JPS59154918U - vapor deposition mask - Google Patents

vapor deposition mask

Info

Publication number
JPS59154918U
JPS59154918U JP4869583U JP4869583U JPS59154918U JP S59154918 U JPS59154918 U JP S59154918U JP 4869583 U JP4869583 U JP 4869583U JP 4869583 U JP4869583 U JP 4869583U JP S59154918 U JPS59154918 U JP S59154918U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition mask
central member
wall
main electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4869583U
Other languages
Japanese (ja)
Other versions
JPH0233389Y2 (en
Inventor
幸博 岡本
Original Assignee
日本電波工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電波工業株式会社 filed Critical 日本電波工業株式会社
Priority to JP4869583U priority Critical patent/JPS59154918U/en
Publication of JPS59154918U publication Critical patent/JPS59154918U/en
Application granted granted Critical
Publication of JPH0233389Y2 publication Critical patent/JPH0233389Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の周波数調整工程を示す斜視図、第２図は
本考案の一実施例を示す斜視図である。 １・・・・・・水晶素片、ｌａ、　　ｌｂ、　　ｌｃ・
・・・・・電極、２・・・・・・金属ベース、３ａ、　
　３ｂ、　　３Ｃ・・・・・・リード端子、４ａ、　　
４ｂ、　　４ｃ・・・・・・保持板、６・・・・・・蒸
着マスク、６ａ・・・・・・中央部材、５ｂ、　　６ｃ
・・・・・・外側部材、７ａ。 ７ｂ、　　７ｃ・・・・・・蒸着用窓。FIG. 1 is a perspective view showing a conventional frequency adjustment process, and FIG. 2 is a perspective view showing an embodiment of the present invention. 1... Crystal piece, LA, LB, LC.
...Electrode, 2...Metal base, 3a,
3b, 3C...Lead terminal, 4a,
4b, 4c... Holding plate, 6... Vapor deposition mask, 6a... Central member, 5b, 6c
...Outer member, 7a. 7b, 7c... Windows for vapor deposition.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 所定角度に切断した圧電結晶の板面に形成した主電極の
上に調整用電極を蒸着して供振周波数の調整を行なうも
のにおいて、主電極を形成した水晶素板を挿入時にこの
水晶素板の外周縁を内壁に当接させて位置決めする切欠
を形成した中央部材の両側に調整用電極を蒸着すべき位
置に対応して蒸着用窓を形成した外側部材を設けるとと
もに上記中央部材の切欠および上記外側部材で囲まれる
空所の内壁に絶縁膜を形成したことを特徴とする蒸着マ
スク。In a device that adjusts the resonance frequency by depositing an adjustment electrode on the main electrode formed on the plate surface of a piezoelectric crystal cut at a predetermined angle, this crystal blank is inserted when the crystal blank with the main electrode formed is inserted. A central member is provided with a notch for positioning the outer peripheral edge of the central member in contact with an inner wall, and an outer member is provided with a deposition window corresponding to the position where the adjustment electrode is to be deposited on both sides of the central member. A vapor deposition mask characterized in that an insulating film is formed on an inner wall of a space surrounded by the outer member.
JP4869583U 1983-04-01 1983-04-01 vapor deposition mask Granted JPS59154918U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4869583U JPS59154918U (en) 1983-04-01 1983-04-01 vapor deposition mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4869583U JPS59154918U (en) 1983-04-01 1983-04-01 vapor deposition mask

Publications (2)

Publication Number Publication Date
JPS59154918U true JPS59154918U (en) 1984-10-17
JPH0233389Y2 JPH0233389Y2 (en) 1990-09-07

Family

ID=30179216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4869583U Granted JPS59154918U (en) 1983-04-01 1983-04-01 vapor deposition mask

Country Status (1)

Country Link
JP (1) JPS59154918U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04126416U (en) * 1991-05-08 1992-11-18 セイコーエプソン株式会社 Frequency adjustment mask

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04126416U (en) * 1991-05-08 1992-11-18 セイコーエプソン株式会社 Frequency adjustment mask

Also Published As

Publication number Publication date
JPH0233389Y2 (en) 1990-09-07

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