JPH04119684A - Metal circuit board - Google Patents

Metal circuit board

Info

Publication number
JPH04119684A
JPH04119684A JP24053190A JP24053190A JPH04119684A JP H04119684 A JPH04119684 A JP H04119684A JP 24053190 A JP24053190 A JP 24053190A JP 24053190 A JP24053190 A JP 24053190A JP H04119684 A JPH04119684 A JP H04119684A
Authority
JP
Japan
Prior art keywords
metal
prepreg
board
thickness
resistant resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24053190A
Other languages
Japanese (ja)
Inventor
Masaaki Ueki
上木 正暁
Tokuo Kurokawa
徳雄 黒川
Masamitsu Aoki
正光 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Chemical Corp
Original Assignee
Toshiba Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Chemical Corp filed Critical Toshiba Chemical Corp
Priority to JP24053190A priority Critical patent/JPH04119684A/en
Publication of JPH04119684A publication Critical patent/JPH04119684A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)

Abstract

PURPOSE:To obtain a metal circuit board where an electrical insulating layer is thin, uniform in thickness, and excellent in electrical insulation and reliability by a method wherein an aromatic polyamide paper is impregnated with heat resistant resin and dried up into prepreg, which serves as an electrical insulating layer. CONSTITUTION:A board of optionally selected metal is formed 0.5-2.5mm in thickness, where the thickness of the board is determined basing on uses. Any kinds of heat resistant resin can be used for the heat resistant resin concerned, and resin of a kind can be used or two or more kinds of resins are mixed together to be utilized. Technora (product of Teijin Co) can be used as an aromatic polyamide paper. A metal foil, a metal plating layer, or a conductive paste which can be formed into a circuit pattern can be used as a conductive layer. An aromatic polyamide paper is impregnated with heat resistant resin and dried up into prepreg. A few sheets of prepreg are laid on a metal board, a copper foil or the like is made to overlap the prepreg, and the laminate concerned is formed into a circuit metal board through thermocompression.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、電気絶縁性、放熱性、密着性、表面平滑性等
に優れたフリップチップ実装等に好適な回路用金属基板
に関する。
[Detailed Description of the Invention] [Object of the Invention] (Field of Industrial Application) The present invention provides a circuit metal suitable for flip-chip mounting, etc., which has excellent electrical insulation, heat dissipation, adhesion, surface smoothness, etc. Regarding the board.

(従来の技術) 近年、半導体能動部品の高集積化に伴い、部品の発熱が
大きな問題となってきた。 また、パッケージの小型化
傾向に従い、COB、チップキャリア、フリップチップ
等のチップが発生した熱を基板に逃がす方式のパッケー
ジが増加している。
(Prior Art) In recent years, as semiconductor active components have become highly integrated, heat generation from the components has become a major problem. In addition, with the trend toward smaller packages, packages such as COB, chip carriers, and flip chips that allow heat generated by chips to escape to the substrate are increasing.

さらに、高密度実装技術の進展は、基板単位面積当りに
搭載される部品数を増大させ、また基板単位面積当りの
発熱量も飛躍的に増大している。
Furthermore, advances in high-density packaging technology have increased the number of components mounted per unit area of a board, and the amount of heat generated per unit area of the board has also increased dramatically.

そのため回路基板の放熱性は、最も重要なファクターの
1つとなっている。
Therefore, the heat dissipation of a circuit board is one of the most important factors.

一般にアルミニウムや鉄等の金属板をベースとした樹脂
積層成形体は、放熱性、電気特性、機械的特性に優れて
いるため、−膜回路用基板や混成集積回路用基板として
使用されている。 この成形体のうち、接着剤を裏面に
塗布した銅箔を金属板上に積層接着して、銅箔に塗布し
た接着剤層を電気絶縁層とした回路用基板(以下塗布基
板という)や熱硬化性樹脂を含浸したガラス紙布を介し
て、金属箔を金属板上に積層接着して、硬化したプリプ
レグを電気絶縁層とした回路用基板(以下プリプレグ基
板という)がある。
In general, resin laminate molded bodies based on metal plates such as aluminum and iron have excellent heat dissipation, electrical properties, and mechanical properties, and are therefore used as substrates for -film circuits and hybrid integrated circuits. Among these molded products, copper foil coated with an adhesive on the back side is laminated and bonded onto a metal plate, and the adhesive layer coated on the copper foil is used as an electrical insulation layer to form a circuit board (hereinafter referred to as a coated board) or a thermal There is a circuit board (hereinafter referred to as a prepreg board) in which a metal foil is laminated and bonded onto a metal plate via a glass paper cloth impregnated with a curable resin, and a cured prepreg is used as an electrical insulating layer.

