jig 58 Boat 59 Frequency adjustment mask 60 Ag 61 Hole for frequency adjustment 62 Piezoelectric vibrator

Claims (3)

[Scope of utility model registration request] Claim 1: In a mask used for frequency adjustment of a hermetic seal type piezoelectric vibrator, a hole for frequency adjustment similar to the electrode pattern of the piezoelectric oscillation piece and a hole for receiving a plug of the hermetic seal are integrated into one plate material. A frequency adjustment mask characterized by an opening. 2. The frequency adjustment mask according to claim 1, wherein the material of the frequency adjustment mask is metal, and at least one side is insulated. 3. The frequency adjustment mask according to claim 1, wherein the frequency adjustment hole and the hole for receiving the plug are continuously formed at a constant interval.