JPH041016Y2 - - Google Patents

Info

Publication number
JPH041016Y2
JPH041016Y2 JP1352185U JP1352185U JPH041016Y2 JP H041016 Y2 JPH041016 Y2 JP H041016Y2 JP 1352185 U JP1352185 U JP 1352185U JP 1352185 U JP1352185 U JP 1352185U JP H041016 Y2 JPH041016 Y2 JP H041016Y2
Authority
JP
Japan
Prior art keywords
carrier
clamp
bar
liner
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1352185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61129662U (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1352185U priority Critical patent/JPH041016Y2/ja
Publication of JPS61129662U publication Critical patent/JPS61129662U/ja
Application granted granted Critical
Publication of JPH041016Y2 publication Critical patent/JPH041016Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
JP1352185U 1985-02-01 1985-02-01 Expired JPH041016Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1352185U JPH041016Y2 (no) 1985-02-01 1985-02-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1352185U JPH041016Y2 (no) 1985-02-01 1985-02-01

Publications (2)

Publication Number Publication Date
JPS61129662U JPS61129662U (no) 1986-08-14
JPH041016Y2 true JPH041016Y2 (no) 1992-01-14

Family

ID=30497607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1352185U Expired JPH041016Y2 (no) 1985-02-01 1985-02-01

Country Status (1)

Country Link
JP (1) JPH041016Y2 (no)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2771645B2 (ja) * 1989-11-15 1998-07-02 株式会社荏原製作所 ウエハキャリヤの洗浄槽に設けられる位置決め装置

Also Published As

Publication number Publication date
JPS61129662U (no) 1986-08-14

Similar Documents

Publication Publication Date Title
US4892455A (en) Wafer alignment and transport mechanism
KR0152324B1 (ko) 웨이퍼 측면파지 이송 반도체 제조장치
KR101695434B1 (ko) 웨이퍼를 다루기 위한 시스템 및 방법
TW200403183A (en) Substrate processing apparatus
JP5393321B2 (ja) 自動分析装置
JP3724361B2 (ja) 基板搬送装置
US7726540B2 (en) Apparatus and method for arranging devices for processing
JPH041016Y2 (no)
JP3636000B2 (ja) テストボードの姿勢変更装置
JP2605824B2 (ja) ロボットハンド
JPH0637906Y2 (ja) 板状物体搬送装置
JPH0271544A (ja) 基板移載装置
JP2926592B2 (ja) 基板処理装置
JPH0834236B2 (ja) ウェハのロ−ディング装置
JPH07201947A (ja) ウェハー搬送用のロボットハンドおよびこのロボットハンドによるウェハーの保持方法
JPH0648848Y2 (ja) カセット二連式基板処理装置のカセット整列装置
JPH0311100B2 (no)
JPH0526753Y2 (no)
JP2513160Y2 (ja) 半導体ウエハ―移載装置
JPH0526754Y2 (no)
JPH07169817A (ja) 半導体ウエハ搬送装置
JP2855863B2 (ja) ハンドラ
JPH03116942A (ja) 電子装置用保持装置
JPS6243339B2 (no)
JPS6031636B2 (ja) フラツト型電子部品移送及び特性選別装置