しかしながら、塗布基板は、電気絶縁層が薄く放熱性の
面で有利であるが、回路用基板の製造時に接着剤の厚さ
を高精度に均一に、かつ任意の厚さに調整することが困
難で、厚さが均一でない場合にはピンホールか発生する
など絶縁特性に劣る欠点かある。 また、折曲げ時には
電気絶縁層にクラックが入りやすい欠点かある。
However, although coated substrates have a thin electrical insulating layer and are advantageous in terms of heat dissipation, it is difficult to adjust the thickness of the adhesive to a uniform and desired thickness with high precision when manufacturing circuit boards. However, if the thickness is not uniform, pinholes may occur, resulting in poor insulation properties. Another drawback is that the electrical insulating layer tends to crack when bent.

一方、プリプレグ基板は、電気絶縁層が熱硬化性樹脂を
含浸させたガラスクロスやカラスペーパーで構成される
なめ、表面が平滑にならず、またその厚さはガラスクロ
スやガラスペーパーの厚さによって塵室されるため、塗
布基板に比較して厚くなり、絶縁特性は有利になるもの
の放熱性に劣る欠点がある。 更にカラスクロスやカラ
スペーパーは、熱硬化性樹脂の含浸性が悪く、また、熱
硬化性樹脂との密着性や金属板との接着性に劣り、折曲
げ時に剥離する可能性かあり、機械的強度も低下する欠
点があった。
On the other hand, with prepreg boards, the electrical insulating layer is made of glass cloth or glass paper impregnated with thermosetting resin, so the surface is not smooth and the thickness depends on the thickness of the glass cloth or glass paper. Because it is a dust chamber, it is thicker than a coated substrate, and although it has advantageous insulation properties, it has the disadvantage of poor heat dissipation. Furthermore, crow cloth and crow paper have poor impregnability with thermosetting resins, poor adhesion with thermosetting resins and poor adhesion with metal plates, and may peel off when bent, resulting in mechanical problems. It also had the disadvantage of reduced strength.

(発明が解決しようとする課題) 本発明は、上記の欠点を解消するためになされたもので
、電気絶縁層の厚さが薄くかつ均一で、電気絶縁性、半
田耐熱性、表面平滑性、折曲げ性、放熱性、密着性、機
械的特性、熱膨張率等に潰れた高信頼性の回路用金属基
板を提供しようとするものである。
(Problems to be Solved by the Invention) The present invention has been made in order to eliminate the above-mentioned drawbacks. The purpose is to provide a highly reliable metal substrate for circuits with excellent bendability, heat dissipation, adhesion, mechanical properties, coefficient of thermal expansion, etc.

[発明の構成J (課題を解決するための手段) 本発明者らは、上記の目的を達成しようと鋭意研究を重
ねた結果、芳香族ポリアミドペーパー基板と耐熱性樹脂
からなるグツプレグを少数枚用いることによって上記目
的が達成されることを見いだし、本発明を完成させたも
のである。
[Structure J of the Invention (Means for Solving the Problems) As a result of extensive research in an attempt to achieve the above object, the present inventors have developed a method using a small number of gutspregs made of an aromatic polyamide paper substrate and a heat-resistant resin. The present invention has been completed based on the discovery that the above object can be achieved by the following methods.

すなわち、本発明は、 金属板の少なくとも片面に、電気絶縁層を介して導電層
を有する回路用金属基板において、電気絶縁層として芳
香族ポリアミドペーパーに耐熱性樹脂を含浸・乾燥させ
たプリプレグを用いてなることを特徴とする回路用金属
基板である。
That is, the present invention provides a metal board for circuits having a conductive layer on at least one side of a metal plate via an electrically insulating layer, in which a prepreg in which aromatic polyamide paper is impregnated with a heat-resistant resin and dried is used as the electrically insulating layer. This is a circuit metal substrate characterized by:

