JPH041016Y2 - - Google Patents
Info
- Publication number
- JPH041016Y2 JPH041016Y2 JP1352185U JP1352185U JPH041016Y2 JP H041016 Y2 JPH041016 Y2 JP H041016Y2 JP 1352185 U JP1352185 U JP 1352185U JP 1352185 U JP1352185 U JP 1352185U JP H041016 Y2 JPH041016 Y2 JP H041016Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- clamp
- bar
- liner
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 19
- 239000000969 carrier Substances 0.000 description 11
- 238000010438 heat treatment Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 1
- 239000012050 conventional carrier Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1352185U JPH041016Y2 (no) | 1985-02-01 | 1985-02-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1352185U JPH041016Y2 (no) | 1985-02-01 | 1985-02-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61129662U JPS61129662U (no) | 1986-08-14 |
JPH041016Y2 true JPH041016Y2 (no) | 1992-01-14 |
Family
ID=30497607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1352185U Expired JPH041016Y2 (no) | 1985-02-01 | 1985-02-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH041016Y2 (no) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2771645B2 (ja) * | 1989-11-15 | 1998-07-02 | 株式会社荏原製作所 | ウエハキャリヤの洗浄槽に設けられる位置決め装置 |
-
1985
- 1985-02-01 JP JP1352185U patent/JPH041016Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS61129662U (no) | 1986-08-14 |
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