JPH1131940A - Surface mount type crystal vibrator - Google Patents

Surface mount type crystal vibrator

Info

Publication number
JPH1131940A
JPH1131940A JP20537997A JP20537997A JPH1131940A JP H1131940 A JPH1131940 A JP H1131940A JP 20537997 A JP20537997 A JP 20537997A JP 20537997 A JP20537997 A JP 20537997A JP H1131940 A JPH1131940 A JP H1131940A
Authority
JP
Japan
Prior art keywords
electrode
conductive adhesive
crystal
holding
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20537997A
Other languages
Japanese (ja)
Inventor
Satoshi Umeki
木 三 十 四 梅
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP20537997A priority Critical patent/JPH1131940A/en
Publication of JPH1131940A publication Critical patent/JPH1131940A/en
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a surface mount type crystal vibrator which securely obtains electric conduction and mechanical holding by applying a conductive adhesive only once and is therefore reduced in variance of electric characteristics and improved in process yield. SOLUTION: This vibrator is constituted by forming a holding electrode 13 which conducts electrically to a mounted electrode 12 formed on the outside bottom surface in a container 11. Further, a crystal piece 16 having exciting electrodes 19, formed on the top and reverse plate surfaces, led out to plate surface end in the mutually opposite directions to the holding electrode is fixed with the conductive adhesive 20. The exciting electrode 19 is connected to a through hole electrode 18 provided at the end part of the crystal piece. Preferably, the crystal piece 16 is adhered directly to the holding electrode 13 with the conductive adhesive 20 and also electrically connected, and the through hole electrode 18 has an electrode film formed by sputtering by boring a through hole in the end part of the crystal piece 16.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、特性のばらつきが
少なく大量生産に適した表面実装型の水晶振動子に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface mount type crystal unit which has little variation in characteristics and is suitable for mass production.

【0002】[0002]

【従来の技術】近時、種々の電子機器では小型、軽量化
および組立工程の自動化のために表面実装型の電子部品
を多用することが行われている。このため、時間や周波
数の基準に使用される水晶振動子も表面実装型のものが
用いられる傾向にある。
2. Description of the Related Art In recent years, various electronic devices have frequently used surface-mounted electronic components in order to reduce the size and weight and to automate the assembly process. For this reason, a surface-mount type crystal resonator used as a reference for time and frequency tends to be used.

【0003】図6、図7は従来の表面実装型の水晶振動
子の一例を示す側断面図および平面図である。1はたと
えば上面に開口を有する箱形に成型したセラミックの容
器である。この容器1の外側底面には、図示しないプリ
ント基板の導電パターンに実装するための実装電極2を
形成している。そして実装電極2に導通して容器1内に
保持電極3を形成している。
FIGS. 6 and 7 are a side sectional view and a plan view showing an example of a conventional surface mount type crystal unit. Reference numeral 1 denotes a box-shaped ceramic container having an opening on the upper surface, for example. On the outer bottom surface of the container 1, a mounting electrode 2 for mounting on a conductive pattern of a printed board (not shown) is formed. Then, the holding electrode 3 is formed in the container 1 by being electrically connected to the mounting electrode 2.

【0004】そして保持電極3に導電性接着剤を塗布
し、ここに水晶片4を載置して固定する。そして、水晶
片4の電極の導出端に導電性接着剤を重ね塗りすること
によって上側の電極の導出端と保持電極を電気的に導通
させるようにしている。上記水晶片4は、人工水晶を所
定の角度に切断して板状に整形し、たとえば所望の周波
数に応じて厚みを研磨して表裏板面に相対面して励振電
極5を形成している。
[0004] A conductive adhesive is applied to the holding electrode 3, and the crystal blank 4 is placed and fixed thereon. Then, a conductive adhesive is applied over the lead-out end of the electrode of the crystal blank 4 to electrically connect the lead-out end of the upper electrode to the holding electrode. The crystal blank 4 is formed by cutting artificial quartz at a predetermined angle into a plate shape, polishing the thickness in accordance with a desired frequency, for example, and forming the excitation electrode 5 facing the front and back plate surfaces. .