本発明に用いる金属板としては、材質か金属であればよ
いか、−数的にはアルミニウム板、各種耐蝕アルミニウ
ム板、銅板、ステンレス板、真鍮板、珪素鋼板等が使用
される。 金属板の厚さについては特に限定はしないが
、−数的な厚さは0.5〜2.51I11程度で、その
使用目的によって選択される。 この金属板は、電気絶
縁層との接着性をよくするため、表面を粗化することが
望ましいが、金属板の種類によって接着性が高い場合は
表面粗化をしなくてもよい。 表面粗化の方法は、機械
的方法、化学的方法およびその他の方法のいずれでもよ
い。
The metal plate used in the present invention may be made of any metal; in terms of numbers, aluminum plates, various corrosion-resistant aluminum plates, copper plates, stainless steel plates, brass plates, silicon steel plates, etc. are used. The thickness of the metal plate is not particularly limited, but the numerical thickness is approximately 0.5 to 2.51I11, and is selected depending on the purpose of use. It is desirable that the surface of this metal plate be roughened in order to improve its adhesion with the electrical insulating layer, but if the type of metal plate has high adhesion, the surface may not be roughened. The surface roughening method may be a mechanical method, a chemical method, or any other method.

本発明に用いる耐熱性樹脂としては、特に制限はなく耐
熱性樹脂であればよく、例えば耐熱エポキシ樹脂、トリ
アジン樹脂、ポリイミド樹脂等が挙げられ、これらは単
独又は2種以上混合して使用することができる。 これ
らの耐熱性樹脂には、更に接着性をよくするために、ポ
リビニルブチラール樹脂、耐熱性エラストマー、フェノ
キシ樹脂等を含むことができ、また放熱性をよりよくす
るために無機質充填剤を、例えばアルミナ、シリカ、マ
グネシア、ジルコニア、窒化ホウ素等を使用することが
できる4 電気絶縁層上にメツキ等により導体回路を形
成する必要がある場合には電気絶縁層の樹脂に粗面化等
の前処理を行うことができる。
The heat-resistant resin used in the present invention is not particularly limited as long as it is a heat-resistant resin, and examples thereof include heat-resistant epoxy resins, triazine resins, polyimide resins, etc., and these may be used alone or in a mixture of two or more kinds. I can do it. These heat-resistant resins can contain polyvinyl butyral resin, heat-resistant elastomer, phenoxy resin, etc. to further improve adhesion, and inorganic fillers such as alumina to improve heat dissipation. , silica, magnesia, zirconia, boron nitride, etc. can be used.4 If it is necessary to form a conductor circuit by plating or the like on the electrically insulating layer, the resin of the electrically insulating layer should be subjected to pretreatment such as roughening. It can be carried out.

本発明に用いる芳香族ポリアミドペーパーとしては、例
えばテクノーラ(音大社製、商品名)等が挙げられる。
Examples of the aromatic polyamide paper used in the present invention include Technora (manufactured by Ontaisha, trade name).

本発明に用いる導電層としては、金属箔、金属メツキ層
、導電ペースト層のように回路形成が可能なものであれ
ばいかなるものでも使用することができる。 特に導電
層として銅箔などの金属箔を使用する場合には、金属板
とプリプレグとを重ねたものの最外層に金属箔を配置し
、一体に積層成形することができるので大量生産に好適
しており、製造上のメリットが大きい。
As the conductive layer used in the present invention, any material that can form a circuit, such as a metal foil, a metal plating layer, or a conductive paste layer, can be used. In particular, when using metal foil such as copper foil as a conductive layer, the metal foil can be placed on the outermost layer of a stack of metal plates and prepreg, and the metal foil can be laminated and molded as one piece, making it suitable for mass production. This has great manufacturing advantages.

本発明の回路用金属基板は、前述した芳香族ポリアミド
ペーパーに耐熱性樹脂を塗布・含浸乾燥させてプリプレ
グをつくる。 このプリプレグの少数枚を金属板に重ね
、更にそのプリプレグの上に銅箔等を重ね合わせて、常
法によって加熱加圧成形して回路用金属基板を製造する
ことができる。
The circuit metal substrate of the present invention is prepared by applying a heat-resistant resin to the above-mentioned aromatic polyamide paper, impregnating it, and drying it to prepare a prepreg. A circuit metal board can be manufactured by stacking a small number of sheets of this prepreg on a metal plate, further stacking a copper foil or the like on top of the prepreg, and molding under heat and pressure by a conventional method.

(作用) 本発明の回路用金属基板は、芳香族ボリアミドベーパー
と、マトリックス樹脂とし耐熱性樹脂を用いることによ
って、頭初の目的を達成することができたものである。
(Function) The metal substrate for circuits of the present invention has been able to achieve the original purpose by using aromatic polyamide vapor and a heat-resistant resin as a matrix resin.

