JPH0410568B2 - - Google Patents

Info

Publication number
JPH0410568B2
JPH0410568B2 JP13563683A JP13563683A JPH0410568B2 JP H0410568 B2 JPH0410568 B2 JP H0410568B2 JP 13563683 A JP13563683 A JP 13563683A JP 13563683 A JP13563683 A JP 13563683A JP H0410568 B2 JPH0410568 B2 JP H0410568B2
Authority
JP
Japan
Prior art keywords
measuring
measured
point
measurement
dimensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13563683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6027809A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13563683A priority Critical patent/JPS6027809A/ja
Publication of JPS6027809A publication Critical patent/JPS6027809A/ja
Publication of JPH0410568B2 publication Critical patent/JPH0410568B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP13563683A 1983-07-25 1983-07-25 表面形状測定装置 Granted JPS6027809A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13563683A JPS6027809A (ja) 1983-07-25 1983-07-25 表面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13563683A JPS6027809A (ja) 1983-07-25 1983-07-25 表面形状測定装置

Publications (2)

Publication Number Publication Date
JPS6027809A JPS6027809A (ja) 1985-02-12
JPH0410568B2 true JPH0410568B2 (zh) 1992-02-25

Family

ID=15156437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13563683A Granted JPS6027809A (ja) 1983-07-25 1983-07-25 表面形状測定装置

Country Status (1)

Country Link
JP (1) JPS6027809A (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6283609A (ja) * 1985-10-09 1987-04-17 Yaskawa Electric Mfg Co Ltd 軌跡アナライザ
GB8605324D0 (en) * 1986-03-04 1986-04-09 Rank Taylor Hobson Ltd Metrological apparatus
JPS62282216A (ja) * 1986-05-31 1987-12-08 Jiro Ishikawa 歯車の歯形および歯すじ誤差の評価方法および装置
JPS6454305A (en) * 1987-08-26 1989-03-01 Nec Corp Method and device for pattern size measurement
US4877326A (en) 1988-02-19 1989-10-31 Kla Instruments Corporation Method and apparatus for optical inspection of substrates
JPH0695009B2 (ja) * 1989-06-29 1994-11-24 オリンパス光学工業株式会社 撮像手段による対象部分の検査方法
JP2764485B2 (ja) * 1991-08-27 1998-06-11 ファナック株式会社 リアルタイムセンサの診断方法
JP3057960B2 (ja) * 1993-06-22 2000-07-04 トヨタ自動車株式会社 三次元形状加工物の評価装置
GB2437982B (en) * 2006-05-08 2011-07-27 Taylor Hobson Ltd Metrological apparatus

Also Published As

Publication number Publication date
JPS6027809A (ja) 1985-02-12

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