【0005】そして励振電極5を互いに逆方向へ板面端
部まで導出し、この導出端に導電性接着剤6を塗布して
水晶片4を保持電極3で保持するとともに、励振電極5
を保持電極3を介して実装電極2に電気的に導通させる
ようにしている。なお容器1の上面の開口は、蓋体7に
よって気密に封止するようにしている。
Then, the excitation electrodes 5 are led out in opposite directions to the end of the plate surface, and a conductive adhesive 6 is applied to the lead ends to hold the crystal blank 4 with the holding electrodes 3 and to hold the excitation electrodes 5
Is electrically connected to the mounting electrode 2 via the holding electrode 3. The opening on the upper surface of the container 1 is hermetically sealed by a lid 7.

【0006】しかしながら、このようなものでは、保持
電極に導電性接着剤を塗布した後にこの上に水晶片を載
置し、さらにこの上から導電性接着剤を塗布する必要が
あり、導電性接着剤を2回塗布しなければならない。こ
のため導電性接着剤の塗布量、塗布域を均一にすること
が難しく、これによって電気的特性のばらつきを生じて
歩留まりが低下する問題があった。さらに導電性接着剤
を2回、塗布するために工程歩留まりも低下する問題が
あった。
However, in such a device, it is necessary to apply a conductive adhesive to the holding electrode, place a crystal blank thereon, and then apply the conductive adhesive from above. The agent must be applied twice. For this reason, it is difficult to make the application amount and the application area of the conductive adhesive uniform, thereby causing a problem that the electrical characteristics vary and the yield decreases. Further, there is a problem that the process yield is reduced because the conductive adhesive is applied twice.

【0007】[0007]

【発明が解決しようとする課題】本発明は上記の事情に
鑑みてなされたもので、導電性接着剤を1回塗布するだ
けで電気的な導通と機械的な保持を確実に行うことがで
き、それによって電気的な特性のばらつきも少なく、工
程歩留まりも向上することができる表面実装型の水晶振
動子を提供することを目的とするものである。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and electric conduction and mechanical holding can be reliably performed by only applying a conductive adhesive once. Accordingly, it is an object of the present invention to provide a surface-mount type crystal unit that has less variation in electrical characteristics and can improve a process yield.

【0008】[0008]

【課題を解決するための手段】本発明の請求項1の発明
は、外側底面に形成した実装電極に導通する保持電極を
容器内に形成し、表裏板面に形成した励振電極を互いに
反対方向へ板面端部へ導出した水晶片を上記保持電極に
導電性接着剤で固着した表面実装型の水晶振動子におい
て、水晶片の端部に設けたスルーホール電極に上記励振
電極を接続したことを特徴とする表面実装型の水晶振動
子であり、請求項2の発明は、請求項1に記載のものに
おいて、水晶片は導電性接着剤によって上記保持電極に
直接接着され、かつ電気的に接続したことを特徴とする
表面実装型の水晶振動子であり、請求項3の発明は請求
項1に記載のものにおいて、水晶片の端部に形成したス
ルーホール電極は、水晶片の端部に透孔を穿設してスパ
ッタによって電極膜を形成したことを特徴とする表面実
装型の水晶振動子である。
According to a first aspect of the present invention, a holding electrode is formed in a container to be electrically connected to a mounting electrode formed on an outer bottom surface, and excitation electrodes formed on front and back plate surfaces are arranged in opposite directions. In a surface-mount type crystal unit in which a crystal piece led to an edge of a plate surface is fixed to the holding electrode with a conductive adhesive, the excitation electrode is connected to a through-hole electrode provided at an end of the crystal piece. According to a second aspect of the present invention, in the second aspect, the quartz piece is directly bonded to the holding electrode by a conductive adhesive, and According to a third aspect of the present invention, there is provided a surface-mount type crystal resonator, wherein the through-hole electrode formed at the end of the crystal blank is connected to the end of the crystal blank. Drill a through hole in the electrode by sputtering To the formation of the a surface mount type crystal resonator according to claim.

【0009】[0009]

【発明の実施の形態】以下、図1に示す側断面図、図2
に示す平面図を参照して、本発明の実施の形態を説明す
る。上面に開口を有し概略箱形に成型したセラミック容
器11の外側底面には、図示しないプリント基板の導電
パターンに実装するための実装電極12を形成してい
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a side sectional view shown in FIG. 1 and FIG.
An embodiment of the present invention will be described with reference to a plan view shown in FIG. A mounting electrode 12 for mounting on a conductive pattern of a printed circuit board (not shown) is formed on the outer bottom surface of a ceramic container 11 having an opening on the upper surface and molded in a substantially box shape.