 すなわち、芳香族ポリアミドペーパーは、ガラス基材
に比べてしなやかで樹脂の含浸性が優れており、その結
果、金属板との密着性を向上させることかできる。 そ
のなめ、折曲げ時の追従性が高く剥離が起こりにくくな
る。
That is, aromatic polyamide paper is more flexible and has better resin impregnation properties than glass substrates, and as a result, it can improve adhesion to metal plates. Therefore, the bending ability is high and peeling is less likely to occur.

またガラス基材より薄いプリプレグがつくれるため放熱
性を向上させることができる。 更に、表面平滑性、x
y力方向熱11張率も優れており、超高密度実装、フリ
ップチップ実装では重要なファクターである。
Additionally, since prepregs can be made thinner than glass substrates, heat dissipation can be improved. Furthermore, the surface smoothness, x
It also has excellent thermal elongation in the y-force direction, which is an important factor in ultra-high-density packaging and flip-chip packaging.

一方、芳香族ポリアミドペーパーは、ガラス基材に比べ
て耐熱性が劣り、1方向の熱膨張が大きい欠点がある。
On the other hand, aromatic polyamide paper has disadvantages in that it has inferior heat resistance and large thermal expansion in one direction compared to glass substrates.

 そのため、マド1!ツクス樹脂として耐熱性樹脂を用
いて、その欠点を補充するものである。
Therefore, Mad 1! This method uses a heat-resistant resin as the Tux resin to compensate for its drawbacks.

(実施例) 次に本発明を実施例によって説明するが、本発明はこれ
らの実施例よって限定されるものではない 実施例 1 厚さ 1 、2nnのアルミニウム板の片面を#200
の砥粒を用いた液体ホーニングで研磨・粗化した。
(Example) Next, the present invention will be explained by examples, but the present invention is not limited by these examples.
Polished and roughened by liquid honing using abrasive grains.

芳香族ポリアミドペーパー、テクノーラ(音大社製、商
品名)に、耐熱エポキシ樹脂ワニスを塗布・含浸・半硬
化させてプリプレグをつくった。
A prepreg was made by coating, impregnating, and semi-curing heat-resistant epoxy resin varnish on aromatic polyamide paper, Technora (manufactured by Ontaisha, trade name).

このプリプレグを前記アルミニウム板の粗面上に重ね、
さらにその上に厚さ18μlの銅箔を重ね、常法によっ
て加熱加圧一体に成形して回路用金属基板を製造した。
Layer this prepreg on the rough surface of the aluminum plate,
Further, a copper foil having a thickness of 18 μl was layered on top of the copper foil, and a metal substrate for circuits was manufactured by integrally molding the foil under heat and pressure using a conventional method.

実施例 2 厚さ0.5IN11の珪素鋼板の片面を、サンドペーパ
ー#100によって研磨・粗化した。 芳香族ポリアミ
ドペーパーのテクノーラ(前出)にポリイミド樹脂ワニ
スを塗布・含浸・半硬化させてグリプレグをつくった。
Example 2 One side of a silicon steel plate having a thickness of 0.5 IN11 was polished and roughened using #100 sandpaper. Gripreg was made by applying polyimide resin varnish to aromatic polyamide paper Technora (described above), impregnating it, and semi-curing it.

 このプリプレグを前記の珪素鋼板の粗面上に重ね、さ
らにその上に厚さ18μmの銅箔を重ね、常法によって
加熱加圧一体に成形して回路用金属基板を製造した。
This prepreg was layered on the rough surface of the silicon steel plate, and a copper foil with a thickness of 18 μm was layered on top of the prepreg, and a metal circuit board was manufactured by integrally molding the prepreg with heat and pressure using a conventional method.