【0010】そして実装電極12に導通して容器11内
に保持電極13を形成している。この実装電極12と保
持電極13とは金属薄板を成型して埋め込んでおくよう
にしてもよいし、セラミックの表面にメタライズ処理を
行って形成するようにしてもよい。
[0010] The holding electrode 13 is formed in the container 11 by being electrically connected to the mounting electrode 12. The mounting electrode 12 and the holding electrode 13 may be formed by embedding and embedding a thin metal plate, or may be formed by performing a metallizing process on the surface of ceramic.

【0011】そして、たとえば図3に示すように所望の
板厚に研磨した水晶板14にレジスト15を塗布して、
各水晶片16の形状に対応する部分のレジストだけを残
し、水晶板の板面を露出させておく。なお図4、図5は
厚みを誇張した水晶板14の断面図である。さらに各水
晶片16の両端部に形成するスルーホール17の部分も
レジストを除去して板面を露出させる。
Then, for example, as shown in FIG. 3, a resist 15 is applied to a quartz plate 14 polished to a desired thickness.
Only the resist corresponding to the shape of each crystal blank 16 is left, and the surface of the crystal plate is exposed. 4 and 5 are cross-sectional views of the quartz plate 14 whose thickness is exaggerated. Further, the resist is also removed from the through holes 17 formed at both ends of each crystal blank 16 to expose the plate surface.

【0012】そして、水晶板14をエッチング液に浸漬
して適当な時間エッチングを行って各水晶片16に分割
するとともに、図5に示すように各水晶片16の両端部
にスルーホール17、すなわち通し孔を形成する。この
通し孔の孔径は、たとえば20ミクロン以上あればよ
い。
Then, the crystal plate 14 is immersed in an etching solution and etched for an appropriate time to divide the crystal plate 16 into respective crystal blanks 16. As shown in FIG. A through hole is formed. The diameter of the through hole may be, for example, 20 microns or more.

【0013】そしてスパッタを行って水晶片15の表裏
板面に励振電極を形成するとともに、上記スルーホール
17の内壁にも金属薄膜を成膜してスルーホール電極1
8を形成する。なおエッチングの主たる目的はスルーホ
ール17を形成することにあり、個々の水晶片16の分
割はダイシング・ソー等を用いて行うようにしてもよ
い。またスパッタの主たる目的は、スルーホール17の
内壁に金属薄膜を成膜したスルーホール電極18を形成
することにあるので、励振電極は従来行われている蒸着
を併用し、あるいは蒸着のみによって形成するようにし
てもよいことは勿論である。
An excitation electrode is formed on the front and back surfaces of the crystal blank 15 by sputtering, and a metal thin film is formed on the inner wall of the through hole 17 to form the through hole electrode 1.
8 is formed. The main purpose of the etching is to form the through holes 17, and the individual crystal blanks 16 may be divided using a dicing saw or the like. The main purpose of sputtering is to form a through-hole electrode 18 formed by depositing a metal thin film on the inner wall of the through-hole 17, so that the excitation electrode is formed by using conventional evaporation or by evaporation alone. Needless to say, this may be done.

【0014】したがって、たとえば水晶板14からレジ
ストを除去した後、所定の外形形状の個々の水晶片16
に切断するようにしてもよい。この水晶片16は表裏板
面に励振電極19を形成するとともに、この励振電極1
9を互いに反対方向へ板面端部まで導出し、板面端部で
スルーホール電極17に接続している。そして、容器1
1内の保持電極13に導電性接着剤20を塗布し、ここ
に水晶片14を載置して固着するとともに、各励振電極
19を保持電極13に電気的に接続するようにしてい
る。そして、容器11の開口を蓋体21で気密に封止す
るようにしている。
Therefore, for example, after the resist is removed from the quartz plate 14, individual quartz pieces 16 having a predetermined outer shape are formed.
May be cut. The crystal blank 16 forms an excitation electrode 19 on the front and back plate surfaces, and the excitation electrode 1
9 are led out in opposite directions to the end of the plate surface, and connected to the through-hole electrode 17 at the end of the plate surface. And container 1
A conductive adhesive 20 is applied to the holding electrode 13 in 1, a crystal blank 14 is placed and fixed thereon, and each excitation electrode 19 is electrically connected to the holding electrode 13. The opening of the container 11 is hermetically sealed with the lid 21.

【0015】このようにすれば、各励振電極19は水晶
片の端部で両側板面に導通しているので、保持電極13
に導電性接着剤20を塗布して、ここに水晶片16を載
置することによって、それぞれ励振電極19と保持電極
13とを電気的に導通させることができる。したがっ
て、導電性接着剤を塗布する作業を1回行うだけでよ
く、しかも導電性接着剤の塗布量を比較的少なくしても
確実に導通を得ることができる。そして工程の簡素化を
図れ、かつ振動特性のばらつきを少なくすることができ
る。
In this way, since each of the excitation electrodes 19 is electrically connected to both side surfaces at the end of the crystal blank,
By applying a conductive adhesive 20 to the substrate and placing the crystal blank 16 thereon, the excitation electrode 19 and the holding electrode 13 can be electrically connected to each other. Therefore, the work of applying the conductive adhesive only needs to be performed once, and even if the amount of the conductive adhesive applied is relatively small, conduction can be reliably obtained. Further, the process can be simplified, and variations in vibration characteristics can be reduced.

【0016】[0016]

【発明の効果】本発明は、以上説明したような形態で実
施され、以下に記載されるような効果を奏する。
The present invention is embodied in the form described above and has the following effects.

【0024】導電性接着剤を塗布する作業は1回でよ
く、しかも比較的少ない塗布量で確実に保持および導通
を得ることができる。したがって振動特性のばらつきも
少なく、工程不良も低減することができる。またエッチ
ングによってスルーホールを形成するとともに各水晶片
に分割する場合、大量の水晶片を効率よく得ることがで
きる。
The operation of applying the conductive adhesive may be performed only once, and the holding and conduction can be reliably achieved with a relatively small amount of application. Therefore, variation in vibration characteristics is small, and process defects can be reduced. Further, when a through hole is formed by etching and divided into individual crystal pieces, a large amount of crystal pieces can be obtained efficiently.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例の側断面図である。FIG. 1 is a side sectional view of one embodiment of the present invention.

【図2】図1に示す水晶振動子の蓋体を取り外した平面
図である。
FIG. 2 is a plan view of the crystal resonator shown in FIG. 1 with a lid removed.

【図3】本発明の多数の水晶片およびスルーホールを形
成した水晶板の平面図である。
FIG. 3 is a plan view of a quartz plate having a large number of quartz pieces and through holes according to the present invention.

【図4】本発明のフォトエッチングの加工を説明する断
面図である。
FIG. 4 is a cross-sectional view illustrating a photo-etching process of the present invention.

【図5】本発明のフォトエッチングの加工を説明する断
面図である。
FIG. 5 is a cross-sectional view illustrating a photoetching process of the present invention.

【図6】従来の水晶振動子の一例を示す側断面図であ
る。
FIG. 6 is a side sectional view showing an example of a conventional crystal unit.

【図7】従来の水晶振動子の一例を示す平面図である。FIG. 7 is a plan view showing an example of a conventional crystal unit.

【符号の説明】[Explanation of symbols]

11 容器 12 実装電極 13 保持電極 16 水晶片 18 スルーホール電極 19 励振電極 20 導電性接着剤 DESCRIPTION OF SYMBOLS 11 Container 12 Mounting electrode 13 Holding electrode 16 Quartz piece 18 Through-hole electrode 19 Excitation electrode 20 Conductive adhesive