比較例 l 厚さ 1.2i11のアルミニウム板の片面を、サンド
ペーパー#100によって研磨・粗化した。 アラミド
紙にエポキシ樹脂のエピコート1001(油化シェル社
製、商品名)100重量部、ジシアンジアミド4重量部
、ベンジルジメチルアミン0.2重量部およびメチルエ
チルケトンからなるエポキシ樹脂ワニスを塗布・含浸・
半硬化させてプリプレグをつくった。 このグリプレグ
を前記アルミニウム板上に重b、更にその上に厚さ18
μmの#4箔を重ねて、常法によって加熱・加圧一体に
成形して回路用金属基板を製造した。
Comparative Example 1 One side of an aluminum plate having a thickness of 1.2i11 was polished and roughened with #100 sandpaper. Aramid paper was coated with an epoxy resin varnish consisting of 100 parts by weight of epoxy resin Epikote 1001 (manufactured by Yuka Shell Co., Ltd., trade name), 4 parts by weight of dicyandiamide, 0.2 parts by weight of benzyldimethylamine, and methyl ethyl ketone.
A prepreg was made by semi-curing. This Gripreg is placed on top of the aluminum plate, and on top of that, a thickness of 18
A circuit metal board was manufactured by overlapping #4 μm foils and integrally molding them under heating and pressure using a conventional method.

比較例 2 比較例1において、アラミド紙の替わりにガラスベーパ
ーを用いた以外は、すべて比較例1と同一にして回路用
金属基板を製造した。
Comparative Example 2 A circuit metal substrate was manufactured in the same manner as in Comparative Example 1 except that glass vapor was used instead of aramid paper.

実施例1〜2及び比較例1〜2で製造した回路用金属基
板について、半田耐熱性、引剥し強さ、絶縁破壊電圧、
折曲げ性、熱膨張率、放熱性について試験を行った。 
それらの結果を第1表に示したが、 本発明はいずれも優れた特性を示し、 本 発明の効果を確認することができた。
Regarding the circuit metal substrates manufactured in Examples 1 and 2 and Comparative Examples 1 and 2, the solder heat resistance, peel strength, dielectric breakdown voltage,
Tests were conducted on bendability, coefficient of thermal expansion, and heat dissipation.
The results are shown in Table 1, and the present invention showed excellent characteristics in all cases, confirming the effects of the present invention.

[発明の効果3 以上の説明および第1表から明らかなように、本発明の
回路用金属基板は、芳香族ポリアミドペーパーと耐熱性
樹脂を用いることによって、電気絶縁層の厚さが薄く均
一となり、また放熱性も良好となった。 また芳香族ポ
リアミドペーパーには耐熱性樹脂がよく含浸されるので
、絶縁層の厚さが薄くなったにもかかわらず電気絶縁性
に優れ、機械的特性、密着性、折曲げ特性にも優れ、熱
膨張率が小さく、高信頼性の回路用金属基板を製造する
ことができ、超密度実装やプリップチップ実装に好適で
ある。
[Effect of the Invention 3] As is clear from the above explanation and Table 1, the circuit metal substrate of the present invention has a thin and uniform electrical insulating layer by using aromatic polyamide paper and heat-resistant resin. , heat dissipation was also improved. In addition, aromatic polyamide paper is well impregnated with heat-resistant resin, so it has excellent electrical insulation even though the thickness of the insulating layer is thinner, and has excellent mechanical properties, adhesion, and bending properties. It is possible to produce a highly reliable circuit metal substrate with a low coefficient of thermal expansion, and is suitable for ultra-density packaging and prep-chip packaging.

特許出願人 東芝ケミカル株式会社 代理人   弁理士 諸1)英ニPatent applicant: Toshiba Chemical Corporation Agent Patent attorney 1) Eini

Claims (1)

【特許請求の範囲】[Claims] 1 金属板の少なくとも片面に、電気絶縁層を介して導
電層を有する回路用金属基板において、電気絶縁層とし
て芳香族ポリアミドペーパーに耐熱性樹脂を含浸・乾燥
させたプリプレグを用いてなることを特徴とする回路用
金属基板。
1. A metal board for circuits having a conductive layer on at least one side of a metal plate via an electrically insulating layer, characterized in that the electrically insulating layer is made of a prepreg obtained by impregnating aromatic polyamide paper with a heat-resistant resin and drying it. Metal substrate for circuits.
JP24053190A 1990-09-11 1990-09-11 Metal circuit board Pending JPH04119684A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24053190A JPH04119684A (en) 1990-09-11 1990-09-11 Metal circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24053190A JPH04119684A (en) 1990-09-11 1990-09-11 Metal circuit board

Publications (1)

Publication Number Publication Date
JPH04119684A true JPH04119684A (en) 1992-04-21

Family

ID=17060916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24053190A Pending JPH04119684A (en) 1990-09-11 1990-09-11 Metal circuit board

Country Status (1)

Country Link
JP (1) JPH04119684A (en)

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