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】外側底面に形成した実装電極に導通する保
持電極を容器内に形成し、表裏板面に形成した励振電極
を互いに反対方向へ板面端部へ導出した水晶片を上記保
持電極に導電性接着剤で固着した表面実装型の水晶振動
子において、 水晶片の両端部にそれぞれ設けたスルーホール電極に上
記励振電極をそれぞれ接続したことを特徴とする表面実
装型の水晶振動子。
1. A holding electrode, which is formed on the outer bottom surface and is electrically connected to a mounting electrode, is formed in a container, and the excitation electrode formed on the front and back plate surfaces is led out to the end of the plate surface in opposite directions to the holding electrode. A surface-mount type crystal unit, wherein said excitation electrodes are respectively connected to through-hole electrodes provided at both ends of a crystal piece, respectively.
【請求項2】請求項1に記載のものにおいて、水晶片は
導電性接着剤によって上記保持電極に直接接着され、か
つ電気的に接続したことを特徴とする表面実装型の水晶
振動子。
2. A surface-mount type crystal unit according to claim 1, wherein said crystal blank is directly bonded to said holding electrode by a conductive adhesive and electrically connected thereto.
【請求項3】請求項1に記載のものにおいて、水晶片の
端部に形成したスルーホール電極は、水晶片の端部に透
孔を穿設してスパッタによって電極膜を形成したことを
特徴とする表面実装型の水晶振動子。
3. A through-hole electrode formed at an end of a crystal blank according to claim 1, wherein a through-hole is formed at an end of the crystal blank to form an electrode film by sputtering. Surface mount type crystal unit.
JP20537997A 1997-07-14 1997-07-14 Surface mount type crystal vibrator Pending JPH1131940A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20537997A JPH1131940A (en) 1997-07-14 1997-07-14 Surface mount type crystal vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20537997A JPH1131940A (en) 1997-07-14 1997-07-14 Surface mount type crystal vibrator

Publications (1)

Publication Number Publication Date
JPH1131940A true JPH1131940A (en) 1999-02-02

Family

ID=16505860

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20537997A Pending JPH1131940A (en) 1997-07-14 1997-07-14 Surface mount type crystal vibrator

Country Status (1)

Country Link
JP (1) JPH1131940A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009135749A (en) * 2007-11-30 2009-06-18 Kyocera Kinseki Corp Piezoelectric vibrator and piezoelectric oscillator
JP2010193496A (en) * 2010-04-05 2010-09-02 Kyocera Corp Crystal oscillator and crystal device
JP2012235519A (en) * 2009-11-11 2012-11-29 Nippon Dempa Kogyo Co Ltd Sheet like ceramic base and manufacturing method of the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009135749A (en) * 2007-11-30 2009-06-18 Kyocera Kinseki Corp Piezoelectric vibrator and piezoelectric oscillator
JP2012235519A (en) * 2009-11-11 2012-11-29 Nippon Dempa Kogyo Co Ltd Sheet like ceramic base and manufacturing method of the same
JP2010193496A (en) * 2010-04-05 2010-09-02 Kyocera Corp Crystal oscillator and crystal device

Similar Documents

Publication Publication Date Title
JP4933903B2 (en) Quartz vibrator, quartz vibrator and quartz wafer
JPS63104512A (en) Sealing structure for piezoelectric resonator
JP4292825B2 (en) Method for manufacturing quartz vibrating piece
JP3926000B2 (en) Piezoelectric vibrator and manufacturing method thereof
JP3926001B2 (en) Piezoelectric vibrator and manufacturing method thereof
JP5171210B2 (en) Method for manufacturing piezoelectric vibrator
JP2005086783A (en) Surface mounted piezoelectric device and its package, mobile phone utilizing surface mounted piezoelectric device, and electronic apparatus utilizing surface mounted piezoelectric device
JPH1131940A (en) Surface mount type crystal vibrator
JP3926002B2 (en) Piezoelectric vibrator and manufacturing method thereof
JP2006303761A (en) Surface mount piezoelectric oscillator
JP2000031773A (en) Crystal vibrator of surface mount type
JPH1051265A (en) Surface-mount type crystal vibrator
JPS59119911A (en) Piezoelectric oscillator
JP2004356687A (en) Manufacturing method for piezoelectric vibration device and piezoelectric vibration device manufactured by the method
JP2002064356A (en) Piezoelectric vibrator
JP2002280865A (en) Piezoelectric device
JPH11274891A (en) Piezoelectric vibrator, piezoelectric vibrator unit using the same and piezoelectric oscillator
JP2009111931A (en) Piezoelectric vibrator and method for manufacturing piezoelectric vibrator
JPH05326702A (en) Manufacture of silicon-glass junction member
JP2001127576A (en) Structure for package for piezoelectric vibrator and its manufacture
JPH06291551A (en) Piezoelectric oscillator
JP2006332932A (en) Quartz resonator with seating
JP2008011309A (en) Piezoelectric oscillator
JPH10117120A (en) Gt-cut crystal oscillator
JP2004214921A (en) Insulating package, fixing structure thereof, piezoelectric device, mobile telephone equipment utilizing the same and electronic equipment utilizing the same